DE60137764D1 - Elektrisches filter - Google Patents
Elektrisches filterInfo
- Publication number
- DE60137764D1 DE60137764D1 DE60137764T DE60137764T DE60137764D1 DE 60137764 D1 DE60137764 D1 DE 60137764D1 DE 60137764 T DE60137764 T DE 60137764T DE 60137764 T DE60137764 T DE 60137764T DE 60137764 D1 DE60137764 D1 DE 60137764D1
- Authority
- DE
- Germany
- Prior art keywords
- electric filter
- filter
- electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02094—Means for compensation or elimination of undesirable effects of adherence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0435—Modification of the thickness of an element of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/045—Modification of the area of an element
- H03H2003/0457—Modification of the area of an element of an electrode
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0012437.0A GB0012437D0 (en) | 2000-05-24 | 2000-05-24 | Improvements to filters |
PCT/GB2001/002293 WO2001091290A1 (en) | 2000-05-24 | 2001-05-23 | Improvements to filters |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60137764D1 true DE60137764D1 (de) | 2009-04-09 |
Family
ID=9892141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60137764T Expired - Lifetime DE60137764D1 (de) | 2000-05-24 | 2001-05-23 | Elektrisches filter |
Country Status (8)
Country | Link |
---|---|
US (1) | US7046103B2 (de) |
EP (1) | EP1287613B1 (de) |
JP (1) | JP2003534696A (de) |
CN (1) | CN1205742C (de) |
AU (1) | AU5860701A (de) |
DE (1) | DE60137764D1 (de) |
GB (1) | GB0012437D0 (de) |
WO (1) | WO2001091290A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0014630D0 (en) * | 2000-06-16 | 2000-08-09 | Koninkl Philips Electronics Nv | Bulk accoustic wave filter |
GB0029090D0 (en) * | 2000-11-29 | 2001-01-10 | Univ Cranfield | Improvements in or relating to filters |
KR100622393B1 (ko) * | 2005-07-05 | 2006-09-12 | 삼성전자주식회사 | 일 표면 상에 딤플이 제작된 공진부를 포함하는 벌크 음향공진기 및 그 제조방법 |
US7528681B2 (en) * | 2005-12-20 | 2009-05-05 | Palo Alto Research Center Incorporated | Acoustic devices using an AlGaN piezoelectric region |
JP5190841B2 (ja) | 2007-05-31 | 2013-04-24 | 独立行政法人産業技術総合研究所 | 圧電体薄膜、圧電体およびそれらの製造方法、ならびに当該圧電体薄膜を用いた圧電体共振子、アクチュエータ素子および物理センサー |
KR101375660B1 (ko) * | 2008-02-22 | 2014-03-19 | 삼성전자주식회사 | 오버레이 ebg 구조를 이용한 공진기, 대역통과필터 및공진기의 제조방법 |
US8410868B2 (en) * | 2009-06-04 | 2013-04-02 | Sand 9, Inc. | Methods and apparatus for temperature control of devices and mechanical resonating structures |
US8476809B2 (en) | 2008-04-29 | 2013-07-02 | Sand 9, Inc. | Microelectromechanical systems (MEMS) resonators and related apparatus and methods |
US9048811B2 (en) | 2009-03-31 | 2015-06-02 | Sand 9, Inc. | Integration of piezoelectric materials with substrates |
CN109167128B (zh) * | 2018-08-20 | 2021-01-26 | 武汉衍熙微器件有限公司 | 一种改善滤波器性能的方法及其滤波器 |
CN111600566B (zh) * | 2020-04-21 | 2021-06-01 | 诺思(天津)微***有限责任公司 | 滤波器、体声波谐振器组件及其制造方法、电子设备 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS639141Y2 (de) * | 1980-10-22 | 1988-03-18 | ||
US4320365A (en) | 1980-11-03 | 1982-03-16 | United Technologies Corporation | Fundamental, longitudinal, thickness mode bulk wave resonator |
US4818959A (en) * | 1986-03-28 | 1989-04-04 | Tdk Corporation | Phase equalizer |
US4837533A (en) | 1987-07-22 | 1989-06-06 | Toko Kabushiki Kaisha | Ladder-type ceramic filter |
JPH0513061Y2 (de) | 1987-07-27 | 1993-04-06 | ||
JPH01314008A (ja) * | 1988-06-13 | 1989-12-19 | Ngk Spark Plug Co Ltd | 梯子型圧電フィルタ |
US5185589A (en) * | 1991-05-17 | 1993-02-09 | Westinghouse Electric Corp. | Microwave film bulk acoustic resonator and manifolded filter bank |
US5587620A (en) | 1993-12-21 | 1996-12-24 | Hewlett-Packard Company | Tunable thin film acoustic resonators and method for making the same |
US5471178A (en) | 1994-02-03 | 1995-11-28 | Motorola, Inc. | Ladder filter and method for producing conjugately matched impedance |
JP3371050B2 (ja) | 1995-10-27 | 2003-01-27 | 三菱電機株式会社 | 薄膜圧電素子 |
JPH0964609A (ja) * | 1995-08-23 | 1997-03-07 | Murata Mfg Co Ltd | 薄膜積層電極及びその製造方法 |
JP3087651B2 (ja) * | 1996-06-03 | 2000-09-11 | 株式会社村田製作所 | 薄膜多層電極、高周波伝送線路、高周波共振器及び高周波フィルタ |
US5939957A (en) | 1996-07-26 | 1999-08-17 | Ngk Spark Plug Co., Ltd. | 6-elements ladder type piezoelectric filter |
US6051907A (en) | 1996-10-10 | 2000-04-18 | Nokia Mobile Phones Limited | Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS) |
US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
JP3227649B2 (ja) * | 1997-08-07 | 2001-11-12 | 株式会社村田製作所 | 弾性表面波フィルタ |
JP3228223B2 (ja) * | 1998-05-26 | 2001-11-12 | 株式会社村田製作所 | 弾性表面波フィルタ |
JP3444218B2 (ja) * | 1999-02-10 | 2003-09-08 | 株式会社村田製作所 | 誘電体共振器、誘電体フィルタ、誘電体デュプレクサ、発振器、通信機装置 |
JP3498204B2 (ja) * | 1999-03-10 | 2004-02-16 | 株式会社村田製作所 | 弾性表面波フィルタ、それを用いた通信機装置 |
US6377136B1 (en) * | 2000-02-04 | 2002-04-23 | Agere Systems Guardian Corporation | Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance |
JP3389911B2 (ja) * | 2000-02-07 | 2003-03-24 | 株式会社村田製作所 | 弾性表面波フィルタ、共用器及び通信機 |
US6462631B2 (en) * | 2001-02-14 | 2002-10-08 | Agilent Technologies, Inc. | Passband filter having an asymmetrical filter response |
-
2000
- 2000-05-24 GB GBGB0012437.0A patent/GB0012437D0/en not_active Ceased
-
2001
- 2001-05-23 CN CN01802166.2A patent/CN1205742C/zh not_active Expired - Lifetime
- 2001-05-23 US US10/031,239 patent/US7046103B2/en not_active Expired - Lifetime
- 2001-05-23 AU AU58607/01A patent/AU5860701A/en not_active Abandoned
- 2001-05-23 EP EP01931920A patent/EP1287613B1/de not_active Expired - Lifetime
- 2001-05-23 WO PCT/GB2001/002293 patent/WO2001091290A1/en active Application Filing
- 2001-05-23 DE DE60137764T patent/DE60137764D1/de not_active Expired - Lifetime
- 2001-05-23 JP JP2001586775A patent/JP2003534696A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US20020118078A1 (en) | 2002-08-29 |
EP1287613B1 (de) | 2009-02-25 |
CN1205742C (zh) | 2005-06-08 |
CN1386320A (zh) | 2002-12-18 |
US7046103B2 (en) | 2006-05-16 |
AU5860701A (en) | 2001-12-03 |
JP2003534696A (ja) | 2003-11-18 |
GB0012437D0 (en) | 2000-07-12 |
EP1287613A1 (de) | 2003-03-05 |
WO2001091290A1 (en) | 2001-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |