DE69837204D1 - Verfahren und vorrichtung zum abbilden der parameterdifferenz einer probenoberfläche - Google Patents

Verfahren und vorrichtung zum abbilden der parameterdifferenz einer probenoberfläche

Info

Publication number
DE69837204D1
DE69837204D1 DE69837204T DE69837204T DE69837204D1 DE 69837204 D1 DE69837204 D1 DE 69837204D1 DE 69837204 T DE69837204 T DE 69837204T DE 69837204 T DE69837204 T DE 69837204T DE 69837204 D1 DE69837204 D1 DE 69837204D1
Authority
DE
Germany
Prior art keywords
shaping
sample surface
parameter difference
parameter
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69837204T
Other languages
English (en)
Other versions
DE69837204T2 (de
Inventor
Matthew J Holcomb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MMR Technologies Inc
Original Assignee
MMR Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MMR Technologies Inc filed Critical MMR Technologies Inc
Publication of DE69837204D1 publication Critical patent/DE69837204D1/de
Application granted granted Critical
Publication of DE69837204T2 publication Critical patent/DE69837204T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
    • G06V10/141—Control of illumination
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/60—Type of objects
    • G06V20/69—Microscopic objects, e.g. biological cells or cellular parts
    • G06V20/693—Acquisition

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
DE69837204T 1997-07-28 1998-07-28 Verfahren und vorrichtung zum abbilden der parameterdifferenz einer probenoberfläche Expired - Fee Related DE69837204T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/900,156 US5946102A (en) 1997-07-28 1997-07-28 Method and apparatus for parameter difference imaging of a sample surface
US900156 1997-07-28
PCT/US1998/015384 WO1999005510A1 (en) 1997-07-28 1998-07-28 Method and apparatus for parameter difference imaging of a sample surface

Publications (2)

Publication Number Publication Date
DE69837204D1 true DE69837204D1 (de) 2007-04-12
DE69837204T2 DE69837204T2 (de) 2007-11-08

Family

ID=25412050

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837204T Expired - Fee Related DE69837204T2 (de) 1997-07-28 1998-07-28 Verfahren und vorrichtung zum abbilden der parameterdifferenz einer probenoberfläche

Country Status (5)

Country Link
US (1) US5946102A (de)
EP (1) EP1000344B1 (de)
JP (1) JP3349503B2 (de)
DE (1) DE69837204T2 (de)
WO (1) WO1999005510A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL123727A (en) 1998-03-18 2002-05-23 Nova Measuring Instr Ltd Method and apparatus for measurement of patterned structures
US6836324B2 (en) * 1998-03-18 2004-12-28 Nova Measuring Instruments Ltd. Method and apparatus for measurements of patterned structures
US6476920B1 (en) 1998-03-18 2002-11-05 Nova Measuring Instruments, Ltd. Method and apparatus for measurements of patterned structures
DE19859801C2 (de) * 1998-12-23 2001-08-30 Bernward Maehner Verfahren zur echtzeitfähigen Ermittlung und Darstellung von Verformungen oder Verschiebungen von Prüfobjekten und Vorrichtung zur Durchführung des Verfahrens
JP4377013B2 (ja) 1999-11-18 2009-12-02 國寛 渡辺 固体撮像装置及び固体撮像素子
DE10052631C1 (de) * 2000-10-24 2002-04-04 Bosch Gmbh Robert Vorrichtung zur Prüfung von einem durch Anlegen eines elektrischen und/oder magnetischen Feldes formändernden Material
US20040235281A1 (en) * 2003-04-25 2004-11-25 Downey Daniel F. Apparatus and methods for junction formation using optical illumination
FR2859024B1 (fr) * 2003-08-22 2005-12-09 Centre Nat Rech Scient Dispositif et procede de detection et de mesure non invasives d'un champ electrique
US8362431B2 (en) * 2005-03-15 2013-01-29 Mount Holyoke College Methods of thermoreflectance thermography
US20090262332A1 (en) * 2008-04-18 2009-10-22 Microvast, Inc. High-throughput spectral imaging and spectroscopy apparatus and methods
US8416418B2 (en) * 2011-07-14 2013-04-09 Kendall Technology Inc. Method and apparatus for gold detection
US9188531B2 (en) 2011-07-14 2015-11-17 Kendall Technology Inc. Method and apparatus for gold detection
KR101446757B1 (ko) * 2012-07-19 2014-10-02 (주) 인텍플러스 디스플레이 패널 검사장치
US11822117B2 (en) * 2019-10-08 2023-11-21 Corning Incorporated Primary coating compositions with improved microbending performance
CN110793942B (zh) * 2019-10-12 2022-02-08 天津大学 基于彩色相机的二维材料形貌快速表征***和方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653109A (en) * 1984-07-30 1987-03-24 Lemelson Jerome H Image analysis system and method
US4750822A (en) * 1986-03-28 1988-06-14 Therma-Wave, Inc. Method and apparatus for optically detecting surface states in materials
US5270797A (en) * 1989-07-20 1993-12-14 Brooklyn College Foundation Method and apparatus for determining a material's characteristics by photoreflectance using improved computer control
US5310260A (en) * 1990-04-10 1994-05-10 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
JPH03292780A (ja) * 1990-04-11 1991-12-24 Fujitsu Ltd 超伝導体の特性評価方法およびこれに用いた超伝導体薄膜の成長方法および装置
US5439291C1 (en) * 1992-03-02 2002-04-16 Ta Instr Inc Method and apparatus for ac differential thermal analysis
US5175231A (en) * 1992-04-17 1992-12-29 Fiber-Cote Corporation Urethane oligomers and polyurethanes
US5379109A (en) * 1992-06-17 1995-01-03 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for non-destructively measuring local resistivity of semiconductors
IL109589A0 (en) * 1993-05-14 1994-08-26 Hughes Aircraft Co Apparatus and method for performing high spatial resolution thin film layer thickness metrology

Also Published As

Publication number Publication date
US5946102A (en) 1999-08-31
EP1000344A1 (de) 2000-05-17
EP1000344A4 (de) 2001-12-19
JP2001511519A (ja) 2001-08-14
WO1999005510A1 (en) 1999-02-04
DE69837204T2 (de) 2007-11-08
JP3349503B2 (ja) 2002-11-25
EP1000344B1 (de) 2007-02-28
WO1999005510A9 (en) 1999-04-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee