IL173848A0 - Spatial-heterodyne interferometry for transmission (shift) measurements - Google Patents

Spatial-heterodyne interferometry for transmission (shift) measurements

Info

Publication number
IL173848A0
IL173848A0 IL173848A IL17384806A IL173848A0 IL 173848 A0 IL173848 A0 IL 173848A0 IL 173848 A IL173848 A IL 173848A IL 17384806 A IL17384806 A IL 17384806A IL 173848 A0 IL173848 A0 IL 173848A0
Authority
IL
Israel
Prior art keywords
spatial
measurements
shift
transmission
heterodyne interferometry
Prior art date
Application number
IL173848A
Other languages
English (en)
Original Assignee
Ut Battelle Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/649,474 external-priority patent/US6999178B2/en
Priority claimed from US10/649,251 external-priority patent/US7119905B2/en
Application filed by Ut Battelle Llc filed Critical Ut Battelle Llc
Publication of IL173848A0 publication Critical patent/IL173848A0/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/08—Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0866—Digital holographic imaging, i.e. synthesizing holobjects from holograms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/0454—Arrangement for recovering hologram complex amplitude
    • G03H2001/0456—Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0469—Object light being reflected by the object
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0465—Particular recording light; Beam shape or geometry
    • G03H2001/0471—Object light being transmitted through the object, e.g. illumination through living cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2210/00—Object characteristics
    • G03H2210/10—Modulation characteristics, e.g. amplitude, phase, polarisation
    • G03H2210/12—Phase modulating object, e.g. living cell

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Holo Graphy (AREA)
IL173848A 2003-08-26 2006-02-21 Spatial-heterodyne interferometry for transmission (shift) measurements IL173848A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/649,474 US6999178B2 (en) 2003-08-26 2003-08-26 Spatial-heterodyne interferometry for reflection and transmission (SHIRT) measurements
US10/649,251 US7119905B2 (en) 2003-08-26 2003-08-26 Spatial-heterodyne interferometry for transmission (SHIFT) measurements
PCT/US2004/027749 WO2005019944A1 (en) 2003-08-26 2004-08-26 Spatial-heterodyne interferometry for transmission (shift) measurements

Publications (1)

Publication Number Publication Date
IL173848A0 true IL173848A0 (en) 2006-07-05

Family

ID=36204478

Family Applications (2)

Application Number Title Priority Date Filing Date
IL173849A IL173849A0 (en) 2003-08-26 2006-02-21 Spatial-heterodyne interferometry for reflection and transmission (shirt) measurements
IL173848A IL173848A0 (en) 2003-08-26 2006-02-21 Spatial-heterodyne interferometry for transmission (shift) measurements

Family Applications Before (1)

Application Number Title Priority Date Filing Date
IL173849A IL173849A0 (en) 2003-08-26 2006-02-21 Spatial-heterodyne interferometry for reflection and transmission (shirt) measurements

Country Status (4)

Country Link
EP (2) EP1660951A1 (ja)
JP (2) JP2007504444A (ja)
KR (2) KR20060033045A (ja)
IL (2) IL173849A0 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0302676D0 (sv) * 2003-10-09 2003-10-09 Neural Ab Method and apparatus for holographic refractometry
JP5362254B2 (ja) * 2007-05-07 2013-12-11 株式会社Ｐｈｏｔｏｎｉｃ Ｓｙｓｔｅｍ Ｓｏｌｕｔｉｏｎｓ 計測システム及び計測方法
JP5379029B2 (ja) * 2010-01-15 2013-12-25 株式会社神戸製鋼所 形状測定装置および該方法
JP5199141B2 (ja) * 2009-02-02 2013-05-15 株式会社神戸製鋼所 形状測定装置
DE112010000808B4 (de) 2009-02-02 2017-03-30 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Profilmesseinrichtung
JP5560628B2 (ja) * 2009-09-04 2014-07-30 ソニー株式会社 検査装置および検査方法
WO2011136382A1 (ja) 2010-04-30 2011-11-03 浜松ホトニクス株式会社 観察装置
KR101233350B1 (ko) * 2011-04-19 2013-02-14 전자부품연구원 홀로그램 트랜스코딩 장치 및 방법
JP5856440B2 (ja) * 2011-11-02 2016-02-09 浜松ホトニクス株式会社 観察装置
KR101990009B1 (ko) * 2017-08-25 2019-09-30 주식회사 내일해 개선된 홀로그래픽 복원 장치 및 방법

Also Published As

Publication number Publication date
KR20060037456A (ko) 2006-05-03
EP1660951A1 (en) 2006-05-31
JP2007504444A (ja) 2007-03-01
EP1660950A1 (en) 2006-05-31
KR20060033045A (ko) 2006-04-18
JP2007504494A (ja) 2007-03-01
IL173849A0 (en) 2006-07-05

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