CN206224038U - The automatic focusing mechanism for checking and measuring is provided - Google Patents
The automatic focusing mechanism for checking and measuring is provided Download PDFInfo
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- CN206224038U CN206224038U CN201621286583.XU CN201621286583U CN206224038U CN 206224038 U CN206224038 U CN 206224038U CN 201621286583 U CN201621286583 U CN 201621286583U CN 206224038 U CN206224038 U CN 206224038U
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Abstract
It is a kind of that the automatic focusing mechanism for checking and measuring is provided, it is characterised in that：It includes：One span unit；One detection unit；And a control unit；Wherein, the span unit provide at least information of a determinand or positioned at an at least determinand an at least target information to described control unit, described control unit at least the information of a determinand or according to this at least the information of a target or calculates this and at least the information of a determinand or calculates the information of an at least target according to this, so that the distance between the determinand of cushion cap adjustment on the cushion cap and the vision module.Cushion cap can be controlled to adjust position of the determinand in one the 3rd axial direction by control unit with this, therefore vision module can be enable to complete the focusing program of determinand really, so vision module can be in uneven surface and non-coplanar determinand obtains clear and available image.
Description
Technical field
The utility model is related to a kind of automatic focusing mechanism for providing and checking and measure, more particularly to a kind of auto-focusing
Detection means.
Background technology
High-precision optical detection technique, is widely used in detection technique, such as panel, wafer, crystal grain or electronic component.
But when existing high-precision optical is installed on detection, high-precision optical device cannot be obtained effectively if not focusing
Image.Though the foregoing shortcoming that cannot effectively obtain effective image, auto-focusing system can be overcome using autofocus system
System is micro moving lens mode, to carry out the comparative analysis of pictorial element, uses the optimal capture focal length of searching, but automatically
The distance of focusing can be restricted, so autofocus system cannot be applied to focal distance situation high with required precision greatly,
Therefore existing settling mode is to manually adjust detection platform and focusing, and be inspected by random samples at random.
As described above, existing autofocus system has focal distance limitation high with required precision greatly, and manually adjust
It is whole that then there is time-consuming and work consuming, therefore existing high-precision optical detection technique still has amendatory space.
The content of the invention
The purpose of this utility model is to provide a kind of automatic focusing mechanism for providing and checking and measure, to be measured by changing
Thing enables vision module to reach the effect of focusing in one the 3rd axial location.
To reach above-mentioned purpose, the technical solution adopted in the utility model is：A kind of offer checks automatic right with what is measured
Coke installation, it includes：
One span unit；
One detection unit, it has a vision module and a cushion cap adjacent to the span unit, the detection unit, and this is regarded
Feel that module is located at the top of the cushion cap；And
One control unit, its signal connects the span unit and the detection unit；
Wherein, the span unit provides at least information of a determinand or at least mesh positioned at an at least determinand
To described control unit, described control unit is according at least information of a determinand or according to an at least target for target information
Information or calculate this and at least the information of a determinand or calculate the information of an at least target so that cushion cap adjustment is located at
The distance between the determinand and the vision module on the cushion cap.
In such scheme, the detection unit also has a displacement module, and the displacement module is located at the lower section of the cushion cap.
In such scheme, the span unit has a read module, and the read module is located at the top of the cushion cap.
Further, the read module is that a Laser rangefinder, a laser calibrator, a code reader or a far infrared are passed
Sensor.
As described above, the shape of the determinand may be rectangle, circular or polygon, the surface of determinand may be song
Face, cancave cambered surface, convex globoidal or a male and fomale(M＆F).By above- mentioned information, control unit is control cushion cap, to adjust determinand one the
Three axial locations, therefore vision module can be enable to complete the focusing program of determinand really, so vision module can be not
Flat surfaces and non-coplanar determinand obtains clear and available image.
In addition, the span unit can carry out acquisition information for multiple determinands or particular test.In described in this
Information is span；And detection unit can be detected for multiple determinands or particular test.
The utility model by the height or thickness for measuring determinand, displacement module according to foregoing thickness or height, with
Adjustment determinand can enable vision module complete the focusing program of determinand really in the position of the 3rd axial direction, so
Vision module can be in uneven surface and non-coplanar determinand obtains clear and available image.
Brief description of the drawings
Fig. 1 is that the utility model is a kind of provides the schematic diagram checked with the automatic focusing mechanism for measuring；
Fig. 2 is that the utility model is a kind of provides the flow chart checked with the correlation technique of the automatic focusing mechanism for measuring；
Fig. 3 is the schematic diagram of an at least determinand and a span unit；
Fig. 4 is the partial schematic diagram of at least a determinand and a pallet；
Fig. 5 is the schematic diagram of at least a determinand and a detection unit；
Fig. 6 is the schematic diagram of an at least determinand and detection unit.
In the figures above：1st, span unit；11st, read module；2nd, detection unit；20th, cushion cap；21st, displacement module；22、
Vision module；3rd, control unit；40th, determinand；41st, pallet；42nd, mark is aligned；S1, the first step；S2, second step.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment is further described to the utility model：
Embodiment：
Coordinate with reference to shown in Fig. 1, the utility model is a kind of to provide the first implementation checked with the automatic focusing mechanism for measuring
Example, it includes a span unit 1, a detection unit 2 and a control unit 3.
Span unit 1 has an at least read module 11.In one embodiment, read module 11 can be surveyed for a laser
Thick instrument or a Laser rangefinder.In yet another embodiment, read module 11 can be that a code reader or a far infrared are sensed
Device.
Detection unit 2 has a cushion cap 20, a displacement module 21 and a vision mould adjacent to span unit 1, detection unit 2
Block 22.Displacement module 21 located at cushion cap 20 lower section, displacement module 21 make cushion cap 20 carry out one first axially, one second axially,
Axially to the 3rd axial movement, foregoing first axially axially can be considered X axis, Y-axis and Z to the 3rd for one the 3rd axial direction or first
Axially, but do not limit.Vision module 22 is located at the top of cushion cap 20.Above-mentioned read module 11 can set and the top of cushion cap 20 or hold
The top and lower section of platform 20.
The signal connecting detection unit 2 of control unit 3 and span unit 1.
Wherein, the span unit 1 provide at least information of a determinand 40 or positioned at an at least determinand 40 extremely
, to described control unit 3, described control unit 3 should according at least information of a determinand 40 or foundation for the information of a few target
At least the information of a target or calculate this and at least the information of a determinand 40 or calculate the information of an at least target, so that described
The distance between the determinand 40 and the vision module 22 of the adjustment of cushion cap 20 on the cushion cap 20.
Please coordinate with reference to shown in Fig. 2, the utility model is a kind of to provide the Atomatic focusing method checked with measurement, its step bag
Contain：
First step S1, measures the apparent height or thickness of an at least determinand.As shown in Figure 3 and Figure 4, an at least determinand
40 are positioned over a pallet 41, and pallet 41 has at least one pair of mark 42.Contraposition mark 42 is adjacent to determinand 40.Citing and
Speech, determinand 40 is panel, wafer, crystal grain or electronic component.
Pallet 41 is located at the top of cushion cap 20.Pallet 41 can be fixed on cushion cap using fixture, strangulation instrument or mechanical device
20 top.If read module 11 is only located at the top of cushion cap 20, read module 11 first reads contraposition mark 42, to be measured to confirm
Whether thing 40 can read the position of determinand 40 positioned at read module 11.If determinand 40 has been located in the readable fetch bit of read module 11
Put, then cushion cap 20 stops start.If determinand 40 is not located at read module 11 and can read position, cushion cap 20 is then by determinand 40
It is moved to read module 11 and can read position.
Read module 11 is Laser rangefinder, then the acquisition of read module 11 top of a position pallet 41 at least determinand 40 is high
Degree, aforementioned height is the distance on top to the top of determinand 40 of tray 41.Aforementioned height is walked around and is changed to by read module 11
One elevation information.
If determinand 40 is multiple, and the top of determinand 40 may have the phenomenon that height rises and falls.Cushion cap 20 is in first axle
Movement is axially axially combined with second to movement, the second axial movement or first, and then changes determinand 40 relative to reading mould
The position of block 11, so that read module 11 can capture the height of multiple determinands 40.Read module 11 will an at least elevation information
Send control unit 3 to, control unit 3 receives an at least elevation information.The elevation information that control unit 3 will be received is put down
, a height average information is drawn.Height average information include the average height of determinand 40 and determinand 40 relative to
The position of pallet 41.
Or, multiple elevation information controlled unit 3 is received as described above, but in this step, control unit 3 will not
Multiple elevation informations give averagely.
Or, each determinand 40 has an at least target, and read module 11 captures the information of an at least target, and will be picked
The information for taking an at least target is converted to an at least target information, then sends an at least target information to control unit 3.
