CN1439096A - 用于自动光学检验***的照明装置 - Google Patents
用于自动光学检验***的照明装置 Download PDFInfo
- Publication number
- CN1439096A CN1439096A CN01811936A CN01811936A CN1439096A CN 1439096 A CN1439096 A CN 1439096A CN 01811936 A CN01811936 A CN 01811936A CN 01811936 A CN01811936 A CN 01811936A CN 1439096 A CN1439096 A CN 1439096A
- Authority
- CN
- China
- Prior art keywords
- detection system
- optical detection
- circuit board
- illumination
- examination region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
- G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95661—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature
- G01N2021/95669—Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature for solder coating, coverage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/062—LED's
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/605,354 | 2000-06-28 | ||
US09/605,354 US6850637B1 (en) | 2000-06-28 | 2000-06-28 | Lighting arrangement for automated optical inspection system |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1439096A true CN1439096A (zh) | 2003-08-27 |
CN1226612C CN1226612C (zh) | 2005-11-09 |
Family
ID=24423315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB018119360A Expired - Fee Related CN1226612C (zh) | 2000-06-28 | 2001-06-18 | 用于自动光学检验***的照明装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6850637B1 (zh) |
JP (1) | JP2004502168A (zh) |
KR (2) | KR100880418B1 (zh) |
CN (1) | CN1226612C (zh) |
AU (1) | AU2001268537A1 (zh) |
TW (1) | TW533304B (zh) |
WO (1) | WO2002001210A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100582567C (zh) * | 2007-07-27 | 2010-01-20 | 四川新力光源有限公司 | 一体化led照明灯具 |
CN100595482C (zh) * | 2007-07-27 | 2010-03-24 | 四川新力光源有限公司 | 一种led照明灯具 |
CN101887032B (zh) * | 2005-07-08 | 2012-05-16 | 伊雷克托科学工业股份有限公司 | 远心轴上暗场照明所实施的光学***的优化使用及性能 |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6549647B1 (en) | 2000-01-07 | 2003-04-15 | Cyberoptics Corporation | Inspection system with vibration resistant video capture |
US6593705B1 (en) | 2000-01-07 | 2003-07-15 | Cyberoptics Corporation | Rapid-firing flashlamp discharge circuit |
WO2001051887A1 (en) | 2000-01-07 | 2001-07-19 | Cyberoptics Corporation | Phase profilometry system with telecentric projector |
US6618123B2 (en) * | 2000-10-20 | 2003-09-09 | Matsushita Electric Industrial Co., Ltd. | Range-finder, three-dimensional measuring method and light source apparatus |
EP2009676B8 (en) * | 2002-05-08 | 2012-11-21 | Phoseon Technology, Inc. | A semiconductor materials inspection system |
EP1411290A1 (en) * | 2002-10-18 | 2004-04-21 | Altman Stage Lighting Co.,Inc. New York Corporation | Diode lighting system |
EP1678442B8 (en) * | 2003-10-31 | 2013-06-26 | Phoseon Technology, Inc. | Led light module and manufacturing method |
US8077305B2 (en) * | 2004-04-19 | 2011-12-13 | Owen Mark D | Imaging semiconductor structures using solid state illumination |
US9281001B2 (en) * | 2004-11-08 | 2016-03-08 | Phoseon Technology, Inc. | Methods and systems relating to light sources for use in industrial processes |
TWM276556U (en) * | 2005-03-04 | 2005-10-01 | Biotek Technology Corp | Improvement of optical system structure for treatment and cosmetology |
JP4713279B2 (ja) * | 2005-08-31 | 2011-06-29 | 第一実業ビスウィル株式会社 | 照明装置及びこれを備えた外観検査装置 |
KR100759843B1 (ko) * | 2006-05-03 | 2007-09-18 | 삼성전자주식회사 | 링 조명 유닛을 갖는 기판 검사 장치 |
DE102007006584B3 (de) * | 2007-02-09 | 2008-06-19 | Leica Microsystems (Schweiz) Ag | Beleuchtungseinrichtung für ein Mikroskop |
CN100526864C (zh) * | 2007-10-26 | 2009-08-12 | 华南理工大学 | 一种用于电路板自动光学检测设备的光源装置 |
US8059280B2 (en) | 2008-01-31 | 2011-11-15 | Cyberoptics Corporation | Method for three-dimensional imaging using multi-phase structured light |
EP2318835B1 (en) * | 2008-07-25 | 2017-04-12 | Corning Incorporated | Nanostructured optical fiber illumination systems and methods for biological applications |
JP5770495B2 (ja) * | 2011-03-11 | 2015-08-26 | 一般社団法人モアレ研究所 | 形状計測装置および格子投影装置 |
CN102788802A (zh) * | 2012-08-29 | 2012-11-21 | 苏州天准精密技术有限公司 | 一种多相机的工件质量检测方法 |
US10126252B2 (en) | 2013-04-29 | 2018-11-13 | Cyberoptics Corporation | Enhanced illumination control for three-dimensional imaging |
EP3134264B1 (en) | 2014-04-25 | 2021-07-28 | Hewlett-Packard Development Company, L.P. | Selecting nozzles |
FR3049709B1 (fr) * | 2016-04-05 | 2019-08-30 | Areva Np | Procede de detection d'un defaut sur une surface par eclairage multidirectionnel et dispositif associe |
SE541493C2 (en) * | 2017-10-26 | 2019-10-15 | Ivisys Aps | System and method for optical inspection of an object |
JP7143740B2 (ja) * | 2018-02-07 | 2022-09-29 | オムロン株式会社 | 画像検査装置および照明装置 |
EP3524967B1 (en) | 2018-02-07 | 2024-01-31 | OMRON Corporation | Image inspection device and lighting device |
KR102235933B1 (ko) | 2019-11-29 | 2021-04-05 | 주식회사 원더풀플랫폼 | 검사조건 최적화 시스템 |
KR102283985B1 (ko) * | 2020-03-25 | 2021-07-29 | 신용관 | 다색컬러를 갖는 약품의 검사방법 |
JP7504643B2 (ja) | 2020-03-30 | 2024-06-24 | 第一実業ビスウィル株式会社 | 検査装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0617777B2 (ja) | 1984-06-02 | 1994-03-09 | 大日本スクリーン製造株式会社 | プリント配線板の撮像方法 |
JPS63268075A (ja) * | 1987-04-24 | 1988-11-04 | Omron Tateisi Electronics Co | 固体光源装置 |
JP2732259B2 (ja) * | 1988-09-10 | 1998-03-25 | 三和生薬株式会社 | 新規なアコニチン系化合物および鎮痛・抗炎症剤 |
US5010412A (en) | 1988-12-27 | 1991-04-23 | The Boeing Company | High frequency, low power light source for video camera |
US4893223A (en) * | 1989-01-10 | 1990-01-09 | Northern Telecom Limited | Illumination devices for inspection systems |
JPH0320089U (zh) * | 1989-07-06 | 1991-02-27 | ||
US5060065A (en) * | 1990-02-23 | 1991-10-22 | Cimflex Teknowledge Corporation | Apparatus and method for illuminating a printed circuit board for inspection |
US5245421A (en) | 1990-09-19 | 1993-09-14 | Control Automation, Incorporated | Apparatus for inspecting printed circuit boards with surface mounted components |
US5365084A (en) * | 1991-02-20 | 1994-11-15 | Pressco Technology, Inc. | Video inspection system employing multiple spectrum LED illumination |
US5349172A (en) * | 1992-02-27 | 1994-09-20 | Alex Roustaei | Optical scanning head |
US5309277A (en) * | 1992-06-19 | 1994-05-03 | Zygo Corporation | High intensity illuminator |
US5822053A (en) | 1995-04-25 | 1998-10-13 | Thrailkill; William | Machine vision light source with improved optical efficiency |
JP3570815B2 (ja) * | 1996-04-26 | 2004-09-29 | 松下電器産業株式会社 | 部品実装機用画像撮像装置 |
US5690417A (en) * | 1996-05-13 | 1997-11-25 | Optical Gaging Products, Inc. | Surface illuminator with means for adjusting orientation and inclination of incident illumination |
JPH10133608A (ja) * | 1996-10-29 | 1998-05-22 | Nichiden Mach Ltd | 照明装置及び照明方法 |
JPH1131848A (ja) * | 1997-07-11 | 1999-02-02 | Iwasaki Electric Co Ltd | 発光ダイオードランプ |
JP3668383B2 (ja) | 1998-02-27 | 2005-07-06 | 松下電器産業株式会社 | 電子部品実装装置 |
JPH11295047A (ja) | 1998-04-06 | 1999-10-29 | Omron Corp | 照明装置 |
US6457645B1 (en) * | 1999-04-13 | 2002-10-01 | Hewlett-Packard Company | Optical assembly having lens offset from optical axis |
-
2000
- 2000-06-28 US US09/605,354 patent/US6850637B1/en not_active Expired - Fee Related
-
2001
- 2001-06-18 WO PCT/US2001/019481 patent/WO2002001210A1/en active Application Filing
- 2001-06-18 KR KR1020087007491A patent/KR100880418B1/ko not_active IP Right Cessation
- 2001-06-18 AU AU2001268537A patent/AU2001268537A1/en not_active Abandoned
- 2001-06-18 CN CNB018119360A patent/CN1226612C/zh not_active Expired - Fee Related
- 2001-06-18 KR KR1020027017917A patent/KR100870693B1/ko not_active IP Right Cessation
- 2001-06-18 JP JP2002506094A patent/JP2004502168A/ja active Pending
- 2001-06-19 TW TW090114808A patent/TW533304B/zh not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101887032B (zh) * | 2005-07-08 | 2012-05-16 | 伊雷克托科学工业股份有限公司 | 远心轴上暗场照明所实施的光学***的优化使用及性能 |
CN100582567C (zh) * | 2007-07-27 | 2010-01-20 | 四川新力光源有限公司 | 一体化led照明灯具 |
CN100595482C (zh) * | 2007-07-27 | 2010-03-24 | 四川新力光源有限公司 | 一种led照明灯具 |
Also Published As
Publication number | Publication date |
---|---|
KR20080040789A (ko) | 2008-05-08 |
AU2001268537A1 (en) | 2002-01-08 |
KR20030015298A (ko) | 2003-02-20 |
KR100880418B1 (ko) | 2009-01-30 |
US6850637B1 (en) | 2005-02-01 |
CN1226612C (zh) | 2005-11-09 |
TW533304B (en) | 2003-05-21 |
WO2002001210A1 (en) | 2002-01-03 |
JP2004502168A (ja) | 2004-01-22 |
KR100870693B1 (ko) | 2008-11-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: LIANGRUI TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: TERADYNE, INC. Effective date: 20041022 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20041022 Address after: Taiwan County, Taipei, China Applicant after: Teradyne Inc. Address before: Massachusetts, USA Applicant before: Teradyne, INC. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20051109 Termination date: 20150618 |
|
EXPY | Termination of patent right or utility model |