CN203877896U - Liquid supply device - Google Patents

Liquid supply device Download PDF

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Publication number
CN203877896U
CN203877896U CN201420161838.4U CN201420161838U CN203877896U CN 203877896 U CN203877896 U CN 203877896U CN 201420161838 U CN201420161838 U CN 201420161838U CN 203877896 U CN203877896 U CN 203877896U
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CN
China
Prior art keywords
tank
liquid
supplying apparatus
fluid supplying
supplying
Prior art date
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Expired - Fee Related
Application number
CN201420161838.4U
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Chinese (zh)
Inventor
高斌
张峰
隆清德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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Priority to CN201420161838.4U priority Critical patent/CN203877896U/en
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Publication of CN203877896U publication Critical patent/CN203877896U/en
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Abstract

The utility model provides a liquid supply device. The liquid supply device comprises a supply tank, and further comprises a heating mechanism. The heating mechanism comprises a heater which can heat liquid flowing out of the supply tank to a preset temperature. The liquid supply device enables the liquid reaching the preset temperature to flow out of an outlet of the liquid supply device. Compared with the prior art, time that the liquid in the liquid supply device rises to the preset temperature for production from the refrigerated storage temperature can be shortened, and therefore production efficiency is improved.

Description

Fluid Supplying apparatus
Technical field
The utility model relates to technical field of liquid crystal display, relates in particular to a kind of fluid Supplying apparatus.
Background technology
The production process that is used for the colored filter of display panels needs to apply a large amount of photoresists as raw materials for production, photoresist all leaves in refrigerator or freezer in the time not using, and need to use time, the taking-up placement long period makes its temperature consistent with the temperature (being generally 23 DEG C identical with ambient temperature) of clean room.In the time that photoresist uses, generally in photoresist bucket 1, pass into gas by vent line 2, make photoresist by stretching into delivery conduit 3 device for transferring (as shown in Figure 1) of bottom, thereby can produce aborning following problem:
On the one hand, photoresist is stored in reefer, when application, to thaw in advance, thawing time is longer, and the model of photoresist kind and product is more in producing, the product of different types of photoresist coupling different model, be according to the situation of producing a large amount of photoresists that thaw in advance, thereby be easy to occur the photoresist stopping production accident causing not in time of thawing, reduce production efficiency.
On the other hand, when existing apparatus uses, photoresist bottom of the barrel remains more photoresist cannot all extrude use, causes production waste of raw materials, has both wasted raw MAT'L, again environment has been caused to certain pollution.
Utility model content
The utility model is intended at least solve one of problems of the prior art, proposes a kind of fluid Supplying apparatus, with reduce photoresist from refrigerant temperature be increased to for the production of time the temperature time used.
To achieve these goals, the utility model provides a kind of fluid Supplying apparatus, this fluid Supplying apparatus comprises supplying tank, wherein, described fluid Supplying apparatus also comprises heating arrangements, described heating arrangements comprises temperature booster, and described temperature booster can be by the heating liquid flowing out from described supplying tank to preset temperature, and described fluid Supplying apparatus can make the liquid that reaches described preset temperature flow out from the outlet of described fluid Supplying apparatus.
Preferably, described temperature booster comprises H Exch, and the entrance of described H Exch is communicated with the outlet of described supplying tank, and the outlet of described H Exch is communicated with the outlet of described fluid Supplying apparatus.
Preferably, described heating arrangements also comprises the first temperature measurer, storage tank and flow divider valve, described the first temperature measurer is arranged on the exit of described H Exch, described flow divider valve is arranged on the delivery conduit of described H Exch, the first distribution pipeline of described flow divider valve is communicated with the outlet of described fluid Supplying apparatus, the second distribution pipeline of described flow divider valve is communicated with described storage tank, in the time that the fluid temperature flowing out from described temperature booster reaches described preset temperature, the outlet that described liquid enters described fluid Supplying apparatus through the first distribution pipeline of described flow divider valve; In the time that the liquid flowing out from described temperature booster does not reach described preset temperature, described liquid enters described storage tank through the second distribution pipeline of described flow divider valve.
Preferably, between the outlet of described storage tank and the entrance of described H Exch, be provided with pump.
Preferably, described fluid Supplying apparatus also comprises control cock and liquid detecting unit, described control cock is arranged on the pipeline between described supplying tank and described storage tank, in the time that described liquid detecting unit inspection is less than default storage content to the storage content of storage pot liquid, described control cock is by the pipeline conducting between described supplying tank and described storage tank, in the time that described liquid detecting unit inspection is no less than default storage content to described storage pot liquid, described control cock is by the pipeline cut-off between described supplying tank and described storage tank.
Preferably, described liquid detecting unit comprises liquid level detector part.
Preferably, described liquid detecting unit comprises liquid weight detection means.
Preferably, described control cock is electromagnetic valve, described fluid Supplying apparatus also comprises the controller being electrically connected with described control cock, on the pipeline between described supplying tank and described control cock, is provided with flow sensing part, and described flow sensing part is electrically connected with described controller.
Preferably, in described storage tank, be provided with the second temperature measurer.
Preferably, the outlet of described supplying tank is arranged at the below of described supplying tank, described supplying tank also comprises seal joint, described seal joint is connected with the exit seal of described supplying tank, described supplying tank also comprises breather pipe, described breather pipe extends to the top of supplying tank inside from the outside of described supplying tank, with by the air in described supplying tank and ambient atmosphere conducting.
In the utility model, temperature booster in described fluid Supplying apparatus can heat the liquid flowing out from described supplying tank, make the temperature of described liquid can be increased to fast described preset temperature, thereby shortened the setup time before producing, improved production efficiency; In addition, the outlet of described supplying tank is arranged at the below of described supplying tank, has reduced the liquid residue in described supplying tank, thereby has provided cost savings.
Brief description of the drawings
Accompanying drawing is to be used to provide further understanding of the present utility model, and forms a part for specification sheets, is used from explanation the utility model, but does not form restriction of the present utility model with detailed description of the invention one below.In the accompanying drawings:
Shown in Fig. 1 is the schematic diagram of existing photoresist feedway;
Shown in Fig. 2 is the structural representation of fluid Supplying apparatus that the utility model provides;
Shown in Fig. 3 is the structural representation of heating arrangements in described fluid Supplying apparatus;
Shown in Fig. 4 is the structural representation of supplying tank in described fluid Supplying apparatus;
Shown in Fig. 5 is another structural representation of supplying tank in described fluid Supplying apparatus.
Description of reference numerals
1: photoresist bucket; 2: vent line; 3: delivery conduit; 10: supplying tank; 11: seal joint; 12: breather pipe; 20: heating arrangements; 210: H Exch; 211: heating member; 212: circulation line; 213: media Containers; 214: controllable capacity pump; 220: the first temperature measurers; 230: storage tank; 240: flow divider valve; 241: the first distribution pipelines; 242: the second distribution pipelines; 250: pump; 260: the second temperature measurers; 30: control cock; 40: liquid detecting unit; 50: flow sensing part; 60: filter element; 70: bubble unit degass.
Detailed description of the invention
Below in conjunction with accompanying drawing, detailed description of the invention of the present utility model is elaborated.Should be understood that, detailed description of the invention described herein only, for description and interpretation the utility model, is not limited to the utility model.
The utility model provides a kind of fluid Supplying apparatus, as shown in Figures 2 and 3, this fluid Supplying apparatus comprises supplying tank 10, wherein, described fluid Supplying apparatus also comprises heating arrangements, described heating arrangements comprises temperature booster, and described temperature booster can be by the heating liquid flowing out from supplying tank to preset temperature, and described fluid Supplying apparatus can make the liquid that reaches described preset temperature flow out from the outlet of described fluid Supplying apparatus.
In the fluid Supplying apparatus providing in the utility model, the liquid in supplying tank 10 can be photoresist, that is, the utility model is particularly useful for the supply to photoresist.Described " preset temperature " refers to temperature when photoresist uses, and is generally 23 DEG C ± 1 DEG C.
In the utility model, described temperature booster can to by the heating liquid flowing out from supplying tank 10 to preset temperature, thereby reduced liquid from refrigerant temperature be warming up to for the production of preset temperature time time used, thereby improved production efficiency.
The utility model is not done concrete restriction to the type of flow of the liquid that reaches described preset temperature in described fluid Supplying apparatus, as long as can flow out from the outlet of described fluid Supplying apparatus, for producing.For example, can utilize the devices such as aspirating pump to extract liquid, also can utilize the Action of Gravity Field of liquid to make liquid directly flow to the outlet of described fluid Supplying apparatus.
The utility model is not done concrete restriction to the form of described temperature booster, as long as can be by the heating liquid flowing out from supplying tank 10, for example, described temperature booster can be for being arranged on the heating member in supplying tank 10 exits.As a kind of detailed description of the invention of the present utility model, as shown in Figures 2 and 3, described temperature booster can comprise H Exch 210, and the entrance of H Exch 210 is communicated with the outlet of supplying tank 10, and the outlet of H Exch 210 is communicated with the outlet of described fluid Supplying apparatus.Conventionally, H Exch 210 can comprise circulation line 212 and heating member 211, in the time utilizing H Exch 210 to heat above described liquid, first need to injected water or other circulatory mediators in circulation line 212, the heat effect of the heating member 211 by H Exch 210, the temperature of water in H Exch 210 or other circulatory mediators is raise, in the time that the liquid flowing out in supplying tank 10 is flowed through described circulation line, can transfer heat to the liquid flowing out from supplying tank 10.In the time that the temperature of the liquid flowing out from supplying tank 10 reaches preset temperature, this liquid flows out from the outlet of described fluid Supplying apparatus.
For the liquid that reaches preset temperature is flowed out from the outlet of described fluid Supplying apparatus, and proceed heating to not reaching the liquid of preset temperature, further, as shown in Figures 2 and 3, described heating arrangements can also comprise the first temperature measurer 220, storage tank 230 and flow divider valve 240, the first temperature measurer 220 is arranged on the exit of H Exch 210, flow divider valve 240 is arranged on the delivery conduit of H Exch 210, the first distribution pipeline 241 of flow divider valve 240 is communicated with the outlet of described fluid Supplying apparatus, the second distribution pipeline 242 of flow divider valve 240 is communicated with storage tank 230.The first temperature measurer 220 can detect the temperature of the liquid flowing out from described temperature booster, and the temperature signal recording is sent to and controls the controller of flow divider valve 240, this controller judges the temperature signal receiving, in the time that the temperature of the liquid flowing out from described temperature booster reaches described preset temperature, the controller of control flow divider valve 240 can be controlled the first outlet of flow divider valve 240 and open, thus the outlet that makes described liquid enter described fluid Supplying apparatus through the first distribution pipeline 241 of flow divider valve 240; In the time that the temperature of the liquid flowing out from described temperature booster does not reach described preset temperature, the controller of control flow divider valve 240 can be controlled the second outlet of flow divider valve 240 and open, thereby makes described liquid enter storage tank 230 through the second distribution pipeline 242 of flow divider valve 240.Storage tank 230 is communicated with H Exch 210, can utilize this H Exch 210 further to heat the liquid in storage tank 230, so that this liquid reaches described preset temperature.
Heat in order to make liquid in storage tank 230 can enter fast H Exch 210, preferably, as shown in Figure 2, between the outlet of storage tank 230 and the entrance of H Exch 210, can be provided with pump 250.
Further, as shown in Figure 2, described fluid Supplying apparatus can also comprise control cock 30 and liquid detecting unit 40, and control cock 30 is arranged on the pipeline between supplying tank 10 and storage tank 230.In the time that liquid detecting unit 40 detects that the storage content of storage tank 230 interior liquid is less than default storage content, control cock 30 is by the pipeline conducting between supplying tank 10 and storage tank 230, in the time that liquid detecting unit 40 detects that the storage content of storage tank 230 interior liquid is no less than default storage content, control cock 30 is by the pipeline cut-off between supplying tank 10 and storage tank 230, thereby ensureing that liquid in storage tank 230, in the situation that not overflowing storage tank 230, can provide sufficient liquid to heat to described temperature booster.
The utility model is not done concrete restriction to the form of control cock 30, control cock 30 can be hydraulic valve, also can be the electromagnetic valve being electrically connected with controller, as long as can be less than default storage content the pipeline conducting between supplying tank 10 and storage tank 230 at the liquid storage amount in storage tank 230, be no less than default storage content the pipeline cut-off between supplying tank 10 and storage tank 230 at the liquid storage amount in storage tank 230.
Form and the detection mode of the utility model to liquid detecting unit 40 do not done concrete restriction, as long as can detect the liquid storage amount in storage tank.As a kind of detailed description of the invention of the present utility model, liquid detecting unit 40 comprises liquid level detector part, for example, and level sensor.Particularly, the liquid level of the liquid recording when described liquid level detector part is during lower than default liquid level, and liquid level detector part can produce the first control signal, and these the first control signal control control cock 30 conductings, make the liquid in supplying tank 10 enter storage tank 230; When the liquid level of the liquid recording when described liquid level detector part is not less than described default liquid level, described liquid level detector part can produce the second control signal, and this second control signal control control cock 30 is ended, and makes the liquid in supplying tank no longer enter storage tank.
As another kind of detailed description of the invention of the present utility model, described liquid detecting unit comprises liquid weight detection means, for example, and weight sensor.Particularly, when the weight of the liquid recording when described liquid weight detection means is less than preset weight, described liquid weight detection means can produce the first control signal, and these the first control signal control control cock 30 conductings, make the liquid in supplying tank 10 enter storage tank 230; When the liquid weight recording when described liquid weight detection means is not less than described preset weight; Described liquid weight detection means can produce the second control signal, and this second control signal control control cock 30 is ended, and makes the liquid in supplying tank 10 no longer enter storage tank 230.
Hold intelligible, corresponding liquid level and weight when the storage content that described default liquid level and described preset weight are respectively the liquid in storage tank 230 reaches described default storage content.
As described above, fluid Supplying apparatus provided by the utility model is particularly useful for the supply of photoresist, in the production process using photoresist as raw material, in order to improve the quality of production, in the time that the photoresist in supplying tank 10 all flows into storage tank 230, by the pipeline cut-off between supplying tank 10 and storage tank 230, to reduce the amount of air mixing in photoresist.
The utility model is not done concrete restriction to described cut-off mode, both can, by manually carrying out, can automatically be controlled by described fluid Supplying apparatus yet.As a kind of preferred implementation of the present utility model, as shown in Figure 2, control cock 30 is electromagnetic valve, described fluid Supplying apparatus can comprise the controller (not shown) being electrically connected with control cock 30, on pipeline between supplying tank 10 and control cock 30, be provided with flow sensing part 50, flow sensing part 50 is electrically connected with described controller.In the time that flow sensing part 50 does not detect that liquid flows through, can produce corresponding first signal and this first signal is sent to described controller, described controller can end control cock 30, thereby prevents that the air in supplying tank 10 from entering storage tank 230 and mixing with the liquid in storage tank 230.
For the temperature of the liquid in detection of stored tank 230, further, as shown in Figure 2, in storage tank 230, be provided with the second temperature measurer 260.In the time that the second temperature measurer 260 records the temperature increase of the liquid in storage tank 230, the rate of circulation of the liquid in H Exch 210 improves; In the time that the second temperature measurer 260 records fluid temperature in storage tank 230 and do not increase, the rate of circulation of the liquid in H Exch 210 reduces, thereby reduces the time to the heating liquid in storage tank 230.
Particularly, as shown in Figures 2 and 3, H Exch 210 can also comprise media Containers 213, and the heating member 211 of H Exch 210 is to the dielectric heating in circulation line 212, thereby makes the medium in circulation line 212 carry out interchange of heat with the liquid flowing out from storage tank 230; Media Containers 213 can be provided with multiple entrances and multiple outlet, so that inject new medium and discharge the medium after using; Between circulation line 212 and media Containers 213, can be provided with controllable capacity pump 214, so that medium is circulated between circulation line 212 and media Containers 213, the second temperature measurer 260 can be electrically connected with the controller of control variable pump 214.In the time that the temperature of the liquid in the storage tank 230 that the second temperature measurer 260 records increases,, the liquid flowing out from storage tank 230 does not reach preset temperature and again enters storage tank 230, the controller of control variable pump 214 increases the extraction speed of controllable capacity pump 214, to improve the rate of circulation of the medium in H Exch 210; In the time that the temperature of the liquid in the storage tank 230 that the second temperature measurer 260 records reduces,, the liquid flowing out from storage tank 230 reaches preset temperature and enters the outlet of described fluid Supplying apparatus, the controller of control variable pump 214 reduces the extraction speed of controllable capacity pump 214, to reduce the rate of circulation of the medium in H Exch 210.
In order to improve the degree of utilization of the liquid in supplying tank 10, further, as shown in Figure 4 and Figure 5, the outlet of supplying tank 10 is arranged at the below of supplying tank 10, supplying tank 10 can comprise seal joint 11, and seal joint 11 is connected with the exit seal of supplying tank 10, and supplying tank 10 can also comprise breather pipe 12, breather pipe 12 extends to the top of supplying tank 10 inside from the outside of supplying tank 10, with by the air in supplying tank 10 and ambient atmosphere conducting.In actual applications, supplying tank 10 can be arranged on the installation basis of described fluid Supplying apparatus, make the exit position of supplying tank 10 higher than the entry position of storage tank 230, thereby make the liquid in supplying tank 10 under Action of Gravity Field, flow out supplying tank 10, reduce the liquid residue in supplying tank 10.
The utility model is not done concrete restriction to the setting of breather pipe 12, as long as can pass into the top in supplying tank 10 unidirectional outside air, for example, on seal joint 11, can be provided with the through hole that breather pipe 12 is passed, breather pipe 12 is penetrated to the top (as shown in Figure 4) in supplying tank 10 by described through hole; Or the top of supplying tank 10 can be provided with the through hole that breather pipe 12 is passed, breather pipe 12 passes into the top (as shown in Figure 5) in supplying tank 10 by supplying tank 10 tops.
It will be understood by those skilled in the art that, for described liquid is filtered and removes the bubble in described liquid, as shown in Figure 2, described fluid Supplying apparatus generally includes filter element 60 and degass bubble unit 70, to remove respectively impurity and the bubble in the liquid after heating, improve the quality of products.
It is more than the description to fluid Supplying apparatus provided by the utility model, can find out, temperature booster in described fluid Supplying apparatus can heat the liquid flowing out from supplying tank 10, make the temperature of described liquid can be increased to fast described preset temperature, thereby shorten the setup time before producing, improved production efficiency; In addition, the outlet of supplying tank 10 is arranged at the below of supplying tank 10, compared with prior art, has reduced the liquid residue in supplying tank 10, thereby has provided cost savings.
Be understandable that, above embodiment is only used to principle of the present utility model is described and the illustrative embodiments that adopts, but the utility model is not limited to this.For those skilled in the art, in the situation that not departing from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.

Claims (10)

1. a fluid Supplying apparatus, this fluid Supplying apparatus comprises supplying tank, it is characterized in that, described fluid Supplying apparatus also comprises heating arrangements, described heating arrangements comprises temperature booster, described temperature booster can be by the heating liquid flowing out from described supplying tank to preset temperature, and described fluid Supplying apparatus can make the liquid that reaches described preset temperature flow out from the outlet of described fluid Supplying apparatus.
2. fluid Supplying apparatus according to claim 1, is characterized in that, described temperature booster comprises H Exch, and the entrance of described H Exch is communicated with the outlet of described supplying tank, and the outlet of described H Exch is communicated with the outlet of described fluid Supplying apparatus.
3. fluid Supplying apparatus according to claim 2, it is characterized in that, described heating arrangements also comprises the first temperature measurer, storage tank and flow divider valve, described the first temperature measurer is arranged on the exit of described H Exch, described flow divider valve is arranged on the delivery conduit of described H Exch, the first distribution pipeline of described flow divider valve is communicated with the outlet of described fluid Supplying apparatus, the second distribution pipeline of described flow divider valve is communicated with described storage tank, in the time that the fluid temperature flowing out from described temperature booster reaches described preset temperature, the outlet that described liquid enters described fluid Supplying apparatus through the first distribution pipeline of described flow divider valve, in the time that the liquid flowing out from described temperature booster does not reach described preset temperature, described liquid enters described storage tank through the second distribution pipeline of described flow divider valve.
4. fluid Supplying apparatus according to claim 3, is characterized in that, between the outlet of described storage tank and the entrance of described H Exch, is provided with pump.
5. fluid Supplying apparatus according to claim 3, it is characterized in that, described fluid Supplying apparatus also comprises control cock and liquid detecting unit, described control cock is arranged on the pipeline between described supplying tank and described storage tank, in the time that described liquid detecting unit inspection is less than default storage content to the storage content of storage pot liquid, described control cock is by the pipeline conducting between described supplying tank and described storage tank, in the time that described liquid detecting unit inspection is no less than default storage content to described storage pot liquid, described control cock is by the pipeline cut-off between described supplying tank and described storage tank.
6. fluid Supplying apparatus according to claim 5, is characterized in that, described liquid detecting unit comprises liquid level detector part.
7. fluid Supplying apparatus according to claim 5, is characterized in that, described liquid detecting unit comprises liquid weight detection means.
8. fluid Supplying apparatus according to claim 5, it is characterized in that, described control cock is electromagnetic valve, described fluid Supplying apparatus also comprises the controller being electrically connected with described control cock, on pipeline between described supplying tank and described control cock, be provided with flow sensing part, described flow sensing part is electrically connected with described controller.
9. according to the fluid Supplying apparatus described in any one in claim 3 to 8, it is characterized in that, in described storage tank, be provided with the second temperature measurer.
10. according to the fluid Supplying apparatus described in any one in claim 1 to 8, it is characterized in that, the outlet of described supplying tank is arranged at the below of described supplying tank, described supplying tank also comprises seal joint, described seal joint is connected with the exit seal of described supplying tank, described supplying tank also comprises breather pipe, and described breather pipe extends to the top of supplying tank inside from the outside of described supplying tank, with by the air in described supplying tank and ambient atmosphere conducting.
CN201420161838.4U 2014-04-03 2014-04-03 Liquid supply device Expired - Fee Related CN203877896U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420161838.4U CN203877896U (en) 2014-04-03 2014-04-03 Liquid supply device

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Application Number Priority Date Filing Date Title
CN201420161838.4U CN203877896U (en) 2014-04-03 2014-04-03 Liquid supply device

Publications (1)

Publication Number Publication Date
CN203877896U true CN203877896U (en) 2014-10-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420161838.4U Expired - Fee Related CN203877896U (en) 2014-04-03 2014-04-03 Liquid supply device

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105540525A (en) * 2016-01-25 2016-05-04 王晶怡 Temperature sensor-based adjustable temperature control system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105540525A (en) * 2016-01-25 2016-05-04 王晶怡 Temperature sensor-based adjustable temperature control system
CN105540525B (en) * 2016-01-25 2018-03-23 贵州溯源大数据有限公司 A kind of adjustable temperature controlled system based on temperature sensor

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Granted publication date: 20141015