CN117957645A - Sheet bonding apparatus and sheet bonding method - Google Patents
Sheet bonding apparatus and sheet bonding method Download PDFInfo
- Publication number
- CN117957645A CN117957645A CN202280061383.6A CN202280061383A CN117957645A CN 117957645 A CN117957645 A CN 117957645A CN 202280061383 A CN202280061383 A CN 202280061383A CN 117957645 A CN117957645 A CN 117957645A
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- pressing
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- adherend
- adhesive sheet
- bonding
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- 238000000034 method Methods 0.000 title claims description 9
- 238000003825 pressing Methods 0.000 claims abstract description 145
- 239000000853 adhesive Substances 0.000 claims abstract description 103
- 230000001070 adhesive effect Effects 0.000 claims abstract description 103
- 238000003708 edge detection Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 238000012840 feeding operation Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 13
- 239000002994 raw material Substances 0.000 description 13
- 239000010410 layer Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 229920001971 elastomer Polymers 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000006837 decompression Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Labeling Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
Abstract
A sheet sticking apparatus EA is provided with: a supply unit (10) for supplying the adhesive sheet AS; and a pressing unit (20) having a pressing member (21) for pressing and adhering the adhesive sheet AS supplied by the supply unit (10) to the adherend WK1 of the adherend WK, wherein the pressing unit (20) performs: in the first bonding operation, a front part ASF of the bonding sheet AS in the feeding direction is pressed and bonded to the bonding surface WK1 by a pressing member (21) by relative movement of the pressing member (21) and the bonding object WK in a first direction D1 intersecting the bonding surface WK1, and in the second bonding operation, a rear part ASR of the bonding sheet AS except the front part ASF is pressed and bonded to the bonding surface WK1 by the pressing member (21) by relative movement of the pressing member (21) and the bonding object WK in a second direction D2 along the bonding surface WK1, the pressing member (21) is provided such that a part pressed to the bonding surface WK1 is deformed to form a sheet pressing region (21A), and the feeding unit (10) performs a feeding operation before bonding of the bonding sheet AS so that the front end AST in the feeding direction of the bonding sheet AS falls into the sheet pressing region (21A) when the first bonding operation is performed.
Description
Technical Field
The present invention relates to a sheet bonding apparatus and a sheet bonding method.
Background
A sheet sticking apparatus for sticking an adhesive sheet to an adherend is known (for example, refer to patent document 1).
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 2008-153449
Disclosure of Invention
First, the technical problem to be solved
In the sheet bonding apparatus M (sheet bonding apparatus) described in patent document 1, after a bonding operation (first bonding operation) of bonding a front portion of a dicing tape DT (bonding sheet) in a feeding direction to a surface to be bonded by a pressing roller 2 (pressing member) and the surface to be bonded in a direction (first direction) intersecting with an upper surface (surface to be bonded) of a ring frame F (the surface to be bonded), a bonding operation (second bonding operation) of bonding a rear portion other than the front portion of the bonding sheet to the surface to be bonded by a pressing member and the surface to be bonded in a direction along the surface to be bonded (second direction) is performed.
However, in the sheet bonding apparatus described in patent document 1, AS shown in fig. 2 (a), if the front edge (front edge AST) in the feeding direction of the bonding sheet AS is located downstream in the feeding direction from the pressing region (sheet pressing region 21A) of the pressing roller 21 (pressing member) at the front stage of the first bonding operation, the vicinity of the front edge AST is not pressed against the surface WK1 of the adherend WK during the first bonding operation, and an unbonded portion SP is formed between the vicinity of the front edge AST and the adherend WK, AS shown in fig. 2 (B). AS a result, after the second bonding operation is performed and the adhesive sheet AS is bonded to the adherend WK, peeling from the non-bonded portion SP or defective bonding in which dust enters the non-bonded portion SP occurs.
On the other hand, AS shown in fig. 2 (C) of the present application, if the front edge AST is located on the upstream side in the feeding direction from the sheet pressing region 21A in the front stage of the first bonding operation, the adhesive sheet AS is not pressed against the adherend WK1 in the vicinity of the front edge AST during the first bonding operation AS shown in fig. 2 (D) of the present application, and a bonding failure occurs in which the front edge AST is rolled up and bonded to the adherend WK AS shown in fig. 2 (E) of the present application or the front edge AST is rolled up and bonded to the adherend WK AS shown in fig. 2 (F) of the present application during the second bonding operation thereafter.
The invention aims to provide a sheet sticking device and a sheet sticking method, which can prevent poor sticking caused by that the vicinity of the front end edge of an adhesive sheet is not pressed on a stuck surface when a first sticking operation is performed.
(II) technical scheme
The present invention employs the structure described in the claims.
(III) beneficial effects
According to the present invention, the pre-attachment supply operation for supplying the adhesive sheet is performed so that the front edge of the adhesive sheet falls within the sheet pressing region when the first attachment operation is performed, and thus it is possible to prevent occurrence of an attachment failure due to the vicinity of the front edge of the adhesive sheet not being pressed against the surface to be attached when the first attachment operation is performed.
Drawings
Fig. 1 (a) to (F) are explanatory diagrams of a sheet sticking apparatus according to an embodiment of the present invention, and (G) to (J) are explanatory diagrams of modification examples.
Fig. 2 (a) to (F) are explanatory diagrams of the technical problems to be solved by the present invention.
Detailed Description
An embodiment of the present invention will be described below with reference to the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, and the X axis and the Y axis are defined as axes in a predetermined plane, and the Z axis is defined as an axis orthogonal to the predetermined plane. In the present embodiment, when the direction is indicated without designating the figure, based on the case of viewing from the front direction in fig. 1 (a) parallel to the Y axis, the arrow direction of the Z axis is defined as "up", the arrow direction of the X axis is defined as "down", the arrow direction of the X axis is defined as "left", the arrow direction of the X axis is defined as "right", the front direction is defined as "front" in fig. 1 parallel to the Y axis, and the direction is defined as "rear". Since all the drawings except fig. 1 (a) are drawings obtained by observing the same direction as fig. 1 (a), arrows indicating the directions are omitted.
The sheet sticking apparatus EA of the present invention includes: a supply unit 10 that performs a supply process for supplying the adhesive sheet AS; a pressing unit 20 having a pressing roller 21 AS a pressing member for pressing and adhering the adhesive sheet AS supplied from the supply unit 10 to the adherend surface WK1 of the adherend WK, and performing a pressing process; and a leading edge detection unit 30 capable of detecting the position of the leading edge AST of the adhesive sheet AS supplied by the pre-attachment supply operation, the sheet attachment device EA being disposed in the vicinity of the adherend conveying unit 40 that conveys the adherend WK.
The supply unit 10 includes: a substrate 11 that directly or indirectly supports a constituent constituting the supply unit 10; a support roller 12 for supporting a raw material RS formed by temporarily adhering the adhesive sheet AS to the band-shaped release sheet RL; a guide roller 13 that guides the raw material RS; a driving roller 14 supported by an output shaft, not shown, of a rotary motor 14A as a driving means, and sandwiching a raw material RS with a pinch roller 14B; a release sheet 15 AS a release means for folding back the release sheet RL at the release edge 15A and peeling the adhesive sheet AS from the release sheet RL; a driving roller 16 supported by an output shaft, not shown, of a rotary motor 16A as a driving means, and sandwiching the release sheet RL with a pinch roller 16B; and a recovery roller 17 AS recovery means supported by an output shaft of a driving device not shown, for always applying a predetermined tension to the release sheet RL existing between the sheet adhering device EA and the pinch roller 16B during the automatic operation of the sheet adhering device EA, and for recovering the release sheet RL, the supply means 10 can perform the supply operation before adhering the adhesive sheet AS so that the front edge AST in the supply direction of the adhesive sheet AS falls within the sheet pressing area 21A (see fig. 1 (B)) during the first adhering operation.
The pressing unit 20 includes a cylindrical or cylindrical pressing roller 21 rotatably provided around a rotation center 21B, and a linear motor 42 shared with the adherend conveying unit 40, and is capable of: a first adhering operation of pressing and adhering the front portion ASF of the adhesive sheet AS in the supply direction to the adherend WK1 by the pressing roller 21 by a relative movement of the pressing roller 21 and the adherend WK in the first direction D1 intersecting the adherend WK1; and a second adhering operation of pressing and adhering the rear portion ASR of the adhesive sheet AS other than the front portion ASF to the adherend WK1 by the pressing roller 21 by a relative movement of the pressing roller 21 and the adherend WK in the second direction D2 along the adherend surface WK1.
The pressing roller 21 is provided so that a portion pressed against the adherend surface WK1 is deformed to form a sheet pressing region 21A at the time of the first bonding operation. The length of the sheet pressing area 21A in the second direction D2 is input as predetermined information to a control unit, not shown, such as a computer or a sequencer, which controls the operation of the entire sheet bonding apparatus EA.
In the case of the present embodiment, the pressing unit 20 can perform the first bonding operation after aligning the adhesive sheet AS with the adherend WK based on the detection result of the leading edge detecting unit 30.
The leading edge detection unit 30 includes a leading edge detection device 31 configured by a camera supported by a support table 43, an imaging unit such as a projector, various sensors such as an optical sensor and an ultrasonic sensor, and the like.
The adherend transport unit 40 includes: a linear motor 41 as a driving device; a linear motor 42 as a driving device supported on the slider 41A thereof and shared with the pressing unit 20; and a support table 43 supported by the output shaft 42A and having a support surface 43A that can be sucked and held by a decompression means (holding means) such as a decompression pump and a vacuum ejector, not shown.
The operation of the above-described sheet sticking apparatus EA will be described.
First, with respect to the sheet adhering apparatus EA in which the respective members are arranged at the initial positions indicated by solid lines in fig. 1 (a), a user of the sheet adhering apparatus EA (hereinafter, simply referred to as "user") sets the raw material RS as shown in the same figure, and then inputs a signal for starting the automatic operation through an operation unit, not shown, such as an operation panel or a personal computer. Then, the supply unit 10 drives the rotary motors 14A and 16A to feed out the raw material RS, and stops driving of the rotary motors 14A and 16A when the front portion ASF of the front adhesive sheet AS is peeled by a predetermined length at the peeling edge 15A of the peeling plate 15, AS shown by the solid line in fig. 1 (a). When a user or a conveying means, not shown, such as an articulated robot or a conveyor belt, places the adherend WK at a predetermined position on the support surface 43A of the support table 43, the adherend conveying means 40 drives a pressure reducing means, not shown, and suction holding on the support surface 43A is started. In addition, the supply unit 10 drives the rotary motors 14A and 16A, and performs a pre-attachment supply operation of supplying the adhesive sheet AS in the direction of the pressing roller 21 and stopping the adhesive sheet AS at a predetermined stop position so that the leading edge AST of the leading adhesive sheet AS falls within the sheet pressing area 21A when the first attachment operation is performed, AS shown in fig. 1 (B), based on predetermined information input to a control unit not shown.
Then, the adherend transporting means 40 drives the linear motor 41, and after moving the support table 43 in the left direction, the leading edge detecting means 30 drives the leading edge detecting device 31 to detect the position of the leading edge AST of the leading adhesive sheet AS shown in fig. 1 (C). Next, based on the detection result of the leading edge detection unit 30, the adherend transport unit 40 stops the predetermined position of the adherend WK immediately below the leading edge AST of the adhesive sheet AS shown in fig. 1 (D), and performs alignment of the adhesive sheet AS and the adherend WK. Then, the pressing unit 20 drives the linear motor 42, and moves the adherend WK in the first direction D1 (upward direction) AS shown in fig. 1 (E), and performs a first bonding operation of pressing and bonding the front portion ASF of the adhesive sheet AS to the adherend WK1 by the pressing roller 21. At this time, the portion of the pressing roller 21 pressed against the adherend surface WK1 is deformed to form the sheet pressing region 21A. Further, since the adhesive sheet AS is already positioned at the predetermined stop position so that the leading edge AST falls within the sheet pressing region 21A, the non-pressing of the vicinity of the leading edge AST against the adherend WK1 does not occur.
