FR2551458B1 - Cellule de vaporisation pour depot sous vide de minces couches sur des supports - Google Patents
Cellule de vaporisation pour depot sous vide de minces couches sur des supportsInfo
- Publication number
- FR2551458B1 FR2551458B1 FR848413490A FR8413490A FR2551458B1 FR 2551458 B1 FR2551458 B1 FR 2551458B1 FR 848413490 A FR848413490 A FR 848413490A FR 8413490 A FR8413490 A FR 8413490A FR 2551458 B1 FR2551458 B1 FR 2551458B1
- Authority
- FR
- France
- Prior art keywords
- substrates
- vacuum deposition
- thin layers
- vaporization cell
- vaporization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 title 1
- 238000001771 vacuum deposition Methods 0.000 title 1
- 230000008016 vaporization Effects 0.000 title 1
- 238000009834 vaporization Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH4848/83A CH654596A5 (de) | 1983-09-05 | 1983-09-05 | Verdampferzelle. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2551458A1 FR2551458A1 (fr) | 1985-03-08 |
FR2551458B1 true FR2551458B1 (fr) | 1989-06-16 |
Family
ID=4283607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR848413490A Expired FR2551458B1 (fr) | 1983-09-05 | 1984-08-31 | Cellule de vaporisation pour depot sous vide de minces couches sur des supports |
Country Status (7)
Country | Link |
---|---|
US (1) | US4565158A (fr) |
JP (1) | JPS6056065A (fr) |
CH (1) | CH654596A5 (fr) |
DE (1) | DE3414669C2 (fr) |
FR (1) | FR2551458B1 (fr) |
GB (1) | GB2146046B (fr) |
NL (1) | NL8402493A (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0757297B2 (ja) * | 1987-04-22 | 1995-06-21 | 日本真空技術株式会社 | 真空排気系用微粒子トラツプ |
IT1240199B (it) * | 1990-04-19 | 1993-11-27 | Cselt Centro Studi Lab Telecom | Effusore di vapori per impianti di deposizione epitassiale. |
US5951769A (en) * | 1997-06-04 | 1999-09-14 | Crown Roll Leaf, Inc. | Method and apparatus for making high refractive index (HRI) film |
DE10211573A1 (de) * | 2002-03-15 | 2003-10-16 | Unaxis Balzers Ag | Vakuumverdampfungseinrichtung |
EP1505167B1 (fr) * | 2003-08-04 | 2014-09-17 | LG Display Co., Ltd. | Source d'évaporation |
JP4344631B2 (ja) * | 2004-03-02 | 2009-10-14 | 長州産業株式会社 | 有機物薄膜堆積用分子線源 |
KR100671673B1 (ko) * | 2005-03-09 | 2007-01-19 | 삼성에스디아이 주식회사 | 다중 진공증착장치 및 제어방법 |
SG10201603129PA (en) * | 2011-10-21 | 2016-05-30 | Oerlikon Advanced Technologies Ag | Direct liquid deposition |
CN104018121A (zh) * | 2014-05-14 | 2014-09-03 | 深圳市华星光电技术有限公司 | 防止高温金属材料泄漏的加热容器及其制造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR872840A (fr) * | 1940-06-04 | 1942-06-19 | Fides Gmbh | Procédé de revêtement de surfaces quelconques avec une couche métallique |
DE747257C (de) * | 1943-03-05 | 1944-09-18 | Bosch Gmbh Robert | Vorrichtung zur Metallisierung laufender Baender durch Metallbedampfung im Vakuum |
US3751310A (en) * | 1971-03-25 | 1973-08-07 | Bell Telephone Labor Inc | Germanium doped epitaxial films by the molecular beam method |
US4061800A (en) * | 1975-02-06 | 1977-12-06 | Applied Materials, Inc. | Vapor desposition method |
GB1455973A (en) * | 1975-02-21 | 1976-11-17 | Fisker H J J | Vacuum relief valve |
GB2032580B (en) * | 1978-10-06 | 1982-12-01 | Wirral Borough Council | Flow restrictor device |
US4401052A (en) * | 1979-05-29 | 1983-08-30 | The University Of Delaware | Apparatus for continuous deposition by vacuum evaporation |
CH651592A5 (de) * | 1982-10-26 | 1985-09-30 | Balzers Hochvakuum | Dampfquelle fuer vakuumbedampfungsanlagen. |
-
1983
- 1983-09-05 CH CH4848/83A patent/CH654596A5/de not_active IP Right Cessation
-
1984
- 1984-04-18 DE DE3414669A patent/DE3414669C2/de not_active Expired
- 1984-06-19 JP JP59126305A patent/JPS6056065A/ja active Pending
- 1984-07-26 GB GB08419073A patent/GB2146046B/en not_active Expired
- 1984-07-30 US US06/635,906 patent/US4565158A/en not_active Expired - Fee Related
- 1984-08-13 NL NL8402493A patent/NL8402493A/nl not_active Application Discontinuation
- 1984-08-31 FR FR848413490A patent/FR2551458B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE3414669A1 (de) | 1985-03-21 |
GB8419073D0 (en) | 1984-08-30 |
US4565158A (en) | 1986-01-21 |
GB2146046A (en) | 1985-04-11 |
CH654596A5 (de) | 1986-02-28 |
GB2146046B (en) | 1986-11-26 |
DE3414669C2 (de) | 1985-09-19 |
FR2551458A1 (fr) | 1985-03-08 |
NL8402493A (nl) | 1985-04-01 |
JPS6056065A (ja) | 1985-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |