CN206787286U - Silver-colored evaporation crucible - Google Patents
Silver-colored evaporation crucible Download PDFInfo
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- CN206787286U CN206787286U CN201720452871.6U CN201720452871U CN206787286U CN 206787286 U CN206787286 U CN 206787286U CN 201720452871 U CN201720452871 U CN 201720452871U CN 206787286 U CN206787286 U CN 206787286U
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- crucible
- copper
- silver
- evaporation
- molybdenum
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Abstract
Silver-colored evaporation crucible.It is related to a kind of crucible, and in particular to a kind of silver evaporation crucible.Provide a kind of retarding heat to be lost in, increase the silver-colored evaporation crucible of evaporation efficiency.Including the internal copper crucible body for cavity structure, the coolant of flowing is connected in cavity, the crucible body upper surface opens up the copper crucible of some groove-like, the molybdenum crucible being adapted to copper crucible is provided with the copper crucible.The crucible mouth of the molybdenum crucible is fixed with the terminal pad being connected in the crucible body.The attachment structure of the terminal pad and the crucible body is：In the crucible body, the groove being adapted to buckle one is provided with around copper crucible.In the crucible body, the T-shaped annular groove being adapted to the T-shaped buckle is provided with around copper crucible, the inwall of the T-shaped annular groove is provided with some openings being adapted to the T-shaped buckle.The utility model energy retarding heat is lost in, and increases evaporation efficiency, cost input is also reduced while effect is reached.
Description
Technical field
It the utility model is related to a kind of crucible, and in particular to a kind of silver evaporation crucible.
Background technology
In current silver-colored evaporation technology, by the way of directly silver-colored source is placed on is deposited in copper crucible, copper crucible sheet
Body inner hollow, there is cooling water circulation, take away high temperature during evaporation, due to the recirculated cooling water good original of copper crucible heat conduction in addition
Cause, heat losses when causing to evaporate on silver source cause this mode to evaporate silver-colored efficiency very low quickly.
Utility model content
The utility model is directed to problem above, there is provided a kind of retarding heat is lost in, and the silver evaporation for increasing evaporation efficiency is used
Crucible.
The technical solution of the utility model is：Including the internal copper crucible body for cavity structure, stream is connected in cavity
Dynamic coolant, the crucible body upper surface open up the copper crucible of some groove-like, are provided with the copper crucible and copper crucible
The molybdenum crucible of adaptation.
The crucible mouth of the molybdenum crucible is fixed with the terminal pad being connected in the crucible body.
The attachment structure of the terminal pad and the crucible body is：The connection tray bottom is provided with some raised buckles
One, in the crucible body, the groove being adapted to buckle one is provided with around copper crucible.
The attachment structure of the terminal pad and the crucible body is：The connection tray bottom or side are provided with some T-shaped
Buckle；
In the crucible body, the T-shaped annular groove being adapted to the T-shaped buckle is provided with around copper crucible, the T-shaped annular groove
Inwall is provided with some openings being adapted to the T-shaped buckle.
Elastic heat conducting material is provided between the copper crucible and molybdenum crucible.
The beneficial effects of the utility model are：Increase a molybdenum crucible being adapted to therewith in original copper crucible, by
It is less than copper in the thermal conductivity of molybdenum crucible, therefore energy retarding heat is lost in, and increases evaporation efficiency, and simply in original copper crucible
Upper increase molybdenum crucible, it is not necessary to change whole crucible, cost input is also reduced while effect is reached.Using snap fit
Molybdenum crucible is connected on original copper crucible, makes its connection firm, will not produced because of amount of heat in evaporation process
Act on and rock, cause to evaporate uneven.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model,
Fig. 2 is molybdenum crucible and the connection diagram of the first embodiment of copper crucible body in the utility model,
Fig. 3 is molybdenum crucible and the connection diagram of second of embodiment of copper crucible body in the utility model；
1 is crucible body in figure, and 11 be groove, and 12 be T-shaped annular groove, and 2 be copper crucible, and 3 are, molybdenum crucible, and 31 be terminal pad,
311 be buckle one, and 312 be T-shaped buckle.
Embodiment
The utility model is illustrated below in conjunction with the accompanying drawings.
As Figure 1-3, the utility model includes the internal copper crucible body 1 for cavity structure, and stream is connected in cavity
Dynamic coolant, the upper surface of crucible body 1 open up the copper crucible 2 of some groove-like, are provided with and copper earthenware in the copper crucible 2
The molybdenum crucible 3 that crucible 2 is adapted to, because the thermal conductivity ratio copper of molybdenum is small, therefore can slow down the heat losses in silver-colored evaporation process, increase
Add its evaporation efficiency, and then the transmitting of electron beam can be reduced, so as to reduce energy resource consumption.
The crucible mouth of the molybdenum crucible 3 is fixed with the terminal pad 31 being connected in the crucible body.
Fig. 2 is molybdenum crucible and the connection diagram of the first embodiment of copper crucible body, institute in the utility model
The attachment structure for stating terminal pad 31 and the crucible body 1 is：The bottom of terminal pad 31 is provided with some raised buckles one
311, in the crucible body 1, the groove 11 being adapted to buckle 1 is provided with around copper crucible 2, buckle 1 is placed on recessed
The connection of molybdenum crucible and original crucible can be achieved in groove 11.
Fig. 3 is molybdenum crucible and the connection diagram of second of embodiment of copper crucible body, institute in the utility model
The attachment structure for stating terminal pad 31 and the crucible body 1 is：The bottom of terminal pad 31 is provided with some T-shaped buckles 312；It is described
In crucible body 1, be provided with the T-shaped annular groove 12 that is adapted to the T-shaped buckle 312 around copper crucible 2, the T-shaped annular groove 12 it is interior
Wall is provided with some openings being adapted to the T-shaped buckle 312.During connection, T-shaped buckle 312 is directed at opening and put down, is then rotated
Molybdenum crucible, make in the T-shaped T-shaped annular groove 12 of the precession of buckle 312, it is more firm that the program connects than the first embodiment.
Some T-shaped buckles two can also be provided with the side of terminal pad 31；Copper crucible periphery of inner wall be provided with it is described T-shaped
The T-shaped annular groove two that buckle two is adapted to, the inwall of the T-shaped annular groove two are provided with some openings two being adapted to the T-shaped buckle two.
Because copper crucible and molybdenum crucible are all hard metal materials, exist contact untight problem between the two, so
Elastic heat conducting material is set between the copper crucible 2 and molybdenum crucible 3, the thermal conductivity of the elastic heat conducting material is also below copper, such as stone
Ink etc..
Claims (5)
1. silver medal evaporation crucible, including inside are the copper crucible body of cavity structure, the coolant of flowing, institute are connected in cavity
State the copper crucible that crucible body upper surface opens up some groove-like, it is characterised in that be provided with the copper crucible and fitted with copper crucible
The molybdenum crucible matched somebody with somebody.
2. silver evaporation crucible according to claim 1, it is characterised in that the crucible mouth of the molybdenum crucible is fixed with connection
Terminal pad in the crucible body.
3. silver evaporation crucible according to claim 2, it is characterised in that the company of the terminal pad and the crucible body
Binding structure is：The connection tray bottom is provided with some raised buckles one, in the crucible body, around copper crucible provided with and card
The groove of the adaptation of button one.
4. silver evaporation crucible according to claim 2, it is characterised in that the company of the terminal pad and the crucible body
Binding structure is：The connection tray bottom or side are provided with some T-shaped buckles；
In the crucible body, the T-shaped annular groove being adapted to the T-shaped buckle, the inwall of the T-shaped annular groove are provided with around copper crucible
Provided with some openings being adapted to the T-shaped buckle.
5. silver evaporation crucible according to claim 1, it is characterised in that bullet is provided between the copper crucible and molybdenum crucible
Property Heat Conduction Material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720452871.6U CN206787286U (en) | 2017-04-26 | 2017-04-26 | Silver-colored evaporation crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720452871.6U CN206787286U (en) | 2017-04-26 | 2017-04-26 | Silver-colored evaporation crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206787286U true CN206787286U (en) | 2017-12-22 |
Family
ID=60709069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720452871.6U Active CN206787286U (en) | 2017-04-26 | 2017-04-26 | Silver-colored evaporation crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206787286U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117888061A (en) * | 2024-03-14 | 2024-04-16 | 天水天光半导体有限责任公司 | Silver metal evaporation vacuum coating method |
-
2017
- 2017-04-26 CN CN201720452871.6U patent/CN206787286U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117888061A (en) * | 2024-03-14 | 2024-04-16 | 天水天光半导体有限责任公司 | Silver metal evaporation vacuum coating method |
| CN117888061B (en) * | 2024-03-14 | 2024-05-24 | 天水天光半导体有限责任公司 | Silver metal evaporation vacuum coating method |
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