CN204946876U - Full-automatic silicon wafer inserted sheet and purging system - Google Patents
Full-automatic silicon wafer inserted sheet and purging system Download PDFInfo
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- CN204946876U CN204946876U CN201520694837.0U CN201520694837U CN204946876U CN 204946876 U CN204946876 U CN 204946876U CN 201520694837 U CN201520694837 U CN 201520694837U CN 204946876 U CN204946876 U CN 204946876U
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- gaily decorated
- decorated basket
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Abstract
<b> the utility model discloses a kind of full-automatic silicon wafer inserted sheet and purging system, </b><bGreatT.Gre aT.GT comprises the first connecting gear for transmitting the unloaded gaily decorated basket, for transmitting silicon chip second connecting gear, for transmitting the 3rd connecting gear of the fully loaded gaily decorated basket, the current gaily decorated basket can be moved and the mechanical arm assembly of realization reception silicon chip between three connecting gears, transfer mechanism, wiper mechanism, transfer mechanism is by elevating control unit, rotate control unit and extension and contraction control unit the fully loaded gaily decorated basket on the 3rd connecting gear to be automatically transferred in hanging basket and to move in wiper mechanism and clean.Above-mentioned </b><bGreatT.Gre aT.GT all processes all automation mechanized operations in the design, and structure is reliable, easy to maintenance, while the labour intensity reducing operating personnel, can greatly enhance productivity, also reduce taking up room of whole inserted sheet and cleaning equipment, be suitable for applying in silicon chip field.</b>
Description
Technical field
the utility model relates to a kind of full-automatic silicon wafer inserted sheet and purging system.
Background technology
in prior art, the operation of silicon chip process, will have been come by different equipment respectively, and discretely between each equipment to open, manually will carry between an equipment to another equipment, waste time and energy, and easily cause damage, be unfavorable for high efficiency production.
Utility model content
for the technical deficiency of above-mentioned existence, the purpose of this utility model is to provide a kind of full-automatic silicon wafer inserted sheet and purging system, and it realizes full-automatic from inserted sheet to cleaning, while lowering personnel labor intensity, effectively enhance productivity.
for solving the problems of the technologies described above, the utility model adopts following technical scheme:
a kind of full-automatic silicon wafer inserted sheet and purging system, it to realize silicon chip to insert in the gaily decorated basket and carries out the function of cleaning, it comprises the first connecting gear, the second connecting gear, the 3rd connecting gear, mechanical arm assembly, transfer mechanism, wiper mechanism, and the first described connecting gear comprises the first conveyer belt for transmitting silicon chip; The second described connecting gear comprises the second conveyer belt for transmitting the unloaded gaily decorated basket; The 3rd described connecting gear comprises the 3rd conveyer belt for transmitting the fully loaded gaily decorated basket; Described mechanical arm assembly comprises can be arranged on the first described conveyer belt, the fixture for clamping the gaily decorated basket between the second described conveyer belt and the 3rd described conveyer belt three movably; Described transfer mechanism comprises hanging basket for receiving multiple fully loaded gaily decorated basket, for the fully loaded gaily decorated basket on the 3rd described conveyer belt being transferred to the transfer assembly in described hanging basket; Described hanging basket is provided with multiple accommodation space with entrance, described accommodation space can receive multiple fully loaded gaily decorated basket; Described transfer assembly comprises support component for extracting the fully loaded gaily decorated basket on the 3rd described conveyer belt, control described in support component lifting elevating control unit, control described in support component swing in horizontal plane rotation control unit, control described in support component and on the fully loaded gaily decorated basket move to extension and contraction control unit in described hanging basket, described support component has the primary importance of the fully loaded gaily decorated basket on the 3rd conveyer belt described in being convenient to extract and makes the fully loaded gaily decorated basket be positioned at the second place of the porch of described accommodation space; Described extension and contraction control unit has the retracted position that the fully loaded gaily decorated basket on described support component can be pushed the extended position in described accommodation space and be separated with the fully loaded gaily decorated basket; Described wiper mechanism comprises the rinse bath for cleaning silicon chip, is loaded with cleaning fluid in described rinse bath.
preferably, described support component is two support bars that can be held up from the relative both sides of the gaily decorated basket, and the support bar described in two is arranged on a bracket.
further preferably, the top of described bracket is provided with an arm, described elevating control unit comprises the lift cylinder vertically arranged, and the cylinder barrel of described lift cylinder is arranged on described arm, and described bracket is fixedly mounted on the lower end of the piston rod of described lift cylinder.
still more preferably, described rotation control unit comprises installation shaft bearing assembly and push-and-pull cylinder, the upper end of the cylinder barrel of described lift cylinder can be arranged on described arm rotationally by described bearing assembly, the cylinder barrel of described push-and-pull cylinder is hingedly mounted on described arm, and the piston rod of described push-and-pull cylinder is connected on described lift cylinder.
preferably, described extension and contraction control unit is two telescopic cylinders, and the cylinder barrel of described telescopic cylinder is fixedly mounted on described bracket, and the gaily decorated basket on described support component is positioned on the flexible path of the piston rod of described telescopic cylinder.
preferably, this system also comprises the suspender that described hanging basket can be moved in described rinse bath.
further preferably, in the opposing sidewalls of described hanging basket, relative extension is provided with two to symmetrical projection, and described suspender comprises four and can hang over the suspension hook of described hanging basket picking-up on described projection.
preferably, this system also comprises the reversing unit that can change the placing direction of the fully loaded gaily decorated basket on the transfer path being arranged on the 3rd described conveyer belt.
preferably, each described accommodation space in described hanging basket parallels setting, and their entrance is towards identical.
the beneficial effects of the utility model are: in the design, transfer to clean all automation mechanized operations from the transmission of the transmission of the transmission of the unloaded gaily decorated basket, silicon chip, the fully loaded gaily decorated basket, the fully loaded gaily decorated basket, and structure is reliable, easy to maintenance, while the labour intensity reducing operating personnel, can greatly enhance productivity.
Accompanying drawing explanation
accompanying drawing 1 is the full-automatic silicon wafer inserted sheet of the present embodiment and the structural representation (rinse bath is not shown) of purging system;
accompanying drawing 2 is the structural representation one of the transfer mechanism in the full-automatic silicon wafer inserted sheet of the present embodiment and purging system;
accompanying drawing 3 is the structural representation two of the transfer mechanism in the full-automatic silicon wafer inserted sheet of the present embodiment and purging system;
accompanying drawing 4 is the structural representation of the part transfer mechanism in the full-automatic silicon wafer inserted sheet of the present embodiment and purging system.
in accompanying drawing: 1, the first connecting gear; 101, the first conveyer belt; 2, the second connecting gear; 201, the second conveyer belt; 3, the 3rd connecting gear; 301, the 3rd conveyer belt; 4, mechanical arm assembly; 401, fixture; 5, transfer mechanism; 501, hanging basket; 5011, projection; 502, accommodation space; 503, support component; 504, bracket; 505, arm; 506, lift cylinder; 507, bearing assembly; 508, push-and-pull cylinder; 509, telescopic cylinder; 6, the gaily decorated basket; 7, silicon chip.
Embodiment
below in conjunction with embodiment shown in the drawings, the utility model is described in detail below:
as shown in Figure 1, a kind of full-automatic silicon wafer inserted sheet and purging system, it to realize silicon chip 7 to insert in the gaily decorated basket 6 and carries out the function of cleaning, it comprises the first connecting gear 1, second connecting gear 2, the 3rd connecting gear 3, mechanical arm assembly 4, transfer mechanism 5, wiper mechanism, and the first connecting gear 1 comprises the first conveyer belt 101 for transmitting silicon chip 7; Second connecting gear 2 comprises the second conveyer belt 201 for transmitting the unloaded gaily decorated basket 6; 3rd connecting gear 3 comprises the 3rd conveyer belt 301 for transmitting the fully loaded gaily decorated basket 6; Mechanical arm assembly 4 comprises the fixture 401 for clamping the gaily decorated basket 6 that can be arranged on movably between the first conveyer belt 101, second conveyer belt 201 and the 3rd conveyer belt 301 three.
as shown in accompanying drawing 2, accompanying drawing 3 and accompanying drawing 4, transfer mechanism 5 comprises hanging basket 501 for receiving multiple fully loaded gaily decorated basket 6, for the fully loaded gaily decorated basket 6 on the 3rd conveyer belt 301 being transferred to the transfer assembly in hanging basket 501; Hanging basket 501 is provided with multiple accommodation space 502 with entrance, accommodation space 502 can receive multiple fully loaded gaily decorated basket 6; Transfer assembly comprises support component 503 for extracting the fully loaded gaily decorated basket 6 on the 3rd conveyer belt 301, control elevating control unit that support component 503 is elevated, control rotation control unit that support component 503 swings in horizontal plane, control support component 503 and on the fully loaded gaily decorated basket 6 move to extension and contraction control unit in hanging basket 501, support component 503 has the primary importance of the fully loaded gaily decorated basket 6 be convenient on extraction the 3rd conveyer belt 301 and makes the fully loaded gaily decorated basket 6 be positioned at the second place of the porch of accommodation space 502; Extension and contraction control unit has the extended position that the fully loaded gaily decorated basket 6 on support component 503 can be pushed in accommodation space 502 and the retracted position be separated with the fully loaded gaily decorated basket 6; Wiper mechanism comprises the rinse bath for cleaning silicon chip 7, is loaded with cleaning fluid in rinse bath.
in the present embodiment, support component 503 is two support bars that can be held up from the relative both sides of the gaily decorated basket 6, two support bars are arranged on a bracket 504, the top of bracket 504 is provided with an arm 505, elevating control unit comprises the lift cylinder 506 vertically arranged, the cylinder barrel of lift cylinder 506 is arranged on arm 505, bracket 504 is fixedly mounted on the lower end of the piston rod of lift cylinder 506, rotate control unit and comprise installation shaft bearing assembly 507 and push-and-pull cylinder 508, the upper end of the cylinder barrel of lift cylinder 506 can be arranged on arm 505 rotationally by bearing assembly 507, this bearing assembly 507 comprises the bearing between the bearing pedestal be fixedly mounted on arm 505 and the cylinder barrel being arranged on this bearing pedestal and lift cylinder 506, the cylinder barrel of push-and-pull cylinder 508 is hingedly mounted on arm 505, the piston rod of push-and-pull cylinder 508 is connected on lift cylinder 506, extension and contraction control unit is two telescopic cylinders 509, the cylinder barrel of telescopic cylinder 509 is fixedly mounted on bracket 504, the gaily decorated basket 6 on support component 503 is positioned on the flexible path of the piston rod of telescopic cylinder 509, this system also comprises the suspender that hanging basket 501 can be moved in rinse bath, in the opposing sidewalls of hanging basket 501, relative extension is provided with two to symmetrical projection 5011, suspender comprises four can hang over the suspension hook that hanging basket 501 holds up by projection 5011, this system also comprise be arranged on the 3rd conveyer belt 301 transfer path on the reversing unit that can change the placing direction of the fully loaded gaily decorated basket 6, each accommodation space 502 in hanging basket 501 parallels setting, and their entrance is towards identical.
during work, the unloaded gaily decorated basket 6 is sent to along the first conveyer belt 101 position that mechanical arm assembly 4 can capture, the current unloaded gaily decorated basket 6 captures by the fixture 401 in mechanical arm assembly 4, and move to inserted sheet position with the unloaded gaily decorated basket 6, silicon chip 7 is mobile in inserted sheet position with the second conveyer belt 201 successively, and insert in the corresponding slot on the unloaded gaily decorated basket 6, until the current gaily decorated basket 6 sticks with silicon chip 7, mechanical arm assembly 4 action, move on the 3rd conveyer belt 301 with the gaily decorated basket 6 sticking with silicon chip 7, then discharge, the current fully loaded gaily decorated basket 6 is under the effect of reversing unit, after turning to required state, the position can shifted by transfer mechanism 5 is moved to the 3rd conveyer belt 301, particularly, lift cylinder 506 works, bracket 504 is declined, namely support component 503 declines, the fully loaded gaily decorated basket 6 now with the 3rd conveyer belt 301 movement just in time can add between two support bars, lift cylinder 506 action, bracket 504 is made to drive the fully loaded gaily decorated basket 6 to be increased to the gaily decorated basket 6 position identical with the height of the accommodation space 502 of hanging basket 501 by support bar, then push-and-pull cylinder 508 action, driven bracket 504 drives the fully loaded gaily decorated basket 6 at horizontal rotation in surface by support bar, make the current fully loaded gaily decorated basket 6 to the entry position of accommodation space 502 turning hanging basket 501, and remain on this position, then telescopic cylinder 509 action, the fully loaded gaily decorated basket 6 on support bar is pushed in the accommodation space 502 in hanging basket 501, repeat above-mentioned process, the fully loaded gaily decorated basket 6 is installed by the accommodation space 502 of hanging basket 501, by suspender fully loaded hanging basket 501 moved in rinse bath and clean.
in the design, transfer to clean all automation mechanized operations from the transmission of the transmission of the transmission of the unloaded gaily decorated basket 6, silicon chip 7, the fully loaded gaily decorated basket 6, the fully loaded gaily decorated basket 6, and structure is reliable, easy to maintenance, while the labour intensity reducing operating personnel, greatly can enhance productivity, be suitable for applying in silicon chip 7 industry.
above-described embodiment, only for technical conceive of the present utility model and feature are described, its object is to person skilled in the art can be understood content of the present utility model and implement according to this, can not limit protection range of the present utility model with this.All equivalences done according to the utility model spirit change or modify, and all should be encompassed within protection range of the present utility model.
Claims (9)
1. full-automatic silicon wafer inserted sheet and a purging system, it to realize silicon chip to insert in the gaily decorated basket and carries out the function of cleaning, and it is characterized in that: comprise the first connecting gear, the second connecting gear, the 3rd connecting gear, mechanical arm assembly, transfer mechanism, wiper mechanism,
The first described connecting gear comprises the first conveyer belt for transmitting silicon chip;
The second described connecting gear comprises the second conveyer belt for transmitting the unloaded gaily decorated basket;
The 3rd described connecting gear comprises the 3rd conveyer belt for transmitting the fully loaded gaily decorated basket;
Described mechanical arm assembly comprises can be arranged on the first described conveyer belt, the fixture for clamping the gaily decorated basket between the second described conveyer belt and the 3rd described conveyer belt three movably;
Described transfer mechanism comprises hanging basket for receiving multiple fully loaded gaily decorated basket, for the fully loaded gaily decorated basket on the 3rd described conveyer belt being transferred to the transfer assembly in described hanging basket; Described hanging basket is provided with multiple accommodation space with entrance, described accommodation space can receive multiple fully loaded gaily decorated basket; Described transfer assembly comprises support component for extracting the fully loaded gaily decorated basket on the 3rd described conveyer belt, control described in support component lifting elevating control unit, control described in support component swing in horizontal plane rotation control unit, control described in support component and on the fully loaded gaily decorated basket move to extension and contraction control unit in described hanging basket, described support component has the primary importance of the fully loaded gaily decorated basket on the 3rd conveyer belt described in being convenient to extract and makes the fully loaded gaily decorated basket be positioned at the second place of the porch of described accommodation space; Described extension and contraction control unit has the retracted position that the fully loaded gaily decorated basket on described support component can be pushed the extended position in described accommodation space and be separated with the fully loaded gaily decorated basket;
Described wiper mechanism comprises the rinse bath for cleaning silicon chip, is loaded with cleaning fluid in described rinse bath.
2. full-automatic silicon wafer inserted sheet according to claim 1 and purging system, is characterized in that: described support component is two support bars that can be held up from the relative both sides of the gaily decorated basket, and the support bar described in two is arranged on a bracket.
3. full-automatic silicon wafer inserted sheet according to claim 2 and purging system, it is characterized in that: the top of described bracket is provided with an arm, described elevating control unit comprises the lift cylinder vertically arranged, the cylinder barrel of described lift cylinder is arranged on described arm, and described bracket is fixedly mounted on the lower end of the piston rod of described lift cylinder.
4. full-automatic silicon wafer inserted sheet according to claim 3 and purging system, it is characterized in that: described rotation control unit comprises installation shaft bearing assembly and push-and-pull cylinder, the upper end of the cylinder barrel of described lift cylinder can be arranged on described arm rotationally by described bearing assembly, the cylinder barrel of described push-and-pull cylinder is hingedly mounted on described arm, and the piston rod of described push-and-pull cylinder is connected on described lift cylinder.
5. full-automatic silicon wafer inserted sheet according to claim 2 and purging system, it is characterized in that: described extension and contraction control unit is two telescopic cylinders, the cylinder barrel of described telescopic cylinder is fixedly mounted on described bracket, and the gaily decorated basket on described support component is positioned on the flexible path of the piston rod of described telescopic cylinder.
6. full-automatic silicon wafer inserted sheet according to claim 1 and purging system, is characterized in that: this system also comprises the suspender that described hanging basket can be moved in described rinse bath.
7. full-automatic silicon wafer inserted sheet according to claim 6 and purging system, it is characterized in that: in the opposing sidewalls of described hanging basket, relative extension is provided with two to symmetrical projection, described suspender comprises four and can hang over the suspension hook of described hanging basket picking-up on described projection.
8. full-automatic silicon wafer inserted sheet according to claim 1 and purging system, is characterized in that: this system also comprises the reversing unit that can change the placing direction of the fully loaded gaily decorated basket on the transfer path being arranged on the 3rd described conveyer belt.
9. full-automatic silicon wafer inserted sheet according to claim 1 and purging system, is characterized in that: each described accommodation space in described hanging basket parallels setting, and their entrance is towards identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520694837.0U CN204946876U (en) | 2015-09-09 | 2015-09-09 | Full-automatic silicon wafer inserted sheet and purging system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520694837.0U CN204946876U (en) | 2015-09-09 | 2015-09-09 | Full-automatic silicon wafer inserted sheet and purging system |
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| Publication Number | Publication Date |
|---|---|
| CN204946876U true CN204946876U (en) | 2016-01-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520694837.0U Active CN204946876U (en) | 2015-09-09 | 2015-09-09 | Full-automatic silicon wafer inserted sheet and purging system |
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| CN (1) | CN204946876U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105140162A (en) * | 2015-09-09 | 2015-12-09 | 张家港市超声电气有限公司 | Full-automatic silicon wafer inserting and cleaning system |
| CN106711073A (en) * | 2017-03-20 | 2017-05-24 | 常州亿晶光电科技有限公司 | Non-destructive type self-cleaning silicon chip inserting device |
| CN110252739A (en) * | 2019-07-11 | 2019-09-20 | 东莞市科路科技有限公司 | Electrode plate and plasma cleaner |
-
2015
- 2015-09-09 CN CN201520694837.0U patent/CN204946876U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105140162A (en) * | 2015-09-09 | 2015-12-09 | 张家港市超声电气有限公司 | Full-automatic silicon wafer inserting and cleaning system |
| CN105140162B (en) * | 2015-09-09 | 2017-11-10 | 张家港市超声电气有限公司 | Full-automatic silicon wafer inserted sheet and purging system |
| CN106711073A (en) * | 2017-03-20 | 2017-05-24 | 常州亿晶光电科技有限公司 | Non-destructive type self-cleaning silicon chip inserting device |
| CN110252739A (en) * | 2019-07-11 | 2019-09-20 | 东莞市科路科技有限公司 | Electrode plate and plasma cleaner |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |