DE2238896B2 - Korpuskularstrahlgeraet, insbesondere elektronenmikroskop - Google Patents

Korpuskularstrahlgeraet, insbesondere elektronenmikroskop

Info

Publication number
DE2238896B2
DE2238896B2 DE19722238896 DE2238896A DE2238896B2 DE 2238896 B2 DE2238896 B2 DE 2238896B2 DE 19722238896 DE19722238896 DE 19722238896 DE 2238896 A DE2238896 A DE 2238896A DE 2238896 B2 DE2238896 B2 DE 2238896B2
Authority
DE
Germany
Prior art keywords
electron microscope
beam device
body beam
particular electron
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19722238896
Other languages
English (en)
Other versions
DE2238896A1 (de
DE2238896C3 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DE19722238896 priority Critical patent/DE2238896C3/de
Priority claimed from DE19722238896 external-priority patent/DE2238896C3/de
Priority to NL7310660A priority patent/NL7310660A/xx
Publication of DE2238896A1 publication Critical patent/DE2238896A1/de
Publication of DE2238896B2 publication Critical patent/DE2238896B2/de
Application granted granted Critical
Publication of DE2238896C3 publication Critical patent/DE2238896C3/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H01J37/165—Means associated with the vessel for preventing the generation of or for shielding unwanted radiation, e.g. X-rays

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE19722238896 1972-08-07 1972-08-07 Korpuskularstrahlgerät, insbesondere Elektronenmikroskop Expired DE2238896C3 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19722238896 DE2238896C3 (de) 1972-08-07 Korpuskularstrahlgerät, insbesondere Elektronenmikroskop
NL7310660A NL7310660A (de) 1972-08-07 1973-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722238896 DE2238896C3 (de) 1972-08-07 Korpuskularstrahlgerät, insbesondere Elektronenmikroskop

Publications (3)

Publication Number Publication Date
DE2238896A1 DE2238896A1 (de) 1974-03-07
DE2238896B2 true DE2238896B2 (de) 1976-03-25
DE2238896C3 DE2238896C3 (de) 1976-11-18

Family

ID=

Also Published As

Publication number Publication date
NL7310660A (de) 1974-02-11
DE2238896A1 (de) 1974-03-07

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee