CN204434756U - 一种电镀槽装置 - Google Patents
一种电镀槽装置 Download PDFInfo
- Publication number
- CN204434756U CN204434756U CN201520025786.2U CN201520025786U CN204434756U CN 204434756 U CN204434756 U CN 204434756U CN 201520025786 U CN201520025786 U CN 201520025786U CN 204434756 U CN204434756 U CN 204434756U
- Authority
- CN
- China
- Prior art keywords
- cell body
- electroplating
- plating bath
- electroplating cell
- bath arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007747 plating Methods 0.000 title claims abstract description 76
- 238000009713 electroplating Methods 0.000 claims abstract description 133
- 210000005056 cell body Anatomy 0.000 claims abstract description 94
- 239000007788 liquid Substances 0.000 claims abstract description 86
- 239000003814 drug Substances 0.000 claims abstract description 35
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 29
- 238000001914 filtration Methods 0.000 claims abstract description 21
- 238000005507 spraying Methods 0.000 claims abstract description 4
- 230000004308 accommodation Effects 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005202 decontamination Methods 0.000 description 1
- 230000003588 decontaminative effect Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520025786.2U CN204434756U (zh) | 2015-01-14 | 2015-01-14 | 一种电镀槽装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520025786.2U CN204434756U (zh) | 2015-01-14 | 2015-01-14 | 一种电镀槽装置 |
Publications (1)
Publication Number | Publication Date |
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CN204434756U true CN204434756U (zh) | 2015-07-01 |
Family
ID=53602650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520025786.2U Active CN204434756U (zh) | 2015-01-14 | 2015-01-14 | 一种电镀槽装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN204434756U (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110791803A (zh) * | 2019-11-20 | 2020-02-14 | 广德东威科技有限公司 | 一种电镀工艺槽的回流消泡*** |
CN113481574A (zh) * | 2021-07-16 | 2021-10-08 | 江苏台祥自动化科技有限公司 | 一种自动化智能电镀*** |
CN114836814A (zh) * | 2022-05-23 | 2022-08-02 | 智程半导体设备科技(昆山)有限公司 | 一种电镀药液循环*** |
-
2015
- 2015-01-14 CN CN201520025786.2U patent/CN204434756U/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110791803A (zh) * | 2019-11-20 | 2020-02-14 | 广德东威科技有限公司 | 一种电镀工艺槽的回流消泡*** |
CN113481574A (zh) * | 2021-07-16 | 2021-10-08 | 江苏台祥自动化科技有限公司 | 一种自动化智能电镀*** |
CN113481574B (zh) * | 2021-07-16 | 2024-03-08 | 江苏台祥自动化科技有限公司 | 一种自动化智能电镀*** |
CN114836814A (zh) * | 2022-05-23 | 2022-08-02 | 智程半导体设备科技(昆山)有限公司 | 一种电镀药液循环*** |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 215311 East Side of Dongding Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Kunshan Weiwei Science and Technology Co.,Ltd. Address before: Suzhou City, Jiangsu province 215335 Dongting Lake Development District of Kunshan City Road 9, room 2 Patentee before: KUNSHAN DONGWEI PLATING EQUIPMENT TECHNOLOGY Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
IP01 | Partial invalidation of patent right |
Commission number: 5W118231 Conclusion of examination: Claim 1-3 of No. 201520025786.2, citing claims 7 and 12 of claims 1-3, indirectly referring to claims 8-11 of claims 1-3, 13 referring to claims 2-3 and claims 14 referring to claims 1-3 are invalid. Claims 4-6 are followed by claims 8-11 of claims 4-6, The patent is still valid on the basis of referring to claims 7 and 12-14 of claims 4-6. Decision date of declaring invalidation: 20200113 Decision number of declaring invalidation: 42793 Denomination of utility model: An electroplating bath device Granted publication date: 20150701 Patentee: Kunshan Weiwei Science and Technology Co.,Ltd. |
|
IP01 | Partial invalidation of patent right |