CN202563097U - Cross wire scanning detector - Google Patents
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- CN202563097U CN202563097U CN2012201534572U CN201220153457U CN202563097U CN 202563097 U CN202563097 U CN 202563097U CN 2012201534572 U CN2012201534572 U CN 2012201534572U CN 201220153457 U CN201220153457 U CN 201220153457U CN 202563097 U CN202563097 U CN 202563097U
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- 230000008878 coupling Effects 0.000 claims abstract description 3
- 238000010168 coupling process Methods 0.000 claims abstract description 3
- 238000005859 coupling reaction Methods 0.000 claims abstract description 3
- 239000000523 sample Substances 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 claims description 3
- 230000009977 dual effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 16
- 238000005259 measurement Methods 0.000 description 8
- 238000002844 melting Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 230000005855 radiation Effects 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000005469 synchrotron radiation Effects 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The utility model relates to a cross wire scanning detector, comprising a slide platform bracket with vertical guide rails, a motor, two limit switches, a zero-position optical coupling switch, a cylindrical vacuum cavity, a linear importer which is connected with the motor and is capable of axially rotating and moving along the vertical guide rails, a buckle which is mounted on the linear importer and moves between the two limit switches, a grating ruler, a support ring which is fixedly connected to the bottom end of the linear importer and is extended into the vacuum cavity, two scanning wires respectively fixedly connected to two end faces of the support ring, multiple double-core vacuum joints which are connected to the outer periphery of the vacuum cavity and are extended into the vacuum cavity, and an observation window. By the cross wire scanning detector of the utility model, a method for measuring the spatial distribution of X rays is simple and only requires scanning once. In addition, a spatial distribution curve graph of the X rays can be obtained rapidly according to the reading of the grating ruler. The measuring efficiency is effectively enhanced, and the manufacture cost and the control complexity are reduced.
Description
Technical Field
The present invention relates to a cross-wire scanning detector for the measurement of synchrotron radiation X-rays (i.e. X-rays), in particular for the measurement of the distribution of the X-ray intensity.
Background
The X-ray beam position monitoring equipment is an indispensable important component part of synchrotron radiation beam lines, and is divided into a blade type detector, a fluorescence target detector and a filament scanning detector according to different detection signal modes. The equipment is mainly used for monitoring the stability of beam current and detecting the shape of light spots or the distribution of light intensity. The blade type detector is mostly used in the front end area of a beam line station to detect the central position deviation condition of the synchronous radiation beam on line; the fluorescent target detector is mainly used for roughly observing the shape and the position of a light spot, the result is visual, the precision is insufficient, quantitative analysis cannot be carried out, and the interference of visible light is easy to occur; the wire scanning detector scans the light beam by one or more conductor wires, and measures the center and distribution of the light beam according to the photoelectric current distribution generated on the metal wire.
The existing wire scanning detector generally adopts a parallel dual-wire structure. The parallel wire scanning detector adopts two parallel gold-plated tungsten wires, the plane of the two wires is vertical to the direction of the light beam, and the two wires can scan point by point in the plane, so that the light power density distribution of the cross section of the light beam can be accurately measured, and the parallel wire scanning detector is particularly suitable for the light beam measurement of the bent iron light source with the light power density uniformly distributed in the horizontal direction. However, the wire scanning detector with such a structure only has one-dimensional spatial resolution capability, that is, the distribution of the X-ray intensity can be measured only in the X direction or the Y direction; if two parallel wire scanning detectors which are vertically arranged are adopted to measure the scanning current distribution in the X direction and the Y direction respectively, although the intensity distribution of X rays in a two-dimensional space can be realized, the two sets of devices can increase the complexity of equipment, occupy twice of beam line space and increase the construction cost, so that the device is not cost-effective.
In addition, there is another method for measuring the spatial distribution of X-rays, which is to calculate the spatial distribution of X-rays by using slit scanning, that is, by placing a metal plate behind a slit and measuring the magnitude of photocurrent generated on the metal plate by the X-rays leaking through the slit. However, this method is complicated to operate, and the measurement data must be scanned twice, i.e., in the X-direction and the Y-direction, respectively, to obtain the spatial distribution graph.
It can be seen that there is a need for a new type of wire scanning probe that effectively addresses the above problems.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems existing in the prior art, the utility model aims to provide a cross wire scanning detector to conveniently measure the two-dimensional space distribution of X-ray intensity simply, and ensure to work reliably and stably in the measurement process.
A cross silk scanning detector, it includes:
a sliding table bracket with a vertical guide rail;
the motor is fixedly connected to the top of the sliding table bracket;
two limit switches which are arranged on one side surface of the sliding table bracket in an up-down parallel manner;
the zero-position optocoupler switch is arranged on one side surface of the sliding table bracket and is positioned between the two limit switches;
the outer peripheral surface of the cylindrical vacuum cavity is fixedly connected with the bottom surface of the sliding table bracket;
the linear introducer is connected with the motor, can axially rotate and moves along the vertical guide rail;
the buckle is arranged on the linear introducer and moves between the two limit switches;
the grating ruler is vertically connected to the sliding table bracket and is arranged in parallel with the linear introducer;
the support ring is fixedly connected to the bottom end of the linear introducer and extends into the vacuum cavity;
the two scanning wires are fixedly connected to the two end faces of the support ring respectively, and are arranged vertically to each other; and
a plurality of double-core vacuum joints connected with the peripheral surface of the vacuum cavity and extending into the vacuum cavity, and an observation window.
In the above cross-hair scanning probe, the support ring comprises:
one end of the driving rod is connected with the linear introducer;
the C-shaped ring is connected to the other end of the driving rod and integrally formed with the driving rod, and the opening of the C-shaped ring is opposite to the driving rod; and
and the wire clamping mechanisms are symmetrically arranged on the C-shaped ring and are respectively used for clamping two ends of the scanning wire.
In the above cross-hair scanning probe, the wire clamping mechanism includes:
the positioning base is fixedly connected to the C-shaped ring; and
the scanning wire clamping device comprises two copper sheets embedded on the surface of the positioning base and used for clamping a scanning wire, and an insulating ceramic gasket arranged between the two copper sheets.
In the cross wire scanning detector, two end faces of the C-shaped ring are respectively provided with a fixing groove for accommodating the positioning base.
In the above cross-hair scanning detector, the detector further comprises a transition joint assembly connected to the dual-core vacuum joint.
In the above cross-wire scanning probe, the motor is connected to the linear introducer via a coupling.
In the cross wire scanning detector, the outer peripheral surface of the vacuum cavity is provided with a knife edge flange opening for accommodating the linear introducer, the double-core vacuum joint and the observation window respectively.
In the cross-wire scanning detector, the number of the double-core vacuum connectors is two.
Since the technical solution is adopted, the utility model discloses utilize two mutually perpendicular's scanning silk to drive the rotation of support ring through the motor, make scanning silk scanning synchrotron radiation beam cross-section (the equidistant region that passes through X ray beam place promptly), and obtain the photocurrent density distribution of vertical and horizontal two-dimensional direction simultaneously, owing to when the light shines on the scanning silk, have the electron to escape, produce electric current on the scanning silk, consequently, the utility model discloses still draw this electric current through two-core vacuum connector, so that measure the size of its electric current, can reach the spatial distribution of X ray beam at this point, then find the central point of its light beam and put. The utility model discloses the method of measuring the spatial distribution of measuring X ray is simple, only need carry on once scan can to can obtain the spatial distribution curve graph of X ray very fast through grating ruler's reading, measurement of efficiency effectively improves, and the complexity of construction cost and control reduces.
Drawings
Fig. 1 is a cross-sectional view of a cross-wire scanning detector according to the present invention;
FIG. 2 is a schematic structural view of the middle sliding stand and the linear introducer of the present invention;
FIG. 3 is a schematic structural view of a support ring according to the present invention;
fig. 4 is a side view of the structure of the support ring of the present invention.
Detailed Description
The following description of the preferred embodiments of the present invention will be made with reference to the accompanying drawings.
Referring to fig. 1-4, the present invention is a cross-wire scanning detector, which includes:
a slipway bracket 1 with a vertical guide rail 11;
the motor 2 is fixedly connected to the top of the sliding table bracket 1;
two limit switches 3 which are arranged on one side surface of the sliding table bracket 1 in parallel up and down;
a zero-position optical coupler switch 4 which is arranged on one side surface of the sliding table bracket 1 and is positioned between the two limit switches 3;
the outer peripheral surface of the cylindrical vacuum cavity body 5 is fixedly connected with the bottom surface of the sliding table bracket 1 and is provided with a plurality of knife edge flange openings 50;
the linear importer 6 is connected with the motor 2 through a coupler 60, can axially rotate and moves along the vertical guide rail 11 and extends into the knife edge flange port 50 of the vacuum cavity 5;
a buckle 7 which is arranged on the linear importer 6 and moves between the two limit switches 3;
a grating ruler 8 vertically connected to the sliding table bracket 1 and arranged in parallel with the linear introducer 7;
a support ring 9 fixedly connected with the bottom end of the linear importer 6 and extending into the vacuum cavity 5;
the two scanning wires 10 are respectively and fixedly connected to the two end faces of the support ring 9, and the two scanning wires 10 are arranged vertically;
two double-core vacuum joints 51 and an observation window 52 which are connected with the peripheral surface of the vacuum cavity 5 and extend into the knife edge flange port 50 of the vacuum cavity 5; and
a transition junction assembly 53 connected to the twin-core vacuum connection 51 for connection to peripheral piping (not shown).
Particularly, the utility model provides a support ring 9 includes:
a drive lever 91 having one end connected to the linear introducer 6;
a C-shaped ring 92 connected to the other end of the driving rod 91 and formed integrally therewith, an opening of which is disposed opposite to the driving rod 91; and
the clamping mechanism 93 symmetrically disposed on the C-shaped ring 92 and respectively used for clamping the two ends of the scanning wire 10 comprises:
the positioning base 931 is fixedly connected to the C-shaped ring 92, specifically, fixing grooves 921 for accommodating the positioning base 931 are respectively arranged on two end faces of the C-shaped ring 92, and the positioning base 931 is fixed in the fixing grooves 921 through a nut 934 and a gasket 935 to ensure that the two wires are perpendicular; and
two copper sheets 932 embedded on the surface of the positioning base 931 for clamping the scanning wire 10, and an insulating ceramic spacer 933 disposed between the two copper sheets 932.
In this embodiment, the positions of the two scanning wires 10 are both at an included angle of 45 degrees with the horizontal direction, and in practical use, the whole detector can be inclined by 45 degrees, so that the support ring 9 is driven by the motor 2 to drive the two scanning wires 10 to move integrally along the direction at an included angle of 45 degrees with the horizontal direction, photocurrent signals on the scanning wires 10 are led out through the double-core vacuum electrical connector 51, and photocurrent signals on the two scanning wires 10 are collected to calculate the optical power density distribution of the light spots, wherein the horizontal distribution condition of the light spots is obtained by scanning the vertical scanning wires 10, and the vertical distribution is obtained by scanning the horizontal scanning wires 10.
In this embodiment the linear introducer 6 is driven by a stepper motor with a stroke of more than 40 mm. The vacuum cavity 5 is a cylindrical cavity with the outer diameter of 152mm and the inner diameter of 100mm, the two end sides of the vacuum cavity are CF100 knife edge flanges, and the end surface length of the CF100 knife edge flanges is 50 mm. The positions of the two limit switches 3 and the zero-position optical coupler switch 4 on the sliding table support 1 are adjustable in the whole process, the zero-position optical coupler switch 4 is effective in 0 position, the TTL level is used, and the output capacity meets the TTL level requirement. The precision of the grating ruler 8 is less than 5 μm.
The utility model discloses the biggest problem of measuring X-ray's spatial distribution lies in the straightness nature problem of the deformation of scanning silk 10 or scanning silk 10 among the scanning process, when scanning silk 10 receives shining of light in the scanning process, can be flagging because of the thermal expansion phenomenon, no longer is the straight line of an ideal, brings certain error for the measuring result, and the droop is big more, and the error is big more. Although the light receiving area of the scanning wire 10 is reduced, the heat power absorbed by the scanning wire can be effectively reduced, and the sagging amount is reduced; however, the light receiving area is reduced, which is usually at the cost of thinning the scanning wire, which brings great difficulty to the processing and manufacturing, and the generated measuring current is correspondingly reduced, thereby reducing the signal-to-noise ratio of the measurement. It follows that the selection of the scanning filament parameters of the cross-filament scanning detector is important.
The following detailed description describes the design calculation of the scanning wire 10 in the present invention, and in order to simplify the calculation process, the following assumptions are made: the optical power is uniformly distributed PX, the absorption efficiency eta is 100%, the heat conduction is neglected, and the radiation power is only temperature dependent.
Radiation power determined according to Boltzmann's law is
Wherein, <math>
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if a metal wire (cylinder) is used, the cross-sectional radius is r, and the wire length is l, the absorption area S isa2lr, heat radiation area Sr2 pi · rl, assuming the equilibrium temperature is the melting point of the material:
radiation power that the filamentous material (cylinder) can bear:
PX＝πσT4，
wire considering the maximum melting point: tungsten wire (melting point: 3422-3695K), then: pX＝πσT4≈33.2W/mm2。
Considering design redundancy, selecting 1/2 with a melting point as the operating temperature reduces the radiated power to 1/16 of Px: about 2W/mm2It is clear that white light of the bent iron light source and all monochromatic light WBPM are fully satisfied.
When a rectangular carbon filament is used instead, the light-receiving thickness h is 100 μm and the side width w is 500 μm, the absorption area S isaIh, heat radiation area SrAssuming that the equilibrium temperature is the melting point of the material, 2lw +2 lh:
radiation power that the filamentous material (cylinder) can bear:
Considering the carbon filament with the maximum melting point (melting point: 3550 ℃ -3823K), then: <math>
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considering design redundancy, the operating temperature was chosen to be 95% of the melting point, leaving a 5% temperature margin: the radiated power experienced is reduced to 81% of Px: about 117W/mm2The size of the carbon filament (cuboid) is mainly determined by material cost and convenience in processing and use.
The use disadvantages of the cuboid filament material include: if the light-facing surface of the wire material can not be ensured to be opposite to the complete light-facing surface; or in the using process, the light beam deflects, so that the large-area side which is originally used for heat dissipation receives more light beam irradiation instead, and the burning is easily caused. While the filiform (the case that the thickness of the cylinder or the light-receiving surface is equal to the width of the side surface) has no similar problem, but the heat-bearing power is not high, and the value is fixed and cannot be adjusted.
The scanning filament may be selected from the perspective of the thermal expansion coefficient of the material filament for the amount of filament sag.
Factors that affect the amount of sag of the wire include: the self weight of the filament; linear coefficient of thermal expansion; the silk material (high hardness, deformation resistance, small work function, high detection efficiency, stable high-temperature property, easy processing and easy use); the calculation of the sag of the scanning wire only considers the linear thermal expansion coefficient of the material, namely the calculation of the sag of the wire only needs to compare the linear thermal expansion coefficients of the material of the wire essentially.
The pull-out work of the silk material is shown in table 1. From table 1, the ratio of the maximum value of work removal of the three elements to the minimum value is shown:
times, much less than 1 order of magnitude. So the work of the three parts will not affect the selection of the silk material. The effect of work pull-off is negligible.
TABLE 1 work of removal of three elements of carbon, gold and tungsten
| Element(s) | C | Au | W |
| Excellent work (eV) | 4.81 | 5.1 | 4.55 |
The scanning wire 10 is made of carbon wire and gold-plated tungsten wire, and the sagging amounts of the two wires are not greatly different, so that the gold-plated tungsten wire is easier to use in the processing technology; the work of extraction of tungsten is also smaller than that of carbon. Therefore, the material of the scanning wire 10 in this embodiment is gold-plated tungsten wire.
From the selection of the scanning wire 10, the maximum photocurrent generated thereon can be estimated:
optical power density in light spot is PX(W/mm2) Table 1 shows that when the incident light energy is far greater than 1 order of magnitude of the removal work of the material of the wire, the maximum total photon number velocity incident on the wire of the wire scanning detector is:
In this embodiment, the thickness of the C-shaped ring 92 in the support ring 9 is 6mm, the transmission direction line is the center line, and the opening angle is 40 degrees. A target hole (not shown) is arranged on the inner wall of the vacuum cavity 5 at a position of 45 degrees on the middle and opposite side surfaces of the linear introducer 6 and the observation window 52 and on the other side of the linear introducer 6, and is used for calibrating the circle center position of the vacuum cavity.
In addition, in order to accurately calculate the optical power density distribution of the light spots, after the cross-wire scanning detector is installed, off-line mechanical calibration is firstly carried out on the cross-wire scanning detector, and a three-coordinate mechanical instrument is used for calibration. The calibration aims at determining the position relation of the centers of the double wires relative to the origin of a coordinate system (the center of a cavity) in the movement process, and the coordinate system is selected by taking the center of the cavity as the origin and taking the directions of two perpendicularly crossed scanning wires 10 as two coordinate axes. The data acquired by offline calibration measurement can be fitted to obtain the corresponding relationship between a group of filament center coordinates X, Y and the readback value of the grating scale 8, so that the corresponding position of the power density distribution at the center of the cavity can be calculated according to the relationship between the photocurrent signal obtained during online scanning and the grating scale reading.
In summary, the reticle scanning detector can conveniently measure the vertical distribution and the horizontal distribution of the light beam at a certain point because the light beam line of the insert has high optical power density and small light spot area.
What has been described above is only the preferred embodiment of the present invention, not for limiting the scope of the present invention, but various changes can be made to the above-mentioned embodiment of the present invention. All the simple and equivalent changes and modifications made according to the claims and the content of the specification of the present invention fall within the scope of the claims of the present invention. The present invention is not described in detail in the conventional technical content.
Claims (8)
1. A cross-hair scanning probe, the probe comprising:
a sliding table bracket with a vertical guide rail;
the motor is fixedly connected to the top of the sliding table bracket;
two limit switches which are arranged on one side surface of the sliding table bracket in an up-down parallel manner;
the zero-position optocoupler switch is arranged on one side surface of the sliding table bracket and is positioned between the two limit switches;
the outer peripheral surface of the cylindrical vacuum cavity is fixedly connected with the bottom surface of the sliding table bracket;
the linear introducer is connected with the motor, can axially rotate and moves along the vertical guide rail;
the buckle is arranged on the linear introducer and moves between the two limit switches;
the grating ruler is vertically connected to the sliding table bracket and is arranged in parallel with the linear introducer;
the support ring is fixedly connected to the bottom end of the linear introducer and extends into the vacuum cavity;
the two scanning wires are fixedly connected to the two end faces of the support ring respectively, and are arranged vertically to each other; and
a plurality of double-core vacuum joints connected with the peripheral surface of the vacuum cavity and extending into the vacuum cavity, and an observation window.
2. The cross-hair scanning probe of claim 1, wherein said support ring comprises:
one end of the driving rod is connected with the linear introducer;
the C-shaped ring is connected to the other end of the driving rod and integrally formed with the driving rod, and the opening of the C-shaped ring is opposite to the driving rod; and
and the wire clamping mechanisms are symmetrically arranged on the C-shaped ring and are respectively used for clamping two ends of the scanning wire.
3. The cross-hair scanning probe of claim 2, wherein said wire clamping mechanism comprises:
the positioning base is fixedly connected to the C-shaped ring; and
the scanning wire clamping device comprises two copper sheets embedded on the surface of the positioning base and used for clamping a scanning wire, and an insulating ceramic gasket arranged between the two copper sheets.
4. The cross-wire scanning probe according to claim 3, wherein the two end faces of the C-shaped ring are respectively provided with a fixing groove for accommodating the positioning base.
5. The cross-hair scanning probe of any of claims 1-4, further comprising a transition tube assembly connected to said dual core vacuum connection.
6. The cross-wire scanning probe of claim 5, wherein the motor is coupled to the linear introducer by a coupling.
7. The cross-wire scanning probe of claim 6, wherein the vacuum chamber has a knife-edge flange on its outer periphery for receiving the linear introducer, the twin-core vacuum connector and the observation window, respectively.
8. A cross-hair scanning detector according to claim 6 or 7, wherein said twin core vacuum connections are two in number.
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| CN2012201534572U CN202563097U (en) | 2012-04-12 | 2012-04-12 | Cross wire scanning detector |
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| CN2012201534572U CN202563097U (en) | 2012-04-12 | 2012-04-12 | Cross wire scanning detector |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020859A (en) * | 2017-12-29 | 2018-05-11 | 合肥中科离子医学技术装备有限公司 | A kind of adjustable driving device for being used to measure line lateral parameter |
| CN108445526A (en) * | 2018-02-28 | 2018-08-24 | 西北核技术研究所 | The silk battle array structure and measuring device of high-resolution silk formation beam cross section measuring device |
| CN111208553A (en) * | 2020-03-12 | 2020-05-29 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| FR3108410A1 (en) * | 2020-03-19 | 2021-09-24 | Safran Aircraft Engines | TEST DEVICE AND APPARATUS FOR MEASURING THE DIMENSIONS OF THE OPTICAL MICRO-FIREPLACE OF A RADIOGENIC TUBE |
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2012
- 2012-04-12 CN CN2012201534572U patent/CN202563097U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020859A (en) * | 2017-12-29 | 2018-05-11 | 合肥中科离子医学技术装备有限公司 | A kind of adjustable driving device for being used to measure line lateral parameter |
| WO2019127865A1 (en) * | 2017-12-29 | 2019-07-04 | 合肥中科离子医学技术装备有限公司 | Adjustable transmission device for measuring transverse parameters of beams |
| US10884145B2 (en) | 2017-12-29 | 2021-01-05 | Hefei Cas Ion Medical And Technical Devices Co., Ltd | Adjustable transmission device for measuring transverse parameters of beams |
| CN108020859B (en) * | 2017-12-29 | 2023-12-29 | 合肥中科离子医学技术装备有限公司 | Adjustable transmission device for measuring transverse parameters of beam |
| CN108445526A (en) * | 2018-02-28 | 2018-08-24 | 西北核技术研究所 | The silk battle array structure and measuring device of high-resolution silk formation beam cross section measuring device |
| CN108445526B (en) * | 2018-02-28 | 2019-05-03 | 西北核技术研究所 | The silk battle array structure and measuring device of high-resolution silk formation beam cross section measuring device |
| CN111208553A (en) * | 2020-03-12 | 2020-05-29 | 中国科学院上海高等研究院 | Fluorescent target detector and detection method thereof |
| FR3108410A1 (en) * | 2020-03-19 | 2021-09-24 | Safran Aircraft Engines | TEST DEVICE AND APPARATUS FOR MEASURING THE DIMENSIONS OF THE OPTICAL MICRO-FIREPLACE OF A RADIOGENIC TUBE |
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