EP1165966A1 - Fixation d'un rotor sur une pompe a vide a friction - Google Patents

Fixation d'un rotor sur une pompe a vide a friction

Info

Publication number
EP1165966A1
EP1165966A1 EP00903590A EP00903590A EP1165966A1 EP 1165966 A1 EP1165966 A1 EP 1165966A1 EP 00903590 A EP00903590 A EP 00903590A EP 00903590 A EP00903590 A EP 00903590A EP 1165966 A1 EP1165966 A1 EP 1165966A1
Authority
EP
European Patent Office
Prior art keywords
rotor
vacuum pump
shaft
section
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00903590A
Other languages
German (de)
English (en)
Inventor
Günter Schütz
Christian Beyer
Ralf Adamietz
Dieter Haas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1165966A1 publication Critical patent/EP1165966A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/266—Rotors specially for elastic fluids mounting compressor rotors on shafts

Definitions

  • the invention relates to a friction vacuum pump with a housing, with a shaft which is supported in the housing via bearings and with a rotor which has a central bore and is held on the shaft in the region of this bore.
  • Frictional vacuum pumps especially turbomolecular vacuum pumps, are operated at very high speeds (up to 100,000 revolutions per minute). This operation requires extremely precise balancing of the rotor unit consisting of shaft and rotor. Despite complex balancing processes, vibrations (vibration accelerations) were repeatedly observed, which occurred after a shorter or longer operating time and whose cause was initially unknown.
  • An annular groove at least in the area of one of the two end faces of the rotor ensures that the centrifugal forces which occur, which have high values in the area of the periphery of the rotor, do not have an effect, at least in the area of the rotor section which the ring groove according to the invention limited internally. Deformations leading to loosening of the joint are largely prevented at least in this area. If this area is also equipped with a reinforcement ring, the risk of loosening the joint is also eliminated for thermal reasons.
  • the material from which the reinforcement ring is made preferably has a relatively small coefficient of thermal expansion.
  • the figures show a partial section through a single-flow turbomolecular vacuum pump 1 with a housing 2, an end inlet flange 3, a rotor 4 and a stator 5, 6.
  • the exemplary embodiments shown are each a compound turbomolecular vacuum pump.
  • the pump-active elements consist of intermeshing rotor blades 7 and stator blades 8.
  • Stator rings 9, which form the inlet-side stator section 5, serve to hold and center the stator blades 8.
  • a Holweck pump section is provided, which is formed by a rotating cylinder section 11 and a fixed cylinder section 12 with a thread 13.
  • the cylinder section 12 forms the rotor section 6 on the stator side.
  • the rotor 4 is supported on a shaft 15.
  • the shaft 15 is supported via bearings 16 (only one is shown) in the bearing housing 17, in which the drive motor 18 is also located.
  • the rotor 4 is supported on the fore-vacuum side from a sleeve 23, which in turn rests on the inner ring of the bearing 16.
  • the rotor 4 On the high vacuum side, the rotor 4 is equipped with a central recess 25 into which the free end of the shaft 15 projects.
  • the rotor 4 is equipped with a conical section 27 which surrounds the shaft 15 and which is designed such that the conical section tapers in the direction of the high vacuum side.
  • a pressure piece 28 rests on this conical section, the inside of which is also designed conically, in such a way that it lies essentially over the entire surface of the conically designed section 27 of the rotor 4.
  • the rotor 4 is fastened on the shaft 15 by a nut 29 screwed onto the free end of the shaft 15, which presses the pressure piece 28 onto the conical section of the rotor 4.
  • a groove 31 embedded in the lower end face of rotor 4 which is delimited by an inner rotor section 32 and an outer rotor section 33.
  • the outer rotor section serves as the carrier of the cylinder section 11 of the Holweck pump.
  • the central depression 25 in the high-vacuum-side end face of the rotor 4 also has the shape of an annular groove 26 in the region of its bottom, in which the inner rotor section is conical and the outer rotor section carries the rotor blades 7.
  • the annular grooves described in the end faces of the rotor 4 have the effect that they relieve the joint between the rotor 4 and the shaft 15 of centrifugal forces at least in the region of the inner rotor sections 27, 32, ie that the centrifugal forces that occur in no gaps in these areas and thus loosening.
  • CFRP carbon or glass fiber composites
  • the pressure piece 28 is suitably made of steel. Gaps between the shaft 15 and the rotor section 27 are also avoided in this way.
  • the inner section of the annular groove 26 comprises not only the conical section 27 but also a cylindrical section 37. This section is also equipped with a reinforcement ring 38 in order to ensure a gap-free joint between the shaft 15 and the rotor 4.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à vide à friction (1), en particulier une turbopompe à vide moléculaire, comprenant un carter (2), un arbre (15) prenant appui sur le carter (2) par l'intermédiaire d'un palier (16), et un rotor (4) présentant un alésage central (21) et maintenu sur l'arbre (15) dans la région de cet alésage (21); dans le but de réduire le risque de desserrage dans la zone du joint entre le rotor et l'arbre, l'invention est caractérisée en ce qu'il est prévu dans la région d'au moins l'une des deux extrémités du rotor (4), une rainure annulaire (26, 31) entourant la zone du joint entre le rotor (4) et l'arbre (15).
EP00903590A 1999-04-03 2000-01-20 Fixation d'un rotor sur une pompe a vide a friction Withdrawn EP1165966A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19915307 1999-04-03
DE19915307A DE19915307A1 (de) 1999-04-03 1999-04-03 Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
PCT/EP2000/000410 WO2000060241A1 (fr) 1999-04-03 2000-01-20 Fixation d'un rotor sur une pompe a vide a friction

Publications (1)

Publication Number Publication Date
EP1165966A1 true EP1165966A1 (fr) 2002-01-02

Family

ID=7903540

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00903590A Withdrawn EP1165966A1 (fr) 1999-04-03 2000-01-20 Fixation d'un rotor sur une pompe a vide a friction

Country Status (5)

Country Link
US (1) US6599084B1 (fr)
EP (1) EP1165966A1 (fr)
JP (1) JP2002541378A (fr)
DE (1) DE19915307A1 (fr)
WO (1) WO2000060241A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10053663A1 (de) 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe mit Rotor und Welle
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
FR2845737B1 (fr) 2002-10-11 2005-01-14 Cit Alcatel Pompe turbomoleculaire a jupe composite
JP2006194083A (ja) * 2003-09-16 2006-07-27 Boc Edwards Kk ロータ軸と回転体との固定構造及び該固定構造を有するターボ分子ポンプ
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
US7997227B2 (en) * 2007-03-13 2011-08-16 General Electric Company Vacuum coater device and mechanism for supporting and manipulating workpieces in same
JP5211408B2 (ja) * 2008-10-14 2013-06-12 株式会社大阪真空機器製作所 分子ポンプのロータ
DE112010001369T5 (de) * 2009-03-25 2012-05-16 Borgwarner Inc. Reduzieren von turboladerkernunwucht mit zentriervorrichtung
JP5689607B2 (ja) * 2010-03-17 2015-03-25 東京電力株式会社 軸流圧縮機
US9790946B2 (en) * 2010-09-28 2017-10-17 Edwards Japan Limited Exhaust pump
EP2650544B1 (fr) * 2010-12-10 2020-06-03 Edwards Japan Limited Pompe à vide
KR101883026B1 (ko) * 2011-06-17 2018-07-27 에드워즈 가부시키가이샤 진공 펌프와 그 로터
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
JP6594602B2 (ja) * 2012-04-05 2019-10-23 エドワーズ株式会社 ロータ、真空ポンプ、及び、真空ポンプの組立方法
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
DE202013010195U1 (de) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-Rotoreinrichtung sowie Vakuumpumpe

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2392858A (en) 1943-03-08 1946-01-15 Gen Electric High-speed rotor for centrifugal compressors and the like
US2441432A (en) 1945-12-14 1948-05-11 Gen Electric High-speed rotor
US3601501A (en) 1970-02-26 1971-08-24 John G Johnson Gas compressor impeller and shaft assembly
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
FR2634829B1 (fr) 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
DE3931661A1 (de) 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
DE4445297C1 (de) * 1994-12-19 1996-03-14 Man B & W Diesel Ag Laufrad für eine Strömungsmaschine
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0060241A1 *

Also Published As

Publication number Publication date
WO2000060241A1 (fr) 2000-10-12
US6599084B1 (en) 2003-07-29
JP2002541378A (ja) 2002-12-03
DE19915307A1 (de) 2000-10-05

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