EP2660858A4 - Semiconductor module, mould device, and mould-forming method - Google Patents

Semiconductor module, mould device, and mould-forming method

Info

Publication number
EP2660858A4
EP2660858A4 EP11852808.2A EP11852808A EP2660858A4 EP 2660858 A4 EP2660858 A4 EP 2660858A4 EP 11852808 A EP11852808 A EP 11852808A EP 2660858 A4 EP2660858 A4 EP 2660858A4
Authority
EP
European Patent Office
Prior art keywords
mould
forming method
semiconductor module
mould device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11852808.2A
Other languages
German (de)
French (fr)
Other versions
EP2660858A1 (en
Inventor
Shuuji Adachi
Fumiyuki Komiyama
Shuuji Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Publication of EP2660858A1 publication Critical patent/EP2660858A1/en
Publication of EP2660858A4 publication Critical patent/EP2660858A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H01L25/072Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14336Coating a portion of the article, e.g. the edge of the article
    • B29C45/14418Sealing means between mould and article
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/26Moulds
    • B29C45/37Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/33Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
EP11852808.2A 2010-12-27 2011-11-10 Semiconductor module, mould device, and mould-forming method Withdrawn EP2660858A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010290295 2010-12-27
PCT/JP2011/075909 WO2012090594A1 (en) 2010-12-27 2011-11-10 Semiconductor module, mould device, and mould-forming method

Publications (2)

Publication Number Publication Date
EP2660858A1 EP2660858A1 (en) 2013-11-06
EP2660858A4 true EP2660858A4 (en) 2016-03-30

Family

ID=46382715

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11852808.2A Withdrawn EP2660858A4 (en) 2010-12-27 2011-11-10 Semiconductor module, mould device, and mould-forming method

Country Status (5)

Country Link
US (1) US8900933B2 (en)
EP (1) EP2660858A4 (en)
JP (1) JP5445695B2 (en)
CN (1) CN103069556B (en)
WO (1) WO2012090594A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5315028B2 (en) * 2008-12-04 2013-10-16 ルネサスエレクトロニクス株式会社 Electronic device and method for manufacturing electronic device
CN103069556B (en) * 2010-12-27 2015-09-16 日产自动车株式会社 Semiconductor module, device for molding and molding method
JP5616996B2 (en) * 2012-11-29 2014-10-29 シャープ株式会社 Liquid crystal display
JP6351731B2 (en) * 2014-08-25 2018-07-04 ルネサスエレクトロニクス株式会社 Semiconductor device and electronic device
US10403601B2 (en) * 2016-06-17 2019-09-03 Fairchild Semiconductor Corporation Semiconductor package and related methods
JP7391819B2 (en) 2020-02-04 2023-12-05 東海興業株式会社 Injection molded products and their manufacturing method
US11955347B2 (en) * 2021-12-02 2024-04-09 Asmpt Singapore Pte. Ltd. Encapsulation process for double-sided cooled packages
CN116666310B (en) * 2023-08-02 2023-10-27 烟台台芯电子科技有限公司 IGBT packaging structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395226A (en) * 1993-02-23 1995-03-07 Mitsubishi Denki Kabushiki Kaisha Molding machine and method
JP2004303900A (en) * 2003-03-31 2004-10-28 Denso Corp Semiconductor device
JP2006086499A (en) * 2004-08-19 2006-03-30 Toyota Motor Corp Resin sealing device and resin sealing method
US20060108700A1 (en) * 2004-11-19 2006-05-25 Denso Corporation Semiconductor device, method and apparatus for fabricating the same
JP2009200415A (en) * 2008-02-25 2009-09-03 Mitsubishi Electric Corp Semiconductor device and method for manufacturing semiconductor device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5955021A (en) * 1997-05-19 1999-09-21 Cardxx, Llc Method of making smart cards
JP3858510B2 (en) 1999-04-02 2006-12-13 富士電機デバイステクノロジー株式会社 Semiconductor device
EP1220309A1 (en) * 2000-12-28 2002-07-03 STMicroelectronics S.r.l. Manufacturing method of an electronic device package
JP3896274B2 (en) * 2001-10-30 2007-03-22 住友重機械工業株式会社 Semiconductor resin sealing device
JP2004096004A (en) 2002-09-03 2004-03-25 Toshiba Corp Multi-chip press-contact package
TW200519925A (en) * 2003-08-05 2005-06-16 Matsushita Electric Ind Co Ltd Optical disc and the manufacturing method thereof
JP2005136332A (en) * 2003-10-31 2005-05-26 Toyota Motor Corp Semiconductor device
JP4426880B2 (en) * 2004-03-12 2010-03-03 Towa株式会社 Resin sealing device and resin sealing method
JP4861749B2 (en) 2006-05-31 2012-01-25 トヨタ自動車株式会社 Mold apparatus and method for manufacturing molded product
JP5064078B2 (en) * 2007-03-30 2012-10-31 株式会社日立産機システム Mold for fine pattern transfer and method for producing resin transfer product using the same
US20100166906A1 (en) * 2007-05-23 2010-07-01 Pioneer Corporation Inprint equipment
JP4902789B2 (en) * 2008-06-25 2012-03-21 キョーラク株式会社 Molding method and molding apparatus for resin molded product, and apparatus for adjusting thickness of thermoplastic resin sheet
CN103069556B (en) * 2010-12-27 2015-09-16 日产自动车株式会社 Semiconductor module, device for molding and molding method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395226A (en) * 1993-02-23 1995-03-07 Mitsubishi Denki Kabushiki Kaisha Molding machine and method
JP2004303900A (en) * 2003-03-31 2004-10-28 Denso Corp Semiconductor device
JP2006086499A (en) * 2004-08-19 2006-03-30 Toyota Motor Corp Resin sealing device and resin sealing method
US20060108700A1 (en) * 2004-11-19 2006-05-25 Denso Corporation Semiconductor device, method and apparatus for fabricating the same
JP2009200415A (en) * 2008-02-25 2009-09-03 Mitsubishi Electric Corp Semiconductor device and method for manufacturing semiconductor device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2012090594A1 *

Also Published As

Publication number Publication date
US20130178018A1 (en) 2013-07-11
EP2660858A1 (en) 2013-11-06
CN103069556A (en) 2013-04-24
JP5445695B2 (en) 2014-03-19
US8900933B2 (en) 2014-12-02
WO2012090594A1 (en) 2012-07-05
JPWO2012090594A1 (en) 2014-06-05
CN103069556B (en) 2015-09-16

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