FR2440618A1 - Circuit integre resistance - capacite a couches minces - Google Patents

Circuit integre resistance - capacite a couches minces

Info

Publication number
FR2440618A1
FR2440618A1 FR7831114A FR7831114A FR2440618A1 FR 2440618 A1 FR2440618 A1 FR 2440618A1 FR 7831114 A FR7831114 A FR 7831114A FR 7831114 A FR7831114 A FR 7831114A FR 2440618 A1 FR2440618 A1 FR 2440618A1
Authority
FR
France
Prior art keywords
tantalum
thin film
angstroms thick
temp
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7831114A
Other languages
English (en)
Other versions
FR2440618B1 (fr
Inventor
Michele Moulin
Jean-Bernard Ranger
Jacques Robineau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lignes Telegraphiques et Telephoniques LTT SA
Original Assignee
Lignes Telegraphiques et Telephoniques LTT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lignes Telegraphiques et Telephoniques LTT SA filed Critical Lignes Telegraphiques et Telephoniques LTT SA
Priority to FR7831114A priority Critical patent/FR2440618A1/fr
Publication of FR2440618A1 publication Critical patent/FR2440618A1/fr
Application granted granted Critical
Publication of FR2440618B1 publication Critical patent/FR2440618B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/01—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate comprising only passive thin-film or thick-film elements formed on a common insulating substrate
    • H01L27/016—Thin-film circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

AMELIORATION DE LA STABILITE EN TEMPERATURE DES CIRCUITS A COUCHES MINCES. L'INVENTION CONSISTE A REALISER LES RESISTANCES PAR UNE COUCHE D'OXYNITRURE DE TANTALE ET LES CAPACITES PAR UNE COUCHE D'OXYDE DE TANTALE COMME DIELECTRIQUE COMPRISE ENTRE UNE COUCHE DE NICKEL ET UNE COUCHE D'OR COMME ELECTRODES. LES COEFFICIENTS DE VARIATION EN FONCTION DE LA TEMPERATURE DE LA RESISTANCE ET DE LA CAPACITE OBTENUS SONT SENSIBLEMENT EGAUX ET DE SIGNES OPPOSES. CIRCUITS DIVERS A CONSTANTE DE TEMPS OU A FREQUENCE STABLE EN FONCTION DE LA TEMPERATURE.
FR7831114A 1978-11-03 1978-11-03 Circuit integre resistance - capacite a couches minces Granted FR2440618A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7831114A FR2440618A1 (fr) 1978-11-03 1978-11-03 Circuit integre resistance - capacite a couches minces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7831114A FR2440618A1 (fr) 1978-11-03 1978-11-03 Circuit integre resistance - capacite a couches minces

Publications (2)

Publication Number Publication Date
FR2440618A1 true FR2440618A1 (fr) 1980-05-30
FR2440618B1 FR2440618B1 (fr) 1982-04-23

Family

ID=9214427

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7831114A Granted FR2440618A1 (fr) 1978-11-03 1978-11-03 Circuit integre resistance - capacite a couches minces

Country Status (1)

Country Link
FR (1) FR2440618A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1982003458A1 (fr) * 1981-04-04 1982-10-14 Burger Kurt Jauge de contrainte a couche mince et procede pour sa fabrication
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element
FR2597262A1 (fr) * 1986-04-15 1987-10-16 Toshiba Kk Circuit integre a semi-conducteur avec condensateur de derivation associe a son cablage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2714034A1 (de) * 1977-03-30 1978-10-05 Lueder Ernst Prof Dr Ing Verfahren zur herstellung temperaturkompensierter duennschichtschaltungen aus einer schicht

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2714034A1 (de) * 1977-03-30 1978-10-05 Lueder Ernst Prof Dr Ing Verfahren zur herstellung temperaturkompensierter duennschichtschaltungen aus einer schicht

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element
WO1982003458A1 (fr) * 1981-04-04 1982-10-14 Burger Kurt Jauge de contrainte a couche mince et procede pour sa fabrication
FR2597262A1 (fr) * 1986-04-15 1987-10-16 Toshiba Kk Circuit integre a semi-conducteur avec condensateur de derivation associe a son cablage

Also Published As

Publication number Publication date
FR2440618B1 (fr) 1982-04-23

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Legal Events

Date Code Title Description
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