CN204356395U - A kind of mask plate - Google Patents
A kind of mask plate Download PDFInfo
- Publication number
- CN204356395U CN204356395U CN201420641286.7U CN201420641286U CN204356395U CN 204356395 U CN204356395 U CN 204356395U CN 201420641286 U CN201420641286 U CN 201420641286U CN 204356395 U CN204356395 U CN 204356395U
- Authority
- CN
- China
- Prior art keywords
- mask
- frame
- fixed frame
- groove
- mask plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The utility model discloses a kind of mask plate, it includes mask, fixed frame and mask frame, and wherein this mask is fixedly connected on fixed frame, and this mask and fixed frame form an entirety, this mask frame is linked in this fixed frame, and this mask frame and fixed frame can combine and dismounting.The utility model, by mask and mask frame are divided into two portions, combines during use, can dismantle when not using, and makes different masks can share same mask frame, reaches cost-saving object.
Description
Technical field
The utility model, about a kind of mask plate, refers to that one can split especially, and can share the vacuum evaporation mask plate of mask frame.
Background technology
In vacuum environment, heating materials is plated on substrate and is called vacuum evaporation, in evaporate process, need mask plate be used.As shown in Figure 1, existing evaporation mask plate, its mask 6 is directly fixed on mask frame 7, and namely mask plate is integrated structure, when adopting different mask, can only the different mask frame of corresponding replacing; Simultaneously because mask is fixed on mask frame, mask tension force cannot be adjusted.
Utility model content
In view of this, main purpose of the present utility model is to provide one to split, and can share the mask plate of mask frame.
For achieving the above object, the utility model provides a kind of mask plate, it includes mask, fixed frame and mask frame, wherein this mask is fixedly connected on fixed frame, this mask and fixed frame form an entirety, this mask frame is linked in this fixed frame, and this mask frame and fixed frame can combine and dismounting.
Be provided with the first groove outside described mask frame, the inner side of described fixed frame is provided with projection in this first groove location place relatively, and when this mask frame is linked in this fixed frame, this projection is entrenched in this first groove.
The inner side of described fixed frame is provided with the first groove, and the outside of described mask frame is provided with projection in this first groove location place relatively, and when this mask frame is linked in this fixed frame, this projection is entrenched in this first groove.
The outside on described at least one limit of mask plate is provided with multiple second groove, and being provided with in this second groove can to the pad of mask tension adjustment.
The inner side at least one limit of described fixed frame is provided with multiple second groove, and being provided with in this second groove can to the pad of mask tension adjustment.
Described second groove is located at outside described mask frame near described mask place.
Described second groove is located at inside described fixed frame near described mask place.
The length of the pad in each described second groove is similar and different.
Four limits of described fixed frame independently, are provided with breach between adjacent two limits.
Described mask is connected with fixed frame laser welding.
The utility model, by mask and mask frame are divided into two portions, combines during use, can dismantle when not using, and makes different masks can share same mask frame, reaches cost-saving object.
Accompanying drawing explanation
Fig. 1 is the structural representation of mask plate in prior art;
Fig. 2 is the exploded perspective view of the utility model mask plate;
Fig. 3 is schematic diagram after the assembling of the utility model mask plate.
Embodiment
For ease of having further understanding to structure of the present utility model and the effect that reaches, the existing preferred embodiment that develops simultaneously by reference to the accompanying drawings is described in detail as follows.
As shown in Figure 2 and Figure 3, mask plate of the present utility model includes mask 1, fixed frame 2 and mask frame 3, wherein mask 1 surrounding is fixedly connected on fixed frame 2, mask 1 and fixed frame 2 is made to form an entirety, mask frame 3 is linked in fixed frame 2, makes mask frame 3 capable of being combined and dismounting with fixed frame 2.Mask 1 is connected by laser welding with fixed frame 2.
The first groove 30 is provided with outside mask frame 3 of the present utility model, the inner side of this fixed frame 2 is provided with multiple projection 20 relative to the first groove 30 position, when mask frame 3 is linked in fixed frame 2, projection 20 inside fixed frame 2 can be entrenched in the first groove 30 outside mask frame 3, with this, mask frame 3 and fixed frame 2 be installed together.
In the utility model, first groove also can be located at the inner side of fixed frame 2, and projection is located at the position relative with the first groove, the outside of mask frame 3, when mask frame 3 is linked in fixed frame 2, projection outside mask frame 3 can be entrenched in the first groove inside fixed frame 2, with this, mask frame 3 and fixed frame 2 be installed together.
