CN219342284U - Driving device and chemical vapor deposition equipment - Google Patents

Abstract

The utility model provides a driving device and chemical vapor deposition equipment, wherein the device comprises a support body and a driving component arranged in the support body; wherein, at least one transparent cover plate is arranged between the supporting bodies; the transparent cover is used for checking the action and the state of the driving assembly. The utility model can observe the current action and working state of the driving assembly in real time without opening the shell.

Description

Driving device and chemical vapor deposition equipment

Technical Field

The utility model relates to the technical field of semiconductor crystal processing, in particular to a driving device and chemical vapor deposition equipment.

Background

PECVD (Plasma Enhanced Chemical Vapor Deposition) is a vapor deposition apparatus using plasma-enhanced chemistry, which ionizes a gas containing atoms of a thin film component by means of microwaves or radio frequency, etc., to locally form a plasma, which has a strong chemical activity and easily reacts to deposit a desired thin film on a substrate. Among them, in order to enable chemical reactions to be performed at a low temperature, the reactivity of plasma is utilized to promote the reactions, and thus such CVD is called Plasma Enhanced Chemical Vapor Deposition (PECVD).

At present, a semiconductor wafer is usually reacted in a vibration disk, and the vibration disk is driven in a vibration way through a driving device, so that the operation safety of operators is ensured, the hands are prevented from being mistakenly clamped and injured, a protective cover is arranged on the outer side of the driving device, but the installation of the protective cover is inconvenient for the operators to observe the internal condition of the driving device timely, and the convenience cannot meet the requirements.

Therefore, there is a need for a driving device that can facilitate an operator to know the internal operation state of the driving device in time while ensuring safety.

Disclosure of Invention

In view of the above problems, the present utility model is directed to a driving device and a chemical vapor deposition apparatus, so as to solve the problem that the convenience is poor due to the fact that the protection cover needs to be removed to confirm the internal state of the driving device in the prior art.

The driving device provided by the utility model comprises a support body and a driving assembly arranged in the support body; wherein, at least one transparent cover plate is arranged between the supporting bodies; the transparent cover is used for checking the action and the state of the driving assembly.

In addition, the optional structural feature is that three supporting bodies are arranged, and a protective shell is respectively arranged between two adjacent supporting bodies; wherein, the protective shell on the front of the driving device adopts a transparent cover plate.

In addition, an optional structural feature is that the drive assembly comprises a driver, a drive shaft connected to the end of the driver, and a bellows sleeved outside the drive shaft; wherein the bellows can be extended or contracted under the action of the driving shaft.

In addition, the optional structural feature is that a first fixing hole is arranged on the side wall of the support body, and second fixing holes corresponding to the positions of the first fixing holes are arranged on two sides of the transparent cover plate; the transparent cover plate is fixedly connected with the support body through bolts penetrating through the second fixing holes and the first fixing holes.

Furthermore, an optional structural feature is that the transparent cover plate is a glass plate or a PC plate.

Furthermore, an optional structural feature is that the protective shell is a metal plate.

Furthermore, an optional structural feature is that the inner side wall of the protective housing is provided as a mirror structure.

In addition, the optional structural feature is that the device further comprises a top plate arranged on the top of the supporting body; wherein, be provided with the shaft hole on the roof, the drive shaft wears out and is connected with external vibration dish from the shaft hole in.

On the other hand, the utility model also provides chemical vapor deposition equipment, which comprises any one of the driving devices.

By using the driving device and the chemical vapor deposition equipment, a support body and a driving component positioned in the support body are arranged; wherein, be provided with at least one transparent apron between the support body, transparent lid can be in the assurance operating personnel hand safety, be convenient for look over drive assembly's inside action and state, need not to carry out dismantling and the installation of casing, simple structure and convenience are strong.

To the accomplishment of the foregoing and related ends, one or more aspects of the utility model comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the utility model. These aspects are indicative, however, of but a few of the various ways in which the principles of the utility model may be employed. Furthermore, the utility model is intended to include all such aspects and their equivalents.

Drawings

Other objects and attainments together with a more complete understanding of the utility model will become apparent and appreciated by referring to the following description taken in conjunction with the accompanying drawings. In the drawings:

fig. 1 is a perspective view of a driving apparatus according to an embodiment of the present utility model;

fig. 2 is a perspective view of a driving device according to an embodiment of the present utility model;

fig. 3 is a top view of a driving apparatus according to an embodiment of the present utility model.

The reference symbols in the drawings: 1. a support body; 2. a transparent cover plate; 3. a protective shell; 4. a top plate; 5. a bellows; 6. mirror structure.

The same reference numerals will be used throughout the drawings to refer to similar or corresponding features or functions.

Detailed Description

In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that such embodiment(s) may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.

In the description of the present utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. as indicated below, are based on the orientation or positional relationship shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the content or structure of the present utility model.

In order to solve the problems that in the existing driving scheme, in order to ensure the operation safety of operators and prevent hands from being mistakenly clamped and injured, a protective cover is usually arranged on the outer side of a driving device, but the installation of the protective cover is inconvenient for the operators to observe the internal condition of the driving device in time, the convenience cannot meet the requirements and the like, the utility model provides the driving device, which is provided with a supporting body and a driving component positioned in the supporting body; wherein, be provided with at least one transparent apron between the support body, transparent lid can be in the assurance operating personnel hand safety, be convenient for look over drive assembly's inside action and state, need not to carry out dismantling and the installation of casing, simple structure and convenience are strong.

In order to describe the structure of the driving device of the present utility model in detail, specific embodiments of the present utility model will be described in detail with reference to the accompanying drawings.

Fig. 1 to 3 show a perspective structure, and a top view structure of a driving device according to an embodiment of the present utility model, respectively.

As shown in fig. 1 to 3 together, the driving device according to the embodiment of the present utility model includes a support body 1, and a driving assembly disposed inside the support body 1; wherein, be provided with at least one transparent apron 2 between support body 1, the setting of transparent lid can be when protecting operating personnel, and the operating personnel of being convenient for looks over drive assembly's inside action and current state, need not to dismantle or install the inside state that can know drive assembly in real time of casing.

Specifically, three support bodies 1 are arranged, three support carriers are symmetrically distributed in the middle and the west, and a protective shell 3 is respectively arranged between two adjacent pairs of support bodies 1; wherein, the protective shell 3 positioned on the front of the driving device is arranged by adopting the transparent cover plate 2, and the two protective shells 3 at other positions can keep the previous structure.

Wherein, the driving assembly can further comprise a driver, a driving shaft connected to the end of the driver, and a corrugated pipe 5 sleeved outside the driving shaft; wherein the bellows 5 is extendable or contractible by a driving shaft which is reciprocally movable in a Z-axis direction at a high frequency, and which is adapted to vibrate a vibration plate on top of the driving shaft.

In order to fix the protective shell 3 and the transparent cover plate 2, a plurality of first fixing holes can be arranged on the side wall of the support body 1, and second fixing holes corresponding to the first fixing holes are arranged on two sides of the transparent cover plate 2; the transparent cover plate 2 and the supporting body 1 are fixedly connected through bolts penetrating through the second fixing holes and the first fixing holes, and the protective shell 3 can be fixed in a similar manner.

In order to achieve the perspective and structural strength of the transparent cover plate 2, the transparent cover plate 2 may be a plexiglass plate, a PC plate or other transparent material with a certain structural strength. And the protection plate can be made of an opaque metal plate structure.

In addition, in order to facilitate the operator to observe the inside of the driving assembly, two other protective cases 3 can be also set as the transparent cover plate 2, or the inner side walls of two other protective cases 3 are set as the mirror surface structure 6, so that the operator can view the structure of the hidden angle through the mirror surface structure 6 when observing the inside condition through the transparent cover plate 2.

In another embodiment of the present utility model, the driving device may further include a top plate 4 disposed at the top of the support body 1, and an axle hole is disposed on the top plate 4, and the driving shaft is limited in the axle hole and penetrates out of the axle hole to be connected with an external vibration disk, so as to drive the vibration disk and the wafer located in the vibration disk to vibrate under the action of the driving shaft.

Corresponding to the driving device, the utility model also provides chemical vapor deposition equipment which comprises the vibrating disk and the driving device arranged below the vibrating disk.

Specifically, embodiments of the chemical vapor deposition apparatus may refer to descriptions in embodiments of the driving device, which are not described herein in detail.

According to the driving device and the chemical vapor deposition equipment provided by the utility model, at least one transparent cover plate is arranged between the supporting bodies, so that the internal action and state of the driving assembly can be checked conveniently while the safety of the hands of operators is ensured, the disassembly and the installation of the shell are not needed when the starting and the corrugated pipe state are observed, and the device is simple in structure and high in convenience.

The driving apparatus and the chemical vapor deposition device according to the present utility model are described above by way of example with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that various modifications may be made to the drive apparatus and chemical vapor deposition apparatus as set forth above without departing from the spirit of the utility model. Accordingly, the scope of the utility model should be determined from the following claims.

Claims (9)

1. The driving device is characterized by comprising a supporting body and a driving assembly arranged in the supporting body; wherein,,

at least one transparent cover plate is arranged between the supporting bodies;

the transparent cover plate is used for checking the action and the state of the driving assembly.

2. The driving device according to claim 1, wherein,

three supporting bodies are arranged, and protective shells are respectively arranged between two adjacent supporting bodies; wherein, the protective shell positioned on the front surface of the driving device adopts the transparent cover plate.

3. The driving device according to claim 1, wherein,

the driving assembly comprises a driver, a driving shaft connected to the end part of the driver and a corrugated pipe sleeved outside the driving shaft; wherein,,

the bellows can be expanded or contracted under the action of the drive shaft.

4. The driving device according to claim 1, wherein,

the side wall of the support body is provided with a first fixing hole, and two sides of the transparent cover plate are provided with second fixing holes corresponding to the first fixing holes in position;

the transparent cover plate is fixedly connected with the support body through bolts penetrating through the second fixing holes and the first fixing holes.

5. The driving device according to claim 1, wherein,

the transparent cover plate is a glass plate or a PC plate.

6. The driving device according to claim 2, wherein,

the protective shell is a metal plate.

7. The driving device according to claim 2, wherein,

the inside wall of the protective shell is provided with a mirror surface structure.

8. The drive of claim 3, further comprising a top plate disposed atop said support body; wherein,,

the top plate is provided with a shaft hole, and the driving shaft penetrates out of the shaft hole and is connected with an external vibration disc.

9. A chemical vapor deposition apparatus comprising the drive device according to any one of claims 1 to 8.

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