GB2365876A - Making nano-sized powder using a plasma arc reactor - Google Patents

Making nano-sized powder using a plasma arc reactor Download PDF

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Publication number
GB2365876A
GB2365876A GB0020106A GB0020106A GB2365876A GB 2365876 A GB2365876 A GB 2365876A GB 0020106 A GB0020106 A GB 0020106A GB 0020106 A GB0020106 A GB 0020106A GB 2365876 A GB2365876 A GB 2365876A
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United Kingdom
Prior art keywords
electrode
plasma
plasma arc
gas
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0020106A
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GB0020106D0 (en
Inventor
David Edward Deegan
Chris David Chapman
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Tetronics International Ltd
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Tetronics Ltd
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Filing date
Publication date
Application filed by Tetronics Ltd filed Critical Tetronics Ltd
Priority to GB0020106A priority Critical patent/GB2365876A/en
Publication of GB0020106D0 publication Critical patent/GB0020106D0/en
Priority to AU2001232063A priority patent/AU2001232063A1/en
Priority to PCT/GB2001/000553 priority patent/WO2001058625A1/en
Priority to DE2001601840 priority patent/DE60101840T2/en
Priority to IL15111401A priority patent/IL151114A0/en
Priority to EP04000974A priority patent/EP1415741A3/en
Priority to EP03024817A priority patent/EP1398100A3/en
Priority to CA002399581A priority patent/CA2399581A1/en
Priority to CNB018047971A priority patent/CN100418674C/en
Priority to KR1020027010323A priority patent/KR100784576B1/en
Priority to RU2002123919/02A priority patent/RU2263006C2/en
Priority to JP2001557715A priority patent/JP2003522299A/en
Priority to AT01904146T priority patent/ATE258092T1/en
Priority to EP01904146A priority patent/EP1257376B1/en
Priority to US10/203,467 priority patent/US7022155B2/en
Publication of GB2365876A publication Critical patent/GB2365876A/en
Priority to IL151114A priority patent/IL151114A/en
Priority to US11/304,633 priority patent/US7727460B2/en
Priority to US11/304,705 priority patent/US20060096417A1/en
Withdrawn legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/12Making metallic powder or suspensions thereof using physical processes starting from gaseous material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/14Making metallic powder or suspensions thereof using physical processes using electric discharge
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3489Means for contact starting
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/42Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/02Apparatus characterised by their chemically-resistant properties
    • B01J2219/0204Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
    • B01J2219/0227Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components of graphite
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
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    • B01J2219/0809Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
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    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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    • B01J2219/0816Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving moving electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
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    • B01J2219/0807Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0816Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving moving electrodes
    • B01J2219/082Sliding electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B01J2219/0807Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824Details relating to the shape of the electrodes
    • B01J2219/0826Details relating to the shape of the electrodes essentially linear
    • B01J2219/083Details relating to the shape of the electrodes essentially linear cylindrical
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824Details relating to the shape of the electrodes
    • B01J2219/0835Details relating to the shape of the electrodes substantially flat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0837Details relating to the material of the electrodes
    • B01J2219/0839Carbon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0837Details relating to the material of the electrodes
    • B01J2219/0841Metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0869Feeding or evacuating the reactor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871Heating or cooling of the reactor
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B01J2219/0873Materials to be treated
    • B01J2219/0879Solid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0881Two or more materials
    • B01J2219/0886Gas-solid
    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894Processes carried out in the presence of a plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894Processes carried out in the presence of a plasma
    • B01J2219/0898Hot plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

Abstract

Powder having a diameter less than 200 nm is produced from solid feed material 20 in a plasma arc reactor which comprises two electrodes 7 and 12, plasma gas introducing means and plasma arc generating means, wherein the first electrode 7 has a solid material feed channel which exits into the space between the electrodes 7 and 12. Preferably the channel also supplies the plasma gas 25 (e.g. helium and/or argon). The electrodes 7 and 12 may be movable relative to each other whereby their arc portions (which may be graphite) may contact each other. The reactor also comprises cooling means 30 for condensing feed material 20 which has been vaporised. This cooling means 30 may be either a stream of inert gas or a reactive gas, e.g. one containing oxygen which oxidises the surface of the powder. The feed material may be in the form of wire, fibres or particulate and may be a metal or alloy such as aluminium or an alloy thereof.

Description

<Desc/Clms Page number 1> Apparatus and process for the production of fine powders The present invention relates to an apparatus and process for the production of fine powders. In particular, a plasma arc reactor is provided which may be used in a plasma evaporation process to produce ultra-fine (i.e. sub-micron or nano-sized) aluminium powders.
Metal and ceramic powders are used in sintering processes in metallurgy and in catalysis in the chemical industry. The powders may be used in the manufacture of structural components, magnetic films, chemical coatings, oil additives, propellant additives and also in explosives.
