CN202226324U - Silicon wafer sorting device - Google Patents
Silicon wafer sorting device Download PDFInfo
- Publication number
- CN202226324U CN202226324U CN2011203536281U CN201120353628U CN202226324U CN 202226324 U CN202226324 U CN 202226324U CN 2011203536281 U CN2011203536281 U CN 2011203536281U CN 201120353628 U CN201120353628 U CN 201120353628U CN 202226324 U CN202226324 U CN 202226324U
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- Prior art keywords
- belt
- silicon chip
- additional strap
- additional
- sorting unit
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The embodiment of the utility model discloses a silicon wafer sorting device, which comprises a belt, a belt wheel and a sensor and further comprises an additional belt in side-by-side transmission with the belt, additional belt wheels, positioning wheels and belt pressing wheels, wherein the additional belt wheels and the belt wheel are arranged side by side, and the additional belt wheels are installed at the two sides of the belt wheel for transmitting the additional belt; the positioning wheels are arranged at the two sides of the sensor and are provided with grooves for lifting the additional belt so that the lifted additional belt is higher than the belt; and the belt pressing wheels are arranged between the positioning wheels and the additional belt wheels for lowering the additional belt so that the lowered additional belt is lower than the belt. In the silicon wafer sorting process, the silicon wafer sorting device disclosed by the utility model not only avoids the detection error caused by the vibration of the belt and the additional belt, but also avoids the detection error caused by the difference in thickness of the belts, thereby reducing the requirements of the belts on precision so that the silicon wafer sorting device has low misjudgment ratio, good stability and long debugging period.
Description
Technical field
The utility model relates to technical field of solar, relates in particular to a kind of silicon chip sorting unit.
Background technology
Solar power industry silicon chip screening installation is when belt conveyor transmits silicon chip, silicon chip to be detected mostly in the market; But because the belt conveyor span is big; And detection time is very short, makes that when silicon chip was detected, belt conveyor was in the vibration elastic state; Cause the detecting sensor in the silicon chip screening installation can't obtain silicon chip static data accurately, cause silicon chip screening installation False Rate high.
To this problem; The general mode of belt conveyor carriage that adopts is eliminated the detection error that the belt conveyor vibrations are caused in the prior art; Promptly increase a carriage in the silicon chip detection position that is being arranged in the middle of the upper and lower sensor of silicon chip screening installation, when the belt conveyor band silicon chip and is sent to the silicon chip detection position, the carriage of inspection positions played certain holder to belt conveyor and holds up fixation; Reduce the vertical tremor of belt conveyor, thereby reduce because the detection error that the belt conveyor vibrations are caused.But this method only has certain effect at the debugging initial stage, and debugging cycle is short, and this method can't eliminate because the detection error that the difference in thickness of belt conveyor itself is introduced.
The utility model content
In view of this, the utility model provides a kind of silicon chip sorting unit, can eliminate detection error that belt vibrations are introduced fully and because the detection error that the difference in thickness of belt own is introduced, debugging cycle is long, good stability.
For addressing the above problem, the utility model provides following technical scheme:
The utility model discloses a kind of silicon chip sorting unit, comprise belt, belt pulley and sensor, also comprise:
With the said belt additional strap of transmission side by side;
Be arranged side by side with said belt pulley and be positioned at said belt pulley both sides, be used for the additional strap wheel of the said additional strap of transmission;
Be positioned at said sensor both sides, it is provided with groove, be used for said additional strap is raised and made additional strap after raising be higher than the locating wheel of said belt;
Between said locating wheel and additional strap wheel, be used for said additional strap is forced down and made additional strap after forcing down be lower than the pinch roller of said belt.
Preferably, said additional strap wheel is 4.
Preferably, said locating wheel is 4.
Preferably, said pinch roller is 4.
Preferably, the concentricity of said locating wheel is less than 40 μ m.
Preferably, the degree of depth of said locating wheel upper groove is 0.3mm.
Preferably, the additional strap after raising is than the high 1.2mm of said belt.
Preferably, said belt is identical with the linear velocity of said additional strap during running.
Compared with prior art, the silicon chip sorting unit that the utility model provided has increased additional strap, additional strap wheel, pinch roller and locating wheel.In the silicon chip transport process, silicon chip is by belt-driving, when silicon chip is about to arrive between the upper and lower sensor; Because locating wheel is raised said additional strap and make the additional strap after raising be higher than said belt; Therefore, said silicon chip breaks away from belt, and under the transmission of said additional strap, rises on the locating wheel; At this moment, by said sensor silicon chip is detected.Silicon chip is being carried out in the testing process, and said silicon chip has not only broken away from belt, and because locating wheel is provided with groove; Said additional strap is positioned at said groove; So said silicon chip has also broken away from said additional strap, this has just guaranteed that silicon chip remains static fully between the silicon chip detection period.Guaranteed that on the one hand silicon chip does not receive the influence of belt and additional strap vibrations when detecting; Eliminated the detection error that the vibrations of belt and additional strap are introduced fully; The detection error of also having avoided the difference in thickness of belt own to be introduced has on the other hand reduced the requirement to the belt precision, thereby makes that the silicon chip sorting unit False Rate that the utility model provided is low; Good stability, debugging cycle is long.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiment of the utility model, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural front view of silicon chip sorting unit in the prior art;
Fig. 2 is the structural representation of silicon chip sorting unit in the prior art;
Fig. 3 is the structural front view of the silicon chip sorting unit that provided in the utility model;
The silicon chip sorting unit structural representation of Fig. 4 for being provided in the utility model.
The specific embodiment
To combine the accompanying drawing among the utility model embodiment below, the technical scheme among the utility model embodiment is carried out clear, intactly description, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
A lot of details have been set forth in the following description so that make much of the utility model; But the utility model can also adopt other to be different from alternate manner described here and implement; Those skilled in the art can do similar popularization under the situation of the utility model intension, so the utility model does not receive the restriction of following disclosed specific embodiment.
With reference to figure 1 and Fig. 2, Fig. 1 is the structural front view of silicon chip sorting unit in the prior art, and Fig. 2 is the structural representation of silicon chip sorting unit in the prior art.Illustrated among the figure: upper sensor 1, silicon chip 2, carriage 3, lower sensor 4, belt pulley 5, belt 6, belt pulley 7, motor 11, support 12, sensor stand 13.
Can find out in conjunction with Fig. 1 and Fig. 2; Silicon chip sorting unit of the prior art, through between upper sensor 1 and lower sensor 4, promptly the silicon chip detection position increases carriage 3; Adopt the mode of belt carriage to eliminate the detection error that belt 6 vibrations are introduced, wherein carriage 3 is positioned at the below of belt 6.When silicon chip 2 is delivered to the detection position by belt 6, holds up effect owing to belt 6 belows have 3 pairs of belts 6 of carriage to play certain holder, thereby reduced the vertical tremor amplitude of belt 6, and then reduced because the detection error that belt 6 vibrations are introduced.But this method only can play the effect that certain reducing detects error at the debugging initial stage.
Because in use; When silicon chip 2 is transported to the detection position; Will rub between belt 6 and the carriage 3, thus the loss of increase belt 6, after use a period of time; The gap will occur between the belt 6 of generation loss and the carriage 3, and then make because the detection error that belt 6 vibrations are introduced reappears.If want to guarantee that this device reduces to detect the effect of error, just need debug again carriage 3 and belt 6, make that the debugging cycle of silicon chip sorting unit is short, poor stability.
In addition; Silicon chip sorting unit of the prior art can't eliminate because the detection error that belt 6 difference in thickness own are introduced; Not only influence the accuracy of detection of silicon chip sorting unit; And this silicon chip sorting unit is very high to the requirement of belt 6 precision, and then makes that the cost of silicon chip sorting unit is very high.
In order to address the above problem, the utility model discloses a kind of silicon chip sorting unit, comprise belt, belt pulley and sensor, in addition, also comprise:
With the said belt additional strap of transmission side by side;
Be arranged side by side with said belt pulley and be positioned at said belt pulley both sides, be used for the additional strap wheel of the said additional strap of transmission;
Be positioned at said sensor both sides, it is provided with groove, be used for said additional strap is raised and made additional strap after raising be higher than the locating wheel of said belt;
Between said locating wheel and additional strap wheel, be used for said additional strap is forced down and made additional strap after forcing down be lower than the pinch roller of said belt.
With reference to figure 3 and Fig. 4, Fig. 3 is a silicon chip sorting unit structural front view disclosed in the utility model, and Fig. 4 is a silicon chip sorting unit structural representation disclosed in the utility model.Upper sensor 1, silicon chip 2, lower sensor 4, belt pulley 5, belt 6, belt pulley 7, locating wheel 8, pinch roller 9, additional strap wheel 10, motor 11, support 12, sensor stand 13, additional strap 14 have been shown among the figure.
Can find out with reference to figure 1, Fig. 2 and Fig. 3, compare that silicon chip sorting unit disclosed in the utility model has replaced carriage 3 of the prior art with additional strap 14, pinch roller 9, locating wheel 8 and additional strap wheel 10 with silicon chip sorting unit of the prior art.Wherein, said additional strap wheel 10 is 4, and said pinch roller 9 is 4, and said locating wheel 8 is 4, and the concentricity of said locating wheel 8 is less than 40 μ m.
Before the work of silicon chip sorting unit, at first adjust the position of locating wheel 8, the last end face that makes locating wheel 8 is a little more than belt 6; Wait to regulate the position of locating wheel 8; Make silicon chip 2 is placed 8 last times of locating wheel that during the about 1.5mm of silicon chip 2 plan range belts 6, stationary positioned is taken turns 8 position.Debug pinch roller 9 then, because the girth of additional strap wheel 10 is consistent with the belt pulley girth, debugging pinch roller 9 is with the tension force of adjusting additional strap 14, thereby assurance belt 6 is identical with the linear velocity of additional strap 14.Regulate the probe of upper sensor 1 and lower sensor 4 at last, confirm the position that upper sensor 1 and lower sensor 4 are popped one's head in, and guarantee to have certain squareness between upper sensor 1 and lower sensor 4 probes and the silicon chip 2.
Need to prove that locating wheel 8 is provided with groove, additional strap 14 is positioned at the groove of locating wheel 8, and wherein the plane of additional strap 14 in groove is lower than on the locating wheel 8 about end face 0.3mm.
When the silicon chip sorting unit is worked, motor 11 drive belt pulleys 5 with 7 and additional strap wheel 10 rotate, and belt pulley 5,7 drives belts 6 transmissions, 14 transmissions of additional strap wheel 10 drive additional strap.Originally silicon chip 2 is forwarded under the drive of belt pulley 5,7 by belt 6, when silicon chip 2 arrival detection positions, because belt pulley 5,7 is identical with the girth of additional strap wheel 10; Make belt 6 have identical linear velocity, and the distance of 6 of end face and belts is shorter on the locating wheel 8, therefore with additional strap 14; Silicon chip 2 can be on automatic climbing to locating wheel 8 under the drive of additional strap 14; When silicon chip detected, silicon chip 2 forwarded under the drive of locating wheel 8, treat silicon chip 2 detect accomplish after; Silicon chip 2 is reduced to again on the belt 6 automatically, is delivered to next flow process by belt 6.
In the silicon chip transport process, silicon chip 2 is by belt 5,7 transmissions, because the last end face of locating wheel 8 is a little more than belt 6; Distance is 1.5mm, and locating wheel 8 is provided with groove, and depth of groove is about 0.3mm; Additional strap 14 is positioned at groove, and locating wheel 8 is raised said additional strap 14 and made the additional strap 14 after raising be higher than said belt 6, is about 1.2mm; Because belt 6 has identical linear velocity with additional strap 14, therefore when silicon chip 2 was about to arrive between upper sensor 1 and the lower sensor 4, said silicon chip 2 broke away from belt 6 again; And rising under the transmission of said additional strap 14 on the locating wheel 8; Like this silicon chip is being carried out in the testing process, silicon chip 2 is positioned on the locating wheel 8, breaks away from fully with belt 6 and additional strap 14; Thereby not only avoided the belt 6 detection error that 14 vibrations are introduced with additional strap fully, and eliminated fully because the detection error that belt 6 and additional strap 14 difference in thickness own are brought.Because the position of locating wheel 8 fixes before the work of silicon chip sorting unit; Therefore; During the silicon chip monitoring; Silicon chip 2 remains static on above-below direction fully, thereby makes the silicon chip sorting unit can obtain silicon chip 2 static datas accurately, has improved the precision of silicon chip sorting unit greatly.
The silicon chip sorting unit that the utility model provided, when silicon chip 2 was detected, silicon chip 2 all broke away from belt 6 and additional strap 14 fully; Thereby solved in the prior art because belt 6 and carriage mutual friction mutually cause belt 6 losses, made the gap to occur between belt 6 and the carriage; And then introduce the detection error problem that vertical tremor caused again owing to belt 6, therefore, the silicon chip sorting unit False Rate that the utility model provided is low; Good stability, debugging cycle is long.And silicon chip 2 all breaks away from belt 6 and additional strap 14 fully; Also eliminated because the detection error that belt 6 and additional strap 14 difference in thickness own are brought; Thereby when improving silicon chip sorting unit precision; Also reduced requirement, prolonged the service life of belt 6 and additional strap 3, and then reduced the productive costs of silicon chip sorting unit belt 6 and additional strap 14 precision.
Various piece adopts the mode of going forward one by one to describe in this specification sheets, and what each part stressed all is and the difference of other parts that identical similar part is mutually referring to getting final product between the various piece.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined General Principle can realize under the situation of spirit that does not break away from the utility model or scope in other embodiments among this paper.Therefore, the utility model will can not be restricted to embodiment illustrated herein, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (8)
1. a silicon chip sorting unit comprises belt, belt pulley and sensor, it is characterized in that, also comprises:
With the said belt additional strap of transmission side by side;
Be arranged side by side with said belt pulley and be positioned at said belt pulley both sides, be used for the additional strap wheel of the said additional strap of transmission;
Be positioned at said sensor both sides, it is provided with groove, be used for said additional strap is raised and made additional strap after raising be higher than the locating wheel of said belt;
Between said locating wheel and additional strap wheel, be used for said additional strap is forced down and made additional strap after forcing down be lower than the pinch roller of said belt.
2. silicon chip sorting unit according to claim 1 is characterized in that, said additional strap wheel is 4.
3. silicon chip sorting unit according to claim 1 is characterized in that, said locating wheel is 4.
4. silicon chip sorting unit according to claim 1 is characterized in that, said pinch roller is 4.
5. silicon chip sorting unit according to claim 1 is characterized in that, the concentricity of said locating wheel is less than 40 μ m.
6. silicon chip sorting unit according to claim 1 is characterized in that, the degree of depth of said locating wheel upper groove is 0.3mm.
7. silicon chip sorting unit according to claim 6 is characterized in that, the additional strap after raising is than the high 1.2mm of said belt.
8. silicon chip sorting unit according to claim 1 is characterized in that, said belt is identical with the linear velocity of said additional strap during running.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203536281U CN202226324U (en) | 2011-09-20 | 2011-09-20 | Silicon wafer sorting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011203536281U CN202226324U (en) | 2011-09-20 | 2011-09-20 | Silicon wafer sorting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202226324U true CN202226324U (en) | 2012-05-23 |
Family
ID=46076925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011203536281U Expired - Lifetime CN202226324U (en) | 2011-09-20 | 2011-09-20 | Silicon wafer sorting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202226324U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109205501A (en) * | 2017-06-30 | 2019-01-15 | 上海微电子装备（集团）股份有限公司 | A kind of the positioning lifting system and detection device of material |
-
2011
- 2011-09-20 CN CN2011203536281U patent/CN202226324U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109205501A (en) * | 2017-06-30 | 2019-01-15 | 上海微电子装备（集团）股份有限公司 | A kind of the positioning lifting system and detection device of material |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120523 |