FR1487438A - Source de faisceau d'électrons non thermoionique - Google Patents
Source de faisceau d'électrons non thermoioniqueInfo
- Publication number
- FR1487438A FR1487438A FR62895A FR62895A FR1487438A FR 1487438 A FR1487438 A FR 1487438A FR 62895 A FR62895 A FR 62895A FR 62895 A FR62895 A FR 62895A FR 1487438 A FR1487438 A FR 1487438A
- Authority
- FR
- France
- Prior art keywords
- electron beam
- beam source
- thermionic electron
- thermionic
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR62895A FR1487438A (fr) | 1965-05-28 | 1966-05-25 | Source de faisceau d'électrons non thermoionique |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US459650A US3414702A (en) | 1965-05-28 | 1965-05-28 | Nonthermionic electron beam apparatus |
FR62895A FR1487438A (fr) | 1965-05-28 | 1966-05-25 | Source de faisceau d'électrons non thermoionique |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1487438A true FR1487438A (fr) | 1967-07-07 |
Family
ID=26170885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR62895A Expired FR1487438A (fr) | 1965-05-28 | 1966-05-25 | Source de faisceau d'électrons non thermoionique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1487438A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0002406A1 (fr) * | 1977-11-28 | 1979-06-13 | ANVAR Agence Nationale de Valorisation de la Recherche | Source d'ions notamment pour implanteur ionique |
-
1966
- 1966-05-25 FR FR62895A patent/FR1487438A/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0002406A1 (fr) * | 1977-11-28 | 1979-06-13 | ANVAR Agence Nationale de Valorisation de la Recherche | Source d'ions notamment pour implanteur ionique |
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