The present invention provides a plasma arc reactor for producing a powder from a solid feed material, the reactor comprising: (a) a first electrode, (b) a second electrode which is adapted to be spaced apart from the first electrode by a distance sufficient to achieve a plasma arc therebetween, (c) means for introducing a plasma gas into the space between the first and second electrodes, (d) means for generating a plasma arc in the space between the first and second electrodes, wherein the first electrode has a channel running therethrough, an outlet of the channel exiting into the space between the first and second electrodes, and
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wherein means are provided for feeding solid material into and through the channel to exit therefrom via the outlet into the space between the first and second electrodes. The term electrode as used herein is intended to encompass a plasma torch. The first electrode is preferably moveable with respect to the second electrode from a first position at which an arc portion thereof contacts with an arc portion of the second electrode to a second position at which said arc portions are spaced apart from each other by a distance sufficient to achieve a plasma arc therebetween. This is advantageous because contacting the first and second electrodes assists in starting the plasma arc. It will be appreciated that by the term arc portion is meant those regions or points on the surfaces of the first and second electrodes between which a plasma arc may be generated. The first electrode may preferably take the form of a hollow elongate member whose inner surface defines a closed channel (equivalent to a bore or passageway). The elongate member terminates at an arc tip, which, in use, will oppose an arc portion. of the second electrode. The outlet of the closed channel is disposed at or adjacent to the arc tip. In this case, the first electrode may be in the form of a hollow rod, cylinder or tube. The first electrode may be formed initially as a hollow object. Alternatively, the first electrode may be formed as a solid object, to subsequently have a bore or passageway formed therein. If the outlet is disposed at the arc tip, then. it will be appreciated that the end surface of the elongate member will define both the arc tip of the electrode and the outlet of the closed channel.
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The second electrode, which acts a counter electrode, may take any appropriate form to enable a plasma arc to be generated between it and the first electrode. The second electrode may simply have a substantially planar arc portion. For example, the second electrode may be disposed as a planar substrate on the bottom wall of the plasma reactor.
The arc portions of the first and/or second electrodes will generally be formed from graphite.
The plasma reactor may be provided in the form of a graphite lined vessel or a graphite crucible, in which a portion thereof acts as the second electrode. Accordingly, the second electrode may be integrally formed with the reactor vessel.
The plasma arc reactor advantageously further comprises cooling means for cooling and condensing solid material which has been vaporised in the plasma arc generated between the first and second electrodes. The cooling means preferably comprises a source of a cooling gas.
The second electrode preferably comprises a graphite vessel having a surface adapted to direct vaporised material downstream to a cooling zone to be cooled, in use, by the cooling gas.
A collection zone may be provided downstream of the cooling zone for collecting a powder of the condensed vaporised material. The collection zone may comprise a filter cloth which separates the powder particulate from the gas stream. The filter cloth is preferably mounted on an earthed cage to prevent electrostatic charge build up. The powder may then be collected from the filter cloth, preferably in a
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controlled atmosphere zone. The resulting powder product is preferably then sealed, in inert gas, in a container at a pressure above atmospheric pressure.
The channel in the first electrode is advantageously adapted to additionally introduce the plasma gas into the space between the first and second electrodes. Thus, the solid feed material and plasma gas may travel through a common channel and exit the electrode via a common outlet into the space between the first and second electrodes.
The means for generating a plasma arc in the space between the first and second electrodes will generally comprise a DC or AC power source.
If desired, one or more additional electrodes, also having a material feed charnel therein, may be used to enable different materials to be co-fed into a single plasma reactor. A common counter electrode may be used or, alternatively, separate counter electrodes may be provided, each opposing an electrode with a channel therein. Common or separate power supplies may be used, although separate power supplies are preferred since this allows different evaporation rates for different materials.
The apparatus according to the present invention may operate without using any water-cooled elements inside the plasma reactor and allows replenishment of solid feed material without stopping the reactor.
The present invention also provides a process for producing a powder from a solid feed material, which process comprises: (i) providing a plasma arc reactor as herein
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described, (ii) introducing a plasma gas into the space between the first and second electrodes, (iii) generating a plasma arc in the space between the first and second electrodes, (iv) feeding solid material through the channel to exit via the outlet thereof into the plasma arc, whereby the solid feed material is vaporised, (v) cooling the vaporised material to condense a powder, and (vi) collecting the powder.
The solid feed material will generally comprise or consist of a metal, for example aluminium or an alloy thereof. The solid feed material may be provided in any suitable form which allows it to be fed into and through the channel to exit therefrom into the space between the electrodes. For example, the material may be in the form of a wire, fibres and/or a particulate.
The plasma gas will generally comprise or consist of an inert gas, for example helium and/or argon.
The plasma gas is advantageously injected into the channel in the first electrode to exit therefrom into the space between the first and second electrodes. In this case, the plasma gas and solid material preferably exit the first electrode via a common outlet. The plasma gas and solid material may be fed into the channel in the first electrode via a common inlet or, alternatively, via separate inlets.
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During operation, the plasma gas and solid material will be co-fed into the channel.
At least some cooling of the vaporised material may be achieved using an inert gas stream, for example argon and/or helium. Alternatively, or in combination with the use of an inert gas, a reactive gas stream may be used. The use of a reactive gas enables oxide and nitride powders to be produced. For example, using air to cool the vaporised material can result in the production of oxide powders, such as aluminium oxide powders. Similarly, using a reactive gas comprising, for example, ammonia can result in the production of nitride powders, such as aluminium nitride powders. The cooling gas may be recycled via water-cooled conditioning chamber.
The surface of the powder may be oxidised using a passivating gas stream. This is particularly advantageous when the material is aluminium or aluminium-based. The passivating gas may comprise an oxygen-containing gas, and a particularly preferred gas comprises from 95 to 99 vol.o of an inert gas, such as helium and/or argon, and from 1 to 5 vol. % of oxygen, more preferably approximately 98 vol.% of the inert gases) and approximately 2 vol.o of oxygen. Such a gas mixture has been found to produce particularly good results for aluminium and aluminium- based materials. The (inert) cooling gas may be recycled and subsequently diluted with oxygen at a rate of typically 1 NM3/hour to provide the passivating gas stream. The reactivity of some ultra- fine powders presents an operational risk if there is a likely-hood of contact with, for example, water and/or air. The passivation stage renders the powdered material more suitable for transporting
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The process according to the present invention may be used to produce a powdered material, such as aluminium, substantially a11 of the particles of which having a diameter of less than 200 nm. Preferably the average particle diameter lies in the range of from 50 to 150 nm, more preferably from 80 to 120 nm, still more preferably from 90 to 110 nm.
Specific surface area analysis has shown that the process according to the present invention may be used to produce a powdered material, such as aluminium, which has a specific surface area typically in the range of from 15 to 40 mzg-1, more typically in the range of from 25 to 30 mzg-1.
It will be appreciated that the processing conditions, such as material and gas feed rates, temperature and pressure, will need to be tailored to the particular material to be processed and the desired size of the particles in the final powder.
It is generally preferable to preheat the reactor before vaporising the solid feed material. The reactor may be preheated to a temperature of at least about 2000 C and typically approximately 2200 C. Pre- heating may be achieved using a plasma arc.
The rate at which the solid feed material is fed into the channel in the first electrode will affect the product yield and powder size. When using aluminium wire, a feed rate of from 1 to 5 kg/hour has been used, more typically approximately 2 kg/hour.
The inert plasma gas, for example helium, may also be injected through the channel in the first electrode at a rate of from 2.4 to 6 Nm3/h, more
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typically approximately 3 Nm3/hour. If a DC power supply is used to generate the plasma arc, then the DC amperage wi11 generally be set at a value in the range of from 400 to 800 A. Typical DC Electrical characteristics are of the order of 800 A and between 30 to 40 V with a plasma arc column length of between 60 mm and 70 mm. The plasma arc reactor according to the present invention is typically operated in excess of 750 mm of water above atmospheric pressure. If a cooling gas such as argon or helium is used to cool and condense the vaporised material, a flow rate of from 60 to 120 Nm3/h has been found to result in an aluminium powder in which most, if not substantially all, of the particles have a diameter of less than 200 nm in diameter (more typically < 100 nm). After cooling, the gas and particulate temperature will typically be from 300 to 350 C. For an aluminium feed material, the process according to the present invention may be used to produce a powdered material having a composition based on a mixture of aluminium metal and aluminium oxide. This is thought to arise with the oxygen addition made to the material during processing under low temperature oxidation conditions. Accordingly, the present invention also provides a particulate material comprising particles having a core comprising or consisting essentially of aluminium and a surface layer comprising or consisting essentially of aluminium oxide, which particulate material is obtainable by a process as herein described.
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Substantially only the surface of the particles oxidise and surface specific analysis has shown that the oxide component of the powder is associated generally with the surface and the oxide layer is typically less than approximately 10 nm in thickness, more typically less than approximately 5 nm in thickness. Hence, such a material can be described as discreetly encapsulated. Substantially all of the particles of the oxide coated aluminium have a diameter of less than 200 nm and the average particle diameter will typically lie in the range of from 50 to 150 nm, more typically from 80 to 120 nm, still more typically from 90 to 110 nm.. The specific surface area of the oxide coated aluminium particles will typically be in the range of from 15 to 40 mzg-=, more typically in the range of from 25 to 30 M2g-1.
The present invention will now be described further, by way of example, with reference to the accompanying drawings in which: Figure 1 shows one embodiment of an electrode configuration which may be used in a plasma arc reactor according to the present invention; Figure 2 provides a flow diagram of a process according to the present invention; Figures 3 (a) and (b) are secondary electron micrographs of aluminium powders made by the process according to the present application (magnification: x 100,000 (a) and x 200,000 (b)); Figure 4 is a graph showing the variation of specific surface area of an ideal nanometric aluminium powder with particle diameter;
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Figure 5 is a graph showing the variation of oxide content of an ideal nanometric alumin=um powder with particle diameter; Figure 6 is a graph showing primary (1st heat) DSC analysis for an aluminium sample; Figure 7 is a graph showing secondary (2"' heat) DSC analysis for an aluminium sample; and Figure 8 is a survey spectrum of nanometric Al powder analysed by XPS.
In Figure 1, a first electrode 5 is provided in the form of a cylindrical graphite rod which terminates at an arc tip 6. If desired, the upper portion of the graphite electrode S may be replaced with copper. The electrode 5 has a central bore formed therein which extends along =he length of :.he elecrrode 5. The surface of the bore defines a closed channel % (or passageway) having an inlet 8 at one end and an outlet 9 disposed at the arc tip 6. A second counter electrode 10 is provided as part of a graphite-lined reactor vessel (13) (see Figures 1 and 2). Only an arc portion 11 on the interior surface of the bottom wall 12 of the vessel 13 is shown in Figure 1. The whole of the vessel 13 is shown in Figure 2 and it can be seen that the counter electrode forms an integral part of the reactor vessel 13. The arc portion 11 of the second electrode 10 opposes the arc tip 6 of the first electrode 5. The first 5 and second 10 electrodes are connected to a DC power supply 15. The first electrode 5 is the cathode and the second electrode is the anode 10, although it will be appreciated that the
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polarities may be reversed.
The first electrode 5 is moveable with respect to the second electrode 10 and hence may be lowered to contact at the arc tip 6 thereof with the arc portion 11 of the second electrode 10 to complete the electrical circuit. The DC amperage from power supply 15 will generally be set at a value from 400 to 800 A. By raising the first electrode 5, a DC plasma arc can be established between the arc tip 6 of the first electrode 5 and the arc portion 11 of the second electrode 10.
A solid feed material, for example aluminium wire 20, can be fed into the inlet 8, to pass down the channel 7, out the outlet 9 and into the space between the arc tip 6 of the first electrode 5 and the arc portion 11 of the second electrode 10. An inert plasma gas 25, such as argon and/or helium, may similarly be injected through the channel 7, via the inlet 8, to exit the first electrode 5 at outlet 9. Accordingly, both the aluminium wire 20 and the plasma gas 25 may enter the first electrode 5 via a common inlet 8 and exit the electrode 5 via a common outlet 9 at the arc tip 6.
The wire 20 may be stored by conventional means on a coil or reel and fed by a multi-speed motor into inlet 8. The plasma gas 25 may be stored by conventional means in a gas tank, and controlled injection into the inlet may be achieved by the use of a valve. Accordingly, the feed rates of both the wire and the plasma gas may be controlled.
In use, the graphite-lined vessel 10 is preheated to a temperature of at least about 2000 C (typically approximately 2200 C) using the plasma arc. This
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entails injecting an inert plasma gas 25 through channel 7 in the first electrode 5 and switching on the power supply 15. The reactor is typically operated in excess of 750 mm of water above atmospheric pressure. Once the reactor has been preheated, aluminium wire 20 is then fed into the inlet 8 of channel 7 in the first electrode 5 at a rate of typically 2 kg/hour. Inert plasma gas is also injected through channel 7, typically at a rate of from 2.4 and 6 Nm3/h, more typically approximately 3 Nm'/hour. Typical DC electrical characteristics are of the order of 800 A and from 30 to 40 V with a plasma arc column length of from 60 mm and 70 mm. In this manner, the aluminium wire 20 is vaporised in the hot plasma gas (step A in Figure 2). The wire 20 and plasma gas 25 are continually fed into the channel 7 of the first electrode 7 as the wire 20 is vaporised in the plasma arc. Eventually a steadystate will be achieved. It will be appreciated that the feed rates of the wire 20 and/or gas 25 may be adjusted during processing. The vaporised aluminium and plasma hot gas exits the reactor vessel under the influence of the gas being injected through the channel 7 in the first electrode 5. The vaporised aluminium is then quenched in a cooling zone 30 using an inert cooling gas stream, such as argon or helium, to condense a submicron powder of aluminium (step B in Figure 2). The flow rate of the cooling gas stream is typically from 60 to 120 Nm3/h, and the particles of the aluminium powder are typically s 200 nm in diameter (more
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typically < 100 nm). After the inert gas quench, the gas and particulate temperature is typically from 300 to 350 C.
If desired, a passivation step may next be carried out in a passivation zone 35 downstream of the cooling zone 30 (step c in Figure 2). This may be achieved in a number of ways. The cooling gas may be recycled to a water-cooled conditioning chamber for further cooling, and then injected back into the apparatus, together with up to 5 vol.o of oxygen to contact with the powder. Typically, the oxygen is introduced at a rate of approximately 1 Nm3/h. Alternatively, a separate source of the passivation gas may be used. The temperature during the passivation step is typically in the range of from 100 to 200 C.
After the passivation step, the powder particulate and gas stream pass to a collection zone 40 which contains a filter cloth (not shown) to separate the particulate from the gas (see step D in Figure 2). The filter cloth is preferably mounted on an earthed cage to prevent electrostatic charge build up. The gas may be recycled.
The powder may then be collected from the filter cloth, preferably in a controlled atmosphere zone. The resulting powder product is preferably then sealed, in inert gas, in a container at a pressure above atmospheric pressure.
If desired, one or more additional electrodes having a channel therein may be used to co-feed different metals into a single plasma vessel to produce, for example, alloy powders, sub-micron and nano-sized mixtures, oxides and nitrides. A common
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counter electrode may be used or, alternatively, separate counter electrodes may be provided, each opposing an electrode with a channel therein. Common or separate power supplies may be used, although separate power supplies are preferred since this allows for different evaporation rates for different metals. Example
This example relates to the production of an ultra-fine aluminium powder using atmospheric DC plasma technology, which is a clean, controllable and directional heat source. Aluminium powders may be used in sintering processes in metallurgy and in catalysis in the chemical industry. The powders may be used in the manufacture of structural components, magnetic films, chemical coatings, oil additives, propellant additives and also in explosives.
The process utilises the mechanism of gas phase condensation. The process offers the advantage of high throughput (Kg/hr) under mixed inert gas process conditions, followed by controllable material passivation during pneumatic conveyance and dispersion above atmospheric pressure. The material is produced, cooled, passivated (i.e. surface oxidised under low temperature conditions), collected and packaged in a highly monitored and automated manner.
The original feed wire (precursor) used in the process is a wrought alloy with the designation 1050A, ASTM = ER1100, DIN = S-AL 9915. This wire has a nominal composition of 99.5 wt% A1, the main impurities are Si and Fe at a maximum of 0.25 wt% and 0.40 wt% respectively.
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The aluminium and aluminium oxide content cannot be determined directly, so a quantitative elemental analysis of major powder components was undertaken. The calculation assumed all oxygen was combined as aluminium oxide, having the stochiometry A1203. A pre-calibrated Leco TC436 oxygen and nitrogen analyser was used to determine oxygen content. A pre- calibrated Leco CS344 carbon and sulphur analyser was used for carbon analysis. Energy dispersive X-ray fluorescence spectroscopy (EDXRF) was used to check powder for high levels of contamination. An ARL 3410 inductively coupled plasma atomic emission spectrometer (ICPAES) was used to quantitatively analyse the solutions for high level of contaminant identified by EDXRF. The EDXRF analysis showed significant levels of calcium, although other contaminants were found at very low levels, for example Fe, Na, Zn and Ga. Hence the quantitative analysis focussed on 0, C and Ca.
The Al content can be assumed to make up the majority of the remaining powder after subtraction of the alumina, calcium and carbon content. The carbon content was assumed as elemental due to the insoluble residue left in the container during ICPAES analysis. The analysis results are shown in Table 1
Table 1: Combined Material Analysis Results Specimen C Ca 0` Calculated Calculated I D wt % wt % wt % wt % A1203 wt % A1 6AL 2.48 0.17 14.9 6AL 2.41 0.17 15.4 6AL 16.3 Mean 2.44 0.17 15.5 33 64.4 Oxygen is purposely added to the system under low temperature oxidation conditions
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Aluminium powder samples have been examined by scanning electron microscopy (SEM) using a Leica Cambridge S360 instrument. Electron micro-graphs were prepared to show the size and shape of the particles. Quantitative energy dispersive (ED) X-ray analysis was carried out to determine the elements present in the sample using a PGT IMIX X-ray analysis system attached to the SEM. Secondary electron detection was used to give topographic textured images of the aluminium powder particulate and associated agglomerates. At low magnification (x 350 magnification) the powder product was observed to have agglomerated. The size of the agglomerates ranged from less than 5 um to more than 200 pm. At higher magnification (x 20,000 and 50,000 magnification) the individual particles could be imaged. Their size (i.e. largest dimension) was observed to be approximately 100 nm 50 nm, however the particles still appeared to be clumped together. These agglomerates were determined to be made up of these finer particles. The shape of the particles seemed to be irregular either spherical or oval. The shape of the individual particles and the process of agglomeration are thought to occur to minimise the excess surface free energy associated with such a finely divided material. Two secondary electron micrographs are shown in Figures 3 (a) and (b). The specific surface area (SSA) was determined by nitrogen absorption, using the continuous flow method, described in BS 4359 Part 1. The SSA was shown to lie in the range of from 25 to 30 m`gl. Figure 4 shows the variation of specific surface area with particle size for an ideal chemically pure, spherical aluminium powder. Figure 4 indicates that a mean particle size of 90 nm is consistent with a specific surface area of
<Desc/Clms Page number 17>
from 25 to 30 M2g-1. So the SEM images show consistency with the SSA analysis.
The fraction of oxide in the powder will shift unfavourably as the powder particulate size becomes smaller, i.e. the proportion of oxide will increase relative to that of the metal. This trend is graphically represented in Figure 5, here a uniform oxide layer of 4.5 nm thickness is assumed. This represents the diffusion limited adherent, coherent and uniform oxide film associated with aluminium material exposed to an oxygen rich atmosphere under low temperature conditions.
Again the compositional analysis indicated an oxide content of 33 wt o, this gives rise to an implied particle size of from 90 to 100 nm. This again being consistent with the SSA analysis and SEM images.
Thermal analysis was carried out using a Differential Scanning Calorimetry (DSC). The instrument was initially checked for temperature and energy calibration using a traceable indium standard. The sample was heated to 750C at a heating rate of 10`C min-' under air flowing at 5 ml min- . The DSC spectrum shows an exothermic (energy is released) peak with an extrapolated onset temperature of 538C. The peak range is from 538 to 620C, with the peak maximum at 590'C. After initial heating the sample was cooled and reheated under the same conditions and no exotherm was observed. This indicated a complete and irreversible chemical reaction, i.e. oxidation of aluminium. This is graphically represented in the Figures 6 and 7.
The technique of X-ray Photoelectron Spectroscopy (XPS) is surface sensitive and the outermost 2 to 3
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layers of a material (i.e. the top 1 nm) is typically analysed. This gives both compositional and chemical information. For example, XPS can distinguish between A1 as a bulk metal and A1 associated with an oxide A1203. The survey spectrum showed the presence of the following species, Table 2:
Table 2: Peak Component Assignment 284.7 Cls Environmental Carbon Contamination 72.2 A12p Metal 74.2 A12p A1203 531.6 Ols A1203 1071.5 Nals Na2C03 2061.3 Na Auger Parameter Na2C03 289.4 Cls Na2C03
The survey spectrum is provided in Figure 8 and shows the presence of carbon (19 atomic o), oxygen (50 atomic o), aluminium (27 atomic o), nitrogen (0 .6 atomic o), sodium (3.3 atomic o) and calcium (0.7 atomic o). These values were calculated using published sensitivity factors (Briggs and Seah 1990). Detailed spectra were taken off the main peak to provide chemical information in the form of binding energies, we did not take into account factors such as morphology, topography and heterogeneity. The carbon peak was used to calibrate the spectrum, i.e. adventitious carbon contamination (environmental contamination), binding energy 287.4 eV. The compositional information relates to the outer 2 to 3 layers of the particulate material and, accordingly, should not be interpreted as the overall bulk
<Desc/Clms Page number 19>
composition of the material.
A12p peak showed two superimposed components due to the metal and the native oxide with binding energies of 72.1 eV and 74.1 eV respectively. The fact that the aluminium metal associated with the interior of the particulate could be detected, i.e. the substrate metal, through the oxide indicates a thin overlayer of less than 2 to 3 monon-layers (Crystallography: Corundum has a rhombohedral crystal system where a = b = c = 12.98 P.). The carbon peak was observed to be made up of two components, i.e. environmental contamination and carbide. The carbon could not be categorically associated with any one of the metal species detected. The sodium is probably present as carbonate (Na2C03) .
It is possible to estimate the thickness of the monolayer using the De Beers - Lambent equations and associated assumptions.
De Beers - Lambent Equation, Version 1 I " = Io " [1 - exp (-d/Asin6) ] (1) De Beers - Lambent Equation, Version 2 Ielement = helement [exp (-d/Asin6) J (2) where A is the inelastic electron mean free path A = 0.05 (KE) .5 nm = 0.05(1486.6 - 73) 5 = 1.8799 nm (KE _ ejected electron kinetic energy) If the oxide is native to the metallic material element then 1"o and h are approximately the same.
<Desc/Clms Page number 20>
Hence, by dividing equation 1 by equation 2, an equation relating the relative A1 signal intensities to oxide layer thickness may be obtained: I ox / Ielement - exp (dlAsin 6) - 1 (3) The assumptions associated with the use of this equation are as follows:
(i) the surfaces are flat; (ii) the oxide layer is uniform in thickness; (iii)the layer is continuous; and (iv) the surfaces are planar. The outcome of this calculation is that the oxide layer is approximately 2 to 3 nm in thickness, which is consistent with the compositional analysis, SSA analysis and SEM images. The variability being associated with the inaccuracy of the assumptions made in calculation. This calculation is very inaccurate, however the technique will only analyse the uppermost nm of sample as a maximum depth. This means that as a parent metal signal is observed in the survey spectrum, the oxide thickness must be less than 5 nm, this being a definite statement associated with the nature of the characterising radiation.
The particulate material according to the present invention has the following characteristics:
1. In composition the material is observed to be a mixture of aluminium metal and aluminium oxide, which is consistent with the oxygen addition. made to the material during processing under low temperature oxidation conditions, i.e. substantially only the surface oxidises.
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2. Imaging indicates that the material is formed with a fine spherical particulate morphology of from 70 to 130 nm in average particle diameter, (more typically from 80 to 120 nm, still more typically approximately 100 nm). This justifies the classification as a nanomaterial.
3. The particles are agglomerated by which is meant an assembly of particles held together by weak forces that can be overcome by suitable means, for example sonication.
4. Specific surface area analysis has shown that the material has a specific surface area typically in the range of from 15 to 40 M2g'1, more typically in the range of from 25 to 30 M2g-1. This correlates typically to a particle size of from 75 to 95 nm.
5. Thermal analysis has shown complete and irreversible chemical reaction takes place in air at 550 to 650C. This being consistent with thermally driven oxidation.
6. Surface specific analysis has shown that the oxide component of the powder is associated with the surface and the layer is less than approximately 5 nm in thickness. Hence the material can be described as discreetly encapsulated.
The apparatus and process according to the present invention provide a simplified technique for the production and collection of ultra-fine, sub- micron powders. In a preferred embodiment, a transferred plasma arc is established between the arc tip of an elongate graphite electrode and a counter
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electrode formed as part of a graphite reactor crucible. The apparatus according to the present invention may operate without using any water-cooled elements inside the plasma reactor and allows replenishment of feed material without stopping the reactor. The reactivity of ultra-fine metals, such as aluminium, presents an operational risk if there is a likely-hood of contact with water, reactive liquids, or reactive gases such as air and oxygen. The passivation stage described herein renders the powdered material more suitable for transporting.
<Desc/Clms Page number 23>

Claims (1)

  1. CLAIMS: 1. A plasma arc reactor for producing a powder from a solid feed material, the reactor comprising: (a) a first electrode, (b) a second electrode which is adapted to be spaced apart from the first electrode by a distance sufficient to achieve a plasma arc therebetween, (c) means for introducing a plasma gas into the space between the first and second electrodes, (d) means for generating a plasma arc in the space between the first and second electrodes, wherein the first electrode has a channel running therethrough, an outlet of the channel exiting into the space between the first and second electrodes, and wherein means are provided for feeding solid material through the channel to exit therefrom via the outlet into the space between the first and second electrodes. 2. A plasma arc reactor as claimed in claim 1, wherein the first electrode is moveable with respect to the second electrode from a first position at which an arc portion thereof contacts with an arc portion of the second electrode to a second position at which said arc portions are spaced apart from each other by a distance sufficient to achieve a plasma arc therebetween. 3. A plasma arc reactor as claimed in claim 1 or claim 2, wherein the first electrode is a hollow elongate member whose inner surface defines a closed
    <Desc/Clms Page number 24>
    channel, the elongate member terminating at an arc tip which opposes the second electrode, wherein the outlet of the closed channel is disposed at or adjacent to the arc tip. 4. A plasma arc reactor as claimed in any one of the preceding claims, wherein arc portions of the first and/or second electrodes is/are formed from graphite. S. A plasma arc reactor as claimed in any one of the preceding claims, further comprising cooling means for cooling and condensing solid feed material which, in use, has been vaporised in the plasma arc between the first and second electrodes. 6. A plasma arc reactor as claimed in claim S, wherein the cooling means comprises a source of a cooling gas. 7. A plasma arc reactor as claimed in claim 6, wherein the second electrode comprises a graphite vessel having a surface adapted to direct vaporised solid material downstream to a cooling zone to be cooled, in use, by the cooling gas. 8. A plasma arc reactor as claimed in any one of the preceding claims, further comprising a collection zone for collecting powdered material. 9. A plasma arc reactor as claimed in any one of the preceding claims, wherein the channel in the first electrode is also adapted to introduce the plasma gas into the space between the first and second electrodes. 10. A plasma arc reactor as claimed in any one
    <Desc/Clms Page number 25>
    of the preceding claims, wherein the means for generating a plasma arc in the space between the first and second electrodes comprises a DC or AC power source. 11. A process for producing a powder from a solid feed material, which process comprises: (i) providing a plasma arc reactor as defined in any one of the preceding claims, (ii) introducing a plasma gas into the space between the first and second electrodes, (iii) generating a plasma arc in the space between the first and second electrodes, (iv) feeding solid material through the channel to exit via the outlet thereof into the plasma arc, whereby the solid feed material is vaporised, (v) cooling the vaporised material to condense a powder, and (vi) collecting the powder. 12. A process as claimed in claim 11, wherein the solid feed material comprises or consists of a metal or alloy. 13. A process as claimed in claim 12, wherein the solid feed material is aluminium or an alloy thereof. 14. A process as claimed in any one of claims 11 to 13, wherein the solid feed material is in the form of a wire, fibres and/or a particulate.
    <Desc/Clms Page number 26>
    15. A process as claimed in any one of claims 11 to 14, wherein the plasma gas comprises or consists of an inert gas. 16. A process as claimed in claim 15, wherein the plasma gas comprises or consists of helium and/or argon. 17. A process as claimed in any one of claims 11 to 16, wherein the plasma gas is injected through the channel of the first electrode to exit therefrom into the space between the first and second electrodes. 18. A process as claimed in claim 17, wherein the plasma gas and solid feed material exit the first electrode via a common outlet. 19. A process as claimed in claim 17 or claim 18, wherein the plasma gas and solid feed material enter the channel in the first electrode via a common inlet. 20. A process as claimed in any one of claims 11 to 19, wherein at least some cooling of the vaporised material is achieved using an inert gas stream. 21. A process as claimed in any one of claims 11 to 20, wherein at least some cooling of the vaporised material is achieved using a reactive gas stream. 22. A process as claimed in any one of claims 11 to 21, wherein the surface of the powder is oxidised using a passivating gas stream. 23. A process as claimed in claim 22, wherein the passivating gas comprises an oxygen-containing gas.
    <Desc/Clms Page number 27>
    24. A process as claimed in claim 23, wherein the oxygen-containing gas comprises from 95 to 99 vol.% of an inert gas and from 1 to 5 vol.% of oxygen. 25. A process as claimed in claim 24, wherein the oxygen-containing gas comprises approximately 98 vol.% of an inert gas and approximately 2 vol.% of oxygen. 26. A process as claimed in any one of claims 11 to 25, wherein the powder comprises particles substantially a11 of which have a diameter of less than 200 nm. 27. A particulate material comprising particles having a core comprising or consisting essentially of aluminium and a surface layer comprising or consisting essentially of aluminium oxide, which particulate material is obtainable by a process as claimed in any one of claims 13 to 26. 28. A particulate material as claimed in claim 27, wherein the aluminium oxide surface layer has a thickness of s 10 nm, preferably s 5 nm, more preferably s 3 nm. 29. A particulate material as claimed in claim 27 or claim 28, wherein substantially all of the particles have a diameter of _ < 200 nm. 30. A particulate material as claimed in any one of claims 27 to 29, wherein the average particle diameter lies in the range of from 50 to 150 nm, more preferably from 70 to 130 nm, still more preferably from 80 to 120 nm.
    <Desc/Clms Page number 28>
    31. A particulate material as claimed in any one of claims 27 to 30, wherein the particulate material has a specific surface area in the range of from 15 to 40 mzg-=, preferably from 25 to 30 mzg-1. 32. A plasma arc reactor for producing a powder from a solid feed material substantially as hereinbefore described with reference to or as illustrated in any one of the accompanying drawings. 33. A process for producing a powder from a solid feed material as claimed in 11, substantially as hereinbefore described.
GB0020106A 2000-02-10 2000-08-15 Making nano-sized powder using a plasma arc reactor Withdrawn GB2365876A (en)

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GB0020106A GB2365876A (en) 2000-08-15 2000-08-15 Making nano-sized powder using a plasma arc reactor
US10/203,467 US7022155B2 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
CNB018047971A CN100418674C (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
RU2002123919/02A RU2263006C2 (en) 2000-02-10 2001-02-09 Plasma-arc reactor and fine powder producing method
DE2001601840 DE60101840T2 (en) 2000-02-10 2001-02-09 PLASMA REACTOR FOR PRODUCING FINE POWDER
IL15111401A IL151114A0 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
EP04000974A EP1415741A3 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
EP03024817A EP1398100A3 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
CA002399581A CA2399581A1 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
AU2001232063A AU2001232063A1 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
KR1020027010323A KR100784576B1 (en) 2000-02-10 2001-02-09 Process for producing powders and plasma arc reactor for the production of fine powders
PCT/GB2001/000553 WO2001058625A1 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
JP2001557715A JP2003522299A (en) 2000-02-10 2001-02-09 Plasma arc reactor for producing fine powder
AT01904146T ATE258092T1 (en) 2000-02-10 2001-02-09 PLASMA REACTOR FOR PRODUCING FINE POWDER
EP01904146A EP1257376B1 (en) 2000-02-10 2001-02-09 Plasma arc reactor for the production of fine powders
IL151114A IL151114A (en) 2000-02-10 2002-08-07 Plasma arc reactor for the production of fine powders
US11/304,633 US7727460B2 (en) 2000-02-10 2005-12-16 Plasma arc reactor for the production of fine powders
US11/304,705 US20060096417A1 (en) 2000-02-10 2005-12-16 Plasma arc reactor for the production of fine powders

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WPI Abstract Accession No. 1975-82237W/50 & JP 50 063 500 A *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1760043A1 (en) 2005-09-06 2007-03-07 ETH Zürich, ETH Transfer Reducing flame spray pyrolysis method for the production of metal, non-oxidic, ceramic and reduced metal oxide powders and nano-powders
CN108686596A (en) * 2017-04-05 2018-10-23 松下知识产权经营株式会社 Fine-grain manufacturing apparatus and particle manufacturing method
CN108686596B (en) * 2017-04-05 2021-12-28 松下知识产权经营株式会社 Fine particle production apparatus and fine particle production method

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