CN217465697U - Optical displacement sensor - Google Patents
Optical displacement sensor Download PDFInfo
- Publication number
- CN217465697U CN217465697U CN202221621671.6U CN202221621671U CN217465697U CN 217465697 U CN217465697 U CN 217465697U CN 202221621671 U CN202221621671 U CN 202221621671U CN 217465697 U CN217465697 U CN 217465697U
- Authority
- CN
- China
- Prior art keywords
- superlens
- light beam
- detector
- displacement sensor
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 143
- 230000003287 optical effect Effects 0.000 title claims abstract description 72
- 239000002086 nanomaterial Substances 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 17
- 238000002834 transmittance Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000002310 reflectometry Methods 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000011358 absorbing material Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model provides an optical displacement sensor, wherein, this optical displacement sensor includes: the device comprises a light source, a super lens, a displacement reflecting layer and a detector; the super lens is arranged on the light emitting side of the light source, the displacement reflection layer is arranged on one side of the super lens far away from the light source in parallel, and the detector is arranged on one side of the super lens close to the light source; the light source is used for emitting an initial light beam; the super lens is used for transmitting one part of the initial light beam to the displacement reflection layer and reflecting the other part of the initial light beam to the detector; the displacement reflection layer is used for reflecting the incident light beam back to the super lens, performing phase modulation on the reflected light beam by the super lens and transmitting the modulated light beam to the detector; the detector is used for receiving part of the initial light beam and the modulated light beam. Through the embodiment of the utility model provides an optics displacement sensor adopts super lens as the important component among this optics displacement sensor, can improve the efficiency of diffraction, increases this optics displacement sensor's SNR, and its sensitivity is high, and is whole frivolous.
Description
Technical Field
The utility model relates to a super lens technical field particularly, relates to an optical displacement sensor.
Background
The existing optical displacement sensor is an optical device manufactured based on interference and diffraction optical principles. The reflection surface to be measured and the Fresnel diffraction lens form an FP (Fabry-Perot) cavity, the Fresnel lens is used for diffracting light beams to a corresponding detector based on diffraction, when the reflection surface has displacement, the length of the FP cavity is changed, so that light intensity received by the detector is changed, and the displacement of the reflection surface to be measured can be determined.
SUMMERY OF THE UTILITY MODEL
To solve the above problem, an object of the embodiments of the present invention is to provide an optical displacement sensor.
An embodiment of the utility model provides an optical displacement sensor, include: the displacement sensor comprises a light source, a superlens, a displacement reflecting layer and a detector; the super lens is arranged on the light emitting side of the light source, the displacement reflection layer is arranged on one side of the super lens far away from the light source in parallel, and the detector is arranged on one side of the super lens close to the light source; the light source is used for emitting an initial light beam; the superlens is used for transmitting one part of the initial light beam to the displacement reflection layer and reflecting the other part of the initial light beam to the detector; the displacement reflection layer is used for reflecting an incident light beam back to the super lens, performing phase modulation on the reflected light beam by the super lens to generate a modulated light beam, and transmitting the modulated light beam to the detector; the detector is used for receiving the part of the initial light beam directly reflected by the super lens and the part of the modulated light beam transmitted by the super lens.
Optionally, the superlens can diffract the light beam reflected by the displaced reflective layer to the detector at a target deflection angle.
Optionally, the number of superlenses is multiple, and the number of the detectors is the same as the number of the superlenses; the plurality of detectors correspond to the plurality of superlenses one to one, respectively.
Optionally, there is also a lens between two adjacent superlenses
The phase difference of (a); wherein n represents the number of superlenses in the optical displacement sensor.
Optionally, the detectors 4 are arranged in the focal plane of the corresponding superlens 2.
Optionally, the superlens comprises a plurality of nanostructures; a plurality of the nanostructures are arranged in an array; each of the nanostructures corresponds to a phase capable of being modulated, and the nanostructures can diffract the light beam reflected by the displacement reflection layer to the detector at the target deflection angle based on the phase.
Optionally, the phase of the nanostructure satisfies:
wherein,
representing the phase of the nanostructure corresponding to the (x, y) coordinate position of the superlens at focal length f; i represents the number of the superlens; x is the number of i Representing the distance in the x direction between the center of the ith said superlens and the center of the corresponding detector; y is i Representing the distance in the y direction between the center of the ith said superlens and the center of the corresponding detector; n represents the number of said superlenses; λ represents the wavelength of the light beam.
Optionally, the light source is disposed opposite to a central region surrounded by the plurality of superlenses, and the superlenses are not disposed in the central region.
Optionally, the light source and the plurality of detectors are inclined from high to low or from low to high in sequence.
