CN210856411U - 碳化硅单晶生长装置 - Google Patents
碳化硅单晶生长装置 Download PDFInfo
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- CN210856411U CN210856411U CN201921085672.1U CN201921085672U CN210856411U CN 210856411 U CN210856411 U CN 210856411U CN 201921085672 U CN201921085672 U CN 201921085672U CN 210856411 U CN210856411 U CN 210856411U
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CN112725886A (zh) * | 2020-12-18 | 2021-04-30 | 浙江博蓝特半导体科技股份有限公司 | 碳化硅晶体生长装置及其生长方法、碳化硅晶锭 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112725886A (zh) * | 2020-12-18 | 2021-04-30 | 浙江博蓝特半导体科技股份有限公司 | 碳化硅晶体生长装置及其生长方法、碳化硅晶锭 |
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Effective date of registration: 20220418 Address after: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee after: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. Address before: 321000 South Second Ring West Road, Jinhua, Zhejiang Province, No. 2688 Patentee before: ZHEJIANG BOLANTE SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20230529 Address after: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee after: Jinhua Bolante New Material Co.,Ltd. Address before: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee before: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. |
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