If read module 11 is located at the top and lower section of microscope carrier 10, and read module 11 is laser calibrator, then read
Module 11 measure the pallet 41 of determinand 40 gross thickness, the gross thickness for determinand 40 top to the bottom of pallet 41 away from
From.Foregoing gross thickness is converted to a thickness information by read module 11, and sends thickness information to control unit 3.Control is single
Unit 3 receives thickness information.If read module 11 transmits the thickness that multiple thickness informations will be received to control unit 3, control unit 3
Degree information gives averagely, and draws a thickness average information.Thickness average information is average total with pallet 41 comprising determinand 40
Thickness, and determinand 40 is relative to the position of pallet 41.
Or, multiple thickness information controlled unit 3 as described above is received, but in this step, control unit 3 is not
Multiple thickness informations are given averagely.
If read module 11 is a code reader or a far infrared sensor, the height or thickness of determinand 40 can be in another
One processing procedure is measured in advance, after read module 11 is read positioned at the bar code or chip of determinand 40, or the read module 11
Read after the bar code or chip of pallet 41, read module 11 obtains the height or thickness of determinand 40, as described above, reading
Modulus block 11 is existing to send elevation information or thickness information to control unit 3 so that control unit 3 draw height average information or
Thickness average information.
If in addition, there is height to rise and fall on the surface of determinand 40, or being an irregular male and fomale(M＆F), or it is a curved surface, then reads
Modulus block 11 captures the surface information of determinand 40, then sends the surface information to control unit 3, and control unit 3 is calculated should
Surface information, elevation information to draw the surface state of determinand 40 and foregoing or thickness information.As it was previously stated, when reading
During 11 acquisition surface information of modulus block, cushion cap 20 can also coordinate the position of determinand 40, and carry out the first axial movement, the second axle
Moved to mobile or the first combination axially with the second axial direction.
Summary, span unit 1 provide at least information of a determinand 40 or positioned at an at least determinand 40 extremely
The information of a few target is to control unit 3.Or span unit 1 can enter for multiple determinands 40 or specific determinand 40
Row acquisition information.It is span in the information described in this, but does not limit.
Second step S2, carries out a Focussing.Please coordinate with reference to shown in Fig. 5, cushion cap 20 is by determinand 40 together with pallet 41
It is moved to the lower section of the vision module 22 of detection unit 2.
Vision module 22 captures the image information of determinand 40 and contraposition mark 42, and it is single to send image information to control
Unit 3, the image information includes the relative distance between determinand 40 and contraposition mark 42.Control unit 3 according to image information, with
Judge determinand 40 whether in set location.
If it is not, then the displacement module 21 of inspection unit 2 makes cushion cap 20 carry out one first axial movement, one second axial movement
Or the first combination axially with the second axial direction is moved, and the determinand 40 for being located at the top of cushion cap 20 is set to return back to set location.
Or, control unit 3 notifies staff, and replys the determinand 40 that staff will be not located at set location
To set location.
If determinand 40 has been located in set location, control unit 3 according to above-mentioned thickness information or elevation information, to control
Displacement module processed 21, and cushion cap 20 is carried out one the 3rd axial movement, as shown in Figure 6.Treat cushion cap 20 in the 3rd axial movement
To a preset distance, the stopping of displacement module 21 action.
Vision module 22 captures the image information to be measured of determinand 40, and image information to be measured is transmitted into control module 3, control
Molding block 3 according to image information to be measured, to detect determinand 40.
Control unit 3 also can according to image information to be measured or above-mentioned image information, with judge determinand 40 in outward appearance whether
There is flaw, the flaw system is damaged or off size.If there is flaw to produce, control unit 3 notifies staff, with take out or
Displacement tool determinand 40 defective；Or control unit 3 is remembered or mark determinand 40 defective, with successive process again
Further treatment.
If further discussing Fig. 5 and Fig. 6, as shown in figure 5, according to elevation information or thickness information, the thickness of determinand 40
Degree or height be compared with remaining determinand 40 it is thick or high, therefore displacement module 21 may be selected it is motionless, or along the 3rd axially towards remote
With a distance from the direction movement one of vision module 22, to meet the focal length of vision module 22.
As shown in fig. 6, according to elevation information or thickness information, the thickness or height of determinand 40 are compared with remaining determinand 40
For thin or low, displacement module 21 is to move a distance along the 3rd direction for being axially facing vision module 22, to meet vision mould
The focal length of block 22.
As described above, control unit 3 is according at least information of a determinand 40 or the information or meter according to an at least target
Calculate at least information of a determinand 40 or calculate the information of an at least target, so that the adjustment of cushion cap 20 is positioned at the to be measured of cushion cap 20
The distance between thing 40 and vision module 22.In the information described in this be above-mentioned thickness information or elevation information, foregoing meter
Calculation can be considered average.The information system of an averaged at least determinand 40 is converted to thickness average information or height average information.
The information system of an averaged at least target is converted to target average information.
In addition, control module 3 also according to multiple information, and can make vision module 22 sequentially capture treating positioned at diverse location
Survey the image of thing 40.Or according to height average information or thickness average information, and make cushion cap 20 maintain the one of the 3rd axial direction to consolidate
Positioning is put, so that vision module 22 captures the image of determinand 40.Therefore vision module 22 can single-point measure determinand 40, then by
Single-point or determinand 40 that cushion cap 20 will be detected, are moved to the lower section of vision module 22, and adjust according to foregoing information
Cushion cap 20 carries out capture in the position of the 3rd axial direction with profit.
Furthermore, the image that control unit 3 can also be captured by vision module 22 judges the shape of determinand 40, citing and
Speech, if determinand 40 is circle, rectangle, polygonal or irregular shape, control unit 3 can be judged by the image for being captured.Lift
For example, if determinand 40 is curved face object, can be by cushion cap 20 first axially and on the mobile acquirement curved surface of the second axial direction
Multiple point distance measurement value, and control unit 3 is depicted the profile and analytical calculation curved surface situation of curved surface.
Further, detection unit 2 can be detected for multiple determinands 40 or specific determinand 40.
Summary, the shape of determinand 40 may be rectangle, circular or polygon, and the surface of determinand 40 may be song
Face, cancave cambered surface, convex globoidal or a male and fomale(M＆F).The utility model is by the height or thickness for measuring determinand 40.Displacement module 21
According to foregoing thickness or height, to adjust position of the determinand 40 in the 3rd axial direction, therefore vision module 22 can be enable true
The real focusing program for completing determinand 40, so vision module 22 can be obtained in uneven surface and non-coplanar determinand 40
Clear and available image.
Above-described embodiment only to illustrate technology design of the present utility model and feature, technique is familiar with its object is to allow
Personage will appreciate that content of the present utility model and implement according to this, protection domain of the present utility model can not be limited with this.
All equivalent change or modifications made according to the utility model Spirit Essence, should all cover protection domain of the present utility model it
It is interior.
Claims (4)
- It is 1. a kind of that the automatic focusing mechanism for checking and measuring is provided, it is characterised in that：It includes：One span unit；One detection unit, it has a vision module and a cushion cap, the vision mould adjacent to the span unit, the detection unit Block is located at the top of the cushion cap；AndOne control unit, its signal connects the span unit and the detection unit；Wherein, the span unit provides at least information of a determinand or at least target positioned at an at least determinand To described control unit, described control unit is according at least information of a determinand or the letter according to an at least target for information Cease or calculate this and at least the information of a determinand or calculate the information of an at least target, so that cushion cap adjustment is held positioned at this The distance between the determinand and the vision module on platform.
- 2. the automatic focusing mechanism for checking and measuring is provided according to claim 1, it is characterised in that：The detection unit is also With a displacement module, the displacement module is located at the lower section of the cushion cap.
- 3. the automatic focusing mechanism for checking and measuring is provided according to claim 1, it is characterised in that：The span unit tool There is a read module, the read module is located at the top of the cushion cap.
- 4. the automatic focusing mechanism for checking and measuring is provided according to claim 3, it is characterised in that：The read module is One Laser rangefinder, a laser calibrator, a code reader or a far infrared sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621286583.XU CN206224038U (en) | 2016-11-25 | 2016-11-25 | The automatic focusing mechanism for checking and measuring is provided |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621286583.XU CN206224038U (en) | 2016-11-25 | 2016-11-25 | The automatic focusing mechanism for checking and measuring is provided |
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| CN206224038U true CN206224038U (en) | 2017-06-06 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106483622A (en) * | 2016-11-25 | 2017-03-08 | 苏州均华精密机械有限公司 | There is provided and check and the automatic focusing mechanism measuring and its method |
| CN111426269A (en) * | 2020-04-24 | 2020-07-17 | 广东鑫光智能***有限公司 | Plate on-line detection equipment |
-
2016
- 2016-11-25 CN CN201621286583.XU patent/CN206224038U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106483622A (en) * | 2016-11-25 | 2017-03-08 | 苏州均华精密机械有限公司 | There is provided and check and the automatic focusing mechanism measuring and its method |
| CN111426269A (en) * | 2020-04-24 | 2020-07-17 | 广东鑫光智能***有限公司 | Plate on-line detection equipment |
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