EP2918843B1 - Vacuum pump damper - Google Patents

Vacuum pump damper Download PDF

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Publication number
EP2918843B1
EP2918843B1 EP15157292.2A EP15157292A EP2918843B1 EP 2918843 B1 EP2918843 B1 EP 2918843B1 EP 15157292 A EP15157292 A EP 15157292A EP 2918843 B1 EP2918843 B1 EP 2918843B1
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EP
European Patent Office
Prior art keywords
vacuum pump
flange
fastening element
decoupling
damper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15157292.2A
Other languages
German (de)
French (fr)
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EP2918843A1 (en
Inventor
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the present invention relates to a vacuum pump damper for the vacuum-tight connection of a vacuum pump to a recipient according to the preamble of claim 1, for example from FIG EP 1 837 521 A1 known.
  • a vacuum pump damper of essentially comparable type is also disclosed in FIG WO 2005/095798 A1 described.
  • the invention also relates to a vacuum pump and a system comprising a vacuum pump, a recipient and a damper.
  • Vacuum pumps with appropriate dampers are known in principle.
  • DE 10 2004 044 775 A1 relates to a vacuum pump vibration damper with an elastic damping ring which is arranged axially between a sealing ring of a vacuum pump and a sealing ring of a vacuum device.
  • the vibration damper also includes a non-elastic sealing sleeve on the radially inside of the sealing rings.
  • dampers have a complex structure. The production is therefore associated with high costs. These dampers are also comparatively susceptible to failure and require a lot of maintenance.
  • a vacuum pump damper connects a first and a second flange, wherein the first flange is connected or can be connected to the vacuum pump and the second flange to the recipient, in particular indirectly or directly.
  • the vacuum pump can be a turbo pump, for example.
  • flange includes not only projections, but also, for example, however shaped end sections of the vacuum pump or the recipient.
  • first flange can in particular form part of the vacuum pump.
  • second flange can also form part of the recipient.
  • the flanges can in particular be designed in one piece with the vacuum pump or the recipient.
  • the vacuum pump damper is designed as an adapter.
  • the vacuum pump damper can form, for example, a vibration-damping and / or electrically insulating intermediate piece between a vacuum pump and a recipient.
  • the vacuum pump damper can in particular have a conventional standard flange on opposite sides, each of which is connected to a conventional standard flange of a vacuum pump and / or a recipient can be.
  • the standard flanges of the vacuum pump damper and the vacuum pump or the recipient can be screwed together, for example.
  • Such an adapter can in particular be designed in several parts, wherein a first adapter part can have the first flange and a standard flange for connection to the vacuum pump.
  • the second adapter part can have the second flange and a standard flange for connection to the recipient.
  • first flange prefferably be firmly connected to the vacuum pump
  • second flange can only be connected to the recipient indirectly, in particular via a standard flange.
  • second flange can also be firmly connected to the recipient, while the first flange can only be connected indirectly to the vacuum pump, in particular via a standard flange.
  • the vacuum pump damper comprises at least one decoupling element which is arranged directly between the mutually facing flange sides of the first and second flange.
  • the flanges are therefore designed in such a way that, without the decoupling element, the two flange sides would lie flat against one another.
  • the flange sides are preferably at least substantially planar and / or oriented parallel to one another.
  • the vacuum pump damper according to the invention further comprises at least one fastening element with which the first and the second flange are connected to one another or are connectable.
  • at least one fastening element with which the first and the second flange are connected to one another or are connectable.
  • fastening elements are provided, which are preferably arranged distributed uniformly around the circumference of the flanges. In particular, the position of the vacuum pump and the recipient with respect to one another is determined by the fastening element and secure fastening is ensured.
  • the fastening element ensures that the position between the vacuum pump and the recipient is fixed, i.e. can reliably prevent lateral relative movements.
  • the flange sides can therefore be designed very simply, since lateral relative movements do not have to be prevented by the decoupling member. In other words, there is a separation or division of the functions “decoupling” on the one hand and “lateral support” on the other hand.
  • the fastening element is designed in particular to be so stable that it can absorb the moments that occur in the event of a crash.
  • a screw, a bolt or the like, for example, can be used as the fastening element.
  • the fastening element and the flanges are designed to preload the decoupling member in a vacuum-tight manner in a non-evacuated assembly state such that the two flanges are mechanically and / or electrically decoupled from one another in an evacuated operating state.
  • the pressure here corresponds in particular to atmospheric pressure.
  • the vacuum pump and the recipient are already connected to one another by the fastening element in such a way that the decoupling element is acted upon by the two flanges and is thus deformed between the two flange sides and consequently pretensioned.
  • the vacuum pump and the recipient are thus connected to one another at least essentially in a vacuum-tight manner in the assembled state.
  • the decoupling element is compressed further due to the atmospheric pressure.
  • a decoupling between this flange and the fastening element that already exists in the assembled state is retained or this decoupling is only achieved through further compression by connecting the fastening element to only one of the flanges, in particular the second flange is.
  • a conductive, in particular metallic, contact between the flanges is avoided in this way.
  • the two flanges are only in contact with one another via non-metallic components, in particular the decoupling element. The flanges are thus decoupled from one another.
  • the fastening element pretensions the decoupling element assigned to it in the assembled state. If a vacuum is now generated, one of the flanges moves away from the drive surface relative to the fastening element. Because of the atmospheric pressure, the pretensioning of the decoupling element can be reduced. In particular, due to the decoupling element, the fastening element can be mechanically and / or electrically decoupled from the flange in question both in the non-evacuated assembly state and in the evacuated operating state.
  • the two flanges are in contact with one another, in particular only through the decoupling element and the decoupling element, which are preferably designed as elastomers.
  • the two flanges are in indirect contact with one another in the area of the fastening element, via the fastening element and at least one decoupling element arranged between the fastening element and one of the flanges.
  • the vacuum pump damper according to the invention enables a vacuum-tight connection between a vacuum pump and a recipient in a simple and cost-effective manner. Furthermore, a decoupling between the vacuum pump and the recipient is made possible in a simple manner. It is particularly advantageous that no complex and multi-part structures are required between the vacuum pump and the recipient. Surprisingly, it has been shown that it is sufficient to provide a decoupling element between the facing, in particular essentially flat, flange sides as well as a suitable, likewise relatively simply constructed attachment that either ensures vibration and / or electrical decoupling between the flanges in the assembled state or in which such a decoupling occurs automatically on transition to the evacuated operating state.
  • the production of the damper according to the invention is therefore very simple and inexpensive and the vacuum-tight connection between the vacuum pump and the recipient can be implemented in a very simple and reliable manner.
  • the flange side of the first and / or the second flange is formed exclusively by an at least substantially flat annular surface.
  • the flange side thus in particular does not include any edges or steps.
  • the mutually facing flange sides of the first and the second flange are thus preferably oriented parallel to each other and in particular form flat surfaces.
  • the production of the flanges is particularly simple and inexpensive as a result.
  • At least one flange side can be provided with any means that prevent the decoupling member, which is designed as an annular element with basically any cross-section, from moving laterally, in particular radially inward, relative to the flange side.
  • Such means can e.g. can be created by a corresponding design of the flange side without additional separate components.
  • the flange side can include an elevation or step which is used to hold the decoupling element.
  • one of the flange sides comprises such means, e.g. in the form of at least one groove or step, which is designed for receiving and / or lateral contact of the decoupling element.
  • the other of the flange sides is preferably flat at least in the area of the decoupling element.
  • the groove can in particular be designed round or angular, for example as a rectangular sealing groove.
  • the cross section of the groove can be at least partially formed by segments of a circle. In this way, a large sealing length can be achieved even with a comparatively low contact pressure.
  • a centering effect can be achieved by the groove, whereby the positioning of the flanges or the components connected to the flanges, i.e. the vacuum pump and the recipient, is simplified relative to one another.
  • the groove can hold the decoupling element in a desired position, which in particular can prevent the fastening element from making metallic contact with the flange in question in the operating state.
  • the decoupling element can be adapted to the design of the groove.
  • the decoupling element can also have a round or rectangular cross section.
  • the fastening element penetrates the flange side of the first and / or the second flange.
  • Both the cross-section of the groove and the cross-section of the decoupling element are basically any.
  • the decoupling element is designed as a damper for mechanical vibrations and / or as an electrical insulator. In the evacuated operating state, there is therefore no transmission of vibrations. Since the vacuum pump and the recipient are only connected to one another via non-metallic components, in particular via the decoupling element, in the evacuated operating state, the vacuum pump and the recipient are mechanically and electrically decoupled from one another. The vibration level can be improved by a factor of about 10 compared to an arrangement without a vacuum pump damper.
  • vacuum pumps with a vacuum pump damper according to the invention can also be used, particularly in applications that are particularly critical in terms of vibration, such as mass spectrometer systems are operated, for which vibrations with frequencies in the range from 500 to 2,000 Hz are particularly critical.
  • the decoupling element comprises at least one elastomer.
  • the elastic material can be a rubber material, for example.
  • the decoupling element is preferably designed as a shaped element or as an O-ring. This can in particular be a commercially available O-ring, which saves costs.
  • the decoupling element can for example be inserted into a groove on the flange side of the first and / or the second flange. It is also possible for the decoupling element to be firmly connected to the flange side of the first and / or the second flange.
  • a plurality of decoupling members can also be provided, which are arranged concentrically to one another, for example.
  • vacuum pump damper for example, in what are known as split-flow pumps, then several decoupling elements can be pressed between the flange sides.
  • the fastening element in the assembled state is firmly connected to one, in particular the second, flange and the other, in particular first, flange is movable relative to the fastening element in a connection direction.
  • the fastening element in particular a head piece of the fastening element, can thus serve, for example, as a stop for one, in particular the first, flange. If the vacuum pump is now put into operation, this flange moves in a connection direction relative to the fastening element due to the ambient pressure.
  • the fastening element can then decouple from this flange or continue to be in indirect contact with the flange without a separation between this flange and the fastening element, but the mechanical vibration decoupling or vibration damping and the electrical decoupling are guaranteed in any case.
  • the vacuum pump damper can in particular comprise a spacer element, in particular a spacer sleeve.
  • the minimum distance between the first and the second flange can be determined by the spacer element.
  • the spacer sleeve can preferably be arranged below a head piece of the fastening element, in particular a screw head.
  • a fitting screw can also be used as a spacer element.
  • the fastening element can only be moved up to a certain position in a fastening direction. In this way, even when there are several fastening elements, a uniform pretension can always be achieved. In particular, the pressure on the decoupling element caused by the fastening elements is always the same.
  • the fastening element can, in particular, be pretensioned in a manner that prevents it from turning loose through the use of such a spacer element. Additional safeguards for the fastening element can thus be omitted.
  • the behavior of the vibration decoupling can also be influenced by the predefined distance.
  • the decoupling element provided on the fastening element is an elastomer which is acted upon by a drive surface of the fastening element.
  • the decoupling element can be an O-ring or a molded element.
  • the drive surface is in particular an underside of a head piece of the fastening element.
  • non-metallic, in particular rubberized, screws or shaped pieces can also be used as fastening elements.
  • a separate decoupling element for the fastening element is then not required.
  • the decoupling element is held in a position below a head piece of the fastening element, in particular a screw head, with the aid of a recess, a washer and / or a molded part.
  • a screw head can also have a collar, for example.
  • the decoupling element is thus to a certain extent chambered. In this way it is ensured that the decoupling element always remains in an intended position, even if, for example, pressure is exerted on the decoupling element by the fastening element.
  • the fastening element in particular below a head piece, preferably a screw head, comprises a non-planar, in particular conical, driving surface.
  • a flange can have a recess or depression for the drive surface.
  • a section of the flange which interacts with the drive surface can have a non-planar, in particular conical, counter, counter or complementary surface. The angles of inclination of these surfaces can in particular correspond here.
  • the invention also relates to a vacuum pump which is connected to a first flange of a vacuum pump damper according to the invention.
  • the vacuum pump can be connected to the second flange with the aid of the first flange.
  • the second flange can be formed directly on a recipient or on an adapter part which can be connected to the recipient by a standard flange.
  • the invention also relates to a system with a vacuum pump, a recipient and a damper designed according to the invention.
  • FIG. 1 is a sectional view of a vacuum pump damper according to the invention. This connects a vacuum pump 10 to a recipient 12.
  • the recipient 12 is a container which is to be evacuated. Both the vacuum pump 10 and the recipient 12 each have an interior space 14, 14 'and a wall 16, 16'.
  • the interior spaces 14, 14 ′ of the vacuum pump 10 and of the recipient 12 are connected to one another via a channel 18.
  • a first flange 20 is arranged at an upper end of the vacuum pump 10.
  • the recipient 12 has a second flange 22 on its underside.
  • the flanges 20, 22 each include both a protruding, cantilevered area and the end faces of the walls 16, 16 '.
  • the first flange 20 and the second flange 22 each include a flange side 24, 24 ', the flange sides 24, 24' facing one another when the relative arrangement is intended.
  • the flange sides 24, 24 ' are oriented flat and parallel to one another.
  • an O-ring 26 with a rectangular cross section is provided, which forms a decoupling element.
  • the first flange 20 and the second flange 22 are connected to one another by means of a plurality of fastening elements designed as screws 28.
  • FIG. 2 An enlarged illustration of a section A comprising the screw 28 according to FIG Fig. 1 is in Fig. 2 shown.
  • the screw 28 has a screw head 30 and a shaft 32.
  • a washer 33 is arranged below the screw head 30.
  • the screw 28 is screwed to the second flange 22.
  • a spacer sleeve 36 is provided below the screw head 30 in order to define a fixed distance between the screw head 30 and the second flange 22.
  • the screw 28 is mechanically and electrically decoupled from the first flange 20.
  • a further O-ring 34 is provided below the screw head 30 or below the washer 33, which serves as a decoupling element for the screw 28.
  • This decoupling element 34 is arranged in a recess 35 of the first flange 20 and is held in a desired position with the aid of the washer 33.
  • the underside of the screw head 30 or the washer 33 forms a driving surface 38 which acts on the O-ring 34.
  • the flange side 24 of the first flange 20 has a groove 40 with a rectangular cross-sectional shape.
  • An alternative embodiment is shown Fig. 3 .
  • the flange side 24 'of the second flange 22 is provided with a step 44 which laterally holds the O-ring 26, which in turn has a rectangular cross section, and prevents the O-ring 26 from moving radially inward.
  • the other flange side 24 '( Fig. 2 ) or 24 ( Fig. 3 ) has just been carried out.
  • the screws 28 are screwed tight to the second flange 22.
  • the O-rings 26, 34 are pretensioned by the resulting pressure.
  • the screws 28 can be tightened until the spacer sleeves 36 take effect.
  • the minimum distance between the flanges 20, 22 defined by the spacer sleeves 36 and thus the pretensioning of the sealing O-ring 26 predetermined by the spacer sleeves 36 are consequently already achieved in the assembled state.
  • the O-rings 34 and the O-rings 26 are thus always pressed in or preloaded to a predetermined and predefined amount.
  • the first flange 20 moves in a connection direction V in the direction of the second flange 22.
  • the screw 28 remains in the original position.
  • the O-ring 26 is further compressed by the ambient pressure.
  • the O-ring 34 can relax.
  • the first flange 20 and the second flange 22 are consequently only connected to one another via the O-rings 26, 34, are thereby indirectly in contact and consequently are not completely separated from one another.
  • a mechanical and / or electrical decoupling between a vacuum pump and a recipient is thus made possible in a very simple, inexpensive and reliable manner.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Gasket Seals (AREA)
  • Vibration Prevention Devices (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Plates (AREA)

Description

Die vorliegende Erfindung betrifft einen Vakuumpumpen-Dämpfer zur vakuumdichten Verbindung einer Vakuumpumpe mit einem Rezipienten gemäß dem Oberbegriff des Anspruchs 1, wie beispielweise aus der EP 1 837 521 A1 bekannt. Ein der Art nach im Wesentlichen vergleichbarer Vakuumpumpen-Dämpfer wird ferner in der WO 2005/095798 A1 beschrieben.The present invention relates to a vacuum pump damper for the vacuum-tight connection of a vacuum pump to a recipient according to the preamble of claim 1, for example from FIG EP 1 837 521 A1 known. A vacuum pump damper of essentially comparable type is also disclosed in FIG WO 2005/095798 A1 described.

Ferner betrifft die Erfindung eine Vakuumpumpe sowie ein System aus einer Vakuumpumpe, einem Rezipienten und einem Dämpfer.The invention also relates to a vacuum pump and a system comprising a vacuum pump, a recipient and a damper.

Vakuumpumpen mit entsprechenden Dämpfern sind grundsätzlich bekannt.Vacuum pumps with appropriate dampers are known in principle.

DE 10 2004 044 775 A1 betrifft einen Vakuumpumpen-Schwingungsdämpfer mit einem elastischen Dämpfungsring, der axial zwischen einem Dichtungsring einer Vakuumpumpe und einem Dichtungsring einer Vakuumvorrichtung angeordnet ist. Der Schwingungsdämpfer umfasst zudem eine nicht-elastische Dichtungshülse radial innenseitig der Dichtungsringe. DE 10 2004 044 775 A1 relates to a vacuum pump vibration damper with an elastic damping ring which is arranged axially between a sealing ring of a vacuum pump and a sealing ring of a vacuum device. The vibration damper also includes a non-elastic sealing sleeve on the radially inside of the sealing rings.

Ferner ist aus EP 1 270 949 A1 eine Vakuumpumpe mit einem Adapter zur Dämpfung bekannt. Die Dämpfung erfolgt mittels eines elastischen Bauteils sowie eines zylindrischen Balgs.It is also off EP 1 270 949 A1 a vacuum pump with an adapter for damping is known. The damping takes place by means of an elastic component and a cylindrical bellows.

Nachteilig an diesen Dämpfern ist, dass diese komplex aufgebaut sind. Die Herstellung ist somit mit hohen Kosten verbunden. Auch sind diese Dämpfer vergleichsweise störungsanfällig und wartungsintensiv.The disadvantage of these dampers is that they have a complex structure. The production is therefore associated with high costs. These dampers are also comparatively susceptible to failure and require a lot of maintenance.

Es ist eine Aufgabe der Erfindung, auf einfache und kostengünstige Weise eine, insbesondere schwingungsentkoppelte und gleichzeitig elektrisch entkoppelte, vakuumdichte Verbindung zwischen einer Vakuumpumpe und einem Rezipienten zu schaffen.It is an object of the invention to create a vacuum-tight connection between a vacuum pump and a recipient, in particular a vibration-decoupled and at the same time electrically decoupled, vacuum-tight connection in a simple and inexpensive manner.

Die Lösung dieser Aufgabe erfolgt durch die Vorrichtung mit den Merkmalen des unabhängigen Anspruchs 1.This object is achieved by the device having the features of independent claim 1.

Erfindungsgemäß verbindet ein Vakuumpumpen-Dämpfer einen ersten und einen zweiten Flansch, wobei der erste Flansch mit der Vakuumpumpe und der zweite Flansch mit dem Rezipienten, insbesondere mittelbar oder unmittelbar, verbunden oder verbindbar ist. Bei der Vakuumpumpe kann es sich beispielsweise um eine Turbopumpe handeln.According to the invention, a vacuum pump damper connects a first and a second flange, wherein the first flange is connected or can be connected to the vacuum pump and the second flange to the recipient, in particular indirectly or directly. The vacuum pump can be a turbo pump, for example.

Der Begriff "Flansch" umfasst nicht nur Auskragungen, sondern auch beispielsweise wie auch immer geformte Endabschnitte der Vakuumpumpe bzw. des Rezipienten.The term “flange” includes not only projections, but also, for example, however shaped end sections of the vacuum pump or the recipient.

Beispielsweise kann der erste Flansch insbesondere einen Teil der Vakuumpumpe bilden. Auch der zweite Flansch kann einen Teil des Rezipienten bilden. Die Flansche können insbesondere einstückig mit der Vakuumpumpe bzw. dem Rezipienten ausgebildet sein.For example, the first flange can in particular form part of the vacuum pump. The second flange can also form part of the recipient. The flanges can in particular be designed in one piece with the vacuum pump or the recipient.

Als Beispiel, das nicht zu der Erfindung gehört, ist es jedoch auch möglich, dass der Vakuumpumpen-Dämpfer als Adapter ausgebildet ist. Der Vakuumpumpen-Dämpfer kann beispielsweise ein schwingungsdämpfendes und/oder elektrisch isolierendes Zwischenstück zwischen einer Vakuumpumpe und einem Rezipienten bilden. Dazu kann der Vakuumpumpen-Dämpfer insbesondere an gegenüberliegenden Seiten jeweils einen herkömmlichen Standard-Flansch aufweisen, welcher jeweils mit einem herkömmlichen Standard-Flansch einer Vakuumpumpe und/oder eines Rezipienten verbunden werden kann. Die Standard-Flansche des Vakuumpumpen-Dämpfers und der Vakuumpumpe bzw. des Rezipienten können beispielsweise miteinander verschraubt werden.As an example that does not belong to the invention, however, it is also possible that the vacuum pump damper is designed as an adapter. The vacuum pump damper can form, for example, a vibration-damping and / or electrically insulating intermediate piece between a vacuum pump and a recipient. For this purpose, the vacuum pump damper can in particular have a conventional standard flange on opposite sides, each of which is connected to a conventional standard flange of a vacuum pump and / or a recipient can be. The standard flanges of the vacuum pump damper and the vacuum pump or the recipient can be screwed together, for example.

Ein derartiger Adapter kann insbesondere mehrteilig ausgebildet sein, wobei ein erstes Adapterteil den ersten Flansch sowie einen Standard-Flansch zur Verbindung mit der Vakuumpumpe aufweisen kann. Das zweite Adapterteil kann den zweiten Flansch sowie einen Standard-Flansch zur Verbindung mit dem Rezipienten aufweisen.Such an adapter can in particular be designed in several parts, wherein a first adapter part can have the first flange and a standard flange for connection to the vacuum pump. The second adapter part can have the second flange and a standard flange for connection to the recipient.

Auch ist es möglich, dass beispielsweise der erste Flansch fest mit der Vakuumpumpe verbunden ist, während der zweite Flansch lediglich mittelbar, insbesondere über einen Standard-Flansch, mit dem Rezipienten verbindbar ist. Ferner kann auch der zweite Flansch fest mit dem Rezipienten verbunden sein, während der erste Flansch lediglich mittelbar, insbesondere über einen Standard-Flansch, mit der Vakuumpumpe verbindbar ist.It is also possible, for example, for the first flange to be firmly connected to the vacuum pump, while the second flange can only be connected to the recipient indirectly, in particular via a standard flange. Furthermore, the second flange can also be firmly connected to the recipient, while the first flange can only be connected indirectly to the vacuum pump, in particular via a standard flange.

Der Vakuumpumpen-Dämpfer umfasst erfindungsgemäß zumindest ein Entkopplungsorgan, das unmittelbar zwischen einander zugewandten Flanschseiten des ersten und des zweiten Flansches angeordnet ist.According to the invention, the vacuum pump damper comprises at least one decoupling element which is arranged directly between the mutually facing flange sides of the first and second flange.

Die Flansche sind also insbesondere derart ausgebildet, dass ohne das Entkopplungsorgan die beiden Flanschseiten flächig aneinander anliegen würden. Vorzugsweise sind die Flanschseiten bei bestimmungsgemäßer Relativanordnung zumindest im Wesentlichen eben ausgebildet und/oder parallel zueinander orientiert.The flanges are therefore designed in such a way that, without the decoupling element, the two flange sides would lie flat against one another. When the relative arrangement is intended, the flange sides are preferably at least substantially planar and / or oriented parallel to one another.

Der erfindungsgemäße Vakuumpumpen-Dämpfer umfasst ferner zumindest ein Befestigungselement, mit dem der erste und der zweite Flansch miteinander verbunden oder verbindbar sind. Vorzugsweise sind mehrere, insbesondere mindestens vier, Befestigungselemente vorgesehen, welche bevorzugt gleichmäßig um den Umfang der Flansche verteilt angeordnet sind. Durch das Befestigungselement wird insbesondere die Lage der Vakuumpumpe und des Rezipienten zueinander festgelegt und eine sichere Befestigung gewährleistet.The vacuum pump damper according to the invention further comprises at least one fastening element with which the first and the second flange are connected to one another or are connectable. Preferably several, in particular at least four, fastening elements are provided, which are preferably arranged distributed uniformly around the circumference of the flanges. In particular, the position of the vacuum pump and the recipient with respect to one another is determined by the fastening element and secure fastening is ensured.

Von Vorteil ist hier insbesondere, dass das Befestigungselement die Lagefestlegung zwischen Vakuumpumpe und Rezipient sicherstellen, d.h. seitliche Relativbewegungen zuverlässig verhindern kann. Im Bereich des Entkopplungsorgans können daher die Flanschseiten sehr einfach gestaltet sein, da seitliche Relativbewegungen nicht vom Entkopplungsorgan unterbunden werden müssen. Mit anderen Worten erfolgt eine Trennung bzw. Aufteilung der Funktionen "Entkopplung" einerseits und "seitlicher Halt" andererseits.It is particularly advantageous here that the fastening element ensures that the position between the vacuum pump and the recipient is fixed, i.e. can reliably prevent lateral relative movements. In the area of the decoupling member, the flange sides can therefore be designed very simply, since lateral relative movements do not have to be prevented by the decoupling member. In other words, there is a separation or division of the functions “decoupling” on the one hand and “lateral support” on the other hand.

Das Befestigungselement ist insbesondere derart stabil ausgebildet, dass es die bei einem Crashfall auftretenden Momente aufnehmen kann.The fastening element is designed in particular to be so stable that it can absorb the moments that occur in the event of a crash.

Als Befestigungselement kann beispielsweise eine Schraube, ein Bolzen oder dergleichen verwendet werden.A screw, a bolt or the like, for example, can be used as the fastening element.

Das Befestigungselement und die Flansche sind erfindungsgemäß dazu ausgebildet, in einem nicht evakuierten Montagezustand das Entkopplungsorgan derart vakuumdicht vorzuspannen, dass in einem evakuierten Betriebszustand die beiden Flansche mechanisch und/oder elektrisch voneinander entkoppelt sind.According to the invention, the fastening element and the flanges are designed to preload the decoupling member in a vacuum-tight manner in a non-evacuated assembly state such that the two flanges are mechanically and / or electrically decoupled from one another in an evacuated operating state.

Im nicht evakuierten Montagezustand ist in der Vakuumpumpe und/oder im Rezipienten kein Vakuum enthalten. Der Druck entspricht hierbei insbesondere dem Atmosphärendruck.In the non-evacuated assembly state, there is no vacuum in the vacuum pump and / or in the recipient. The pressure here corresponds in particular to atmospheric pressure.

Im Montagezustand sind die Vakuumpumpe und der Rezipient durch das Befestigungselement bereits miteinander verbunden, und zwar derart, dass das Entkopplungsorgan von den beiden Flanschen beaufschlagt und somit zwischen den beiden Flanschseiten deformiert und folglich vorgespannt wird. Durch das Entkopplungsorgan sind die Vakuumpumpe und der Rezipient somit bereits im Montagezustand zumindest im Wesentlichen vakuumdicht miteinander verbunden.In the assembled state, the vacuum pump and the recipient are already connected to one another by the fastening element in such a way that the decoupling element is acted upon by the two flanges and is thus deformed between the two flange sides and consequently pretensioned. As a result of the decoupling element, the vacuum pump and the recipient are thus connected to one another at least essentially in a vacuum-tight manner in the assembled state.

Wird nun im Montagezustand die Vakuumpumpe in Betrieb genommen, so wird das Entkopplungsorgan aufgrund des Atmosphärendrucks weiter komprimiert. Je nach Ausgestaltung des Befestigungselementes und eines der Flansche bleibt eine bereits im Montagezustand gegebene Entkoppelung zwischen diesem Flansch und dem Befestigungselement erhalten oder wird diese Entkopplung durch die weitere Komprimierung erst erzielt, indem das Befestigungselement nur noch mit einem der Flansche, insbesondere dem zweiten Flansch, verbunden ist. Insbesondere wird auf diese Weise ein leitender, insbesondere metallischer, Kontakt zwischen den Flanschen vermieden. Die beiden Flansche stehen lediglich über nicht-metallische Bauteile, insbesondere das Entkopplungsorgan, miteinander in Kontakt. Die Flansche sind somit voneinander entkoppelt.If the vacuum pump is now put into operation in the assembled state, the decoupling element is compressed further due to the atmospheric pressure. Depending on the design of the fastening element and one of the flanges, a decoupling between this flange and the fastening element that already exists in the assembled state is retained or this decoupling is only achieved through further compression by connecting the fastening element to only one of the flanges, in particular the second flange is. In particular, a conductive, in particular metallic, contact between the flanges is avoided in this way. The two flanges are only in contact with one another via non-metallic components, in particular the decoupling element. The flanges are thus decoupled from one another.

Mittels der Treibfläche spannt das Befestigungselement das ihm zugeordnete Entkopplungselement bereits im Montagezustand vor. Wird nun ein Vakuum erzeugt, so bewegt sich einer der Flansche relativ zum Befestigungselement von der Treibfläche weg. Aufgrund des Atmosphärendrucks kann sich hierbei die Vorspannung des Entkopplungselements reduzieren.
Insbesondere kann das Befestigungselement aufgrund des Entkopplungselements sowohl im nicht evakuierten Montagezustand als auch im evakuierten Betriebszustand mechanisch und/oder elektrisch von dem betreffenden Flansch entkoppelt sein.By means of the driving surface, the fastening element pretensions the decoupling element assigned to it in the assembled state. If a vacuum is now generated, one of the flanges moves away from the drive surface relative to the fastening element. Because of the atmospheric pressure, the pretensioning of the decoupling element can be reduced.
In particular, due to the decoupling element, the fastening element can be mechanically and / or electrically decoupled from the flange in question both in the non-evacuated assembly state and in the evacuated operating state.

Im evakuierten Betriebszustand stehen die beiden Flansche insbesondere lediglich durch das Entkopplungsorgan und das Entkopplungselement, welche vorzugsweise als Elastomere ausgebildet sind, miteinander in Kontakt.In the evacuated operating state, the two flanges are in contact with one another, in particular only through the decoupling element and the decoupling element, which are preferably designed as elastomers.

Erfindungsgemäß ist es ferner vorgesehen, dass im evakuierten Betriebszustand die beiden Flansche im Bereich des Befestigungselementes mittelbar miteinander in Kontakt stehen, und zwar über das Befestigungselement und zumindest ein zwischen dem Befestigungselement und einem der Flansche angeordneten Entkopplungselement.According to the invention, it is also provided that in the evacuated operating state the two flanges are in indirect contact with one another in the area of the fastening element, via the fastening element and at least one decoupling element arranged between the fastening element and one of the flanges.

Durch den erfindungsgemäßen Vakuumpumpen-Dämpfer wird auf einfache und kosteneffiziente Weise eine vakuumdichte Verbindung zwischen einer Vakuumpumpe und einem Rezipienten ermöglicht. Ferner wird auch eine Entkopplung zwischen der Vakuumpumpe und dem Rezipienten auf einfache Weise ermöglicht. Besonders vorteilhaft ist, dass keine komplexen und vielteiligen Strukturen zwischen Vakuumpumpe und Rezipient erforderlich sind. Es hat sich überraschend gezeigt, dass es genügt, ein Entkopplungsorgan zwischen den einander zugewandten, insbesondere im Wesentlichen ebenen Flanschseiten sowie eine geeignete, ebenfalls relativ einfach aufgebaute Befestigung vorzusehen, die entweder bereits im Montagezustand eine schwingungstechnische und/oder elektrische Entkopplung zwischen den Flanschen sicherstellt oder bei der sich eine solche Entkopplung beim Übergang in den evakuierten Betriebszustand automatisch einstellt. Damit ist die Herstellung des erfindungsgemäßen Dämpfers sehr einfach und kostengünstig und kann die vakuumdichte Verbindung zwischen Vakuumpumpe und Rezipient auf sehr einfache und zuverlässige Weise realisiert werden.The vacuum pump damper according to the invention enables a vacuum-tight connection between a vacuum pump and a recipient in a simple and cost-effective manner. Furthermore, a decoupling between the vacuum pump and the recipient is made possible in a simple manner. It is particularly advantageous that no complex and multi-part structures are required between the vacuum pump and the recipient. Surprisingly, it has been shown that it is sufficient to provide a decoupling element between the facing, in particular essentially flat, flange sides as well as a suitable, likewise relatively simply constructed attachment that either ensures vibration and / or electrical decoupling between the flanges in the assembled state or in which such a decoupling occurs automatically on transition to the evacuated operating state. The production of the damper according to the invention is therefore very simple and inexpensive and the vacuum-tight connection between the vacuum pump and the recipient can be implemented in a very simple and reliable manner.

Weiterbildungen der Erfindung sind auch den abhängigen Ansprüchen zu entnehmen.Further developments of the invention can also be found in the dependent claims.

Gemäß einer Ausführungsform ist die Flanschseite des ersten und/oder des zweiten Flansches ausschließlich durch eine zumindest im Wesentlichen ebene Ringfläche gebildet. Die Flanschseite umfasst somit insbesondere keine Kanten oder Stufen. Die einander zugewandten Flanschseiten des ersten und des zweiten Flansches sind somit vorzugsweise parallel zueinander orientiert und bilden insbesondere ebene Flächen. Die Herstellung der Flansche ist hierdurch besonders einfach und kostengünstig möglich.According to one embodiment, the flange side of the first and / or the second flange is formed exclusively by an at least substantially flat annular surface. The flange side thus in particular does not include any edges or steps. The mutually facing flange sides of the first and the second flange are thus preferably oriented parallel to each other and in particular form flat surfaces. The production of the flanges is particularly simple and inexpensive as a result.

An zumindest einer Flanschseite können grundsätzliche beliebig ausgestaltete Mittel vorgesehen sein, die verhindern, dass sich das insbesondere als ringförmiges Element mit prinzipiell beliebigem Querschnitt ausgebildete Entkopplungsorgan seitlich, insbesondere radial nach innen, relativ zu der Flanschseite bewegt. Derartige Mittel können z.B. durch eine entsprechende Gestaltung der Flanschseite ohne zusätzliche separate Bauteile geschaffen werden. Beispielsweise kann die Flanschseite eine Erhebung oder Stufe umfassen, die zur haltenden Anlage des Entkopplungsorgans dient.At least one flange side can be provided with any means that prevent the decoupling member, which is designed as an annular element with basically any cross-section, from moving laterally, in particular radially inward, relative to the flange side. Such means can e.g. can be created by a corresponding design of the flange side without additional separate components. For example, the flange side can include an elevation or step which is used to hold the decoupling element.

Nach einer Ausführungsform umfasst nur genau eine der Flanschseiten derartige Mittel, z.B. in Form wenigstens einer Nut oder Stufe, welche zur Aufnahme und/oder seitlichen Anlage des Entkopplungsorgans ausgebildet ist. Vorzugsweise ist die andere der Flanschseiten zumindest im Bereich des Entkopplungsorgans eben ausgebildet. Die Herstellung der Flanschseiten und somit der Flansche wird auf diese Weise wesentlich vereinfacht, da nur ein Minimum an Strukturen auf den Flanschseiten vorgesehen werden muss.According to one embodiment only exactly one of the flange sides comprises such means, e.g. in the form of at least one groove or step, which is designed for receiving and / or lateral contact of the decoupling element. The other of the flange sides is preferably flat at least in the area of the decoupling element. The manufacture of the flange sides and thus the flanges is considerably simplified in this way, since only a minimum of structures need to be provided on the flange sides.

Die Nut kann insbesondere rund oder kantig ausgebildet sein, beispielsweise als Rechteckdichtnut. Alternativ kann der Querschnitt der Nut zumindest teilweise von Kreissegmenten gebildet sein. So kann auch bei einem vergleichsweise geringen Anpressdruck eine große Dichtlänge erreicht werden.The groove can in particular be designed round or angular, for example as a rectangular sealing groove. Alternatively, the cross section of the groove can be at least partially formed by segments of a circle. In this way, a large sealing length can be achieved even with a comparatively low contact pressure.

Insbesondere kann durch die Nut eine zentrierende Wirkung erzielt werden, wodurch die Positionierung der Flansche bzw. der mit den Flanschen verbundenen Komponenten, d.h. der Vakuumpumpe und des Rezipienten, relativ zueinander vereinfacht wird. So kann die Nut das Entkopplungsorgan in einer gewünschten Position halten, wodurch insbesondere verhindert werden kann, dass das Befestigungselement im Betriebszustand einen metallischen Kontakt zum betreffenden Flansch herstellt.In particular, a centering effect can be achieved by the groove, whereby the positioning of the flanges or the components connected to the flanges, i.e. the vacuum pump and the recipient, is simplified relative to one another. Thus, the groove can hold the decoupling element in a desired position, which in particular can prevent the fastening element from making metallic contact with the flange in question in the operating state.

Insbesondere kann das Entkopplungsorgan an die Ausgestaltungsform der Nut angepasst sein. So kann auch das Entkopplungsorgan beispielsweise einen runden oder rechteckigen Querschnitt aufweisen.In particular, the decoupling element can be adapted to the design of the groove. For example, the decoupling element can also have a round or rectangular cross section.

Gemäß einer weiteren Ausführungsform durchdringt das Befestigungselement die Flanschseite des ersten und/oder des zweiten Flansches.According to a further embodiment, the fastening element penetrates the flange side of the first and / or the second flange.

Sowohl der Querschnitt der Nut als auch der Querschnitt des Entkopplungsorgans sind grundsätzlich beliebig.Both the cross-section of the groove and the cross-section of the decoupling element are basically any.

Nach einer weiteren Ausführungsform ist das Entkopplungsorgan als Dämpfer für mechanische Schwingungen und/oder als elektrischer Isolator ausgebildet. Im evakuierten Betriebszustand ergeben sich somit keinerlei Schwingungsübertragungen. Da im evakuierten Betriebszustand die Vakuumpumpe und der Rezipient lediglich über nicht-metallische Bauteile, insbesondere über das Entkopplungsorgan, miteinander verbunden sind, sind die Vakuumpumpe und der Rezipient voneinander mechanisch sowie elektrisch entkoppelt. Das Schwingungsniveau kann hierbei um einen Faktor von etwa 10 im Vergleich zu einer Anordnung ohne einen Vakuumpumpen-Dämpfer verbessert werden. Da die Geräuschentwicklung sowie die Resonanzanregungen deutlich reduziert werden, können Vakuumpumpen mit einem erfindungsgemäßen Vakuumpumpen-Dämpfer insbesondere auch bei besonders schwingungskritischen Anwendungen wie beispielsweise Massenspektrometersystemen betrieben werden, für die Schwingungen mit Frequenzen im Bereich von 500 bis 2.000 Hz besonders kritisch sind.According to a further embodiment, the decoupling element is designed as a damper for mechanical vibrations and / or as an electrical insulator. In the evacuated operating state, there is therefore no transmission of vibrations. Since the vacuum pump and the recipient are only connected to one another via non-metallic components, in particular via the decoupling element, in the evacuated operating state, the vacuum pump and the recipient are mechanically and electrically decoupled from one another. The vibration level can be improved by a factor of about 10 compared to an arrangement without a vacuum pump damper. Since the development of noise and the resonance excitations are significantly reduced, vacuum pumps with a vacuum pump damper according to the invention can also be used, particularly in applications that are particularly critical in terms of vibration, such as mass spectrometer systems are operated, for which vibrations with frequencies in the range from 500 to 2,000 Hz are particularly critical.

Gemäß einer weiteren Ausführungsform umfasst das Entkopplungsorgan zumindest ein Elastomer. Bei dem elastischen Material kann es sich beispielsweise um ein Gummimaterial handeln. Vorzugsweise ist das Entkopplungsorgan als Formelement oder als O-Ring ausgebildet. Hierbei kann es sich insbesondere um einen handelsüblichen O-Ring handeln, wodurch Kosten gespart werden können.According to a further embodiment, the decoupling element comprises at least one elastomer. The elastic material can be a rubber material, for example. The decoupling element is preferably designed as a shaped element or as an O-ring. This can in particular be a commercially available O-ring, which saves costs.

Das Entkopplungsorgan kann beispielsweise in eine Nut der Flanschseite des ersten und/oder des zweiten Flansches eingelegt werden. Auch ist es möglich, dass das Entkopplungsorgan fest mit der Flanschseite des ersten und/oder des zweiten Flansches verbunden ist.The decoupling element can for example be inserted into a groove on the flange side of the first and / or the second flange. It is also possible for the decoupling element to be firmly connected to the flange side of the first and / or the second flange.

Es können auch mehrere Entkopplungsorgane vorgesehen sein, welche beispielsweise konzentrisch zueinander angeordnet sind.A plurality of decoupling members can also be provided, which are arranged concentrically to one another, for example.

Wird der Vakuumpumpen-Dämpfer beispielsweise bei so genannten Splitflow-Pumpen eingesetzt, so können mehrere Entkopplungsorgane zwischen den Flanschseiten verpresst sein.If the vacuum pump damper is used, for example, in what are known as split-flow pumps, then several decoupling elements can be pressed between the flange sides.

Nach einer weiteren Ausführungsform ist im Montagezustand das Befestigungselement fest mit einem, insbesondere dem zweiten, Flansch verbunden und der andere, insbesondere erste, Flansch ist relativ zu dem Befestigungselement in einer Verbindungsrichtung beweglich. Im Montagezustand kann das Befestigungselement, insbesondere ein Kopfstück des Befestigungselements, somit beispielsweise als Anschlag für einen, insbesondere den ersten, Flansch dienen. Wird nun die Vakuumpumpe in Betrieb genommen, so bewegt sich dieser Flansch aufgrund des Umgebungsdrucks in eine Verbindungsrichtung relativ zum Befestigungselement. Je nach konkreter Ausgestaltung kann das Befestigungselement daraufhin von diesem Flansch entkoppeln oder weiterhin mittelbar mit dem Flansch in Kontakt stehen, ohne dass es zu einer Trennung zwischen diesem Flansch und dem Befestigungselement kommt, wobei aber die mechanische Schwingungsentkoppelung bzw. Vibrationsdämpfung und die elektrische Entkoppelung in jedem Fall gewährleistet sind.According to a further embodiment, in the assembled state the fastening element is firmly connected to one, in particular the second, flange and the other, in particular first, flange is movable relative to the fastening element in a connection direction. In the assembled state, the fastening element, in particular a head piece of the fastening element, can thus serve, for example, as a stop for one, in particular the first, flange. If the vacuum pump is now put into operation, this flange moves in a connection direction relative to the fastening element due to the ambient pressure. Depending on the specific configuration, the fastening element can then decouple from this flange or continue to be in indirect contact with the flange without a separation between this flange and the fastening element, but the mechanical vibration decoupling or vibration damping and the electrical decoupling are guaranteed in any case.

Der Vakuumpumpen-Dämpfer kann insbesondere ein Distanzelement, insbesondere eine Distanzhülse, umfassen. Durch das Distanzelement kann der minimale Abstand zwischen dem ersten und dem zweiten Flansch festgelegt werden.The vacuum pump damper can in particular comprise a spacer element, in particular a spacer sleeve. The minimum distance between the first and the second flange can be determined by the spacer element.

Vorzugsweise kann die Distanzhülse unterhalb eines Kopfstücks des Befestigungselements, insbesondere eines Schraubenkopfes, angeordnet sein. Alternativ kann auch eine Passschraube als Distanzelement eingesetzt werden.The spacer sleeve can preferably be arranged below a head piece of the fastening element, in particular a screw head. Alternatively, a fitting screw can also be used as a spacer element.

Aufgrund des Distanzelements kann das Befestigungselement nur bis zu einer bestimmten Position in eine Befestigungsrichtung bewegt werden. Auf diese Weise kann auch bei mehreren Befestigungselementen stets eine gleichmäßige Vorspannung erreicht werden. Insbesondere ist der durch die Befestigungselemente verursachte Druck auf das Entkopplungsorgan stets derselbe.Because of the spacer element, the fastening element can only be moved up to a certain position in a fastening direction. In this way, even when there are several fastening elements, a uniform pretension can always be achieved. In particular, the pressure on the decoupling element caused by the fastening elements is always the same.

Das Befestigungselement kann durch den Einsatz eines derartigen Distanzelements insbesondere losdrehsicher vorgespannt werden. Zusätzliche Sicherungen für das Befestigungselement können somit entfallen.The fastening element can, in particular, be pretensioned in a manner that prevents it from turning loose through the use of such a spacer element. Additional safeguards for the fastening element can thus be omitted.

Auch kann durch den vordefinierten Abstand das Verhalten der Schwingungsentkopplung beeinflusst werden.The behavior of the vibration decoupling can also be influenced by the predefined distance.

Nach einer weiteren Ausführungsform ist das am Befestigungselement vorgesehene Entkopplungselement ein Elastomer, das von einer Treibfläche des Befestigungselements beaufschlagt ist. Insbesondere kann es sich bei dem Entkopplungselement um einen O-Ring oder ein Formelement handeln. Die Treibfläche ist hierbei insbesondere eine Unterseite eines Kopfstücks des Befestigungselements.According to a further embodiment, the decoupling element provided on the fastening element is an elastomer which is acted upon by a drive surface of the fastening element. In particular, it can be with the decoupling element be an O-ring or a molded element. The drive surface is in particular an underside of a head piece of the fastening element.

Alternativ können auch nicht-metallische, insbesondere gummierte, Schrauben oder Formstücke als Befestigungselemente verwendet werden. Ein separates Entkopplungselement für das Befestigungselement ist dann nicht erforderlich.Alternatively, non-metallic, in particular rubberized, screws or shaped pieces can also be used as fastening elements. A separate decoupling element for the fastening element is then not required.

Gemäß einer Weiterbildung ist das Entkopplungselement, insbesondere mit Hilfe einer Aussparung, einer Unterlegscheibe und/oder eines Formteils, in einer Position unterhalb eines Kopfstücks des Befestigungselements, insbesondere eines Schraubenkopfes, gehalten. Auch kann ein Schraubenkopf beispielsweise einen Bund aufweisen. Das Entkopplungselement ist somit gewissermaßen gekammert. Auf diese Weise wird sichergestellt, dass das Entkopplungselement stets in einer vorgesehenen Position verbleibt, auch wenn beispielsweise Druck auf das Entkopplungselement durch das Befestigungselement ausgeübt wird.According to a development, the decoupling element is held in a position below a head piece of the fastening element, in particular a screw head, with the aid of a recess, a washer and / or a molded part. A screw head can also have a collar, for example. The decoupling element is thus to a certain extent chambered. In this way it is ensured that the decoupling element always remains in an intended position, even if, for example, pressure is exerted on the decoupling element by the fastening element.

Nach einer weiteren Ausführungsform umfasst das Befestigungselement, insbesondere unterhalb eines Kopfstücks, vorzugsweise eines Schraubenkopfes, eine nicht-ebene, insbesondere konische, Treibfläche. Ein Flansch kann hierbei eine Aussparung oder Senkung für die Treibfläche aufweisen. Insbesondere kann ein Abschnitt des Flansches, welcher mit der Treibfläche zusammenwirkt, eine nicht-ebene, insbesondere konische, Konter-, Gegen- oder Komplementärfläche aufweisen. Die Neigungswinkel dieser Flächen können sich hierbei insbesondere entsprechen. Wird nun der betreffende Flansch nach Inbetriebnahme der Vakuumpumpe relativ zum Befestigungselement in eine Verbindungsrichtung bewegt, so erfolgt eine Entkopplung dieses Flansches von dem Befestigungselement. Eine Entkopplung erfolgt also erst im Betriebszustand durch die Aufeinanderzubewegung der beiden Flansche. Ein Entkopplungselement für das Befestigungselement ist hierbei nicht erforderlich, wenngleich ein solches zusätzlich eingesetzt werden kann.According to a further embodiment, the fastening element, in particular below a head piece, preferably a screw head, comprises a non-planar, in particular conical, driving surface. A flange can have a recess or depression for the drive surface. In particular, a section of the flange which interacts with the drive surface can have a non-planar, in particular conical, counter, counter or complementary surface. The angles of inclination of these surfaces can in particular correspond here. If the flange in question is now moved in a connection direction relative to the fastening element after the vacuum pump has been started up, this flange is decoupled from the fastening element. A decoupling therefore only takes place in the operating state by the two flanges moving towards one another. A decoupling element for the fastening element is not required here, although such a decoupling element can also be used.

Die Erfindung betrifft zudem eine Vakuumpumpe, welche mit einem ersten Flansch eines erfindungsgemäßen Vakuumpumpen-Dämpfers verbunden ist.The invention also relates to a vacuum pump which is connected to a first flange of a vacuum pump damper according to the invention.

Die Vakuumpumpe kann mit Hilfe des ersten Flansches mit dem zweiten Flansch verbunden werden. Der zweite Flansch kann hierbei unmittelbar an einem Rezipienten ausgebildet sein oder aber an einem Adapterteil, welches durch einen Standard-Flansch mit dem Rezipienten verbindbar ist.The vacuum pump can be connected to the second flange with the aid of the first flange. The second flange can be formed directly on a recipient or on an adapter part which can be connected to the recipient by a standard flange.

Die Erfindung betrifft ferner ein System mit einer Vakuumpumpe, einem Rezipienten und einem gemäß der Erfindung ausgebildeten Dämpfer.The invention also relates to a system with a vacuum pump, a recipient and a damper designed according to the invention.

Die Erfindung wird im Folgenden beispielhaft unter Bezugnahme auf die Zeichnungen beschrieben. Es zeigen:

Fig. 1
eine Schnittansicht einer ersten Ausführungsform eines erfindungsgemäßen Vakuumpumpen-Dämpfers,
Fig. 2
eine vergrößerte Darstellung des Ausschnitts A gemäß Fig. 1, und
Fig. 3
eine geschnittene Teilansicht einer zweiten Ausführungsform eines erfindungsgemäßen Vakuumpumpen-Dämpfers.
The invention is described below by way of example with reference to the drawings. Show it:
Fig. 1
a sectional view of a first embodiment of a vacuum pump damper according to the invention,
Fig. 2
an enlarged view of section A according to Fig. 1 , and
Fig. 3
a sectional partial view of a second embodiment of a vacuum pump damper according to the invention.

In Fig. 1 ist eine Schnittansicht eines erfindungsgemäßen Vakuumpumpen-Dämpfers dargestellt. Dieser verbindet eine Vakuumpumpe 10 mit einem Rezipienten 12. Bei dem Rezipienten 12 handelt es sich um ein Behältnis, welches evakuiert werden soll. Sowohl die Vakuumpumpe 10 als auch der Rezipient 12 weisen jeweils einen Innenraum 14, 14' sowie eine Wandung 16, 16' auf.In Fig. 1 is a sectional view of a vacuum pump damper according to the invention. This connects a vacuum pump 10 to a recipient 12. The recipient 12 is a container which is to be evacuated. Both the vacuum pump 10 and the recipient 12 each have an interior space 14, 14 'and a wall 16, 16'.

Die Innenräume 14, 14' der Vakuumpumpe 10 und des Rezipienten 12 sind über einen Kanal 18 miteinander verbunden.The interior spaces 14, 14 ′ of the vacuum pump 10 and of the recipient 12 are connected to one another via a channel 18.

An einem oberen Ende der Vakuumpumpe 10 ist ein erster Flansch 20 angeordnet. Der Rezipient 12 weist an seiner Unterseite einen zweiten Flansch 22 auf.A first flange 20 is arranged at an upper end of the vacuum pump 10. The recipient 12 has a second flange 22 on its underside.

Die Flansche 20, 22 umfassen jeweils sowohl einen vorstehenden, auskragenden Bereich als auch die Stirnflächen der Wandungen 16, 16'.The flanges 20, 22 each include both a protruding, cantilevered area and the end faces of the walls 16, 16 '.

Der erste Flansch 20 sowie der zweite Flansch 22 umfassen jeweils eine Flanschseite 24, 24', wobei die Flanschseiten 24, 24' bei bestimmungsgemäßer Relativanordnung einander zugewandt sind. Die Flanschseiten 24, 24' sind eben und parallel zueinander orientiert. Unmittelbar zwischen den Flanschseiten 24, 24' ist ein O-Ring 26 mit rechteckigem Querschnitt vorgesehen, welcher ein Entkopplungsorgan bildet.The first flange 20 and the second flange 22 each include a flange side 24, 24 ', the flange sides 24, 24' facing one another when the relative arrangement is intended. The flange sides 24, 24 'are oriented flat and parallel to one another. Immediately between the flange sides 24, 24 ', an O-ring 26 with a rectangular cross section is provided, which forms a decoupling element.

Der erste Flansch 20 und der zweite Flansch 22 sind mittels mehrerer als Schrauben 28 ausgebildeter Befestigungselemente miteinander verbunden.The first flange 20 and the second flange 22 are connected to one another by means of a plurality of fastening elements designed as screws 28.

Eine vergrößerte Darstellung eines die Schraube 28 umfassenden Abschnitts A gemäß Fig. 1 ist in Fig. 2 dargestellt. Die Schraube 28 weist einen Schraubenkopf 30 sowie einen Schaft 32 auf. Unterhalb des Schraubenkopfes 30 ist eine Unterlegscheibe 33 angeordnet.An enlarged illustration of a section A comprising the screw 28 according to FIG Fig. 1 is in Fig. 2 shown. The screw 28 has a screw head 30 and a shaft 32. A washer 33 is arranged below the screw head 30.

Die Schraube 28 ist mit dem zweiten Flansch 22 verschraubt. Unterhalb des Schraubenkopfes 30 ist eine Distanzhülse 36 vorgesehen, um einen festen Abstand zwischen dem Schraubenkopf 30 und dem zweiten Flansch 22 zu definieren.The screw 28 is screwed to the second flange 22. A spacer sleeve 36 is provided below the screw head 30 in order to define a fixed distance between the screw head 30 and the second flange 22.

Von dem ersten Flansch 20 ist die Schraube 28 mechanisch und elektrisch entkoppelt. Zu diesem Zweck ist unterhalb des Schraubenkopfes 30 bzw. unterhalb der Unterlegscheibe 33 ein weiterer O-Ring 34 vorgesehen, welcher als Entkopplungselement für die Schraube 28 dient. Dieses Entkopplungselement 34 ist in einer Aussparung 35 des ersten Flansches 20 angeordnet und wird mithilfe der Unterlegscheibe 33 in einer gewünschten Position gehalten.The screw 28 is mechanically and electrically decoupled from the first flange 20. For this purpose, a further O-ring 34 is provided below the screw head 30 or below the washer 33, which serves as a decoupling element for the screw 28. This decoupling element 34 is arranged in a recess 35 of the first flange 20 and is held in a desired position with the aid of the washer 33.

Die Unterseite des Schraubenkopfes 30 bzw. der Unterlegscheibe 33 bildet eine Treibfläche 38, welche den O-Ring 34 beaufschlagt.The underside of the screw head 30 or the washer 33 forms a driving surface 38 which acts on the O-ring 34.

Um den O-Ring 26 stets in der gewünschten Position zu halten, weist die Flanschseite 24 des ersten Flansches 20 eine Nut 40 mit rechteckiger Querschnittsform auf. Eine alternative Ausgestaltung zeigt Fig. 3. Hier ist die Flanschseite 24' des zweiten Flansches 22 mit einer Stufe 44 versehen, die den hier wiederum einen rechteckigen Querschnitt aufweisenden O-Ring 26 seitlich hält und verhindert, dass der O-Ring 26 sich radial nach innen bewegt. Die jeweils andere Flanschseite 24' (Fig. 2) bzw. 24 (Fig. 3) ist eben ausgeführt.In order to always keep the O-ring 26 in the desired position, the flange side 24 of the first flange 20 has a groove 40 with a rectangular cross-sectional shape. An alternative embodiment is shown Fig. 3 . Here the flange side 24 'of the second flange 22 is provided with a step 44 which laterally holds the O-ring 26, which in turn has a rectangular cross section, and prevents the O-ring 26 from moving radially inward. The other flange side 24 '( Fig. 2 ) or 24 ( Fig. 3 ) has just been carried out.

Seitliche Relativbewegungen der Flansche 20, 22 senkrecht zu einer Mittelachse 46 werden durch die Schrauben 28 (in Fig. 3 nicht dargestellt) unterbunden. Der O-Ring 26 hat keine derartige Haltefunktion.Lateral relative movements of the flanges 20, 22 perpendicular to a central axis 46 are controlled by the screws 28 (in Fig. 3 not shown) prevented. The O-ring 26 has no such holding function.

In einem nicht evakuierten Montagezustand werden die Schrauben 28 am zweiten Flansch 22 festgeschraubt. Dabei werden die O-Ringe 26, 34 durch den entstehenden Druck vorgespannt. Die Schrauben 28 können angezogen werden, bis die Distanzhülsen 36 wirksam werden. Der durch die Distanzhülsen 36 definierte Minimalabstand zwischen den Flanschen 20, 22 und somit die durch die Distanzhülsen 36 vorgegebene Vorspannung des dichtenden O-Rings 26 sind folglich bereits im Montagezustand erreicht.In a non-evacuated assembly state, the screws 28 are screwed tight to the second flange 22. The O-rings 26, 34 are pretensioned by the resulting pressure. The screws 28 can be tightened until the spacer sleeves 36 take effect. The minimum distance between the flanges 20, 22 defined by the spacer sleeves 36 and thus the pretensioning of the sealing O-ring 26 predetermined by the spacer sleeves 36 are consequently already achieved in the assembled state.

Die O-Ringe 34 sowie die O-Ringe 26 werden somit stets auf ein vorbestimmtes und vordefiniertes Maß eingedrückt bzw. vorgespannt.The O-rings 34 and the O-rings 26 are thus always pressed in or preloaded to a predetermined and predefined amount.

Wird nun die Vakuumpumpe 10 in Betrieb genommen, so bewegt sich der erste Flansch 20 in eine Verbindungsrichtung V in Richtung des zweiten Flansches 22. Die Schraube 28 verbleibt hierbei in der ursprünglichen Position. Durch den Umgebungsdruck wird der O-Ring 26 weiter zusammengedrückt. Der O-Ring 34 kann sich hingegen entspannen. Im evakuierten Betriebszustand sind der erste Flansch 20 und der zweite Flansch 22 folglich lediglich über die O-Ringe 26, 34 miteinander verbunden, stehen hierdurch mittelbar in Kontakt und sind folglich nicht vollständig voneinander separiert.If the vacuum pump 10 is now put into operation, the first flange 20 moves in a connection direction V in the direction of the second flange 22. The screw 28 remains in the original position. The O-ring 26 is further compressed by the ambient pressure. The O-ring 34, however, can relax. In the evacuated operating state, the first flange 20 and the second flange 22 are consequently only connected to one another via the O-rings 26, 34, are thereby indirectly in contact and consequently are not completely separated from one another.

Da keine metallische Verbindung über die Schraube 28 besteht, sind die beiden Flansche 20, 22 elektrisch voneinander entkoppelt. Ferner ist die Übertragung von Schwingungen zumindest weitgehend unterbunden.Since there is no metallic connection via the screw 28, the two flanges 20, 22 are electrically decoupled from one another. Furthermore, the transmission of vibrations is at least largely prevented.

Erfindungsgemäß wird somit auf denkbar einfache, kostengünstige und zuverlässige Weise eine mechanische und/oder elektrische Entkopplung zwischen einer Vakuumpumpe und einem Rezipienten ermöglicht.According to the invention, a mechanical and / or electrical decoupling between a vacuum pump and a recipient is thus made possible in a very simple, inexpensive and reliable manner.

BezugszeichenlisteList of reference symbols

1010
VakuumpumpeVacuum pump
1212
Rezipientrecipient
14, 14'14, 14 '
Innenrauminner space
16, 16'16, 16 '
WandungWall
1818th
Kanalchannel
2020th
erster Flanschfirst flange
2222nd
zweiter Flanschsecond flange
24,24'24.24 '
FlanschseiteFlange side
2626th
O-Ring, EntkopplungsorganO-ring, decoupling element
2828
Schraube, BefestigungselementScrew, fastener
3030th
SchraubenkopfScrew head
3232
Schaftshaft
3333
UnterlegscheibeWasher
3434
O-Ring, EntkopplungselementO-ring, decoupling element
3535
AussparungRecess
3636
DistanzhülseSpacer sleeve
3838
TreibflächeDriving surface
4040
NutGroove
4242
GegenflächeCounter surface
4444
Stufestep
4646
MittelachseCentral axis
VV
VerbindungsrichtungConnection direction

Claims (12)

  1. A vacuum pump damper for the vacuum-tight connection of a vacuum pump (10) to a recipient (12), wherein a first flange (20) is connected or connectable to the vacuum pump (10) and a second flange (22) is connected or connectable to the recipient (12), said vacuum pump damper comprising
    at least one decoupling member (26) which is arranged directly between mutually facing flange sides (24, 24') of the first and second flanges (20, 22); and
    at least one fastening element (28), in particular a screw, by which the first and second flanges (20, 22) are connected or connectable to one another,
    wherein the fastening element (28) and the flanges (20, 22) are configured to preload the decoupling member (26) in a vacuum-tight manner in a non-evacuated assembly state such that the two flanges (20, 22) are mechanically and/or electrically decoupled from one another in an evacuated operating state;
    wherein a decoupling element (34) is provided at the fastening element (28), is arranged between the fastening element (28) and one of the flanges (20, 22) and is acted on by a driving surface (38) of the fastening element (28); and
    wherein the two flanges (20, 22) are indirectly in contact with one another via the fastening element (28), and at least via the decoupling element (34), in the region of the fastening element (28) in the evacuated operating state,
    characterized in that
    the decoupling element (34) is already preloaded by the fastening element (28) in the non-evacuated assembly state, with the preload of the decoupling element (34) in the evacuated operating state being reduced with respect to the preload in the non-evacuated assembly state.
  2. A vacuum pump damper in accordance with claim 1,
    characterized in that
    the flange side (24, 24') of the first and/or second flange (20, 22) is formed solely by an at least substantially planar annular surface.
  3. A vacuum pump damper in accordance with claim 1 or claim 2,
    characterized in that
    only exactly one of the flange sides (24, 24') comprises a groove (40), in particular a round or an angular groove (40), or a step (44) which is configured to receive and/or to laterally contact the decoupling member (26), with preferably the other one of the flange sides (24', 24) being planar at least in the region of the decoupling member (26).
  4. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that
    the fastening element (28) passes through the flange side (24, 24') of the first and/or second flange (20, 22).
  5. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that
    the decoupling member (26) is configured as a damper for mechanical vibrations and/or as an electrical insulator.
  6. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that
    the decoupling member (26) comprises at least one elastomer which is in particular configured as an O-ring.
  7. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that,
    in the assembly state, the fastening element (28) is fixedly connected to one flange (22) and the other flange (20) is movable relative to the fastening element (28) in a connection direction (V).
  8. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that
    the decoupling element (34) is an elastomer configured as an O-ring.
  9. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that
    the decoupling element (34) is held in a position below a head piece of the fastening element (28), in particular a screw head (30), in particular by means of a recess (35), a washer (33) and/or a molded part.
  10. A vacuum pump damper in accordance with any one of the preceding claims,
    characterized in that
    the fastening element (28) comprises a non-planar driving surface (38), in particular a conical driving surface (38), in particular below a head piece, preferably a screw head (30).
  11. A vacuum pump (10) which is connected to a first flange (20) of a vacuum pump damper in accordance with any one of the preceding claims.
  12. A system comprising a vacuum pump (10); a recipient (12); and a damper in accordance with any one of the claims 1 to 10.
EP15157292.2A 2014-03-14 2015-03-03 Vacuum pump damper Active EP2918843B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014103510.0A DE102014103510B4 (en) 2014-03-14 2014-03-14 Vacuum pump damper

Publications (2)

Publication Number Publication Date
EP2918843A1 EP2918843A1 (en) 2015-09-16
EP2918843B1 true EP2918843B1 (en) 2020-10-28

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Country Link
EP (1) EP2918843B1 (en)
JP (1) JP6133919B2 (en)
DE (1) DE102014103510B4 (en)

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
EP3171030B1 (en) * 2015-11-19 2020-01-08 Pfeiffer Vacuum Gmbh Vacuum pump
GB2552324B (en) 2016-07-18 2019-06-12 Edwards Ltd Vibration damping connector systems
JP7009274B2 (en) * 2018-03-20 2022-01-25 エドワーズ株式会社 Vacuum pumps and dampers for vacuum pumps
CN113700966B (en) * 2021-08-31 2022-11-08 厦门振为科技有限公司 Vibration reduction connecting device for flange based on particle damping

Citations (1)

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Publication number Priority date Publication date Assignee Title
US20100178183A1 (en) * 2007-06-20 2010-07-15 Knf Flodos Ag Pump mounting

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JPS59133856U (en) * 1983-02-28 1984-09-07 日産ディーゼル工業株式会社 Vibration isolation type mounting structure of mounting member
US5516122A (en) * 1993-12-10 1996-05-14 Caffee; Barry K. Ultra high vacuum elastomer seal
JP4250353B2 (en) * 2001-06-22 2009-04-08 エドワーズ株式会社 Vacuum pump
DE102004012677A1 (en) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh vacuum system
DE102004044775A1 (en) * 2004-09-16 2006-04-06 Leybold Vacuum Gmbh Vibration damper for gas-tight connection of vacuum pump with vacuum device, has damper device with elastic damping ring between sealing ring of vacuum device and sealing ring of vacuum pump, where sealing sleeve is sealed to both rings
WO2006068014A1 (en) * 2004-12-20 2006-06-29 Boc Edwards Japan Limited Structure for connecting end parts and vacuum system using the structure
JP4322237B2 (en) * 2005-08-31 2009-08-26 勲 齋藤 Packaging method for nutritionally adjusted foods with solid thickness
JP4925781B2 (en) * 2006-10-05 2012-05-09 エドワーズ株式会社 Vacuum pump and its vibration absorption damper
DE102009039120A1 (en) * 2009-08-28 2011-03-03 Pfeiffer Vacuum Gmbh vacuum pump
IT1399567B1 (en) * 2010-04-16 2013-04-19 Varian Spa VIBRATION DAMPER FOR VACUUM PUMPS

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Publication number Priority date Publication date Assignee Title
US20100178183A1 (en) * 2007-06-20 2010-07-15 Knf Flodos Ag Pump mounting

Also Published As

Publication number Publication date
DE102014103510A1 (en) 2015-09-17
JP2015175372A (en) 2015-10-05
JP6133919B2 (en) 2017-05-24
DE102014103510B4 (en) 2016-02-25
EP2918843A1 (en) 2015-09-16

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