The outside at least one limit of mask frame 3 in the utility model is also provided with at least one second groove 31, when mask 1 tension force needs adjustment, pad 32 can be provided with in position second groove 31 needing adjustment, after mask frame 3 and fixed frame 2 are installed, the gap of mask frame 3 and fixed frame 2 is adjusted by the pad 32 in the second groove 31, so as to adjusting the tension force of mask 1, the length of pad 32 can be changeable according to the needs of adjusting play.When being provided with multiple second groove 31, the pad 32 of identical or different size can be set in the second groove 31, need adjustment place to select long or short pad at tension force, as required to the adjustment that mask 1 tension force carries out in various degree.
The second groove in the utility model also can be located at the inner side at least one limit of fixed frame 2, and the adjustment being carried out mask tension force by pad is above-mentioned as seen, repeats no more.The second groove in the utility model can be located at inside fixed frame 2 near mask 1 place or to be located near mask 1 place outside mask frame 3, to be more conducive to borrow pad 32 wherein to adjust mask tension force.
Four limits of the fixed frame 2 in the utility model independently, can be provided with breach each other, can easy disassembly.
The utility model, by mask and mask frame are divided into two portions, combines during use, can dismantle when not using, and makes different masks can share same mask frame, reaches cost-saving object; Simultaneously by increasing pad, adjustable mask tension force in the second groove on mask frame.
The above, be only preferred embodiment of the present utility model, is not intended to limit protection domain of the present utility model.
Claims (8)
1. a mask plate, is characterized in that, it includes mask, fixed frame and mask frame, wherein this mask is fixedly connected on fixed frame, this mask and fixed frame form an entirety, and this mask frame is linked in this fixed frame, and this mask frame and fixed frame can combine and dismounting;
Be provided with the first groove outside described mask frame, the inner side of described fixed frame is provided with projection in this first groove location place relatively, and when this mask frame is linked in this fixed frame, this projection is entrenched in this first groove; Or,
The inner side of described fixed frame is provided with the first groove, and the outside of described mask frame is provided with projection in this first groove location place relatively, and when this mask frame is linked in this fixed frame, this projection is entrenched in this first groove.
2. mask plate as claimed in claim 1, it is characterized in that, the outside on described at least one limit of mask plate is provided with multiple second groove, and being provided with in this second groove can to the pad of mask tension adjustment.
3. mask plate as claimed in claim 1, it is characterized in that, the inner side at least one limit of described fixed frame is provided with multiple second groove, and being provided with in this second groove can to the pad of mask tension adjustment.
4. mask plate as claimed in claim 2, is characterized in that, described second groove is located at outside described mask frame near described mask place.
5. mask plate as claimed in claim 3, is characterized in that, described second groove is located at described fixing inside 3 frames near described mask place.
6. mask plate as claimed in claim 2 or claim 3, it is characterized in that, the length of the pad in each described second groove is similar and different.
7. mask plate as claimed in claim 1, it is characterized in that, four limits of described fixed frame independently, are provided with breach between adjacent two limits.
8. mask plate as claimed in claim 1, it is characterized in that, described mask is connected with fixed frame laser welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420641286.7U CN204356395U (en) | 2014-10-31 | 2014-10-31 | A kind of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420641286.7U CN204356395U (en) | 2014-10-31 | 2014-10-31 | A kind of mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204356395U true CN204356395U (en) | 2015-05-27 |
Family
ID=53257875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420641286.7U Expired - Fee Related CN204356395U (en) | 2014-10-31 | 2014-10-31 | A kind of mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204356395U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108034923A (en) * | 2018-01-24 | 2018-05-15 | 武汉华星光电半导体显示技术有限公司 | Mask assembly, mask frame and mask support frame |
| CN110331364A (en) * | 2019-08-02 | 2019-10-15 | 深圳市华星光电半导体显示技术有限公司 | Evaporation metal mask plate |
-
2014
- 2014-10-31 CN CN201420641286.7U patent/CN204356395U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108034923A (en) * | 2018-01-24 | 2018-05-15 | 武汉华星光电半导体显示技术有限公司 | Mask assembly, mask frame and mask support frame |
| CN108034923B (en) * | 2018-01-24 | 2020-06-05 | 武汉华星光电半导体显示技术有限公司 | Mask assembly, mask frame and mask support frame |
| CN110331364A (en) * | 2019-08-02 | 2019-10-15 | 深圳市华星光电半导体显示技术有限公司 | Evaporation metal mask plate |
| CN110331364B (en) * | 2019-08-02 | 2021-05-07 | 深圳市华星光电半导体显示技术有限公司 | Vapor plating metal mask plate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150527 Termination date: 20171031 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |