EP2172432A4 - Process for producing quartz glass crucible and apparatus for producing the quartz glass crucible - Google Patents
Process for producing quartz glass crucible and apparatus for producing the quartz glass crucibleInfo
- Publication number
- EP2172432A4 EP2172432A4 EP08791683.9A EP08791683A EP2172432A4 EP 2172432 A4 EP2172432 A4 EP 2172432A4 EP 08791683 A EP08791683 A EP 08791683A EP 2172432 A4 EP2172432 A4 EP 2172432A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- producing
- quartz glass
- glass crucible
- crucible
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007196814 | 2007-07-28 | ||
PCT/JP2008/063439 WO2009017068A1 (en) | 2007-07-28 | 2008-07-25 | Process for producing quartz glass crucible and apparatus for producing the quartz glass crucible |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2172432A1 EP2172432A1 (en) | 2010-04-07 |
EP2172432A4 true EP2172432A4 (en) | 2014-04-16 |
Family
ID=40304299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08791683.9A Withdrawn EP2172432A4 (en) | 2007-07-28 | 2008-07-25 | Process for producing quartz glass crucible and apparatus for producing the quartz glass crucible |
Country Status (6)
Country | Link |
---|---|
US (1) | US8196429B2 (en) |
EP (1) | EP2172432A4 (en) |
JP (1) | JP5398074B2 (en) |
KR (1) | KR101312999B1 (en) |
TW (1) | TW200918471A (en) |
WO (1) | WO2009017068A1 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2174917A4 (en) * | 2007-07-27 | 2012-08-15 | Japan Super Quartz Corp | Method for manufacturing quartz glass crucible |
JP4922355B2 (en) * | 2009-07-15 | 2012-04-25 | 信越石英株式会社 | Silica container and method for producing the same |
JP5453679B2 (en) * | 2009-10-02 | 2014-03-26 | 株式会社Sumco | Silica glass crucible manufacturing apparatus and silica glass crucible manufacturing method |
JP5397857B2 (en) * | 2009-10-20 | 2014-01-22 | 株式会社Sumco | Method and apparatus for producing quartz glass crucible |
US9003832B2 (en) * | 2009-11-20 | 2015-04-14 | Heraeus Shin-Etsu America, Inc. | Method of making a silica crucible in a controlled atmosphere |
JP5500686B2 (en) * | 2010-11-30 | 2014-05-21 | 株式会社Sumco | Silica glass crucible |
JP5605902B2 (en) | 2010-12-01 | 2014-10-15 | 株式会社Sumco | Method for producing silica glass crucible, silica glass crucible |
JP5605903B2 (en) * | 2010-12-02 | 2014-10-15 | 株式会社Sumco | Silica glass crucible manufacturing equipment |
JP5749147B2 (en) * | 2010-12-31 | 2015-07-15 | 株式会社Sumco | Method for producing silica glass crucible |
JP5777881B2 (en) * | 2010-12-31 | 2015-09-09 | 株式会社Sumco | Method for producing silica glass crucible |
KR101293501B1 (en) | 2011-01-28 | 2013-08-06 | 쟈판 스파 쿼츠 가부시키가이샤 | Apparatus and method for manufacturing vitreous silica crucible |
US9193620B2 (en) | 2011-03-31 | 2015-11-24 | Raytheon Company | Fused silica body with vitreous silica inner layer, and method for making same |
US9221709B2 (en) * | 2011-03-31 | 2015-12-29 | Raytheon Company | Apparatus for producing a vitreous inner layer on a fused silica body, and method of operating same |
US8281620B1 (en) * | 2011-04-27 | 2012-10-09 | Japan Super Quartz Corporation | Apparatus for manufacturing vitreous silica crucible |
WO2013099430A1 (en) * | 2011-12-29 | 2013-07-04 | ジャパンスーパークォーツ株式会社 | Silica glass crucible manufacturing device |
KR101670295B1 (en) * | 2013-02-05 | 2016-10-28 | (주) 쿼츠테크 | Apparatus for fabrication quartz-crucible |
KR101657969B1 (en) * | 2013-02-05 | 2016-09-20 | (주) 쿼츠테크 | Method for fabrication quartz-crucible |
EP3577160A4 (en) * | 2017-02-06 | 2020-12-09 | Gosselin, Mathilde | Physical deposition of siliceous particles on plastic support to enhance surface properties |
JP7094487B2 (en) * | 2018-02-07 | 2022-07-04 | 株式会社Sumco | Silica glass crucible manufacturing equipment and silica glass crucible manufacturing method |
JP6879240B2 (en) * | 2018-03-16 | 2021-06-02 | 株式会社Sumco | Method of adjusting the position of the arc electrode, method of manufacturing a quartz glass crucible using the method, and manufacturing equipment |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5762672A (en) * | 1994-07-19 | 1998-06-09 | Shin-Etsu Quartz Products, Ltd. | Method for producing a quartz glass crucible |
JPH11199369A (en) * | 1998-01-08 | 1999-07-27 | Toshiba Ceramics Co Ltd | Quartz glass crucible for pulling up silicon single crystal and its production |
WO2002060827A2 (en) * | 2000-10-27 | 2002-08-08 | General Electric Company | Method for quartz crucible fabrication |
JP2003313035A (en) * | 2002-04-23 | 2003-11-06 | Japan Siper Quarts Corp | Heating furnace for manufacturing quartz crucible |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3014311C2 (en) * | 1980-04-15 | 1982-06-16 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Process for the production of quartz glass crucibles and apparatus for carrying out this process |
JPS5934659A (en) | 1982-08-20 | 1984-02-25 | Toshiba Corp | Solid-state image pickup device |
JP2559604B2 (en) * | 1987-12-15 | 1996-12-04 | 東芝セラミックス株式会社 | Quartz glass crucible manufacturing method |
JPH0920586A (en) | 1995-06-30 | 1997-01-21 | Toshiba Ceramics Co Ltd | Production of quartz glass crucible for pulling silicon single crystal |
JP4548682B2 (en) * | 1999-04-06 | 2010-09-22 | 株式会社ワコム製作所 | Manufacturing method of quartz glass crucible |
KR100383796B1 (en) * | 1999-04-06 | 2003-05-14 | 가부시키가이샤 난와쿼츠 | Method for manufacturing quartz glass crucible |
JP3765368B2 (en) * | 1999-06-01 | 2006-04-12 | 東芝セラミックス株式会社 | Quartz glass crucible and method for producing the same |
JP4161296B2 (en) | 2002-05-30 | 2008-10-08 | ジャパンスーパークォーツ株式会社 | Method for producing quartz glass crucible |
-
2008
- 2008-07-25 US US12/303,134 patent/US8196429B2/en not_active Expired - Fee Related
- 2008-07-25 KR KR1020087029171A patent/KR101312999B1/en not_active IP Right Cessation
- 2008-07-25 EP EP08791683.9A patent/EP2172432A4/en not_active Withdrawn
- 2008-07-25 WO PCT/JP2008/063439 patent/WO2009017068A1/en active Application Filing
- 2008-07-25 JP JP2009525377A patent/JP5398074B2/en active Active
- 2008-07-29 TW TW097128658A patent/TW200918471A/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5762672A (en) * | 1994-07-19 | 1998-06-09 | Shin-Etsu Quartz Products, Ltd. | Method for producing a quartz glass crucible |
JPH11199369A (en) * | 1998-01-08 | 1999-07-27 | Toshiba Ceramics Co Ltd | Quartz glass crucible for pulling up silicon single crystal and its production |
WO2002060827A2 (en) * | 2000-10-27 | 2002-08-08 | General Electric Company | Method for quartz crucible fabrication |
JP2003313035A (en) * | 2002-04-23 | 2003-11-06 | Japan Siper Quarts Corp | Heating furnace for manufacturing quartz crucible |
Non-Patent Citations (1)
Title |
---|
See also references of WO2009017068A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2009017068A1 (en) | 2009-02-05 |
JPWO2009017068A1 (en) | 2010-10-21 |
KR101312999B1 (en) | 2013-10-01 |
TW200918471A (en) | 2009-05-01 |
US8196429B2 (en) | 2012-06-12 |
US20100229599A1 (en) | 2010-09-16 |
EP2172432A1 (en) | 2010-04-07 |
KR20100051764A (en) | 2010-05-18 |
JP5398074B2 (en) | 2014-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20081128 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA MK RS |
|
R17P | Request for examination filed (corrected) |
Effective date: 20081128 |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20140314 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: C30B 15/10 20060101ALI20140310BHEP Ipc: C03B 20/00 20060101AFI20140310BHEP Ipc: C30B 29/06 20060101ALI20140310BHEP Ipc: C03B 19/09 20060101ALI20140310BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20141014 |