DE3867123D1 - Einrichtung zur feststellung der kristallisationsgrenzflaechenposition. - Google Patents
Einrichtung zur feststellung der kristallisationsgrenzflaechenposition.Info
- Publication number
- DE3867123D1 DE3867123D1 DE8888106650T DE3867123T DE3867123D1 DE 3867123 D1 DE3867123 D1 DE 3867123D1 DE 8888106650 T DE8888106650 T DE 8888106650T DE 3867123 T DE3867123 T DE 3867123T DE 3867123 D1 DE3867123 D1 DE 3867123D1
- Authority
- DE
- Germany
- Prior art keywords
- crystalization
- determining
- surface position
- crystalization surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62104084A JPS63269003A (ja) | 1987-04-27 | 1987-04-27 | 晶出界面位置検出装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3867123D1 true DE3867123D1 (de) | 1992-02-06 |
Family
ID=14371270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888106650T Expired - Fee Related DE3867123D1 (de) | 1987-04-27 | 1988-04-26 | Einrichtung zur feststellung der kristallisationsgrenzflaechenposition. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4918520A (de) |
EP (1) | EP0290854B1 (de) |
JP (1) | JPS63269003A (de) |
DE (1) | DE3867123D1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0651599B2 (ja) * | 1987-12-05 | 1994-07-06 | 信越半導体株式会社 | 浮遊帯域制御方法 |
US5269875A (en) * | 1989-10-05 | 1993-12-14 | Shin-Etsu Handotai Company, Limited | Method of adjusting concentration of oxygen in silicon single crystal and apparatus for use in the method |
JP2601930B2 (ja) * | 1990-03-29 | 1997-04-23 | 信越半導体株式会社 | 単結晶ネツク部直径制御方法及び装置 |
JP2574074B2 (ja) * | 1991-04-10 | 1997-01-22 | 日鉄鉱業株式会社 | Fz法による単結晶育成状態の異常を検出する方法およびその装置 |
US5519211A (en) * | 1994-06-14 | 1996-05-21 | United States Of America As Represented By The Secretary Of Commerce | Method and apparatus for monitoring resin crystallization and shrinkage during polymer molding |
JP2004250101A (ja) * | 2002-08-13 | 2004-09-09 | Imekkusu Kk | 容器 |
CN115763231A (zh) * | 2022-12-07 | 2023-03-07 | 西安奕斯伟材料科技有限公司 | 晶圆的外延生长方法及设备 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE631568A (de) * | 1962-04-27 | |||
GB1127742A (en) * | 1965-02-06 | 1968-09-18 | Metals Res Ltd | Improvements in or relating to image analysis systems |
FR2139434A5 (de) * | 1971-05-11 | 1973-01-05 | Image Analysing Computers Ltd | |
US4242589A (en) * | 1979-01-15 | 1980-12-30 | Mobil Tyco Solar Energy Corporation | Apparatus for monitoring crystal growth |
US4277441A (en) * | 1979-01-15 | 1981-07-07 | Mobil Tyco Solar Energy Corporation | Apparatus for monitoring crystal growth |
CA1166842A (en) * | 1980-12-17 | 1984-05-08 | Edward G. Lucas | Bed height measurement |
EP0097676A4 (de) * | 1982-01-04 | 1985-11-11 | Commw Of Australia | Steuerung des diameters im czochralski-kristallwachstum. |
DE3325003A1 (de) * | 1983-07-11 | 1985-01-24 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum messen des druchmessers eines durch zonenschmelzen hergestellten halbleiterstabes |
JPS5994006A (ja) * | 1983-10-26 | 1984-05-30 | Hitachi Ltd | 外観検査装置 |
-
1987
- 1987-04-27 JP JP62104084A patent/JPS63269003A/ja active Granted
-
1988
- 1988-04-25 US US07/185,894 patent/US4918520A/en not_active Expired - Fee Related
- 1988-04-26 DE DE8888106650T patent/DE3867123D1/de not_active Expired - Fee Related
- 1988-04-26 EP EP88106650A patent/EP0290854B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0535963B2 (de) | 1993-05-27 |
EP0290854B1 (de) | 1991-12-27 |
JPS63269003A (ja) | 1988-11-07 |
EP0290854A1 (de) | 1988-11-17 |
US4918520A (en) | 1990-04-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |