CN1966268A - Liquid jet device and its system and method for detecting ink stock of the device - Google Patents
Liquid jet device and its system and method for detecting ink stock of the device Download PDFInfo
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- CN1966268A CN1966268A CN 200510124631 CN200510124631A CN1966268A CN 1966268 A CN1966268 A CN 1966268A CN 200510124631 CN200510124631 CN 200510124631 CN 200510124631 A CN200510124631 A CN 200510124631A CN 1966268 A CN1966268 A CN 1966268A
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Abstract
The invention relates to a fluid ejector with sensor, wherein it comprises fluid ejector and one sensor; the ejector comprises several fluid chambers in substrate, to contain fluid, while it has the first layer; at least one foam generator above the first layer opposite to the fluid chamber; and one ejection hole near the foam generator through the first layer and the fluid chamber of foam generator, to form one fluid ejector; the sensor comprises one piezoelectric sensor or film resonance device above the first layer and opposite another fluid chamber, to form a fluid sensor, to sense the fluid amount in another fluid chamber.
Description
Technical field
The present invention relates to a kind of fluid ejection apparatus, particularly relate to a kind of fluid ejection apparatus and system thereof, to detect inking chamber ink inside storage with piezo sensor.
Background technology
Micro-fluid ejecting device applies to information industry recently widely, for example in ink-jet printer or the similar devices.Progressively exploitation along with micro-system engineering (micro system engineering), this kind fluid ejection apparatus has the application of other various fields gradually, for example fuel injection system (fuel injectionsystem), cell screening (cell sorting), drug delivery system (drug delivery system), spray printing photoetching technique (print lithography) and micro-injection propulsion system (micro jet propulsion system) etc.In above-mentioned each application, comparatively successful a kind of design is to use heat to drive the bubble mode to eject the method for drop.Because its simplicity of design and with low cost is therefore also general in the use.
When print data, traditional ink discharge device can be distinguished into continous way (continuous) and select two kinds of forms of injecting type (drop-on-demand) according to the mode of ink ejection.But print form detects the ink remaining quantity in the black chamber whichsoever, and the foundation to provide ink cartridges to change is important research project.If black casket internal memory China ink is very few, except that causing inferior print quality,,, also can damage ink discharge device because of sky burns phenomenon as heater to the driving injection apparatus of ink droplet.
At the demand that detects the ink remaining quantity in the ink cartridges, United States Patent (USP) U.S.Pat.No.5,699, No. 090 people such as patent Wade disclose a kind of thermal (thermal bubble) drive-type ink discharge device, by the relation of the variation of the hot end instrument measuring resistance in the ink-jet chip with respect to variations in temperature.
See also Fig. 1, controller 111 transmits a printing and controls signal to ink jet head driving apparatus 113 after receiving and handling print data.Voltage-controlled source supply 115 provides a control voltage V
sTo ink jet head driving apparatus 113, control voltage V
sSize controlled by voltage-controlled source supply 115.The ink jet head driving apparatus of being controlled by controller 111 113 provides a drive voltage pulses V
PTo the heater resistance 117 of a heat driving type ink gun 119, carry out fluid and spray.Then, utilize the temperature sensing resistance (temperature sensing resistor) 123 of ink-jet chip, contrast is as the reference value of each heater resistance 117 in the ink-jet chip, and export an analog signal, and then controller 111 is done optimized ink-jet condition enactment to analog/digital conversion device 125.
According to known techniques, the relation of measured residual China ink amount and temperature changing trend in the ink course of injection, as shown in Figure 2.The testing result that obtains ink inventory in the ink cartridges thus can be as the foundation of follow-up ink-jet.Yet in the prior art, to the material selection of resistance sensing device, choosing of configuration and sense position all can influence measurement result.In addition, sensor this as temperature-sensitive sticker, its circuit also can cause the error of measuring temperature because of electric current passes through the heating effect that caused.So this kind converts voltage output to by resistance-type sensor temperature changing trend, and then record the detection effect of ink cartridges ink inside storage, the restricted of elder generation the sky arranged in fact.More leisure opinion can't be used for the ink discharge device of non-hot bubble type with this type of sensing principle.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of fluid ejection apparatus, with the resonance characteristics of the structure sheaf above the senses flow body cavity with piezo sensor.
Another object of the present invention is to provide a kind of method of test fluid injection apparatus ink inside storage, different with vibration characteristics under the no filling ink state by structure sheaf at filling ink, with a piezo sensor, can detect inking chamber ink inside storage synchronously.
According to above-mentioned purpose, the invention provides a kind of fluid ejection apparatus with sensor, comprise a fluid injection apparatus and a sensor.Fluid ejection apparatus comprises: a fluid cavity has a ground floor in order to hold fluid on it in a substrate; At least one air Bubble generating apparatus is arranged on this ground floor and in the opposite side of this fluid cavity; And a spray orifice, be close to this air Bubble generating apparatus and penetrate this and this ground floor, and be communicated with this fluid cavity.This sensor comprises that piezo sensor or thin film resonator are arranged on this ground floor, in order to measure the storage of this fluid cavity fluid.
The present invention provides a kind of fluid injection system in addition, comprising: an ink accumulator tank, a fluid ejector chip comprise a plurality of fluid ejection apparatus and at least one sensor.Each fluid ejection apparatus comprises: a fluid cavity is communicated with this ink accumulator tank, in order to hold a fluid, a ground floor is arranged on it; At least one air Bubble generating apparatus is arranged on this ground floor and in the opposite side of this fluid cavity; And a spray orifice, be close to this air Bubble generating apparatus and penetrate this and this ground floor, and be communicated with this fluid cavity.This at least one sensor is arranged at those fluid ejection apparatus, on this ground floor of one of them, in order to measure the storage of this fluid cavity fluid.
The present invention provides a kind of method of test fluid injection apparatus ink inside storage again, and this fluid ejection apparatus comprises that a fluid cavity has a structure sheaf and at least one fluid actuator to be arranged on this structure sheaf on it.This detection method comprises the resonance character of utilizing a piezoelectricity sensing apparatus to measure this structure sheaf, and exports a signal; And receive this signal, drive this fluid actuator according to this.
Below cooperate graphic and preferred embodiment, to illustrate in greater detail the present invention.
Description of drawings
Fig. 1 is the calcspar of existing test fluid injection apparatus method;
Fig. 2 is the graph of a relation of measured residual China ink amount in the existing ink course of injection with temperature changing trend;
Fig. 3 A is the top view of the piezo sensor of the embodiment of the invention;
Fig. 3 B is the generalized section that piezo sensor is arranged at the fluid cavity top;
Fig. 3 C is that the fluid sensing cell of Fig. 3 B is in the generalized section of filling ink state;
Fig. 4 is the schematic diagram of the fluid ink-jet system of the embodiment of the invention;
Fig. 5 is the structural representation of ink-jet chip among Fig. 4;
Fig. 6 A-Fig. 6 B be ink-jet chip when the fluid occupied state, along the AA line of cut generalized section;
Fig. 7 A-Fig. 7 B is that the ink-jet chip of tool piezo sensor of the embodiment of the invention is when the fluid occupied state, along the generalized section of BB line of cut;
Fig. 8 A be the piezo sensor of the embodiment of the invention when no ink fill fluid chamber, the schematic diagram of measured reflection loss and resonant frequency;
Fig. 8 B is the schematic diagram of the sensor of the embodiment of the invention measured reflection loss and resonant frequency when ink is filled;
Another implements the top view of the ink-jet chip of example to Fig. 9 for the present invention;
Figure 10 is the top view of the ink-jet chip of further embodiment of this invention;
Figure 11 is that the ink-jet chip of tool piezo sensor of Figure 10 is when the fluid occupied state, along the generalized section of CC line of cut;
Figure 12 is the calcspar of method of the test fluid injection apparatus ink inside storage of the embodiment of the invention.
The specific embodiment
Below have the fluid ejection apparatus of piezo sensor and control the embodiment that it sprays the method for quality for of the present invention, conjunction with figs. and label are described in detail as follows now.
Fig. 3 A shows the top view according to the piezo sensor of the embodiment of the invention.Fig. 3 B shows that piezo sensor is arranged at the generalized section on the fluid ejection apparatus.Fig. 3 C shows that the fluid ejection apparatus of Fig. 3 B is in the generalized section of filling ink state.
See also Fig. 3 A and Fig. 3 B, single petrochemical industry (monolithic) fluid sensing cell 10S comprises a substrate 1, and for example silicon single crystal wafer forms a fluid cavity 5 in substrate 1.On substrate 1 and the fluid cavity 5 structure sheaf 3 is arranged.Structure sheaf 3 is the film of a low stress, for example the silicon nitride of low stress (low stressSi
3N
4) film.
Then, on structure sheaf 3, form one first electrode 22, for example: gold, aluminium, platinum or other conducting metal or alloy.Above first electrode 22, a piezoelectric material layer 4 is set, for example: zinc oxide (ZnO), aluminium nitride (AlN), lithium niobate (LiNbO
3), lithium tantalate (LiTaO
3), the combination of lead titanates (PT), metatitanic acid fine linen barium (BST), lead zirconates (PZT) or above-mentioned material.And second electrode 21 is then being plated in piezoelectric material layer 4 tops, for example: gold, aluminium, platinum or other conducting metal or alloy.
Piezo sensor 2 promptly is made up of first electrode 22, piezoelectric material layer 4 and second electrode 21.Piezo sensor 2 carries out signal measurement by the perforate (via) 23 at piezoelectric layer 4 places.Owing to have or not the elastic wave velocity of wave of ink inventory and piezoelectric layer that direct relation is just arranged in the fluid cavity of single petrochemical fluids sensing cell.Therefore, directly measure the elastic wave difference that velocity of wave changes on piezoelectric layer by closing piezo sensor 2, as judging the foundation that whether has fluid to exist in the fluid cavity 5.Next, state bright fluid ejection apparatus in detail with regard to the embodiment of the invention with piezo sensor.
Fig. 4 shows the schematic diagram according to the fluid ink-jet system of the embodiment of the invention.Fluid ink-jet system 30 comprises an ink-jet chip 7 and an ink cartridges 8.Comprise a plurality of fluid ejectors 10A, fluid guides the manifold (manifold) 11 that enters ink-jet chip 7 by this ink cartridges 8 through filter screen (filter), ink guide tube (stand pipe), and the inking chamber 5 that enters fluid ejection apparatus 10 again is interior for ink-jet.The fluid cavity 5 of each fluid ejectors has nothing in common with each other with the distance of menifold 11.
Fig. 5 shows the structural representation of ink-jet chip 7 among Fig. 4.Ink-jet chip 7 is the single petrochemical fluid jet structure, utilizes micro electronmechanical (MEMS) manufacture craft, and photoetching etching silicon single crystal wafer is finished.Ink-jet chip 7 comprises a plurality of fluid ejectors 10A.Fluid is filled to via menifold 11 in the fluid cavity of each fluid ejectors by this ink accumulator tank.The fluid cavity of each fluid ejectors 10A and menifold 11 distances have nothing in common with each other.Piezo sensor 2 is arranged at the fluid cavity top away from this menifold 11, to form a fluid sensing cell.
Fig. 6 A-Fig. 6 B shows ink-jet chip when the fluid occupied state, along the AA line of cut generalized section.See also Fig. 6 A, when the ink content in the ink cartridges was sufficient, the ink backfill was smooth and easy, and heater 15 heats ink in the fluid cavitys, drove drop 12 from spray orifice 16 ejections, and the size of drop 12 is even, and flight path all can be kept specific direction.Otherwise, see also Fig. 6 B, when in the ink cartridges during ink cartridge low, the ink backfill situations in each fluid cavity 5 can't be grasped, the phenomenon that is caused, gently then ink dot inequality, direction differ 12 ', heavy then can't spray ink droplet at all.
The ink-jet chip 7 of the tool piezo sensor 2 of Fig. 7 A-Fig. 7 B demonstration embodiment of the invention is when the fluid occupied state, along the generalized section of BB line of cut.By bottom electrode 22, piezoelectric 4, and the sensor 2 that constituted of top electrode 21 laminated construction, in order to detect the storage of ink in fluid cavity.The manufacture method of ink-jet chip 7 structures comprises in the silicon single crystal wafer substrate 1, and deposition of sacrificial layer (not icon), structure sheaf 3, heater 15 form manifold 11, fluid cavity 5 and spray orifice 16 with etching in regular turn, to form fluid ejectors.If the fluid cavity top replaces heater and spray orifice with piezo sensor 2, then form fluid sensing cell 10S.
The manufacture method step of sensor 2 comprise make bottom electrode 22 on the structure sheaf, the deposition piezoelectric layer is on the bottom electrode, then form top electrode 21 again on piezoelectric layer, opens an aperture 23 at last to be convenient for measuring on piezoelectric layer 4.The structure sheaf below of whole sensor, the fluid cavity 5 of filling ink detects to provide ink to flow into.
See also Fig. 7 A, piezo sensor 2 is arranged on the fluid cavity away from these menifold 11 center lines.That is D
h<D
s, D wherein
h, D
sBe respectively manifold 11 center lines to the spray orifice 16 of distance fluid cavity farthest, with manifold 11 center lines to the distance of sensor 2.
See also Fig. 7 B, because piezo sensor 2 is arranged on manifold 7 fluid cavity farthest.When ink reduced gradually, the phenomenon of ink lack of fill can take place earlier than other apart from the nearer fluid cavity 5 of manifold in the fluid cavity 5 of sensor 2 belows.
Aforesaid piezo sensor 2 also can be considered a thin film resonator (thin film bulk acousticresonator is called for short FBAR), and the resonant frequency of piezo sensor 2, and is as follows with the relation of velocity of wave and wavelength:
Wherein, when the resonant frequency of thin film resonator, v existed for no ink when f existed for no ink, the longitudinal wave velocity of piezoelectric layer (longitudinal wave velocity), λ were that wavelength, d are piezoelectric membrane thickness.8A figure system shows according to the piezo sensor 2 of the embodiment of the invention when the no ink fill fluid chamber, measured reflection loss (return loss) S
11Schematic diagram with resonant frequency.Label 41 is reflection loss (return loss) S when existing for no ink
11Signal schematic representation.
Because above-mentioned vibration mode is because compressional wave resonance causes, therefore above piezoelectric material layer if there is ink to exist, then can cause weight change (mass loading), and it is general to produce similar damping effect (damping effect), cause lateral body wave-wave speed to change, and make the resonant frequency shift of thin film resonator and the decline of factor of merit (Q factor):
Longitudinal wave velocity when the resonant frequency of thin film resonator, v ' existed for ink when wherein, f ' existed for ink, λ are that wavelength, d are piezoelectric membrane thickness.Fig. 8 B is for showing sensor measured reflection loss when ink is filled (return loss) S according to the embodiment of the invention
11Schematic diagram with resonant frequency.Reflection loss S when label 51 exists for ink
11Signal schematic representation.Utilize above-mentioned principle, can pass through the variation of velocity of wave, resonant frequency or the factor of merit of sensor sensing, the testing result that whether contains China ink in the inking chamber is provided.
Another implements the top view of the ink-jet chip of example to Fig. 9 according to the present invention.See also Fig. 9, at least one piezo sensor, for example three piezo sensors 61,62,63 are arranged at inking chamber 91,92,93 tops of different length respectively.Wherein inking chamber 91 and 92 length apart from the manifold center line are respectively in whole inking chambers apart from the shortest and elder of manifold 11.And the length of inking chamber 93 then surpasses inking chamber 92.So when the resonant frequency of sensor 63 changed, the ink in the ink cartridges is existing as can be known reduced, and the anxiety of slightly influential backfill.When sensor 62 also occurrence frequency changes, can push away existing part inking chamber in the ink-jet mechanism, can be because of the ink lack of fill, and cause bad printing phenomenon.When whole sensors 61,62,63, when all producing frequency change, promptly need remind the user, carry out ink cartridges and change action.Aforementioned measured signal more can for example be sent to controller through the analog/digital conversion device after back coupling is handled, fluid injection system is provided, and drives the foundation of ink-jet condition as change.On the contrary, only need piezo sensor is carried out reverse detection, that is detect frequency change and change in proper order by piezo sensor 61 to piezo sensor 62 to piezo sensor 63, the filling China ink manufacture craft that promptly can be applicable to ink discharge device detects.
Figure 10 shows the top view according to the ink-jet chip of further embodiment of this invention.Figure 11 shows that the ink-jet chip of tool piezo sensor of Figure 10 is when the fluid occupied state, along the generalized section of CC line of cut.See also Figure 10, a void is put fluid sensing cell 10S ', have a fluid cavity 94 and be not communicated with this menifold 11, wherein this void put fluid sensing cell 10 ' from the distance of this menifold more than or equal to away from the fluid ejectors 10 of this menifold 11.And, on fluid cavity 94, make a piezo sensor 74.Because fluid cavity 94 is not connected with manifold 11, and does not inject ink, is not filled in it, as shown in figure 11 so fluid cavity 94 does not have ink.Therefore, piezo sensor 74 that can fluid cavity 94 tops is as the benchmark of frequency measurement.
When ink-jet chip not before the filling ink, four groups of piezo sensors 61,62,63,74 all show identical frequency resonance response.After filling ink, also can compare by the resonant frequency of sensor 74 with other sensor 61,62,63, learn the filling effect of ink in each fluid ejection apparatus inking chamber.And ink cartridges can compare by the frequency measurement of each sensor 61,62,63 and sensor 74 in follow-up use equally, learns estimating of the residual China ink amount of ink cartridges.
The present invention provides a kind of method of test fluid injection apparatus ink inside storage again.See also Figure 12, an ink-jet print system 200 has following each device: a controller 220 is after receiving and handling print data, and transmission one is printed and controlled signal to an ink jet head driving apparatus 230.One voltage-controlled source supply 240 provides a control voltage V
sTo the ink gun driver circuit, control voltage V
sSize controlled by voltage-controlled source supply 240.The ink jet head driving apparatus of being controlled by controller 220 provides a drive voltage pulses V
PTo the actuator 214 of fluid ejection apparatus 210, for example the heater resistance of heat driving type ink gun carries out fluid and sprays.
Then, utilize a piezoelectricity sensing apparatus 216 to measure the resonance character of the structure sheaf of fluid ejection apparatus 210, and export a signal.Since in the fluid cavity of fluid ejection apparatus whether filling ink directly influence the resonant frequency of piezoelectricity sensing apparatus, so the measured output signal of piezoelectricity sensing apparatus can be as the foundation of drive fluid injection apparatus 210.Then, convert data signal to controller 220, drive this fluid ejection apparatus 210 according to this by an analog/digital signal conversion device 250.
Characteristics of the present invention and effect
Characteristics of the present invention and effect are the piezo sensor that is built in ink-jet chip by one, and ink inventory in the fluid cavity of ink-jet chip is effectively judged.By the residual black amount detection machine system of non-thermal resistance type, a for example built-in piezo sensor (piezoelectric sensor) is above fluid cavity, and ink content detects in the convection current body cavity, to avoid the empty effect of burning of heater to influence that inkjet component was caused.
Because the operating principle of piezo sensor is to utilize compressional wave to measure, so no matter be thermal, or fluid ejection apparatus such as piezoelectric actuated all can be used the present invention, changes the foundation that the filling China ink manufacture craft of ink cartridges or ink discharge device detects as the real-time reminding user.
Though disclosed the present invention in conjunction with above preferred embodiment; yet it is not in order to limiting the present invention, anyly is familiar with this operator, without departing from the spirit and scope of the present invention; can do to change and retouching, so protection scope of the present invention should be with being as the criterion that claim was defined.
Claims (20)
1. fluid ejection apparatus with sensor comprises:
One fluid injection apparatus, it comprises: a plurality of fluid cavitys have a structure sheaf in order to hold fluid on it in a substrate; At least one fluid actuator is arranged on this structure sheaf and is positioned at the opposite side of at least one fluid cavity; And a spray orifice, be close to this fluid actuator and penetrate this and this structure sheaf, and be communicated with this fluid cavity; And
One piezo sensor is arranged on this structure sheaf and is positioned at the opposite side of another fluid cavity, in order to detect the storage of fluid in this fluid cavity.
2. the fluid ejection apparatus with sensor as claimed in claim 1, wherein this fluid actuator comprises a thermal drive-type fluid ejection apparatus.
3. the fluid ejection apparatus with sensor as claimed in claim 1, wherein this structure sheaf comprises a low stress nitride silicon layer.
4. the fluid ejection apparatus with sensor as claimed in claim 1, wherein this piezo sensor comprises one first electrode, a piezoelectric material layer, reaches the laminated construction that second electrode is constituted.
5. the fluid ejection apparatus with sensor as claimed in claim 4, wherein the material of this piezoelectric material layer comprises zinc oxide (ZnO), aluminium nitride (AlN), lithium niobate (LiNbO
3), lithium tantalate (LiTaO
3), the combination of lead titanates (PT), metatitanic acid fine linen barium (BST), lead zirconates (PZT) or above-mentioned material.
6. fluid injection system comprises:
One ink accumulator tank;
One fluid ejector chip comprises a plurality of fluid ejectors, and each fluid ejectors comprises:
One fluid cavity is communicated with this ink accumulator tank, in order to hold a fluid, a structure sheaf is arranged on it;
At least one fluid actuator is arranged on this structure sheaf and is positioned at the opposite side of this fluid cavity; And
One spray orifice is close to this fluid actuator and penetrates this and this structure sheaf, and is communicated with this fluid cavity; And
At least one fluid sensing cell with piezo sensor, in this fluid sensing cell, piezo sensor places on the structure sheaf, in order to the storage of fluid in the fluid cavity of measuring the structure sheaf below.
7. fluid injection system as claimed in claim 6, wherein those fluid actuators comprise a thermal drive-type fluid ejection apparatus.
8. fluid injection system as claimed in claim 6, wherein this structure sheaf comprises a low stress nitride silicon layer.
9. fluid injection system as claimed in claim 6, wherein this piezo sensor comprises one first electrode, a piezoelectric material layer, reaches the laminated construction that second electrode is constituted.
10. fluid injection system as claimed in claim 9, wherein the material of this piezoelectric material layer comprises the combination of zinc oxide (ZnO), aluminium nitride (AlN), lead titanates (PT), metatitanic acid fine linen barium (BST), lead zirconates (PZT) or above-mentioned material.
11. fluid injection system as claimed in claim 6, wherein this fluid is flowed into via a menifold in this fluid cavity of each fluid ejectors and fluid sensing cell by this ink accumulator tank; And wherein the distance of each fluid cavity and this menifold can have nothing in common with each other.
12. fluid injection system as claimed in claim 11, wherein this piezo sensor is arranged on the fluid cavity of the most close this menifold.
13. fluid injection system as claimed in claim 11, wherein this piezo sensor is arranged on the fluid cavity away from this menifold.
14. fluid injection system as claimed in claim 11 comprises that also a void puts the fluid sensing cell, have a fluid cavity and be communicated with this menifold, wherein this void put the fluid sensing cell from the distance of this menifold greater than away from the fluid ejectors of this menifold.
15. fluid injection system as claimed in claim 14, wherein this void is put a comparison piezo sensor is set on the fluid sensing cell.
16. fluid injection system as claimed in claim 11 comprises that more a void puts the fluid sensing cell, have a fluid cavity and be not communicated with this menifold, wherein this void put the fluid sensing cell from the distance of this menifold greater than away from the fluid ejectors of this menifold.
17. fluid injection system as claimed in claim 16, wherein this void is put a comparison piezo sensor is set on the fluid sensing cell.
18. fluid injection system as claimed in claim 6 more comprises:
One analog/digital converter is connected with this piezo sensor, and the resonance signal of this piezo sensor being measured this structure sheaf converts a data signal to; And
One controller, the resonance signal that measures when relatively this data signal is filled with no ink is controlled this fluid actuator.
19. the method for a test fluid injection apparatus ink inside storage, this fluid ejection apparatus comprise that a fluid cavity has a structure sheaf and at least one fluid actuator to be arranged on this structure sheaf on it, this method comprises the following steps:
Utilize a piezoelectricity sensing apparatus to measure the resonance character of this structure sheaf, and export a signal; And
Receive this signal, drive this fluid actuator according to this.
20. the method for test fluid injection apparatus ink inside storage as claimed in claim 19, wherein this piezo sensor comprises one first electrode, a piezoelectric material layer, reaches the laminated construction that second electrode is constituted.
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CN 200510124631 CN1966268A (en) | 2005-11-14 | 2005-11-14 | Liquid jet device and its system and method for detecting ink stock of the device |
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CN 200510124631 CN1966268A (en) | 2005-11-14 | 2005-11-14 | Liquid jet device and its system and method for detecting ink stock of the device |
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Cited By (1)
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CN101661066B (en) * | 2008-08-25 | 2011-11-30 | 瑞鼎科技股份有限公司 | Sensing element and electric quantity sensing device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101661066B (en) * | 2008-08-25 | 2011-11-30 | 瑞鼎科技股份有限公司 | Sensing element and electric quantity sensing device |
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