CN216355281U - Optical fiber amplifier - Google Patents
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- CN216355281U CN216355281U CN202123251616.0U CN202123251616U CN216355281U CN 216355281 U CN216355281 U CN 216355281U CN 202123251616 U CN202123251616 U CN 202123251616U CN 216355281 U CN216355281 U CN 216355281U
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 34
- 239000000835 fiber Substances 0.000 claims abstract description 57
- 230000003287 optical effect Effects 0.000 claims abstract description 24
- 230000008878 coupling Effects 0.000 claims description 48
- 238000010168 coupling process Methods 0.000 claims description 48
- 238000005859 coupling reaction Methods 0.000 claims description 48
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- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000003780 insertion Methods 0.000 abstract description 5
- 230000037431 insertion Effects 0.000 abstract description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
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- 239000005331 crown glasses (windows) Substances 0.000 description 1
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- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 1
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Abstract
The present invention provides an optical fiber amplifier comprising: a super-surface based light converging coupler and a doped fiber; the light converging coupler is used for converging signal light and pump light which are incident to the light inlet side of the light converging coupler to a converging point, and the converging point is positioned on the light outlet side of the light converging coupler; the light input end of the doped fiber is located at the convergence point. According to the optical fiber amplifier provided by the embodiment of the utility model, the optical convergence coupler is manufactured based on the super-surface technology, and the optical convergence coupler can couple signal light and pump light into the doped optical fiber to realize optical signal amplification. The optical fiber amplifier has small size and is convenient to integrate; the optical fiber amplifier is simple to process, has low requirement on precision and large processing tolerance, and has good performance indexes such as insertion loss and crosstalk.
Description
Technical Field
The utility model relates to the technical field of optical communication, in particular to an optical fiber amplifier.
Background
An Optical Fiber amplifier (Optical Fiber amplifier, abbreviated as OFA) is a new type of amplifier capable of amplifying signals. The conventional optical fiber amplifier includes one signal light path and one pump light path, and the two light paths can enter the optical combiner to couple the signal light and the pump light. The light beam combiner can be realized through a traditional light path, but the light beam combiner has larger volume, is difficult to realize integration and miniaturization, and has a more complex system. The other type is represented by fused biconical taper, and the coupling is realized by modifying an optical fiber structure. The signal light and the pump light enter a wavelength division multiplexing coupler (wavelength division multiplexing coupler) in a fiber fused tapering mode, and the signal light and the pump light are coupled.
The WDM coupler is a five-core multi-core few-mode fiber with a cross-sectional view as shown in FIG. 1, in which cores 1-4 (diameter a) are used for transmitting LP01Pump light of mode, core 5 for transmitting LP01,LP11,LP21,LP02Signal light of a pattern. When the distance d between the core 5 and the cores 1 to 4 is smaller than a certain value, the signal light and the pump light are coupled, and the coupled light is transmitted to the erbium-doped fiber to realize light amplification.
The optical fiber amplifier can realize extremely high coupling efficiency, extremely low insertion loss and crosstalk under an ideal state, however, according to error analysis in related work, the core diameter a of the wavelength division multiplexing coupler is about 3 mu m, the core diameter changes by 10nm, and the coupling efficiency is reduced by 50%; that is, the allowable error is much less than 0.3%; in fig. 1, d, i.e., the core pitch, is about 16 μm, and when the variation range is 700nm, the coupling efficiency is reduced by 20%, and the allowable processing error is less than 4%. From these data, it can be seen that the structure requires extremely high processing technology, and the performance is extremely sensitive to the structural parameters, so that it is difficult to achieve the desired effect in practical use.
SUMMERY OF THE UTILITY MODEL
To solve the above problems, it is an object of the embodiments of the present invention to provide an optical fiber amplifier.
In a first aspect, an embodiment of the present invention provides an optical fiber amplifier, including: a super-surface based light converging coupler and a doped fiber;
the light converging coupler is used for converging signal light and pump light which are incident to the light inlet side of the light converging coupler to a converging point, and the converging point is positioned on the light outlet side of the light converging coupler;
the light input end of the doped fiber is located at the convergence point.
Optionally, the light converging coupler comprises a super-surface coupling element and a converging element;
the super-surface coupling element is used for converting the incident signal light and the incident pump light into parallel light and emitting the parallel light;
the converging element is used for converging the light rays emitted by the super-surface coupling element to the converging point.
Optionally, the first light ray is directed towards the super-surface coupling element at normal incidence and the second light ray is directed towards the super-surface coupling element at an oblique angle;
the first light is one of the signal light and the pump light, and the second light is the other of the signal light and the pump light.
Optionally, the super-surface coupling element comprises a plurality of super-surface structure units;
the phase of the super-surface structure unit for regulating and controlling the first light ray is as follows:
the phase of the super-surface structure unit for regulating and controlling the second light ray is as follows:
wherein r isiDenotes the distance, λ, between a super-surface-structure-unit i and the distribution center of the same said super-surface-structure-unit1Represents the wavelength of the first light ray,where θ represents an angle of incidence of the second light ray incident to the super-surface coupling element.
Optionally, the super-surface coupling element comprises a transparent base layer and a plurality of nanostructures disposed on the transparent base layer.
Optionally, a transparent filler is disposed around the nano-structure, and a difference between a refractive index of the filler and a refractive index of the nano-structure is greater than or equal to 0.5.
Optionally, the converging element comprises a convex lens and/or a super surface element capable of converging light.
Optionally, the fiber amplifier further comprises an isolator; and the optical output end of the doped optical fiber is connected with the isolator.
Optionally, the doped fiber comprises: at least one of erbium-doped fiber, ytterbium-doped fiber, thulium-doped fiber, praseodymium-doped fiber, bismuth-doped fiber, and phosphorus-doped fiber.
Optionally, the fiber amplifier further comprises a signal source and/or a pump source;
the signal source is used for providing the signal light to the light convergence coupler;
the pump source is used for providing the pump light to the light converging coupler.
Optionally, in the case that the optical fiber amplifier further comprises the pump source, the optical fiber amplifier further comprises a mode converter;
the mode converter is arranged between the pump source and the light converging coupler and is used for converting light rays emitted by the pump source into pump light with the same mode as the signal light.
In the scheme provided by the embodiment of the utility model, the optical convergence coupler is manufactured based on the super-surface technology, and the optical convergence coupler can couple signal light and pump light into the doped optical fiber to realize optical signal amplification. The optical fiber amplifier has small size and is convenient to integrate; the optical fiber amplifier is simple to process, has low requirement on precision and large processing tolerance, and has good performance indexes such as insertion loss and crosstalk.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic cross-sectional view of a prior art wavelength division multiplexing coupler;
FIG. 2 is a schematic diagram of a first configuration of an optical fiber amplifier provided by an embodiment of the present invention;
FIG. 3 is a schematic diagram of a second configuration of an optical fiber amplifier provided by an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a super-surface coupling element provided by an embodiment of the utility model;
FIG. 5 is a schematic diagram of a super-surface structure unit provided by an embodiment of the utility model;
FIG. 6 is a schematic diagram showing phase modulation at 1550nm for selected units of a super-surface structure according to embodiments of the utility model;
FIG. 7 shows a schematic diagram of phase modulation at 980nm for selected units of a super-surface structure according to an embodiment of the present invention.
Icon:
10-light converging coupler, 11-super surface coupling element, 111-transparent substrate layer, 112-nanostructure, 12-converging element, 20-doped fiber, 30-isolator, 40-signal source, 50-pumping source, 60-mode converter, 70-few-mode fiber, 1-signal light and 2-pumping light.
Detailed Description
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
An optical fiber amplifier provided by an embodiment of the present invention, as shown in fig. 2, includes: a super-surface based light converging coupler 10 and a doped fiber 20. The light converging coupler 10 is used for converging the signal light 1 and the pump light 2 which are incident to the light incident side of the light converging coupler 10 to a convergence point, and the convergence point is positioned on the light emergent side of the light converging coupler 10; the light input end of the doped fiber 20 is located at the convergence point.
In an embodiment of the present invention, the light converging coupler 10 is a device manufactured based on the super-surface technology, which is capable of coupling light. Specifically, the optical convergence coupler 10 can adjust the phases of the signal light 1 and the pump light 2 incident to the light-in side of the optical convergence coupler 10, thereby enabling coupling of the signal light 1 and the pump light 2; moreover, the optical convergence coupler 10 can also converge the signal light 1 and the pump light 2 to a preset position, i.e., a convergence point, so that the coupled signal light 1 and pump light 2 can be transmitted into the doped fiber 20 at the convergence point and propagated by the doped fiber 20.
As shown in fig. 2, the left side of the optical convergence coupler 10 is an incident side, and the right side is an emergent side, and both the signal light 1 and the pump light 2 enter the optical convergence coupler 10 from left to right; the light converging coupler 10 couples and converges the signal light 1 and the pump light 2, so that the coupled light can converge to the light input end of the doped fiber 20 and enter the doped fiber 20, and then the coupled light can be transmitted by using the doped fiber 20. Wherein the doped fiber 20 may be a rare earth doped fiber. For example, the doped fiber 20 may include: at least one of erbium-doped fiber, ytterbium-doped fiber, thulium-doped fiber, praseodymium-doped fiber, bismuth-doped fiber, and phosphorus-doped fiber.
The optical fiber amplifier provided by the embodiment of the utility model is characterized in that the optical convergence coupler 10 is manufactured based on a super-surface technology, and the optical convergence coupler 10 can couple the signal light 1 and the pump light 2 into the doped optical fiber to realize optical signal amplification. The optical fiber amplifier has small size and is convenient to integrate; the optical fiber amplifier is simple to process, has low requirement on precision and large processing tolerance, and has good performance indexes such as insertion loss and crosstalk.
On the basis of the above embodiment, referring to fig. 3, the optical fiber amplifier may further include a signal source 40 and/or a pump source 50; the signal source 40 is for supplying the signal light 1 to the optical converging coupler 10; the pump source 50 is used to provide pump light 2 to the optical concentrating coupler 10.
Here, the modes of the signal light 1 and the pump light 2 incident on the optical converging coupler 10 need to be identical, and both need to have the same mode. At this time, a mode converter 60 may be added, and the mode converter 60 converts the pump light to have the same mode as the signal light 1 before the pump light 2 is incident to the optical convergence coupler 10, so that the signal light 1 and the pump light 2 incident to the optical convergence coupler 10 have the same mode. Specifically, the mode converter 60 is disposed between the pump source 50 and the light converging coupler 10, and is located on the propagation path of the pump light 2. The original pump light emitted from the pump source 50 passes through the mode converter 60 and then is directed to the light converging coupler 10.
Further optionally, referring to fig. 3, the fiber amplifier further comprises an isolator 30; the optical output of the doped fiber 20 is connected to an isolator 30. The coupled light propagating through the doped fiber 20 may pass through the isolator 30 and be transmitted from the isolator 30 to a next element, such as a few-mode fiber 70 in fig. 3. The isolator 30 can prevent the reflection of light, prevent the reflected light from entering a subsequent link, and improve the signal transmission quality.
On the basis of the above embodiment, referring to fig. 3, the light converging coupler 10 includes a super-surface coupling element 11 and a converging element 12. The super-surface coupling element 11 is used for converting the incident signal light 1 and the incident pump light 2 into parallel light and emitting the parallel light; the converging element 12 is used to converge the light rays exiting the super-surface coupling element 11 to a convergence point.
In the embodiment of the present invention, in order to improve the coupling effect of the light converging coupler 10, the light converging coupler 10 firstly adjusts the incident light into parallel light, and then realizes light converging by using the converging effect of the converging element 12, so that both the signal light 1 and the pump light 2 can be converged to the converging point. Wherein the converging element 12 may comprise a convex lens and/or a super-surface element capable of converging light rays. For example, the converging element 12 may be a convex lens, or alternatively, a super-surface element capable of converging light may be fabricated based on super-surface technology, and the super-surface element may be used as the converging element 12.
Alternatively, referring to fig. 4, the super-surface coupling element 11 includes a transparent base layer 111 and a plurality of nanostructures 112 disposed on the transparent base layer 111. Wherein the super-surface coupling elements 11 are arranged according to a period; the arrangement period can be 200-1500 nm, and the nano structure 112 is arranged at the center or the top point of the period.
The transparent substrate layer 111 is made of a material that can transmit light in the wavelength band of the signal light 1 and the pump light 2, and may be, for example, quartz glass, crown glass, flint glass, or the like. The nano-structure 112 is made of a material that can transmit light in the wavelength band of the signal light 1 and the pump light 2, such as titanium oxide, silicon nitride, gallium phosphide, aluminum oxide, hydrogenated amorphous silicon, and the like. Alternatively, the nano-structures 112 may be filled with air or other materials that can transmit the light in the wavelength bands of the signal light 1 and the pump light 2, and the difference between the refractive index of the filling material and the refractive index of the nano-structures 112 is greater than or equal to 0.5. The transparent substrate layer 111, the nano-structures 112, and the fillers among the nano-structures 112 are all made of different materials.
In general, the wavelengths of the signal light 1 and the pump light 2 are different, for example, the wavelength of the signal light 1 is 1550nm, and the wavelength of the pump light 2 is 980 nm. In the embodiment of the present invention, in order to enable the super-surface coupling element 11 to implement phase modulation on both the signal light 1 and the pump light 2 with different wavelengths, the signal light 1 and the pump light 2 are incident on the super-surface coupling element 11 at different angles. Specifically, one of the signal light 1 and the pump light 2 is regarded as a first light, and the other of the signal light 1 and the pump light 2 is regarded as a second light, the first light is emitted to the super-surface coupling element 11 at normal incidence, and the second light is emitted to the super-surface coupling element 11 at an inclination.
As shown in fig. 3, the signal light 1 is a first light, which is emitted to the super-surface coupling element 11 in a normal incidence manner, and an incident angle of the signal light 1 incident to the super-surface coupling element 11 is 90 degrees. The pump light 2 is a second light, which is incident to the super-surface coupling element 11 in an inclined manner, and a certain included angle exists between the pump light 2 and the super-surface coupling element 11. With the signal light 1 and the pump light 2 thus incident, the super-surface structure unit in the super-surface coupling element 11 can be designed so that the super-surface structure unit can achieve the required phase modulation for different signal lights 1 and pump lights 2.
Optionally, the super-surface coupling element 11 comprises a plurality of super-surface structure units.
The phase of the super-surface structure unit for regulating and controlling the first light is as follows:
the phase of the super-surface structure unit for regulating and controlling the second light is as follows:
wherein r isiDenotes the distance, λ, between the super-surface structure unit i and the distribution center of identical super-surface structure units1Which represents the wavelength of the first light ray,representing a preset phase value, theta represents the angle of incidence of the second light ray onto the super-surface coupling element 11.
In the embodiment of the present invention, the super-surface coupling element 11 includes a plurality of super-surface structure units, each super-surface structure unit is a part of a structure artificially divided from the super-surface coupling element 11, and a plurality of super-surface structure units can be divided from the super-surface coupling element 11; however, this does not mean that there must be completely structurally independent entities between the various units of the meta-surface structure; the plurality of super surface structure units may be integral or at least some of the super surface structure units may be structurally independent. Typically, different super-surface structure units share the same substrate (e.g., the transparent substrate layer 111 described above), except that different super-surface structure units are located at different positions on the substrate.
In the super-surface coupling element 11, each super-surface structure unit is located at a different position, the super-surface structure units at different positions are generally different, but the same super-surface structure unit exists in the super-surface coupling element 11, and the distribution of the same super-surface structure units is circular and is provided with a distribution center correspondingly; the same super-surface structure units in a plurality of groups are similar to the distribution shape of concentric circles, and correspond to the same distribution center. Wherein the first light ray can be emitted to the distribution center in a normal incidence mode.
In this embodiment, the super-surface structure unit needs to implement corresponding phase control on two light beams (signal light 1 and pump light 2) with different wavelengths, and in this embodiment, the super-surface structure unit is selected in which the phase for controlling the first light beam is a constant and the phase for controlling the second light beam is related to the position. The process of selecting the super-surface structure unit can be as follows: a number of nanostructures of the same phase (e.g., phase of pi) are found for the first light, and may be selected to generate a super-surface structure unit if the nanostructures achieve 0-2 pi coverage for the phase modulated by the second light.
Specifically, for the first light ray, the phase control of each super-surface structure unit on the first light ray is the same, and the wavelength of the super-surface structure unit is lambda1When the first light is modulated, the modulation phase is expressed as:the control phase is constantThe control phase is independent of the position of the super-surface structure unit, i.e. the distance r from the super-surface structure unit to the distribution centeriThe regulation phase of the first light ray is not influenced. Wherein,the specific value may be selected based on actual conditions for the preset phase value.
For the second lightIn the line, the phase control of the second light by the super surface structure unit at different positions may be different, and the controlled phase and the distance r from the super surface structure unit to the distribution centeriAnd is related to the angle of incidence of the second ray. Specifically, for the super surface structure unit i, the phase of the second light ray is regulated and controlledIs risin θ, so that the obliquely incident second light can be also adjusted to be parallel light.
The structure of the optical fiber amplifier will be described in detail by one embodiment.
In the embodiment of the present invention, the super-surface structure unit in the super-surface coupling element 11 can be seen from fig. 5, and the nano-structure 112 is in the shape of a square column, and has a length and a width of w1 and w2, respectively. The 1550nm signal light is used as the first light, and the 980nm pump light is used as the second light. Since the modulation phase of the super-surface structure unit to the 1550nm signal light is constant, the super-surface structure units of different sizes corresponding to the same phase can be determined first. Fig. 6 shows the phase retardation distribution of different sized super-surface structure units, from which a plurality of different sized super-surface structure units can be selected by finding points with the same phase, the abscissa and ordinate in fig. 6 respectively representing the length and width of the nano-structure, and the color depth representing the phase of modulation, in the range of 0,2 pi. For example, table 1 shows 8 super-surface structure units selected from the list, and the 8 super-surface structure units are labeled in fig. 6.
TABLE 1
|
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 |
W1/nm | 280 | 340 | 370 | 410 | 480 | 550 | 590 | 650 |
W2/nm | 650 | 620 | 550 | 500 | 470 | 480 | 450 | 460 |
Moreover, the coupling function is realized by using different phase modulations of the selected 8 super-surface structure units at 980nm, and the phase modulations of the selected 8 super-surface structure units at 980nm are shown in fig. 7; the curves with triangular open symbols in fig. 7 represent the phase of the modulation (corresponding to the left ordinate), and the curves with filled square symbols represent the transmission (corresponding to the right ordinate). The super-surface coupling element 11 has a transmittance of 97% for 1550nm light, a transmittance of 95.6% for 980nm light, an insertion loss of 0.16dB, and an incident angle of pump light of 43.5 °.
The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present invention, and the present invention shall be covered by the claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (11)
1. An optical fiber amplifier, comprising: a super-surface based light converging coupler (10) and a doped fiber (20);
the light converging coupler (10) is used for converging the signal light (1) and the pump light (2) which are incident to the light incident side of the light converging coupler (10) to a converging point, and the converging point is positioned on the light emergent side of the light converging coupler (10);
the light input end of the doped fiber (20) is located at the convergence point.
2. The fiber amplifier according to claim 1, wherein the light converging coupler (10) comprises a super-surface coupling element (11) and a converging element (12);
the super-surface coupling element (11) is used for converting the incident signal light (1) and the incident pump light (2) into parallel light and emitting the parallel light;
the converging element (12) is used for converging the light rays emitted by the super surface coupling element (11) to the converging point.
3. The optical fiber amplifier of claim 2,
the first light ray is emitted to the super-surface coupling element (11) in a normal incidence mode, and the second light ray is emitted to the super-surface coupling element (11) in an inclined mode;
the first light is one of the signal light (1) and the pump light (2), and the second light is the other of the signal light (1) and the pump light (2).
4. The fiber amplifier of claim 3, wherein the super-surface coupling element (11) comprises a plurality of super-surface structure units;
the phase of the super-surface structure unit for regulating and controlling the first light ray is as follows:
the phase of the super-surface structure unit for regulating and controlling the second light ray is as follows:
wherein r isiDenotes the distance, λ, between a super-surface-structure-unit i and the distribution center of the same said super-surface-structure-unit1Represents the wavelength of the first light ray,represents a preset phase value, theta represents an incident angle of the second light ray incident on the super-surface coupling element (11).
5. The fiber amplifier according to any of claims 2-4, wherein the super-surface coupling element (11) comprises a transparent substrate layer (111) and a plurality of nanostructures (112) arranged on the transparent substrate layer (111).
6. The fiber amplifier according to claim 5, wherein a transparent filler is provided around the nanostructures (112), and the difference between the refractive index of the filler and the refractive index of the nanostructures (112) is greater than or equal to 0.5.
7. Optical fiber amplifier according to claim 2, characterized in that the converging element (12) comprises a convex lens and/or an ultra-surface element capable of converging light rays.
8. The fiber amplifier of claim 1, further comprising an isolator (30);
the optical output end of the doped optical fiber (20) is connected with the isolator (30).
9. The fiber amplifier of claim 1, wherein the doped fiber (20) comprises: at least one of erbium-doped fiber, ytterbium-doped fiber, thulium-doped fiber, praseodymium-doped fiber, bismuth-doped fiber, and phosphorus-doped fiber.
10. The fiber amplifier of claim 1, further comprising a signal source (40) and/or a pump source (50);
the signal source (40) is used for providing the signal light (1) to the light converging coupler (10);
the pump source (50) is for providing the pump light (2) to the light converging coupler (10).
11. The fiber amplifier according to claim 10, wherein in case the fiber amplifier further comprises the pump source (50), the fiber amplifier further comprises a mode converter (60);
the mode converter (60) is arranged between the pump source (50) and the light converging coupler (10) and is used for converting light rays emitted by the pump source (50) into pump light (2) with the same mode as the signal light (1).
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US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
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CN115236795B (en) * | 2022-08-02 | 2024-03-08 | 深圳迈塔兰斯科技有限公司 | Super-surface manufacturing method and optical fiber end face super-surface |
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