DE2238896B2 - Korpuskularstrahlgeraet, insbesondere elektronenmikroskop - Google Patents
Korpuskularstrahlgeraet, insbesondere elektronenmikroskopInfo
- Publication number
- DE2238896B2 DE2238896B2 DE19722238896 DE2238896A DE2238896B2 DE 2238896 B2 DE2238896 B2 DE 2238896B2 DE 19722238896 DE19722238896 DE 19722238896 DE 2238896 A DE2238896 A DE 2238896A DE 2238896 B2 DE2238896 B2 DE 2238896B2
- Authority
- DE
- Germany
- Prior art keywords
- electron microscope
- beam device
- body beam
- particular electron
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
- H01J37/165—Means associated with the vessel for preventing the generation of or for shielding unwanted radiation, e.g. X-rays
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722238896 DE2238896C3 (de) | 1972-08-07 | Korpuskularstrahlgerät, insbesondere Elektronenmikroskop | |
NL7310660A NL7310660A (de) | 1972-08-07 | 1973-08-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722238896 DE2238896C3 (de) | 1972-08-07 | Korpuskularstrahlgerät, insbesondere Elektronenmikroskop |
Publications (3)
Publication Number | Publication Date |
---|---|
DE2238896A1 DE2238896A1 (de) | 1974-03-07 |
DE2238896B2 true DE2238896B2 (de) | 1976-03-25 |
DE2238896C3 DE2238896C3 (de) | 1976-11-18 |
Family
ID=
Also Published As
Publication number | Publication date |
---|---|
NL7310660A (de) | 1974-02-11 |
DE2238896A1 (de) | 1974-03-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C3 | Grant after two publication steps (3rd publication) | ||
E77 | Valid patent as to the heymanns-index 1977 | ||
8339 | Ceased/non-payment of the annual fee |