EP2918843A1 - Amortisseur pour pompes à vide - Google Patents

Amortisseur pour pompes à vide Download PDF

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Publication number
EP2918843A1
EP2918843A1 EP15157292.2A EP15157292A EP2918843A1 EP 2918843 A1 EP2918843 A1 EP 2918843A1 EP 15157292 A EP15157292 A EP 15157292A EP 2918843 A1 EP2918843 A1 EP 2918843A1
Authority
EP
European Patent Office
Prior art keywords
flange
vacuum pump
fastening element
decoupling
damper according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15157292.2A
Other languages
German (de)
English (en)
Other versions
EP2918843B1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=52596410&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2918843(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2918843A1 publication Critical patent/EP2918843A1/fr
Application granted granted Critical
Publication of EP2918843B1 publication Critical patent/EP2918843B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the present invention relates to a vacuum pump damper for the vacuum-tight connection of a vacuum pump with a recipient. Furthermore, the invention relates to a vacuum pump and a system of a vacuum pump, a recipient and a damper.
  • Vacuum pumps with corresponding dampers are known in principle.
  • DE 10 2004 044 775 A1 relates to a vacuum pump vibration damper with an elastic damping ring, which is arranged axially between a sealing ring of a vacuum pump and a sealing ring of a vacuum device.
  • the vibration damper also includes a non-elastic sealing sleeve radially inwardly of the sealing rings.
  • dampers are complex. The production is thus associated with high costs. Also, these dampers are relatively prone to failure and maintenance.
  • a vacuum pump damper comprises a first and a second flange, wherein the first flange with the vacuum pump and the second flange with the recipient, in particular directly or indirectly connected or connectable.
  • the vacuum pump may be, for example, a turbo pump.
  • flange includes not only protrusions, but also, for example, whatever shaped end portions of the vacuum pump or the recipient.
  • the first flange can in particular form a part of the vacuum pump.
  • the second flange may form part of the recipient.
  • the flanges can in particular be formed integrally with the vacuum pump or the recipient.
  • the vacuum pump damper is designed as an adapter.
  • the vacuum pump damper may for example form a vibration damping and / or electrically insulating intermediate piece between a vacuum pump and a recipient.
  • the vacuum pump damper in particular on opposite sides each having a conventional standard flange, which can be connected in each case with a conventional standard flange of a vacuum pump and / or a recipient.
  • the standard flanges of the vacuum pump damper and the vacuum pump or the recipient for example, can be screwed together. In this way, conventional vacuum pumps or recipient be retrofitted with the vacuum pump damper according to the invention.
  • Such an adapter may in particular be designed in several parts, wherein a first adapter part may have the first flange and a standard flange for connection to the vacuum pump.
  • the second adapter part may have the second flange and a standard flange for connection to the recipient.
  • the first flange is fixedly connected to the vacuum pump, while the second flange is connectable only indirectly, in particular via a standard flange, with the recipient.
  • the second flange can also be fixedly connected to the recipient, while the first flange can only be connected indirectly, in particular via a standard flange, to the vacuum pump.
  • the vacuum pump damper comprises at least one decoupling member, which is arranged directly between mutually facing flange sides of the first and the second flange.
  • the flanges are thus in particular designed such that without the decoupling member, the two flange sides would lie flat against one another.
  • the flange sides are formed at the intended relative arrangement at least substantially planar and / or oriented parallel to each other.
  • the vacuum pump damper according to the invention further comprises at least one fastening element, with which the first and the second flange are connected or connectable to one another.
  • a plurality, in particular at least four, fastening elements are provided, which are preferably distributed uniformly around the circumference of the flanges.
  • the fastening element ensure the positional fixing between the vacuum pump and the recipient, i. Relative lateral movements can reliably prevent.
  • the flange sides can be made very simple, since lateral relative movements do not have to be prevented by the decoupling element.
  • the fastening element is in particular designed so stable that it can absorb the moments occurring in the event of a crash.
  • a fastener for example, a screw, a bolt or the like can be used.
  • the fastening element and the flanges are designed to pre-stress the decoupling member in a vacuum-tight manner in a non-evacuated mounting state such that the two flanges are mechanically and / or electrically decoupled from one another in an evacuated operating state.
  • no vacuum is contained in the vacuum pump and / or in the recipient.
  • the pressure in this case corresponds in particular to the atmospheric pressure.
  • the vacuum pump and the recipient by the fastener are already connected to each other, in such a way that the decoupling member is acted upon by the two flanges and thus deformed between the two flange sides and thus biased.
  • the vacuum pump and the recipient are thus already at least substantially vacuum-tightly connected to each other already in the assembled state.
  • the decoupling device is further compressed due to the atmospheric pressure.
  • a decoupling between this flange and the fastening element which has already been achieved in the assembled state remains or this decoupling is achieved by the further compression only by connecting the fastening element only to one of the flanges, in particular the second flange is.
  • a conductive, in particular metallic, contact between the flanges is avoided in this way.
  • the two flanges are in contact only via non-metallic components, in particular the decoupling member. The flanges are thus decoupled from each other.
  • the vacuum pump damper according to the invention enables a vacuum-tight connection between a vacuum pump and a recipient in a simple and cost-efficient manner. Furthermore, a decoupling between the vacuum pump and the recipient is made possible in a simple manner. It is particularly advantageous that no complex and multiple-part structures between the vacuum pump and the recipient are required. It has surprisingly been found that it is sufficient to provide a decoupling member between the mutually facing, in particular substantially planar flange sides and a suitable, also relatively simple structure fastening, which ensures either already in the assembled state a vibration-technical and / or electrical decoupling between the flanges or in which such a decoupling automatically sets in the transition to the evacuated operating state.
  • the flange side of the first and / or the second flange is formed exclusively by an at least substantially flat annular surface.
  • the flange side thus comprises in particular no edges or steps.
  • the mutually facing flange sides of the first and second flange are thus preferably oriented parallel to one another and in particular form flat surfaces. The production of the flanges is thereby particularly simple and inexpensive possible.
  • the decoupling element which is designed in particular as an annular element of basically any cross-section, from moving laterally, in particular radially inward, relative to the flange side.
  • Such agents may e.g. be created by an appropriate design of the flange without additional separate components.
  • the flange side may include a survey or stage, which serves to hold the decoupling device holding.
  • only exactly one of the flange sides comprises such means, for example in the form of at least one groove or step, which is designed for receiving and / or lateral abutment of the decoupling member.
  • the other of the flange sides is planar, at least in the region of the decoupling element.
  • the groove may be formed in particular round or edged, for example as Georgiaeckdichtnut.
  • the cross-section of the groove may be at least partially formed by circle segments.
  • a centering effect can be achieved by the groove, whereby the positioning of the flanges or components connected to the flanges, i. the vacuum pump and the recipient, is simplified relative to each other.
  • the groove can hold the decoupling member in a desired position, which in particular can be prevented that the fastener in the operating state makes a metallic contact with the respective flange.
  • the decoupling element can be adapted to the embodiment of the groove.
  • the decoupling member may for example have a round or rectangular cross-section.
  • the fastening element penetrates the flange side of the first and / or the second flange.
  • Both the cross section of the groove and the cross section of the decoupling member are basically arbitrary.
  • the decoupling member is designed as a damper for mechanical vibrations and / or as an electrical insulator. In the evacuated operating condition, therefore, there are no vibration transmissions. Since, in the evacuated operating state, the vacuum pump and the recipient are connected to one another only via non-metallic components, in particular via the decoupling member, the vacuum pump and the recipient are mechanically and electrically decoupled from one another. The vibration level can this can be improved by a factor of about 10 as compared to an arrangement without a vacuum pump damper.
  • vacuum pumps with a vacuum pump damper according to the invention can also be operated in particular for vibration-critical applications such as mass spectrometer systems for which vibrations with frequencies in the range of 500 to 2,000 Hz are particularly critical.
  • the decoupling member comprises at least one elastomer.
  • the elastic material may be, for example, a rubber material.
  • the decoupling element is designed as a shaped element or as an O-ring. This may in particular be a commercially available O-ring, whereby costs can be saved.
  • the decoupling element can be inserted for example in a groove of the flange side of the first and / or the second flange. It is also possible that the decoupling member is fixedly connected to the flange side of the first and / or the second flange.
  • decoupling members which are arranged for example concentric with each other.
  • vacuum pump damper is used for example in so-called split-flow pumps, then several decoupling elements can be pressed between the flange sides.
  • the fastening element in the assembled state, is firmly connected to one, in particular the second, flange and the other, in particular first, flange is movable relative to the fastening element in a connecting direction.
  • the fastening element in particular, a head piece of the fastening element, thus serving, for example, as a stop for one, in particular the first, flange. If now the vacuum pump is put into operation, so this flange moves due to the ambient pressure in a direction of connection relative to the fastener.
  • the fastener can then decouple from this flange or continue to be indirectly in contact with the flange, without causing a separation between this flange and the fastener, but with the mechanical vibration isolation or vibration damping and electrical decoupling in each Case are guaranteed.
  • the two flanges are indirectly in contact with one another in the region of the fastening element, in particular via the fastening element and at least one decoupling element arranged between the fastening element and one of the flanges.
  • the vacuum pump damper may in particular comprise a spacer element, in particular a spacer sleeve.
  • a spacer element in particular a spacer sleeve.
  • the spacer sleeve can be arranged below a head piece of the fastening element, in particular a screw head.
  • a dowel screw can be used as a spacer element.
  • the fastener can only be moved to a certain position in a mounting direction. In this way, even with multiple fasteners always a uniform bias can be achieved. In particular, the pressure on the decoupling member caused by the fasteners is always the same.
  • the fastener can be biased by the use of such a spacer element in particular against rotation. Additional fuses for the fastener can thus be omitted.
  • the behavior of the vibration decoupling can also be influenced by the predefined distance.
  • a decoupling element preferably an elastomer, is provided on the fastening element, which is acted upon by a driving surface of the fastening element.
  • the fastening element may be an O-ring or a shaped element.
  • the driving surface is in this case in particular a lower side of a head piece of the fastening element.
  • the fastening element pretensions the decoupling element assigned to it already in the assembled state. If a vacuum is now generated, one of the flanges moves away from the driving surface relative to the fastening element. Due to the atmospheric pressure in this case can reduce the bias of the decoupling element.
  • non-metallic, in particular rubberized, screws or fittings can be used as fasteners.
  • a separate decoupling element for the fastener is then not required.
  • the fastening element can be decoupled mechanically and / or electrically from the respective flange, both in the non-evacuated mounting state and in the evacuated operating state.
  • the two flanges are in particular only by the decoupling element and the decoupling element, which are preferably designed as elastomers, in contact.
  • the decoupling element in particular with the aid of a recess, a washer and / or a molded part, is held in a position below a head piece of the fastening element, in particular a screw head.
  • a screw head for example, have a collar.
  • the decoupling element is thus chambered to a certain extent. In this way, it is ensured that the decoupling element always remains in a predetermined position, even if, for example, pressure is exerted on the decoupling element by the fastening element.
  • the fastening element in particular below a head piece, preferably a screw head, comprises a non-planar, in particular conical, driving surface.
  • a flange may in this case have a recess or countersink for the driving surface.
  • a portion of the flange, which interacts with the driving surface have a non-planar, in particular conical, counter, counter or complementary surface. The inclination angle of these surfaces may in this case correspond in particular.
  • the invention also relates to a vacuum pump, which is connected to a first flange of a vacuum pump damper according to the invention.
  • the vacuum pump can be connected to the second flange by means of the first flange.
  • the second flange may in this case be formed directly on a recipient or on an adapter part which can be connected to the recipient by means of a standard flange.
  • the invention further relates to a system with a vacuum pump, a recipient and a damper formed according to the invention.
  • Fig. 1 is a sectional view of a vacuum pump damper according to the invention shown. This connects a vacuum pump 10 with a recipient 12.
  • the recipient 12 is a container which is to be evacuated. Both the vacuum pump 10 and the recipient 12 each have an inner space 14, 14 'and a wall 16, 16'.
  • the interior spaces 14, 14 'of the vacuum pump 10 and the recipient 12 are connected to one another via a channel 18.
  • a first flange 20 is disposed at a top end of the vacuum pump 10.
  • the recipient 12 has on its underside a second flange 22.
  • the flanges 20, 22 each comprise both a projecting, projecting region and the end faces of the walls 16, 16 '.
  • the first flange 20 and the second flange 22 each include a flange 24, 24 ', wherein the flange sides 24, 24' are facing each other in accordance with the relative arrangement.
  • the flange sides 24, 24 ' are flat and oriented parallel to each other.
  • an O-ring 26 is provided with a rectangular cross section, which forms a decoupling element.
  • the first flange 20 and the second flange 22 are connected to each other by means of a plurality of fasteners 28 designed as screws.
  • FIG. 2 An enlarged view of a screw 28 comprising section A according to Fig. 1 is in Fig. 2 shown.
  • the screw 28 has a screw head 30 and a shaft 32. Below the screw head 30, a washer 33 is arranged.
  • the screw 28 is screwed to the second flange 22.
  • a spacer sleeve 36 is provided below the screw head 30, to define a fixed distance between the screw head 30 and the second flange 22.
  • the screw 28 is mechanically and electrically decoupled.
  • a further O-ring 34 is provided below the screw head 30 and below the washer 33, which serves as a decoupling element for the screw 28.
  • This decoupling element 34 is in one Recess 35 of the first flange 20 and is held by means of the washer 33 in a desired position.
  • the bottom of the screw head 30 and the washer 33 forms a driving surface 38, which acts on the O-ring 34.
  • the flange side 24 of the first flange 20 has a groove 40 with a rectangular cross-sectional shape.
  • An alternative embodiment shows Fig. 3 , Here, the flange side 24 'of the second flange 22 is provided with a step 44 which laterally retains the O-ring 26 having a rectangular cross section and prevents the O-ring 26 from moving radially inwardly.
  • the respective other flange side 24 '( Fig. 2 ) or 24 ( Fig. 3 ) is executed.
  • the screws 28 are screwed to the second flange 22.
  • the O-rings 26, 34 are biased by the resulting pressure.
  • the screws 28 can be tightened until the spacers 36 become effective.
  • the defined by the spacers 36 minimum distance between the flanges 20, 22 and thus predetermined by the spacers 36 bias of the sealing O-ring 26 are thus already achieved in the assembled state.
  • the O-rings 34 and the O-rings 26 are thus always pressed or biased to a predetermined and predefined degree.
  • the first flange 20 moves in a connecting direction V in the direction of the second flange 22.
  • the screw 28 remains in the original position. Due to the ambient pressure, the O-ring 26 is further compressed. The O-ring 34, however, can relax. In the evacuated operating state, the first flange 20 and the second flange 22 are thus connected to each other only via the O-rings 26, 34, are thereby indirectly in contact and are therefore not completely separated from each other.
  • a mechanical and / or electrical decoupling between a vacuum pump and a recipient is thus made possible in a very simple, cost-effective and reliable manner.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Gasket Seals (AREA)
  • Vibration Prevention Devices (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Connection Of Plates (AREA)
EP15157292.2A 2014-03-14 2015-03-03 Amortisseur pour pompes à vide Active EP2918843B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014103510.0A DE102014103510B4 (de) 2014-03-14 2014-03-14 Vakuumpumpen-Dämpfer

Publications (2)

Publication Number Publication Date
EP2918843A1 true EP2918843A1 (fr) 2015-09-16
EP2918843B1 EP2918843B1 (fr) 2020-10-28

Family

ID=52596410

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15157292.2A Active EP2918843B1 (fr) 2014-03-14 2015-03-03 Amortisseur pour pompes à vide

Country Status (3)

Country Link
EP (1) EP2918843B1 (fr)
JP (1) JP6133919B2 (fr)
DE (1) DE102014103510B4 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3171030A1 (fr) * 2015-11-19 2017-05-24 Pfeiffer Vacuum Gmbh Pompe à vide
WO2018015727A1 (fr) * 2016-07-18 2018-01-25 Edwards Limited Systèmes de raccords d'amortissement de vibrations et procédé de fabrication de système de raccord d'amortissement de vibrations
CN111788397A (zh) * 2018-03-20 2020-10-16 埃地沃兹日本有限公司 真空泵及真空泵用风门
CN113700966A (zh) * 2021-08-31 2021-11-26 厦门振为科技有限公司 一种基于粒子阻尼的法兰用减振连接装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516122A (en) * 1993-12-10 1996-05-14 Caffee; Barry K. Ultra high vacuum elastomer seal
EP1270949A1 (fr) 2001-06-22 2003-01-02 BOC Edwards Technologies, Limited Pompe à vide
WO2005095798A1 (fr) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Systeme sous vide
DE102004044775A1 (de) 2004-09-16 2006-04-06 Leybold Vacuum Gmbh Vakuumpumpen-Schwingungsdämpfer
EP1837521A1 (fr) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure pour relier des parties d'extrémité et système de vide utilisant cette structure
EP2290242A2 (fr) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Pompe à vide
EP2410184A1 (fr) * 2010-04-16 2012-01-25 Agilent Technologies, Inc. Amortisseur de vibrations pour pompes sous vide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133856U (ja) * 1983-02-28 1984-09-07 日産ディーゼル工業株式会社 取付部材の振動遮断形取付構造
JP4322237B2 (ja) * 2005-08-31 2009-08-26 勲 齋藤 中実肉厚形態の栄養調整食品の包装方法
JP4925781B2 (ja) * 2006-10-05 2012-05-09 エドワーズ株式会社 真空ポンプとその振動吸収ダンパ
DE102007028350A1 (de) * 2007-06-20 2008-12-24 Knf Flodos Ag Pumpenbefestigung

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516122A (en) * 1993-12-10 1996-05-14 Caffee; Barry K. Ultra high vacuum elastomer seal
EP1270949A1 (fr) 2001-06-22 2003-01-02 BOC Edwards Technologies, Limited Pompe à vide
WO2005095798A1 (fr) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Systeme sous vide
DE102004044775A1 (de) 2004-09-16 2006-04-06 Leybold Vacuum Gmbh Vakuumpumpen-Schwingungsdämpfer
EP1837521A1 (fr) * 2004-12-20 2007-09-26 BOC Edwards Japan Limited Structure pour relier des parties d'extrémité et système de vide utilisant cette structure
EP2290242A2 (fr) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Pompe à vide
EP2410184A1 (fr) * 2010-04-16 2012-01-25 Agilent Technologies, Inc. Amortisseur de vibrations pour pompes sous vide

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3171030A1 (fr) * 2015-11-19 2017-05-24 Pfeiffer Vacuum Gmbh Pompe à vide
WO2018015727A1 (fr) * 2016-07-18 2018-01-25 Edwards Limited Systèmes de raccords d'amortissement de vibrations et procédé de fabrication de système de raccord d'amortissement de vibrations
GB2552324B (en) * 2016-07-18 2019-06-12 Edwards Ltd Vibration damping connector systems
US11608916B2 (en) 2016-07-18 2023-03-21 Edwards Limited Vibration damping connector systems
CN111788397A (zh) * 2018-03-20 2020-10-16 埃地沃兹日本有限公司 真空泵及真空泵用风门
US11499571B2 (en) 2018-03-20 2022-11-15 Edwards Japan Limited Vacuum pump and vacuum-pump damper
CN113700966A (zh) * 2021-08-31 2021-11-26 厦门振为科技有限公司 一种基于粒子阻尼的法兰用减振连接装置

Also Published As

Publication number Publication date
DE102014103510A1 (de) 2015-09-17
EP2918843B1 (fr) 2020-10-28
JP2015175372A (ja) 2015-10-05
JP6133919B2 (ja) 2017-05-24
DE102014103510B4 (de) 2016-02-25

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