Next, the supply unit 10 and the adherend conveying unit 40 drive the rotary motors 14A, 16A and the linear motor 41, and, while moving the adherend WK in the second direction D2 (left direction), the raw material RS is fed out according to the moving speed to supply the adhesive sheet AS, and the second bonding operation of pressing and bonding the rear portion ASR of the adhesive sheet AS to the adherend surface WK1 by the pressing roller 21 is performed. Thereby, the adhesive sheet AS is peeled off from the release sheet RL, and the rear portion ASR of the adhesive sheet AS peeled off from the release sheet RL is pressed by the pressing roller 21 and stuck to the stuck surface WK1 of the stuck object WK. Then, AS shown in fig. 1 (F), the entire front adhesive sheet AS is adhered to the adherend WK to form the integrated object UP, and when the front portion ASF of the next adhesive sheet AS following the front adhesive sheet AS is peeled off by a predetermined length at the peeling edge 15A of the peeling plate 15, the supply unit 10 stops driving of the rotation motors 14A, 16A. When the support table 43 is separated from the lower side of the pressing roller 21, the driven linear motor 41 is stopped by the adherend conveying means 40, and then the driving of a pressure reducing means, not shown, is stopped, and the suction holding on the support surface 43A is released. When the user or a not-shown conveying means conveys the integrated object UP to the next step, the adherend conveying means 40 drives the linear motor 41 and the linear motor 42 to return the support table 43 to the initial positions, and then repeats the same operation as described above.
Here, it was found that, in the sheet sticking apparatus EA, when the sheet pressing region 21A was formed, the sticking state of the adhesive sheet AS was good AS long AS the length of the sheet pressing region 21A in the second direction D2 was 1mm or more and 50% or less of the diameter of the pressing roller 21.
When the supply unit 10 stops the adhesive sheet AS at a predetermined stop position, the lower limit value of the length of the sheet pressing area 21A in the second direction D2 is preferably 1mm or more because the stop position of the adhesive sheet AS varies within a range of plus or minus 0.2mm and the accuracy of forming the adhesive sheet AS formed on the raw material RS varies within a range of plus or minus 0.3 mm. When the length of the sheet pressing area 21A in the second direction D2 is smaller than 1mm, the front edge AST of the adhesive sheet AS often comes out of the sheet pressing area 21A when the first attaching operation is performed.
On the other hand, the upper limit value of the length of the sheet pressing area 21A in the second direction D2 is about the diameter of the pressing roller 21. Therefore, when the first pressing roller having a diameter of 30mm and composed of a silicone sponge having a Young's modulus of about 0.8MPa, the second pressing roller having a diameter of 35mm and composed of a silicone rubber having a Young's modulus of about 2MPa, and the third pressing roller having a diameter of 40mm and composed of a urethane rubber having a Young's modulus of about 10MPa were used for verification, it was found that when the length of the sheet pressing region 21A in the second direction D2 exceeded a specific length, the pressing roller was hardly deformed, the rotational resistance of the pressing roller was increased, the rotation was difficult, and the risk of damaging the adherend WK was increased. That is, it was found that other sticking defects often occur when the specific length exceeds 15mm, i.e., 50% of the diameter of the press roller for the case of the first press roller, 28.6% of the diameter of the press roller for the case of the second press roller, and 12.5% of the diameter of the press roller for the case of the third press roller. Therefore, it is preferable that the upper limit of the length of the sheet pressing area 21A in the second direction D2 is 50% or less of the diameter of the pressing roller.
According to the above embodiment, the pre-attachment supply operation for supplying the adhesive sheet AS is performed so that the front edge AST of the adhesive sheet AS falls within the sheet pressing area 21A when the first attachment operation is performed, and therefore, it is possible to prevent occurrence of attachment failure due to the vicinity of the front edge AST of the adhesive sheet AS not being pressed against the adherend WK1 when the first attachment operation is performed.
The units and steps in the present invention are not particularly limited as long as the operations, functions, or steps described in the units and steps can be realized, and are not limited to the simple components and steps of one embodiment shown in the above-described embodiments. For example, the pressing member is not limited as long as it is provided so that the portion pressed against the surface to be adhered is deformed to form the sheet pressing region at the time of the first adhering operation, and is within the technical scope of the present invention as compared with the technical knowledge at the time of the initial application (the same applies to other units and steps).
The supply unit 10 may be configured to supply the adhesive sheet AS from the raw material RS having the predetermined area partitioned by the slit AS the adhesive sheet AS by forming the slit in the whole of the closed loop shape or the short-length width direction on the tape-shaped adhesive sheet base material temporarily adhered to the tape-shaped release sheet RL; a tape-shaped adhesive sheet material having a tape-shaped adhesive sheet base material temporarily adhered to a tape-shaped release sheet RL may be used, and a cut-off knife serving AS a cutting means may be used to form a cut-out in the entire width direction of the adhesive sheet base material in a closed loop shape or in the short length direction during the feeding of the tape-shaped adhesive sheet base material, and the adhesive sheet AS may be supplied from a raw material RS having a predetermined area partitioned by the cut-out AS the adhesive sheet AS; the tape-shaped adhesive sheet AS may be peeled from the raw material RS in which the tape-shaped adhesive sheet AS is temporarily adhered to the tape-shaped release sheet RL and supplied; when the adhesive sheet AS is adhered to the adherend WK, adhesion tension control may be performed, that is, the speed and tension of the supplied adhesive sheet AS may be controlled to apply a predetermined tension to the adhesive sheet AS or not to apply a tension thereto; the adhesive sheet AS may be peeled from the raw material RS folded into a folded fan shape and supplied without winding; a recovery unit that can recover the release sheet RL by folding it into a fan shape, cutting it with a shredder, or collecting it at will, for example, without winding; the recovery unit may not be used; the adhesive sheet AS that is not temporarily adhered to the release sheet RL may be fed.
The supply unit 10 may perform the pre-attachment supply operation by moving at least one of the pressing roller 21 and the substrate 11 so that the tip edge AST of the front adhesive sheet AS falls within the sheet pressing area 21A when performing the first attachment operation, using a driving device not shown that moves at least one of the pressing roller 21 and the substrate 11; AS shown in the drawing with reference numeral AA attached to fig. 1 (a), the adhesive sheet AS may be provided with a biasing means 18 for jetting a gas AR such AS air or gas onto a front portion ASF of the adhesive sheet AS supplied by the pre-attachment supply operation and pressing the front portion ASF against the pressing roller 21 in a stage before the first attachment operation; the drive rollers 14, 16, the rotation motors 14A, 16A, and the pinch rollers 14B, 16B may be configured as tip edge position adjustment means, and if it is determined that the tip edge AST does not fall into the sheet pressing area 21A based on the detection result of the position of the tip edge AST detected by the tip edge detection means 30, the rotation motors 14A, 16A may be driven to pull back the raw material RS in the direction of the support roller 12 or send out the raw material RS in the direction of the recovery roller 17 so that the tip edge AST falls into the sheet pressing area 21A; a driving device not shown for moving at least one of the pressing roller 21 and the substrate 11 may be used as the leading edge position adjustment means, and if it is determined that the leading edge AST does not fall into the sheet pressing area 21A based on the detection result of the position of the leading edge AST detected by the leading edge detection means 30, the driving device not shown may be driven to move at least one of the pressing roller 21 and the substrate 11 so that the leading edge AST falls into the sheet pressing area 21A; the speed of supplying the adhesive sheet AS during the supplying operation before the attaching operation may be the same AS or different from the speed of supplying the adhesive sheet AS during the second attaching operation; the pre-attachment position of the adhesive sheet AS during the supply may be set so that the tip edge AST falls within the sheet pressing area 21A at the time of the first attachment operation of the pressing unit 20 without stopping the adhesive sheet AS at the predetermined stop position during the pre-attachment supply operation.
In the supply unit 10, in the pre-attachment supply operation, AS long AS the leading edge AST falls within the sheet pressing area 21A, the stop position and pre-attachment position of the adhesive sheet AS may be arbitrarily set, for example, AS shown in fig. 1 (G) and (H), the stop position and pre-attachment position of the adhesive sheet AS may be set so that the leading edge AST is located directly below the lowermost portion of the pressing roller 21, AS shown in fig. 1 (I) and (J), or the stop position and pre-attachment position of the adhesive sheet AS may be set so that the leading edge AST is located further to the upstream side in the feeding direction of the adhesive sheet AS than the lowermost portion of the pressing roller 21.
The pressing unit 20 can adjust the pressing force of the pressing roller 21 so that the length of the sheet pressing area 21A in the second direction D2 in the first attaching operation is the same as or different from the length of the sheet pressing area 21A in the second attaching operation; the first bonding operation and the second bonding operation may be performed without sharing or sharing the linear motor 42 with the adherend conveying unit 40, or without using the linear motor 42 and using a driving device that moves the pressing roller 21; the first bonding operation in which the adherend WK is moved relatively in the first direction D1 may be performed without moving the adherend WK or by moving the pressing roller 21 while moving the adherend WK; the second bonding operation in which the adherend WK is relatively moved in the second direction D2 may be performed without moving the adherend WK or by moving the pressing roller 21 while moving the adherend WK; the adhesive sheet AS may be aligned with the adherend WK, not based on the detection result of the leading edge detecting unit 30; the first bonding operation may be performed at a timing when the support 43 reaches a predetermined position, for example, without aligning the adhesive sheet AS with the adherend WK; the first direction D1 may be perpendicular to the adherend surface WK1 or the left-right direction (X-axis direction), or inclined at 80 degrees, 105 degrees, or the like; the first direction D1 may be the direction opposite to the arrow shown in the above embodiment; the second direction D2 may be parallel to the adherend surface WK1 or the left-right direction (X-axis direction), or inclined at 1 degree, 10 degrees, or the like; the second direction D2 may be the direction opposite to the arrow shown in the above embodiment; in this case, for example, the user may actually measure the width of the sheet pressing area 21A in the lateral direction, and the stop position and the pre-attachment position of the adhesive sheet AS supplied from the supply unit 10 may be set so that the tip edge AST of the adhesive sheet AS falls within the sheet pressing area 21A when the pre-attachment supply operation is performed.
The length of the sheet pressing area 21A in the second direction D2 may be different depending on various conditions such AS the type, characteristics, properties, materials, composition, structure, shape, size, weight, atmosphere, and other factors of the pressing roller 21, and the pressing roller 21 may be different depending on the pressing force for pressing the adhesive sheet AS against the adherend WK1, and the user may change the type of the pressing roller 21, or the pressing force for pressing the adhesive sheet AS against the adherend WK1 by the pressing roller 21 may be changed to an arbitrary length.
The pressing member may be any member such as a flat plate-shaped pressing plate, or may be any material such as rubber, resin, sponge, or metal, in addition to the cylindrical or cylindrical pressing roller 21.
The leading edge detection unit 30 may not be supported by the support table 43, for example, by an output portion of the driving device or other portions, and may be provided in the die bonding apparatus EA of the present invention or may not be provided.
The adherend transporting unit 40 may not share the linear motor 42 with the pressing unit 20, may not use the linear motor 42, may use the support table 43 incapable of being sucked and held on the support surface 43A, and may be provided in the sheet bonding apparatus EA of the present invention, or may not be provided.
The material, type, shape, and the like of the adhesive sheet AS and the adherend WK in the invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be polygonal such AS circular, elliptical, triangular, or quadrangular, or may be other shapes, and the adhesive sheet AS may be a pressure-sensitive adhesive or a heat-sensitive adhesive material, or in the case of using the heat-sensitive adhesive sheet AS, the adhesive may be bonded by a suitable method such AS providing a suitable coil heater for heating the adhesive sheet AS or a heating means such AS a heating side of a heat pipe. In addition, such an adhesive sheet AS may be, for example, a single layer having only an adhesive layer; two layers each having a base material and an adhesive layer laminated thereon; three or more layers including one or more intermediate layers laminated between the base material and the adhesive layer; three or more layers of one or more cover layers are laminated on the upper surface of the base material; a base material, an intermediate layer or a cover layer is arranged in a peelable manner; a single-layer double-sided adhesive sheet composed of only an adhesive layer; and a double-sided adhesive sheet having an adhesive layer laminated on both outermost surfaces of one or more intermediate layers. The adherend WK may be, for example, a single body such as a food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, an information recording substrate such as a circuit board or an optical disk, a glass plate, a steel plate, a ceramic, a wood plate or a resin, or a composite of two or more of these, and any type of member, article, or the like may be used. The adhesive sheet AS may be replaced by any sheet, film, tape, or the like, such AS a label for information recording, a label for decoration, a protective sheet, a dicing tape, a die bonding film, a die bonding tape, a recording layer forming resin sheet, or the like.
The driving device in the above embodiment may be an electric device such as a rotary motor, a linear motor, a single-axis robot, or a multi-joint robot having joints of two or more axes, an actuator such as a cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or may be an actuator formed by directly or indirectly combining these.
In the above embodiment, when a rotating member such as a roller is used, a driving device for rotationally driving the rotating member may be provided, and the surface of the rotating member or the rotating member itself may be constituted by a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be constituted by a non-deformable member, or other members such as a shaft or a blade that rotates or does not rotate may be used instead of the roller; when the object to be peeled is peeled by using a peeling means such as a peeling plate or a peeling roller, the above-described exemplary method or combination thereof may be used: the member to be peeled off may be a deformable member such as rubber or resin, or may be a non-deformable member; in the case of a member for supporting (holding) a supported member (a held member) by using a supporting (holding) unit, a supporting (holding) member, or the like, a structure for supporting (holding) the supported member by a holding unit such as a mechanical chuck or a chuck cylinder, coulomb force, an adhesive (an adhesive sheet, an adhesive tape), magnetic force, bernoulli adsorption, suction adsorption, a driving device, or the like can be employed; in the case of cutting the cut member by using a cutting means, a cutting member, or the like, or forming a score or a cutting line in the cut member, the above-described exemplary embodiment may be used in place of or in combination with the above-described embodiment: cutting is performed by means of a cutter, a laser cutter, an ion beam, fire, heat energy, water pressure, a heating wire, a jet gas or liquid, or by moving an object to be cut by means of a device constituted by combining appropriate driving means; in the case of using the urging means, the urging means may be constituted by a spring, rubber, resin, driving means, or the like.
Description of the reference numerals
EA sheet sticking device
10. Supply unit
20. Pressing unit
21 Press roller (pressing component)
21A sheet pressing area
30. Front edge detection unit
AS adhesive sheet
ASF front part
ASR rear part
AST front end edge
D1 First direction
D2 Second direction
WK adherend
WK1 is glued.
Claims (4)
1. A sheet sticking device is provided with:
A supply unit that supplies an adhesive sheet; and
A pressing unit having a pressing member for pressing and adhering the adhesive sheet supplied from the supply unit to an adherend surface of the adherend,
The pressing unit performs: a first adhering operation of pressing and adhering a front portion of the adhesive sheet in a feeding direction to the adherend surface by the pressing member by a relative movement of the pressing member and the adherend in a first direction intersecting the adherend surface; and a second adhering operation of pressing and adhering a rear portion of the adhesive sheet other than the front portion to the adherend by the pressing member by a relative movement of the pressing member and the adherend in a second direction along the adherend surface,
The pressing member is provided such that a portion pressed against the adherend surface is deformed to form a sheet pressing region during the first attaching operation,
The supply unit performs a pre-attachment supply operation of supplying the adhesive sheet so that a leading edge in a supply direction of the adhesive sheet falls within the sheet pressing region when the first attachment operation is performed.
2. The sheet sticking apparatus according to claim 1, wherein,
A front edge detection unit capable of detecting the position of the front edge of the adhesive sheet supplied by the pre-attachment supply operation,
The pressing means performs the first bonding operation after the bonding sheet and the adherend are aligned based on the detection result of the leading edge detecting means.
3. The sheet sticking apparatus according to claim 1 or 2, wherein,
The pressing member includes a cylindrical or columnar pressing roller, and when the sheet pressing region is formed, the length of the sheet pressing region in the second direction is 1mm or more and 50% or less of the diameter of the pressing roller.
4. A sheet sticking method is realized by:
a supply step of supplying an adhesive sheet; and
A pressing step of pressing and adhering the adhesive sheet supplied from the supplying step to the adherend surface by a pressing member,
In the pressing step,: a first adhering operation of pressing and adhering a front portion of the adhesive sheet in a feeding direction to the adherend surface by the pressing member by a relative movement of the pressing member and the adherend in a first direction intersecting the adherend surface; and a second adhering operation of pressing and adhering a rear portion of the adhesive sheet other than the front portion to the adherend by the pressing member by a relative movement of the pressing member and the adherend in a second direction along the adherend surface,
The pressing member is provided such that a portion pressed against the adherend surface is deformed to form a sheet pressing region during the first attaching operation,
In the supplying step, a pre-attachment supplying operation of supplying the adhesive sheet is performed so that a leading edge in a supplying direction of the adhesive sheet falls within the sheet pressing region when the first attaching operation is performed.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021183935A JP2023071273A (en) | 2021-11-11 | 2021-11-11 | Sheet sticking device and sheet sticking method |
| JP2021-183935 | 2021-11-11 | ||
| PCT/JP2022/039631 WO2023085074A1 (en) | 2021-11-11 | 2022-10-25 | Sheet affixing device and sheet affixing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117957645A true CN117957645A (en) | 2024-04-30 |
Family
ID=86335729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280061383.6A Pending CN117957645A (en) | 2021-11-11 | 2022-10-25 | Sheet bonding apparatus and sheet bonding method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2023071273A (en) |
| KR (1) | KR20240101540A (en) |
| CN (1) | CN117957645A (en) |
| TW (1) | TW202335158A (en) |
| WO (1) | WO2023085074A1 (en) |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5112682B2 (en) | 2006-12-18 | 2013-01-09 | リンテック株式会社 | Sheet sticking device and sticking method |
| JP5043446B2 (en) * | 2007-01-16 | 2012-10-10 | リンテック株式会社 | Sheet sticking device and sticking method |
| JP2009220856A (en) * | 2008-03-17 | 2009-10-01 | Sato Knowledge & Intellectual Property Institute | Hand labeller |
| JP2010278272A (en) * | 2009-05-29 | 2010-12-09 | Panasonic Corp | Solid-state imaging element and method of manufacturing solid-state imaging element |
| JP5384229B2 (en) * | 2009-07-03 | 2014-01-08 | リンテック株式会社 | Sheet feeding apparatus and feeding method, and sheet pasting apparatus and pasting method |
| JP5827023B2 (en) * | 2011-03-29 | 2015-12-02 | リンテック株式会社 | Sheet sticking device and sticking method |
| JP5269229B2 (en) * | 2012-04-06 | 2013-08-21 | リンテック株式会社 | Sheet sticking device and sticking method |
| JP6177622B2 (en) * | 2013-08-07 | 2017-08-09 | リンテック株式会社 | Sheet sticking device and sheet sticking method |
| JP6539523B2 (en) * | 2015-07-07 | 2019-07-03 | リンテック株式会社 | Sheet feeding apparatus and feeding method |
| JP2018047943A (en) * | 2016-09-23 | 2018-03-29 | 株式会社フェニックス | Label attaching device and control method |
| JP7064868B2 (en) * | 2017-12-26 | 2022-05-11 | リンテック株式会社 | Sheet supply device and sheet supply method, and sheet pasting device and sheet pasting method |
| JP2019127283A (en) * | 2018-01-24 | 2019-08-01 | リンテック株式会社 | Sheet supply device and sheet supply method, and sheet sticking device and sheet sticking method |
| JP7067951B2 (en) * | 2018-02-16 | 2022-05-16 | リンテック株式会社 | Sheet pasting device and sheet pasting method |
| JP2019153641A (en) * | 2018-03-01 | 2019-09-12 | リンテック株式会社 | Sheet feeding apparatus and sheet feeding method, and sheet pasting apparatus and sheet pasting method |
| JP7067963B2 (en) * | 2018-03-01 | 2022-05-16 | リンテック株式会社 | Sheet supply device and sheet supply method, and sheet pasting device and sheet pasting method |
| JP7390124B2 (en) * | 2019-07-22 | 2023-12-01 | リンテック株式会社 | Sheet pasting device and sheet pasting method |
| JP7446071B2 (en) * | 2019-09-20 | 2024-03-08 | リンテック株式会社 | Sheet pasting device and sheet pasting method |
-
2021
- 2021-11-11 JP JP2021183935A patent/JP2023071273A/en active Pending
-
2022
- 2022-10-25 CN CN202280061383.6A patent/CN117957645A/en active Pending
- 2022-10-25 KR KR1020247007459A patent/KR20240101540A/en unknown
- 2022-10-25 WO PCT/JP2022/039631 patent/WO2023085074A1/en active Application Filing
- 2022-11-02 TW TW111141708A patent/TW202335158A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW202335158A (en) | 2023-09-01 |
| WO2023085074A1 (en) | 2023-05-19 |
| KR20240101540A (en) | 2024-07-02 |
| JP2023071273A (en) | 2023-05-23 |
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