Optionally, the superlens and the displacement reflective layer satisfy the formula: t is 1 ·(1+R 3 ·T 2 ) 1 ± Δ; wherein, T 1 The transmittance corresponding to the super lens transmitting a part of initial light beams to the displacement reflecting layer is represented; r 3 Representing the reflectivity of the displaced reflective layer; t is 2 Representing a transmittance corresponding to the superlens transmitting the modulated light beam to the detector; Δ represents an error smaller than a preset value.
Optionally, the optical displacement sensor further comprises: a bottom layer and a support layer; the bottom layer is used for placing the light source and the detector; the supporting layer is arranged between the bottom layer and the displacement reflection layer.
Optionally, the light source is a laser light source.
Optionally, the superlens further comprises: a filling material filled around the nanostructures; the filling material is transparent or semitransparent material in an operating waveband, and the absolute value of the difference between the refractive index of the filling material and the refractive index of the nano structure is greater than or equal to 0.5.
The embodiment of the utility model provides an in the scheme, adopt super lens as the important component part among this optics displacement sensor, compare in the fresnel lens that traditional scheme adopted, the optics displacement sensor who adopts super lens can improve the efficiency of diffraction, increases this optics displacement sensor's SNR, and its sensitivity is high, and is whole frivolous.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an optical displacement sensor according to an embodiment of the present invention;
fig. 2 is a schematic diagram illustrating an optical displacement sensor provided by an embodiment of the present invention, including a plurality of superlenses;
fig. 3 is a schematic diagram illustrating a superlens including a plurality of regions in an optical displacement sensor provided by an embodiment of the present invention;
fig. 4 is a top view of a superlens in an optical displacement sensor provided by an embodiment of the present invention;
fig. 5 is a schematic diagram illustrating an optical displacement sensor provided in an embodiment of the present invention, in which a superlens is not disposed in a central region;
fig. 6 is a schematic diagram illustrating an optical displacement sensor provided in an embodiment of the present invention, in which a light source and a plurality of detectors are arranged in an inclined manner from top to bottom;
fig. 7 is a schematic diagram of an optical displacement sensor according to an embodiment of the present invention, based on the principle of interference;
fig. 8 is a schematic structural diagram of an optical displacement sensor provided in an embodiment of the present invention, which includes a bottom layer and a supporting layer.
Icon:
1-light source, 2-super lens, 3-displacement reflecting layer, 4-detector, 5-bottom layer, 6-supporting layer and 21-nano structure.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
An embodiment of the utility model provides an optical displacement sensor, it is shown with reference to fig. 1, this optical displacement sensor includes: the device comprises a light source 1, a super lens 2, a displacement reflecting layer 3 and a detector 4; the super lens 2 is arranged on the light emitting side of the light source 1, the displacement reflection layer 3 is arranged on one side of the super lens 2 far away from the light source 1 in parallel, and the detector 4 is arranged on one side of the super lens 2 close to the light source 1; the light source 1 is shown in fig. 1 with its light exit side on the upper side.
As shown in fig. 1, a light source 1 is used to emit an initial light beam; the superlens 2 is used for transmitting one part of the initial light beam to the displacement reflection layer 3 and reflecting the other part of the initial light beam to the detector 4; the displacement reflection layer 3 is used for reflecting the incident light beam back to the super lens 2, performing phase modulation on the reflected light beam by the super lens 2 to generate a modulated light beam, and transmitting the modulated light beam to the detector 4; the detector 4 is used to receive the part of the initial beam directly reflected by the superlens 2 and the modulated beam transmitted by the superlens 2.
In the optical displacement sensor provided by the embodiment of the present invention, the light source 1 can emit an initial light beam to the superlens 2 disposed on the light emitting side thereof, optionally, the light source 1 is a laser light source; the light source 1 may be a semiconductor laser, so that the emitted initial light beam is a laser beam. For example, the light source 1 may be a vertical cavity laser; wherein, the laser that vertical cavity laser emitted can be jetted out by the top surface of perpendicular to integrated circuit, can realize high density array's integration very easily, can realize higher power output, makes the embodiment of the utility model provides a light source 1 that uses light-emitting effect is better.
In the embodiment of the present invention, the initial light beam may form a partial reflection on the surface of the superlens 2 (e.g. the side of the superlens 2 close to the light source 1, which is shown as the lower side of the superlens 2 in fig. 1), for example, the superlens 2 may reflect part of the initial light beam directly to the detector 4; the detector 4 is disposed at a side of the superlens 2 close to the light source 1, that is, the detector 4 and the light source 1 are both disposed at the same side of the superlens 2. In the embodiment of the present invention, the light source 1 can transmit to the surface of the displacement reflection layer 3 disposed on one side of the superlens 2 away from the light source 1 through the superlens 2 to another part of the initial light beam emitted from the superlens 2, i.e. another part of the initial light beam which is not reflected by the superlens 2 (for convenience of description, the loss of light is not considered in the embodiment). Wherein, the plane of the displacement reflection layer 3 and the plane of the super lens 2 are two planes parallel to each other; this displacement reflection stratum 3 is one kind can follow the reflection stratum that this super lens 2 of perpendicular to place planar direction removed (as in fig. 1, this displacement reflection stratum 3 can be followed the dotted line direction and reciprocated), the embodiment of the utility model provides an, displacement reflection stratum 3 and super lens 2 form the FP chamber, can confirm the change of the chamber length in the inside FP chamber of this optical displacement sensor to the removal of this displacement reflection stratum 3 to the light intensity that makes and kicks into detector 4 produces the change, the displacement volume of this displacement reflection stratum 3 of final determination.
The embodiment of the utility model provides an in, this displacement reflection stratum 3 can directly reflect this part initial beam of penetrating into wherein back this super lens 2, makes this part initial beam reflect to a side surface that light source 1 was kept away from to super lens 2 promptly to this part initial beam that makes the reflection back this super lens 2 can be modulated (phase modulation) by this super lens 2, forms the modulation light beam (the partial initial beam after the phase modulation), and transmits to this detector 4. Since the initial light beam emitted to the superlens 2 forms a partial reflection and a partial transmission on its surface (e.g. a surface of the superlens 2 near the light source 1), the light beam received by the detector 4 can be divided into two parts, the first part is a partial initial light beam directly reflected on a side of the superlens 2 near the light source 1, and the second part is a modulated light beam transmitted from a side of the superlens 2 near the light source 1.
The embodiment of the utility model provides an adopt super lens 2 as the important component in this optics displacement sensor, compare in the fresnel lens that traditional scheme adopted, adopt super lens 2's optics displacement sensor can improve the efficiency of diffraction, increase this optics displacement sensor's SNR, its sensitivity is high, and is whole frivolous.
Alternatively, the superlens 2 can diffract the light beam reflected by the displacement reflection layer 3 to the detector 4 at a target deflection angle.
Wherein, another part of the initial light beam reflected to the superlens 2 by the displacement reflection layer 3 can form a modulated light beam after the phase modulation of the superlens 2, and the modulated light beam is a modulated light beam which can emit to the detector 4 at a specific emitting angle, wherein the specific emitting angle is described as a target deflection angle in the embodiment of the present invention, and the modulated light beam is a light beam diffracted to the detector 4 at the target deflection angle, and the specific size of the target deflection angle can be determined according to the specific position of the corresponding detector 4.
The embodiment of the utility model provides a make modulation light beam with target deflection angle directive detector 4, another part initial beam that makes the transmission go out at displacement reflection stratum 3 and reflection in other words can be concentrated and assemble on detector 4, has controlled the light path direction that is not directly reflected to another part initial beam of detector 4 for this part initial beam can also be accurately received to this detector 4, is favorable to the displacement volume of this displacement reflection stratum 3 of follow-up definite.
Alternatively, referring to fig. 2, the number of the superlenses 2 is multiple, and the number of the detectors 4 is the same as the number of the superlenses 2; the plurality of detectors 4 correspond to the plurality of superlenses 2 one to one, respectively.
The embodiment of the utility model provides an in, the quantity of super lens 2 is a plurality of respectively with the quantity of detector 4, and the two quantity equals, can form the relation of one-to-one. The one-to-one correspondence relationship formed between the superlens 2 and the detector 4 can be understood as follows: the reflected part of the primary light beam and the transmitted modulated light beam on the side surface of the super lens 2 close to the light source 1 are both directed to a corresponding detector 4, and the detector 4 can receive the light beam (the reflected part of the primary light beam or the transmitted modulated light beam) emitted by the super lens 2 corresponding to the detector 4. For example, the optical displacement sensor shown in fig. 2 includes 3 superlenses 2, i.e., a superlens 2a, a superlens 2b, and a superlens 2c, which are connected in parallel and have a circular structure (as shown in fig. 2, the 3 superlenses 2 may be horizontally disposed on a transparent support); correspondingly, the optical displacement sensor comprises 3 detectors 4, 4a, 4b and 4 c; wherein, the detector 4a can be used for receiving the light beam (reflected partial initial light beam or transmitted modulated light beam) emitted by the side of the superlens 2a close to the light source 1, the detector 4b can be used for receiving the light beam (reflected partial initial light beam or transmitted modulated light beam) emitted by the side of the superlens 2b close to the light source 1, and the detector 4c can be used for receiving the light beam (reflected partial initial light beam or transmitted modulated light beam) emitted by the side of the superlens 2c close to the light source 1.
Further, referring to fig. 3, in the optical displacement sensor provided in the embodiment of the present invention, the superlens 2 may also be a superlens 2 capable of dividing a plurality of different regions on its surface, and the superlens 2 of each region may correspond to one detector 4, that is, the number of detectors 4 in the optical displacement sensor is the same as the number of regions divided on the superlens 2. Since a plurality of regions are divided based on the whole superlens 2, the embodiment of the present invention may also refer to a region of the superlens 2 as a superlens 2, for example, the superlens 2 in the optical displacement sensor shown in fig. 3 may be divided into 3 parallel regions, for example, the 3 regions may be respectively referred to as a superlens 2d, a superlens 2e and a superlens 2f (as shown in fig. 3, the superlens 2 may be horizontally disposed on a transparent support); correspondingly, the optical displacement sensor comprises 3 detectors 4, 4d, 4e and 4 f; wherein, the detector 4d can be used for receiving the light beam (reflected part of the original light beam or transmitted modulated light beam) emitted by the side of the superlens 2d close to the light source 1, the detector 4e can be used for receiving the light beam (reflected part of the original light beam or transmitted modulated light beam) emitted by the side of the superlens 2e close to the light source 1, and the detector 4f can be used for receiving the light beam (reflected part of the original light beam or transmitted modulated light beam) emitted by the side of the superlens 2f close to the light source 1.
Because, only adopt under the condition of a super lens 2 and a detector 4 at optical displacement sensor, it can have dynamic detection range narrow, and sensitivity is low grade defect, consequently, the embodiment of the utility model provides a can be through increasing the number of mated super lens 2 and detector 4 (or the number of regional and detector 4 on the super lens 2) to a plurality of super lens 2 carry out the mode of making up, enlarge this optical displacement sensor's dynamic detection range, improve its sensitivity.
Optionally, two adjacent superlenses 2 are also provided with
The phase difference of (a); where n denotes the number of superlenses 2 in the optical displacement sensor.
The embodiment of the utility model provides an under the condition that optical displacement sensor includes a plurality of super lens 2 and a plurality of detector 4, there is the phase difference between two super lens 2, and the size of this phase difference is
Wherein n represents the superlens 2 of the optical displacement sensorIn the case where the optical displacement sensor includes 3 superlenses 2, for example, the phase difference between two adjacent superlenses 2 is
Namely, it is
For example, in the optical displacement sensor shown in fig. 2, the phase difference between the superlens 2a and the superlens 2b is
The phase difference between the superlens 2b and the superlens 2c is also
Accordingly, the phase difference between the superlens 2a and the superlens 2c is
The embodiment of the utility model provides a be different from the traditional initial position through setting up different lenses, apply the structure of phase difference according to not co-altitude, the embodiment of the utility model provides an optical displacement sensor is direct with the phase difference additional in the design of surpassing lens 2, if direct preparation has super lens 2 of this phase difference, so both guaranteed the phase accuracy, on the other hand should surpass lens 2 with its unified hardware height, can make this optical displacement sensor's course of working simple, easy volume production.
Optionally, the detector 4 is arranged in the focal plane of the corresponding superlens 2. Each detector 4 can be respectively arranged on the focal plane of the corresponding superlens 2, as shown in fig. 2, the focal length of each superlens 2 in fig. 2 is equal, and since the superlenses 2 are coplanar, each respectively corresponding detector 4 can be arranged on the same plane to correspondingly receive the light beam (reflected partial initial light beam or transmitted modulated light beam) emitted by the respectively corresponding superlens 2, and the optical displacement sensor has a more regular structure and is suitable for various installation environments.
Alternatively, as shown in fig. 4, the superlens 2 includes a plurality of nanostructures 21, and the plurality of nanostructures 21 are arranged in an array; each nanostructure 21 corresponds to a phase that can be modulated, and the nanostructure 21 can diffract the light beam reflected by the displacement reflective layer 3 to the corresponding detector 4 at the target deflection angle based on the phase.
In the optical displacement sensor provided in the embodiment of the present invention, the plurality of nanostructures 21 in the superlens 2 are arranged in an array (as shown in fig. 4); accordingly, a front view of the superlens 2 can be seen in fig. 2, which is a superlens 2. Each nanostructure 21 corresponds to a phase that can be modulated, for example, each square nanostructure 21 in fig. 4 may correspond to a phase. Each nanostructure 21 in the superlens 2 has a function of enabling the light beam reflected by the displacement reflection layer 3 and incident therein to be modulated into a modulated light beam through the phase modulation, and to be emitted to the detector 4 at the target deflection angle.
The embodiment of the utility model provides an optical displacement sensor can be based on a plurality of nano-structures 21 that it has, will be by the light beam modulation that displacement reflection stratum 3 reflects back for the modulation light beam that jets out with target deflection angle to the realization is with this modulation light beam directive detector 4's function.
Optionally, the superlens 2 further comprises: a filler material filled around the nanostructures 21; the filling material is a transparent or translucent material in the operating band, and the absolute value of the difference between the refractive index of the filling material and the refractive index of the nanostructures 21 is greater than or equal to 0.5.
The filling material filled around the nano-structure 21 is also a transparent or semitransparent material in the working wavelength band, i.e. the filling material has high transmittance or transmittance of 40% -60% to the light (such as visible light) in the working wavelength band, so as to protect the nano-scale nano-structure 21. The absolute value of the difference between the refractive index of the filling material and the refractive index of the nanostructures 21 is greater than or equal to 0.5 to avoid the filling material from affecting the light modulation effect.
Alternatively,the phase of the nanostructure 21 satisfies:
wherein,
represents the phase of the nanostructure 21 corresponding to the (x, y) coordinate position of the superlens 2 at focal length f; i represents the number of the superlens 2; x is the number of i Represents the distance in the x direction between the center of the ith superlens 2 and the center of the corresponding detector 4; y is i Represents the distance in the y direction between the center of the ith superlens 2 and the center of the corresponding detector 4; n represents the number of superlenses 2; λ represents the wavelength of the light beam.
In the case that the optical displacement sensor includes a plurality of superlenses 2, if the phases corresponding to the nanostructures 21 with different coordinates are to be determined, the phases can be calculated according to the specific positions of the nanostructures 21 on the superlens 2 to be determined, the distance between the center of the superlens 2 corresponding to the nanostructures 21 and the center of the matched detector 4 in the x direction, the distance between the center of the superlens 2 corresponding to the nanostructures 21 and the center of the matched detector 4 in the y direction, the focal length of the superlens 2 where the nanostructures 21 are located, and the phase difference between the superlens 2 where the nanostructures 21 are located and the superlens 2 with the smallest number, and other relevant data.
In the embodiment of the present invention, each superlens 2 may be numbered separately, that is, the number corresponding to the superlens 2 may be represented by i, and for example, the numbers corresponding to 3 superlenses 2 included in the optical displacement sensor are i ═ 1, i ═ 2, and i ═ 3, respectively. Wherein the phases of the nanostructures 21 of different coordinates satisfy the following equation:
from this equation, the phase associated with each nanostructure 21 that can function to direct a modulated beam at a target deflection angle to a corresponding detector 4 can be determined. Where (x, y) is used to indicate the desired determined phase
The specific position of the nanostructure 21 on the superlens 2 with focal length f, i.e. the coordinates of the nanostructure 21; n is used to indicate the number of superlenses 2 included in the optical displacement sensor, for example, when the optical displacement sensor includes 3 superlenses 2, n is 3; x is the number of i Denotes the distance in the x-direction, y, between the center of the ith superlens 2 and the center of the corresponding detector 4 i Indicates the distance between the center of the ith superlens 2 and the center of the corresponding detector 4 in the y direction, so that the x direction can be passed i 、y i And f, determining a target deflection angle theta corresponding to the ith super lens 2 i 。
For example, as shown in fig. 2, when the superlens 2 and the corresponding detector 4 are at the same position in the y direction, the above equation can be simplified as:
at this time, the target deflection angle θ i Satisfies the relation:
for example, when the optical displacement sensor includes 3 superlenses 2, and numbers 1, 2, and 3 corresponding to the 3 superlenses 2 are provided, θ 1 A target deflection angle corresponding to the modulated light beam transmitted by the superlens 2 (in which the nano-structure 21 is located) with the number 1 to the detector 4; theta 2 A target deflection angle corresponding to the modulated light beam transmitted by the superlens 2 (in which the nanostructure 21) with the number 2 toward the detector 4 is represented; theta 3 Modulation of the transmission of the superlens 2 (of which the nanostructures 21) numbered 3 towards the detector 4A target deflection angle corresponding to the light beam; wherein, the target deflection angles theta corresponding to different superlenses 2 are respectively i Can be determined according to the specific position of the detector 4 corresponding to the position (e.g. the plane of the detector 4 is the focal plane of the corresponding superlens 2, and the distance between the center of the detector 4 and the center of the corresponding superlens 2 in the x direction) that is determined by
Can determine theta i Is a known parameter; λ represents the wavelength of the modulated light beam, e.g. the wavelength of the initial light beam emitted by the light source 1. By calculating this equation, the phase of the nanostructures 21 that can achieve the above-described modulation effect (i.e., directing the modulated beam at the target deflection angle to the corresponding detector 4) can be determined
The embodiment of the utility model provides a can be more accurate confirm the phase place that each nanostructure 21 corresponds, and this kind of optical displacement sensor can be according to actual need, and the overall arrangement has different phase's nanostructure 21 in different super lens 2.
Alternatively, as shown in fig. 5, the light source 1 is disposed opposite to a central region surrounded by the plurality of superlenses 2, and the superlenses 2 are not disposed in the central region.
The embodiment of the utility model provides an under optical displacement sensor includes a plurality of super lens 2's the condition, because the initial beam of light source 1 directive is 2 to a plurality of super lens, have partly initial beam directly by these super lens 2 reflect respectively to corresponding detector 4 in, if this moment by these super lens 2 partial initial beam reflection that reflect respectively get into light source 1, can produce the influence to this light source 1, this influence is light then reduces the life of this light source 1, then will directly burn out this light source 1 heavy.
Therefore, in order to protect the light source 1, the embodiment of the present invention may not provide any superlens 2 at the central region surrounded by the plurality of superlenses 2, and the light source 1 may be disposed opposite to the central region; for example, referring to fig. 5, the light source 1 may be disposed at a central position of the bottom of the optical displacement sensor, and the central position corresponds to a central area surrounded by a plurality of superlenses 2, and since the superlenses 2 are not disposed in the central area according to the embodiment of the present invention, for example, a light absorbing material capable of completely absorbing the initial light beam may be disposed in the central area, so that the initial light beam emitted to the central area may be absorbed by the light absorbing material, and is prevented from being directly reflected back to the light source 1; alternatively, the light absorbing material may be disposed in the central region of the displacement reflection layer 3, so that the initial light beam passes through the central region surrounded by the plurality of superlenses 2 (empty, without disposing the superlenses 2), and when the initial light beam is emitted to the central region of the displacement reflection layer 3, the initial light beam may be absorbed by the light absorbing material, thereby preventing the initial light beam from being directly reflected back to the light source 1. Therefore, when the light source 1 emits the initial light beam to the plurality of superlenses 2, the reflected light reflected into the light source 1 can be effectively reduced, and the light source 1 is protected.
Alternatively, as shown in fig. 6, the light source 1 and the plurality of detectors 4 are tilted from high to low or from low to high in sequence.
The embodiment of the utility model provides a concrete structure that can protect light source 1 is still provided, as shown in fig. 6, can set up light source 1 and a plurality of detector 4 in this optics displacement sensor bottom slope, for example can arrange in proper order from high to low or from low to high and set up light source 1 and a plurality of detector 4 for by the initial beam of this light source 1 transmission, can not shine back in this light source 1, but on a plurality of detectors 4 of directive as far as possible, in order to realize the effect of protection light source 1.
Alternatively, the superlens 2 and the displacement reflection layer 3 satisfy the formula: t is 1 ·(1+R 3 ·T 2 ) 1 ± Δ; wherein, T 1 The transmittance corresponding to the super lens 2 transmitting a part of the initial light beam to the displacement reflection layer 3 is shown; r 3 Represents the reflectance of the displacement reflection layer 3; t is 2 The transmittance corresponding to the modulated light beam transmitted by the superlens 2 to the detector 4 is shown; Δ represents an error smaller than a preset value.
Because the embodiment of the utility model provides a be based on the interference principle, consequently, for forming good interference effect, need ask directly to reflect to the partial initial beam of detector 4 by super lens 2, and by super lens 2 with the transmission of target deflection angle to the modulation light beam of detector 4, the amplitude or the intensity of these two bundles of light keep unanimous as far as possible (as shown in fig. 7, two dotted lines represent two bundles of light above-mentioned respectively in fig. 7), with better this interference principle of satisfying, make this optical displacement sensor's signal-to-noise ratio can improve, its sensitivity is also higher.
Therefore the embodiment of the utility model provides an adopted super lens 2 should satisfy the mathematical relation formula to the transmissivity of different light beams to and between the reflectivity of displacement reflection stratum 3: t is 1 ·(1+R 3 ·T 2 ) 1 ± Δ; wherein, the transmittance of the superlens 2 corresponding to a part of the initial light beam can be T 1 Is represented by, i.e. T 1 The transmittance of the superlens 2 when transmitting a part of the initial light beam to the displacement reflection layer 3; the transmittance of the superlens 2 corresponding to the modulated light beam can be T 2 Is represented by, i.e. T 2 The transmittance of the modulated light beam transmitted to the detector 4 at the target deflection angle corresponding to the superlens 2; the reflectivity of the displacement reflection layer 3 can be R for the part of the initial light beam incident into the displacement reflection layer 3 And (4) showing. In the equation, Δ represents an error smaller than a preset value, that is, 1 ± Δ may be a preset range; for example, Δ may be a predetermined value such as 0.1, i.e., the expression is T 1 ·(1+R 3 ·T 2 ) 1 ± 0.1, i.e. the smaller Δ, the closer the result of the equation is to 1, e.g. T 1 ·(1+R 3 ·T 2 ) 1. The embodiment of the present invention provides an optical displacement sensor, wherein the superlens 2 and the displacement reflection layer 3 satisfy the above formula, and the superlens 2 directly reflects the partial initial beam to the detector 4 and is transmitted to the modulation beam of the detector 4 at the target deflection angle by the superlens 2, and the intensity of the two interference lights is closer, and the interference effect is better.
Further, when the optical displacement sensor has a plurality of superlenses 2 and a plurality of detectors 4, the light intensity received by each detector 4 satisfies the formula:
wherein n represents n superlenses 2 in total, and the numbers of the superlenses 2 are sequentially increased from 0; a. the n-1 Representing the intensity of light received by the detector 4 numbered n-1, the detector 4 numbered n-1 being the detector 4 corresponding to the superlens 2 numbered n-1; epsilon is the displacement to be measured; i is the intensity of the light emitted by the light source 1. Based on the above formula, the light intensity received by different detectors 4 can be determined by using an n-step phase shift method, so as to determine the displacement epsilon generated by the displacement reflection layer 3.
Optionally, as shown in fig. 8, the optical displacement sensor further includes: a bottom layer 5 and a support layer 6; the bottom layer 5 is used for placing the light source 1 and the detector 4; the support layer 6 is disposed between the bottom layer 5 and the displacement reflection layer 3.
Wherein, the bottom layer 5 is arranged at the bottom of the optical displacement sensor and is used for arranging the light source 1 and the detector 4 on the surface of the bottom layer 5 (such as the upper side surface of the bottom layer 5 in fig. 8); in order to enhance the stability of the optical displacement sensor, the embodiment of the present invention may vertically arrange the supporting layer 6 between the displacement reflecting layer 3 and the bottom layer 5, so that the supporting layer 6 can support the whole optical displacement sensor, thereby enhancing the stability thereof; the optical displacement sensor package can be fixed to an integrated structure by the support layer 6, the bottom 5, and the displacement reflection layer 3.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the technical solutions of the changes or replacements within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (13)
1. An optical displacement sensor, comprising: the device comprises a light source (1), a super lens (2), a displacement reflecting layer (3) and a detector (4); the super lens (2) is arranged on the light emitting side of the light source (1), the displacement reflection layer (3) is arranged on one side, far away from the light source (1), of the super lens (2) in parallel, and the detector (4) is arranged on one side, close to the light source (1), of the super lens (2);
the light source (1) is used for emitting an initial light beam;
the superlens (2) is used for transmitting one part of the initial light beam to the displacement reflection layer (3) and reflecting the other part of the initial light beam to the detector (4);
the displacement reflection layer (3) is used for reflecting an incident light beam back to the super lens (2), the super lens (2) is used for carrying out phase modulation on the reflected light beam to generate a modulated light beam, and the modulated light beam is transmitted to the detector (4);
the detector (4) is used for receiving part of the initial light beam directly reflected by the superlens (2) and the modulated light beam transmitted by the superlens (2).
2. The optical displacement sensor according to claim 1, wherein the superlens (2) is capable of diffracting the light beam reflected back by the displacement reflective layer (3) to the detector (4) at a target deflection angle.
3. The optical displacement sensor according to claim 2, characterized in that the number of superlenses (2) is plural, the number of detectors (4) corresponding to the number of superlenses (2); the plurality of detectors (4) are in one-to-one correspondence with the plurality of superlenses (2).
4. Optical displacement sensor according to claim 3, characterized in that between two adjacent superlenses (2) there is a superlens
The phase difference of (a); wherein n represents the number of superlenses (2) in the optical displacement sensor.
5. Optical displacement sensor according to claim 4, characterized in that the detector (4) is arranged in the focal plane of the corresponding superlens (2).
6. Optical displacement sensor according to claim 5, characterized in that the superlens (2) comprises a plurality of nanostructures (21); a plurality of the nanostructures (21) are arranged in an array;
each nanostructure (21) corresponds to a phase that can be modulated, and the nanostructures (21) can diffract the light beam reflected by the displacement reflection layer (3) to the detector (4) at the target deflection angle based on the phase.
7. Optical displacement sensor according to claim 6, in which the phase of the nanostructures (21) is such that:
wherein,
-representing the phase of said nanostructure (21) corresponding to the (x, y) coordinate position of the superlens (2) at a focal length f; i represents the number of the superlens (2); x is the number of i Represents the distance in the x direction between the center of the ith superlens (2) and the center of the corresponding detector (4); y is i Represents the distance between the center of the ith super lens (2) and the center of the corresponding detector (4) in the y direction; n represents the number of said superlenses (2); λ represents the wavelength of the light beam.
8. Optical displacement sensor according to claim 3, characterized in that the light source (1) is arranged opposite a central area surrounded by a plurality of superlenses (2), and that the central area is free of the superlenses (2).
9. Optical displacement sensor according to claim 3, characterized in that the light source (1) and the plurality of detectors (4) are arranged inclined in sequence from high to low or from low to high.
10. Optical displacement sensor according to claim 1, characterized in that the superlens (2) and the displacement reflective layer (3) satisfy the formula: t is 1 ·(1+R 3 ·T 2 )＝1±Δ；
Wherein, T 1 Represents the transmittance corresponding to the transmission of a part of the initial light beam by the superlens (2) to the displacement reflection layer (3); r 3 Representing the reflectivity of the displacement reflective layer (3); t is 2 Represents the transmittance corresponding to the transmission of the modulated light beam by the superlens (2) to the detector (4); Δ represents an error smaller than a preset value.
11. The optical displacement sensor according to claim 1, further comprising: a bottom layer (5) and a support layer (6);
the bottom layer (5) is used for placing the light source (1) and the detector (4);
the supporting layer (6) is arranged between the bottom layer (5) and the displacement reflection layer (3).
12. Optical displacement sensor according to claim 1, characterized in that the light source (1) is a laser light source.
13. The optical displacement sensor according to claim 6, wherein the superlens (2) further comprises: a filler material filled around the nanostructures (21);
the filling material is a transparent or semitransparent material in an operating waveband, and the absolute value of the difference between the refractive index of the filling material and the refractive index of the nano structure (21) is greater than or equal to 0.5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221621671.6U CN217465697U (en) | 2022-06-27 | 2022-06-27 | Optical displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221621671.6U CN217465697U (en) | 2022-06-27 | 2022-06-27 | Optical displacement sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217465697U true CN217465697U (en) | 2022-09-20 |
Family
ID=83240013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221621671.6U Active CN217465697U (en) | 2022-06-27 | 2022-06-27 | Optical displacement sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217465697U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
-
2022
- 2022-06-27 CN CN202221621671.6U patent/CN217465697U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217465697U (en) | Optical displacement sensor | |
| EP3819688B1 (en) | Waveguide and light projecting system | |
| CN102576266B (en) | To position encoded device, system and the method for object | |
| EP0390092B1 (en) | Encoder | |
| US8816269B2 (en) | Reflective optical scale for encoder and reflective optical encoder | |
| CN217823690U (en) | Semiconductor laser light source, light source array and multi-line laser radar system | |
| CN217820829U (en) | Coaxial multiline laser radar system of receiving and dispatching | |
| JP2006317244A5 (en) | ||
| US11536981B2 (en) | Diffractive optical element, projection device, and measurement device | |
| CN217467162U (en) | Laser radar transmitting system based on super lens and laser radar | |
| CN217456368U (en) | Unmanned aerial vehicle with landing laser radar system | |
| JPWO2006006342A1 (en) | Optical encoder | |
| CN216345776U (en) | Spectrum simulation system | |
| CN217821071U (en) | Two-photon microscope and sample detection system | |
| CN217820943U (en) | ToF emission module and electronic equipment comprising same | |
| CN115113174A (en) | Angle amplifier, transmitting system and design method of angle amplifier | |
| CN1293367C (en) | Reference point talbot encoder | |
| GB2284259A (en) | Source collimating reflecting arrangement for a photoelectric encoder | |
| CN107421464B (en) | High-precision interference-type dibit phase grating displacement sensor for measuring surface form | |
| CN108803067A (en) | A kind of optical depth camera and its signal optical source processing method | |
| WO2024045600A1 (en) | Multi-wavelength scanning apparatus, manufacturing method, lidar and transmission module | |
| US11276986B2 (en) | Photo-sensing reflectors for compact display module assembly comprising a reflective coating on a light receiving surface of a reflective photodiode | |
| CN111610534A (en) | Image forming apparatus and image forming method | |
| US20230244008A1 (en) | Surface light source projection device | |
| US11409111B2 (en) | Photo-sensing reflectors for compact display module assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |