CN203696673U - Ultraprecise processing device for off-axis thin-wall aspheric surface optical part - Google Patents
Ultraprecise processing device for off-axis thin-wall aspheric surface optical part Download PDFInfo
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- CN203696673U CN203696673U CN201320794448.6U CN201320794448U CN203696673U CN 203696673 U CN203696673 U CN 203696673U CN 201320794448 U CN201320794448 U CN 201320794448U CN 203696673 U CN203696673 U CN 203696673U
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Abstract
The utility model discloses an ultraprecise processing device for an off-axis thin-wall aspheric surface optical part. The ultraprecise processing device is used for processing the off-axis thin-wall aspheric surface optical part, the optical surface of the optical part adopts an aspheric surface, the inclined angle of the symmetrical optical axis and the geometric center axis of the aspheric surface is a wedge angle of the aspheric surface, and a through hole is formed in the central position. The device comprises a wedge angle tool, a spacer and a washer, wherein a groove is formed in the top surface of the wedge angle tool, and the optical part is arranged in the groove; through hole of the optical part is filled with the spacer; the washer is mounted between the excircle wall of the optical part and the top surface of the wedge angle tool; the wedge angle of the top surface of the groove is obtained by calculating the wedge angle of the aspheric surface of the optical part and the calibre of the part, and the aspheric surface of the optical part is leveled up, so that the symmetrical optical axis and the geometric center axis of the aspheric surface are coincident. The device provided by the utility model masterly utilizes the wedge angle tool, the spacer and the washer to precisely process the off-axis thin-wall aspheric surface optical part, and the problem that the off-axis thin-wall aspheric surface optical part is difficult to process is solved.
Description
Technical field
The utility model relates to the processing unit (plant) of optical element, particularly a kind of ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory.
Background technology
Be the structural representation from axle thin-walled aspheric surface optical accessory as shown in Figure 1, 2, the optical surface of this optical element 1 is aspheric surface 11, the angle of the symmetrical optical axis of aspheric surface and geometrical central axis is aspheric locking angle, and be provided with through hole 12 in centre, the precision of locking angle that processes optical element finished product ± 1 ' in, the THICKNESS CONTROL of centre through hole is at ± 0.01mm.
In prior art, processing aspheric surface processing technology comprises: optical glass mould pressing technology, single-point diamond turning technology, classic method are repaiied band technology, Technique of Magnetorheological Finishing, ion beam polishing technology and computer controlled optical surfacing forming technique.
1, optical glass compression molding technology
The precise compression molding technology of successful glass is studied by Kodak at 20 century 70s, once just complete optical spherical surface or aspheric forming parts, does not need the processing of grinding and polishing.Optical glass compression molding technology, that to have utilized the process of glass from molten state to solid-state conversion be the hot-working character of continuous reversible, near the transition temperature Tg of glass, under oxygen free condition, to the pressurization of heating of glass and mould, the disposable optical element that reaches instructions for use that optical glass is molded into.The operations such as traditional corase grind, fine grinding, polishing and centering edging have been abandoned due to optical glass compression molding method, directly one-shot forming, material auxiliary material, time, equipment and manpower are greatly saved, and can mold pressing go out difformity, especially at aspherics glass part manufacture view, have broad application prospects.Optical glass compression molding technology, is a complex art, needs to consider the technological parameter of glass material, mold materials, molding apparatus and mold pressing.This technology is mainly applicable to small aspherical manufacture, and maximum norm nose bar is very little in 50mm at present, and can not mold pressing off-axis aspheric surface optical part.
2, single-point diamond turning technology
Computer numerical control single-point diamond turning technology is the aspheric surface optical accessory process technology of developing, applied the eighties that taken the lead in the sixties by U.S. national defense scientific research institution.It is on ultraprecise numerically controlled lathe, adopts natural uni-crystal diamond cutter, and lathe and processing environment are being carried out under accurate controlled condition, directly utilizes the turning of diamond cutter single-point to process and meets the aspheric surface optical accessory that optical quality requires.At present, the material that adopts diamond turning technology to process: non-ferrous metal, germanium, plastics, crystal for infrared use, but can not turning glass.
3, classic method is repaiied band technology
It is that traditional aspheric surface optical accessory material is removed formula processing method that classic method is repaiied with technology.This method, is first part to be ground to form and approaches spherical shape most, then grinds or polishing with machine or the manual part of continuing, and processing limit, limit is measured, until reconditioning goes out satisfactory aspheric surface.Rely on by hand due to main, be in this way only applicable to the aspheric surface that heavy caliber and aspherical degree are less.The aspheric surface according to said method processing, can reach very high precision, but efficiency is low, and precision poor repeatability, is only applicable to single-piece or small lot batch manufacture, and classic method is repaiied with technology and is suitable for the symmetrical aspheric processing of revolution, can not be used for processing off-axis aspheric surface.
4, Technique of Magnetorheological Finishing
Technique of Magnetorheological Finishing (MRF), is a kind of novel optical element processing method that Rochester university of the U.S. proposes, and it combines electromagnetism fluid dynamic theory, analytical chemistry.Magnetorheologicai polishing liquid is meeting hardening in high-intensity gradient magnetic, has viscoplastic Bingham medium and become, and forms the projection of similar ribbon.In the time of very little space that this MEDIA FLOW forms through workpiece and moving coil, the shearing force that the region that surface of the work material can be in contact with it by surface of the work produces is removed.Because MRF can obtain the optical surface that quality is very high, combine with CCOS, can realize computer control, thereby obtain more complicated face shape, and removal efficiency is high, can there is not tool wear, clogging.In ensureing higher removal efficiency, do not introduce sub-surface damage because of its unique shear removal mechanism, can efficiently eliminate the sub-surface damage layer that grinding produces, realize nearly zero sub-surface damage and nano-precision polishing.Shortcoming is to have magnetizing mediums not use, and magnetic flow liquid characteristic is with changes in material, and polishing is removed function and must be demarcated at any time, is subject to the restriction of disk size simultaneously, cannot process for the aspheric surface optical accessory of some high steepness.
5, ion beam polishing
Ion beam polishing is that the nineteen sixty-five staff of Arizona, USA university finds and succeeds in developing.At present, ion-optical company of the U.S., Frankfort munitions factory succeed in developing ion beam polishing equipment already, and are applied to production.In addition, the state such as Japan, Britain, France also R and D this new technology.The principle of ion beam polishing, is that inert gas (as argon, krypton, xenon etc.) atom is ionized as ion in low vacuum, then accelerating impact is to the surface of the work being placed in the vacuum chamber of condition of high vacuum degree, with atom magnitude, its surfacing is removed.The main feature of ion beam processing glass, is that machining tool precision is very good, and surface does not produce normal pressure, and the control of processing capacity is extremely precise and stable.Accelerated ion and the atomic nucleus of workpiece material directly produce elastic collision, make its surface of overflowing, and can realize easily the material of atom magnitude and remove, and machining accuracy can reach λ/100, and are not subject to the restriction of part to be processed surface and material.The shortcoming of this technology is cost costliness, and complicated operation when work, have vibration, and polishing velocity is slow.
6, computer controlled optical surfacing forming technique
Computer controlled optical surfacing (CCOS) process technology is early 1970s, the technical though that a kind of new optical surface that American I tek company takes the lead in proposing is processed, it is by small instruments and tools of computer control, control software, machine tool and detection method are combined, carry out optical surface processing.The scientific research center of U.S., method, moral, Russia has all carried out deep research in this field subsequently.As the University of Arizona optics scientific center of the U.S., French space optics manufacturing center, Zeiss, Germany company, Russian Vavilov Inst Nat Optique etc.Along with the develop rapidly of computer technology and precise measurement technique, CCOS process technology from computational speed to machining accuracy etc., has all obtained further raising and perfect.The general principle of CCOS process technology is to control a polished die more much smaller than part to be processed size with computer, with certain route, speed and press polish surface of the work.By changing the polishing time in any one region, can accurately obtain the material removal amount of requirement.Because the removal amount of polishing is little, so workpiece will first grind, be polished to approaching comparison sphere with usual way.Computer control polishing is only to skim the aspheric surface of sphere and requirement in the existing bias in each point place.Work in-process, the mode of use iteration, progressively restrains surface error.
Above-mentioned process technology all cannot meet this required precision from axle thin-walled aspheric surface optical accessory.
Utility model content
The purpose of this utility model is to provide a kind of ultra-precision processing apparatus and processing method thereof from axle thin-walled aspheric surface optical accessory, utilize cleverly angle of wedge frock, pad and packing ring, process accurately from axle thin-walled aspheric surface optical accessory, solved from the unmanageable problem of axle thin-walled aspheric surface optical accessory.
In order to realize above object, the utility model is achieved through the following technical solutions:
A kind of ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory, be used for processing from axle thin-walled aspheric surface optical accessory, the optical surface of this optical element is aspheric surface, the angle of the symmetrical optical axis of aspheric surface and geometrical central axis is the aspheric angle of wedge, and be provided with through hole in centre, be characterized in, comprise:
Angle of wedge frock, its end face is provided with groove, and described optical element is arranged in groove;
Pad, it is filled in the through hole of described optical element;
Packing ring, it is arranged between optical element cylindrical wall and angle of wedge frock end face;
The angle of wedge of described groove end face is leveled up the aspheric surface of optical element by the aspheric angle of wedge of optical element and part calculation of diameter gained, and the symmetrical optical axis of aspheric surface and geometrical central axis are coincided.
The angle of wedge precision of described groove end face is higher than the required angle of wedge precision processing of optical element.
2 times of the angle of wedge precision of described groove end face are to the required angle of wedge precision processing of optical element.
The utility model compared with prior art, has the following advantages:
1, by the ultraprecise angle of wedge frock of design, optical element aspheric surface is leveled up, the symmetrical optical axis of aspheric surface and geometrical central axis are coincided, only need process symmetrical aspheric surface, thereby the ingenious aspheric surface obtaining from axle has improved angle of wedge precision.
2, pad is encased inside in through hole, and with optical element synchronous processing, can measure the thickness of pad with height gauge, can be by the central through hole THICKNESS CONTROL from axle thin-walled aspheric surface optical accessory in ± 0.01mm by the thickness of controlling pad.
3, will be on packing ring dish at the cylindrical from axle thin-walled aspheric surface optical accessory, along with from the polishing together of axle thin-walled aspheric surface optical accessory, the cylindrical producing in the polishing limit of collapsing is presented on outer circular washer, well ensured the surface precision after polishing.。
Brief description of the drawings
Fig. 1 is the structural representation from axle thin-walled aspheric surface optical accessory;
Fig. 2 is the I place partial enlarged drawing from the angle of wedge of axle thin-walled aspheric surface optical accessory
Fig. 3 is the structural representation of the utility model from the ultra-precision processing apparatus of axle thin-walled aspheric surface optical accessory;
Fig. 4 is the structural representation of angle of wedge frock of the present utility model;
Fig. 5 is the partial enlarged drawing at the utility model angle of wedge frock II place;
Structural representation when Fig. 6 is the utility model milling;
Structural representation when Fig. 7 is the utility model polishing.
Detailed description of the invention
Below in conjunction with accompanying drawing, by describing a preferably specific embodiment in detail, the utility model is further elaborated.
As shown in Figure 1, 2, a kind of from axle thin-walled aspheric surface optical accessory, the optical surface of this optical element 1 is aspheric surface 11, and the angle of the symmetrical optical axis of aspheric surface and geometrical central axis is aspheric locking angle, and is provided with through hole 12 in centre.
As shown in Figure 3,4, a kind of ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory, is used for processing from axle thin-walled aspheric surface optical accessory, comprises: angle of wedge frock 2, and its end face is provided with groove 21, and described optical element 1 is arranged in groove 21; Pad 3, it is encased inside in the through hole 12 of described optical element 1; Packing ring 4, it is arranged between optical element cylindrical wall and angle of wedge frock end face; The angle of wedge β of described groove end face, by the aspheric locking angle of optical element and optical element calculation of diameter gained (referring to Fig. 5), levels up optical element aspheric surface, and symmetrical optical axis and the geometrical central axis of aspheric surface 11 are coincided.
A processing method of utilizing the above-mentioned ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory, the method comprises following steps:
Step 1, optical element 1 are arranged in angle of wedge frock 2, the groove end face of the baseplane of optical element 1 and angle of wedge frock 2 is bonded to each other, and the aspheric surface 11 of optical element is leveled up, the angle of wedge precision of groove end face is higher than the required angle of wedge precision processing of optical element, 2 times of the angle of wedge precision of groove end face are to the required angle of wedge precision processing of optical element, in the present embodiment, the desired angle of wedge precision of optical element is ± 1 ', and the angle of wedge precision of the angle of wedge frock adopting is 30 ";
Step 1.1, using the baseplane of optical element 1 as datum level, clean up datum level;
Step 1.2, on groove 21 inner side millet cake uniform glue, the datum level that ensures optical element 1 does not enter glue, and by bonded to each other to optical element baseplane and groove end face, the aspheric surface 11 of leveling up optical element, coincides symmetrical optical axis and the geometric center lines of aspheric surface 11.
Step 2, be encased inside pad 3 at through hole 12 places of optical element 1;
Step 3, between optical element cylindrical wall and angle of wedge frock end face, packing ring 4 is installed;
Step 4, employing model are the synchronous milling optical element 1 of milling and grinding machine, pad 3 and the packing ring 4 of LOH SPM50-1SL, and milling goes out the aspheric surface 11 of this optical element;
Step 4.1, milling and grinding machine be at optical element 1 and be positioned at the pad 3 of optical element, the synchronous milling of packing ring 4 at optical element 1 cylindrical place, and optical element 1, pad 3 and the synchronous just milling of packing ring 4 are gone out to the sphere that approaches most of aspheric surface 11;
Step 4.2, on the numerical control interface of milling and grinding machine, input a series of aspheric parameters, adjust a series of lathe parameters such as grinding wheel speed, feed speed, radial feeds, go out the aspheric surface 11 of optical element 1 by emery wheel 5 millings, measure the face shape of aspheric surface 11 with the gloomy measuring instrument of Taylor Hope, the finishing face of making graphic data shelves, and feed back to milling and grinding machine milling, by continuous milling, measurement, feedback, control the center thickness of part band frock well, optical element surface figure accuracy Rt is controlled at Rt<2um(referring to Fig. 6 the most at last).
It is that the polishing machine of LOH SPS140 carries out polishing to the packing ring 4 at the aspheric surface 11 of optical element 1, pad 3 and cylindrical place that step 5 adopts model;
Step 5.1, on polishing machine, input aspheric surface parameter, install polishing pad 6, polishing pad parameter is set, polishing rotating speed, polish pressure, the technological parameters such as the removal factor of polishing, polishing aspheric surface, with aspheric shape of the gloomy measuring instrument measurement of Taylor Hope, the finishing face of making graphic data shelves, and feed back to polishing machine polishing, by continuous polishing, measure, feedback, control part band frock center thickness well, the limit of simultaneously cylindrical producing in polishing being collapsed is presented on outer circular washer, well ensure the surface precision after polishing, be controlled at Rt<0.5um from the surface figure accuracy Rt of axle thin-walled aspheric surface optical accessory at last, can measure the thickness of pad 3 with height gauge, by control the thickness of pad 3 by the be controlled at ± 0.01mm of center thickness from axle thin-walled aspheric surface optical accessory with interior (referring to Fig. 7),
Step 5.2, polishing machine carry out polishing to optical element, and the cylindrical producing in the polishing limit of collapsing is presented on outer circular washer, have ensured the surface precision after polishing.
From axle thin-walled aspheric surface optical accessory material taking K9 glass as main, final surface roughness Ra requires to be controlled at Ra<6nm, and the control of surface roughness is a comprehensive technology, need to carry out the research of following several respects.Find out the impacts of burnishing parameters on K9 glass high speed polishing surface roughness such as polishing time, polishing rotating speed, polish pressure, polishing fluid pH value by engineer testing, select the most applicable technological parameter from the high speed polishing of axle thin-walled aspheric surface optical accessory.
polishing time
In glossing, time parameter determines actual polishing efficiency.For the polishing of optical glass surface, be intended to remove the damage and the affected layer that in milling process, produce, to reduce surface roughness, obtain the higher workpiece of surface quality.The impact of polishing time on K9 glass surface roughness only considered in experiment, gets respectively 5 blocks of K9 glass, polishing 10 min, and 20 min, 30 min, 45 min and 60min, result of the test is as shown in table 1.
| Sequence number | Polishing time (min) | Surface roughness (nm) | Remarks |
| Test 1 | 10 | 28 | ? |
| Test 2 | 20 | 5.8 | ? |
| Test 3 | 30 | 5.9 | ? |
| Test 4 | 45 | 5.9 | ? |
| Test 5 | 60 | 5.85 | ? |
Table 1
Visible according to experimental result, in the polishing starting stage, optical element and polishing pad 6 are still in break-in state, and surface roughness Ra is 28nm, and in the time of polishing 20min, surface roughness Ra has reached 5.8nm, meets the requirements.Along with the carrying out of processing, optical element surface is more and more smooth, reduces gradually with polishing pad 6 rubbing action between the two, and polishing efficiency is reduced gradually.Can find out from polished Part Surface Roughness aspect, if polishing time is too short, the removal of optical element skin-material also could not change the damage and deterioration layer that a upper procedure causes completely, and surface quality does not reach perfect condition; Polishing 20min rear surface roughness will be down to minimum of a value 5.8nm, than the optical element surface quality before polishing, have significant improvement; Along with the prolongation of polishing time, surface quality can't improve afterwards, even slightly worsens, and will tend to a certain stationary value, this be because when polishing for a long time in polishing fluid the corrosiveness of chemical composition by destruction work surface quality.Therefore for improving the level of resources utilization, cut the waste, save time, to selecting 20min to be advisable from the axle thin-walled aspheric surface optical accessory aspheric high speed polishing time.
polishing rotating speed
Getting respectively rotating speed is 500r/min, 600r/min, and 700r/min, 800r/min, 900r/min, 1000r/min, other parameters are all constant, and after polishing 20 min, the surface roughness from axle thin-walled aspheric surface optical accessory obtaining under different rotating speeds is shown in Table 2.Experimental result shows, suitably improves the rotating speed of polishing disk, and optical element stock-removing efficiency improves thereupon, and this also matches with classical Preston equation.But rotating speed is too high, face deformationization is obvious, and surface roughness increases, therefore to selecting 800r/min to be advisable from the aspheric high speed polishing rotating speed of axle thin-walled aspheric surface optical accessory.
| Sequence number | Polishing rotating speed (r/min) | Surface roughness (nm) | Remarks |
| Test 1 | 500 | 6.8 | ? |
| Test 2 | 600 | 6.5 | ? |
| Test 3 | 700 | 6.7 | ? |
| Test 4 | 800 | 5.8 | ? |
| Test 5 | 900 | 5.9 | ? |
| Test 6 | 1000 | 6.1 | ? |
Table 2
polish pressure
Getting respectively polish pressure is 0.25MPa, 0.50MPa, and 0.75MPa and 1MPa, other parameters are all constant, after polishing 20min, obtain the surface roughness under different pressures, as shown in table 3.Experimental result shows: along with the increase of polish pressure, the surface roughness of optical element will correspondingly increase, this is will to cause the frictional force between polishing pad and workpiece to increase because increase pressure, be that abrasive particle increases the micro-cutting effect of optical element, in this and traditional free abrasive polishing, Preston equation is substantially identical, therefore to selecting 0.25MPa to be advisable from the aspheric high speed polishing pressure of axle thin-walled aspheric surface optical accessory.
| Sequence number | Pressure (MPa) | Surface roughness (nm) | Remarks |
| Test 1 | 0.25 | 5.8 | ? |
| Test 2 | 0.5 | 6.73 | ? |
| Test 3 | 0.75 | 7.68 | ? |
| Test 4 | 1 | 7.82 | ? |
Table 3
polishing fluid pH value
Change the pH value of polishing fluid, getting respectively pH is 7,9,10.5,12, and other parameters are all constant, after polishing 20 min, obtains surface roughness under different pH values as shown in table 4.Experimental result shows, in the time that pH is 7, surface roughness is minimum can obtain high-quality surface, but polishing efficiency is lower; In the time that pH is 9, polishing efficiency significantly raises; In the time that pH is elevated to 10.5 and 12, polishing efficiency changes little.This is that K9 glass surface will more easily form one deck soften layer, then under the mechanism of polishing pad, is more easily removed because under the chemical action of alkalescence polishing liquid.Therefore in the time of pH<9, the key link of restriction polishing efficiency is chemical action; And in the time of pH>9, chemical action has reached capacity, the key link of restriction polishing efficiency is mechanism.Under the prerequisite allowing in efficiency, to selecting 7 to be advisable from the pH value of axle thin-walled aspheric surface optical accessory high speed polishing liquid.
| Sequence number | PH value | Surface roughness (nm) | Remarks |
| Test 1 | 7 | 5.8 | ? |
| Test 2 | 9 | 6.2 | ? |
| Test 3 | 10.5 | 6.8 | ? |
| Test 4 | 12 | 7 | ? |
Table 4
By above-mentioned engineer testing, selecting pH value is 7 polishing fluid, polish pressure 0.25MPa, polishing rotating speed 800r/min, polishing time 20min, can obtain high-quality surface.
In sum, the utility model a kind of ultra-precision processing apparatus and processing method thereof from axle thin-walled aspheric surface optical accessory, can be common to the ultraprecise processing of various angle of wedge thin-walled aspheric surface optical accessories.
Although content of the present utility model has been done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to restriction of the present utility model.Read after foregoing those skilled in the art, for multiple amendment of the present utility model and substitute will be all apparent.Therefore, protection domain of the present utility model should be limited to the appended claims.
Claims (3)
1. the ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory, be used for processing from axle thin-walled aspheric surface optical accessory, the optical surface of this optical element (1) is aspheric surface (11), the angle of the symmetrical optical axis of aspheric surface and geometrical central axis is the aspheric angle of wedge (α), and be provided with through hole (12) in centre, it is characterized in that, comprise:
Angle of wedge frock (2), its end face is provided with groove (21), and described optical element (1) is arranged in groove (21);
Pad (3), it is filled in the through hole (12) of described optical element (1);
Packing ring (4), it is arranged between optical element cylindrical wall and angle of wedge frock end face;
The angle of wedge (β) of described groove end face is leveled up the aspheric surface of optical element (11) by the aspheric angle of wedge of optical element (α) and part calculation of diameter gained, and the symmetrical optical axis of aspheric surface and geometrical central axis are coincided.
2. the ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory as claimed in claim 1, is characterized in that, the angle of wedge precision of described groove end face is higher than the required angle of wedge precision processing of optical element.
3. the ultra-precision processing apparatus from axle thin-walled aspheric surface optical accessory as claimed in claim 1 or 2, is characterized in that, 2 times of the angle of wedge precision of described groove end face are to the required angle of wedge precision processing of optical element.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659520A (en) * | 2013-12-06 | 2014-03-26 | 上海新跃仪表厂 | Ultra-precision machining device and method for off-axis thin-wall aspherical optical element |
| CN105643374A (en) * | 2016-02-06 | 2016-06-08 | 苏州大学 | Processing method for aspherical mirror |
| CN105690187A (en) * | 2016-02-06 | 2016-06-22 | 苏州大学 | Method for machining off-axis aspherical mirror |
| CN115431105A (en) * | 2022-09-06 | 2022-12-06 | 天津津航技术物理研究所 | Spherical off-axis mirror processing method |
-
2013
- 2013-12-06 CN CN201320794448.6U patent/CN203696673U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659520A (en) * | 2013-12-06 | 2014-03-26 | 上海新跃仪表厂 | Ultra-precision machining device and method for off-axis thin-wall aspherical optical element |
| CN103659520B (en) * | 2013-12-06 | 2017-05-24 | 上海新跃仪表厂 | Ultra-precision machining device and method for off-axis thin-wall aspherical optical element |
| CN105643374A (en) * | 2016-02-06 | 2016-06-08 | 苏州大学 | Processing method for aspherical mirror |
| CN105690187A (en) * | 2016-02-06 | 2016-06-22 | 苏州大学 | Method for machining off-axis aspherical mirror |
| CN105643374B (en) * | 2016-02-06 | 2018-01-09 | 苏州大学 | A kind of processing method of aspherical mirror |
| CN105690187B (en) * | 2016-02-06 | 2018-03-27 | 苏州大学 | The processing method of off-axis aspheric mirror |
| CN115431105A (en) * | 2022-09-06 | 2022-12-06 | 天津津航技术物理研究所 | Spherical off-axis mirror processing method |
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Granted publication date: 20140709 Effective date of abandoning: 20170524 |
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