CN116449560B - Reverse design method of adiabatic tapered waveguide in optical communication - Google Patents
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
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Abstract
The invention relates to the technical field of integrated photoelectrons, in particular to a reverse design method of an adiabatic tapered waveguide in optical communication. Solves the problems ofThe front waveguide has the problems of large size and low integration level, and the technical scheme is as follows: the method comprises the following steps: s1: determining waveguide input end width W I And output end width W F The method comprises the steps of carrying out a first treatment on the surface of the S2: uniformly segmenting the whole conical waveguide; s3: determining the length L of each segment i The method comprises the steps of carrying out a first treatment on the surface of the S4: forming a complete waveguide; s5: simulating a power transmission efficiency curve; s6: the waveguide length is selected according to the device. The beneficial effects of the invention are as follows: the invention has the advantages of small size, low loss, high transmission efficiency, simple structure and easy processing.
Description
Technical Field
The invention relates to the technical field of integrated photoelectrons, in particular to a reverse design method of an adiabatic tapered waveguide in optical communication.
Background
The photon integrated chip is a great demand for economic development in the field of information technology in China, and is an infrastructure and a core support of a new generation of information industry in the future. Adiabatic tapered waveguides based on adiabatic mode evolution are in the paper due to both wide bandwidth and good manufacturing tolerances: this is shown in Tu-Lu Liang, yongming Tu, xi Chen, YIngan Huang, qiang Bai, yaying Zhao, junchi Zhang, yuthong Yuan, junyu Li, fei Yi, wei Shao, and Seng-Tiong Ho, "Afully numerical methodfor designing efficient adiabatic mode evolution structures (adaptive tip, coupler, splitter, mode converter) applicable to complex geometries," IEEE Journal of Lightwave Technology,2021,39 (17): 5531-5547. Adiabatic tapered waveguides play an important role in photonic integrated chips and can be used as "connectors" to connect various optical functional units. Meanwhile, in order to improve the integration level and realize smaller size so as to meet the development requirement of the next generation information technology, the miniaturized design of the adiabatic tapered waveguide plays a significant role in the future large-scale photon integrated chip.
Because of the smaller loss of the wide waveguide and reduced sensitivity to width variations, it is often desirable to use a wider waveguide for connecting external fibers in a photonic integrated chip. However, the wide waveguide contains a plurality of different modes, so that in order to excite only the required modes, the waveguide width needs to be slowly increased by using an adiabatic tapered waveguide, thereby ensuring that the beam mode is always the required mode, and in the paper: Y.Fu, T.Ye, W.Tang, and T.Chu, "Efficient adiabatic silicon-on-insulator waveguide taper," photon. Res., vol.2, no.3, pp. A41-A44, jun.2014. Adiabatic taper waveguides can be linearly varying, but the linearly varying adiabatic taper waveguide is large in size, not conforming to the direction of higher integration development in photonic integrated chips. Commercial software (e.g., COMSOL) and simulation algorithms (e.g., FDTD) can calculate the transmission efficiency for a given shape of structure, however, for a given transmission efficiency, it is difficult to directly obtain the optimum waveguide shape of the adiabatic device by the simulation algorithm or commercial software, and reverse design cannot be directly achieved.
Disclosure of Invention
The invention aims to provide a reverse design method of an adiabatic tapered waveguide in optical communication. The heat-insulating tapered waveguide structure solves the problems of large waveguide size and low integration level at present and has the advantages of small size, low loss, high transmission efficiency, simple structure and easiness in processing.
In order to achieve the aim of the invention, the invention adopts the technical scheme that: the method comprises the following steps:
s1: determining waveguide input end width W I And output end width W F ;
S2: uniformly segmenting the whole conical waveguide;
s3: determining the length L of each segment i ;
S4: forming a complete waveguide;
s5: simulating a power transmission efficiency curve;
s6: the waveguide length is selected according to the device.
In step S2, the width is determined from W I To W F The interval DeltaW is divided into N segments, and the width of the input end of the ith segment is as follows: w (W) i =W I The width of the output end is: w (W) i+1 =W I +i x aw, where i increases from 1 to N,
wherein N is a positive integer.
In step S3, a quadratic function is used for designing each segment, thereby shortening the device length of the adiabatic taper waveguide. Taking the horizontal direction as the x axis and the vertical direction as the y axis, the quadratic function expression is:
y=Ax 1/2 (1)
wherein: a is a constant, and is determined by the structural parameters to be designed;
width of input end W I =2y I The corresponding abscissa is x I Width W of output end F =2y F The corresponding abscissa is x F Wherein x is F >x I >0 absolute length L TOT =x F -x I Coordinates (x) i ,y i ) And (x) i+1 ,y i+1 ) Substituting equation (1) can result in:
wherein x is F >x i+1 >x i >x I 。
Due to width W i =2y i And width W i+1 =2y i+1 Substituting equations (2) and (3) can result in:
equations (4) and (5) square on both sides, with:
equation (7) minus equation (6) can be obtained:
let W i =W I ,W i+1 =W F An expression for the coefficient a can be obtained:
substituting the expression (9) of the coefficient a into equation (8) can result in the length of each segment:
equation (10) is used for the calculation of the individual segment lengths in the present invention.
In step S4, according to the input end width W of each segment i And output end width W i+1 Each segment L obtained in step S3 i Each segment is constructed and then all segments are spliced and recombined to form the complete waveguide shape.
Step S5 obtains a power transmission efficiency curve of the whole structure through simulation by a Finite-difference time-domain (FDTD) method or an eigenmode expansion (Eigenmode Expansion, EME) method, and the curve gives a length corresponding to the power transmission efficiency, and the length can be used for practical application.
FDTD is one of the most widely applied time domain numerical methods in the field of computational electromagnetics, EME calculates Maxwell's equations in the frequency domain, calculation accuracy is high and fast, devices are segmented along the propagation direction, the eigenmodes of each segment are calculated, when the lengths of the devices are changed, recalculation is not needed, and time is less when the devices are scanned.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention derives a formula for reverse design of adiabatic tapered waveguideThe optimum waveguide shape of the adiabatic tapered waveguide can be directly obtained by the formula, and the designed structure has the advantage of small size compared with the design in the prior art.
2. When it is desired to achieve 95% power transfer efficiency, the length required for the device of the present invention is 36 μm, whereas the length required for the prior art is 54 μm; when it is desired to achieve 99% power transfer efficiency, the device of the present invention requires a length of 78 μm, whereas the prior art requires a length of 109 μm. The size of the structural device designed by the design method is far smaller than that of the prior art. Compared with the prior art, the photonic integrated chip has remarkable progress and important value and application prospect for achieving the aim of higher integration level.
3. The invention derives a formula for reverse design of adiabatic tapered waveguideThe application range is wide, and the method is suitable for the design of complex adiabatic tapered waveguide structures.
4. The invention derives a formula for reverse design of adiabatic tapered waveguideThe designed device has simple structure and is easy to process.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention.
FIG. 1 is a schematic diagram of the input end structure of an adiabatic tapered waveguide of the present invention.
FIG. 2 is a schematic diagram of the output end structure of the adiabatic tapered waveguide of the present invention.
FIG. 3 is a schematic diagram of the adiabatic tapered waveguide reverse design of the present invention.
Fig. 4 is a graph comparing the power transmission efficiency of the device structure designed by the present invention with the prior art.
Wherein, the reference numerals are as follows: 1-silicon core and 2-cladding.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. Of course, the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
Example 1
A method of reverse engineering an adiabatic tapered waveguide in optical communications, comprising the steps of:
s1: determining waveguide input end width W I And output end width W F ;
S2: uniformly segmenting the whole conical waveguide;
s3: determining the length L of each segment i ;
S4: forming a complete waveguide;
s5: simulating a power transmission efficiency curve;
s6: the waveguide length is selected according to the device.
In step S2, the width is determined from W I To W F The interval DeltaW is divided into N segments, and the width of the input end of the ith segment is as follows: w (W) i =W I The width of the output end is: w (W) i+1 =W I +i x aw, where i increases from 1 to N,
wherein N is a positive integer.
In step S3, a quadratic function is used for designing each segment, thereby shortening the device length of the adiabatic taper waveguide. Taking the horizontal direction as the x axis and the vertical direction as the y axis, the quadratic function expression is:
y=Ax 1/2 (1)
wherein: a is a constant, and is determined by the structural parameters to be designed;
width of input end W I =2y I The corresponding abscissa is x I Width W of output end F =2y F The corresponding abscissa is x F Wherein x is F >x I >0 absolute length L TOT =x F -x I Coordinates (x) i ,y i ) And (x) i+1 ,y i+1 ) Substituting equation (1) can result in:
wherein x is F >x i+1 >x i >x I 。
Due to width W i =2y i And width W i+1 =2y i+1 Substituting equations (2) and (3) can result in:
equations (4) and (5) square on both sides, with:
equation (7) minus equation (6) can be obtained:
let W i =W I ,W i+1 =W F An expression for the coefficient a can be obtained:
substituting the expression (9) of the coefficient a into equation (8) can result in the length of each segment:
equation (10) is used for the calculation of the individual segment lengths in the present invention.
In step S4, according to the input end width W of each segment i And output end width W i+1 Each segment L obtained in step S3 i Each segment is constructed and then all segments are spliced and recombined to form the complete waveguide shape.
Step S5 obtains a power transmission efficiency curve of the whole structure through simulation by a Finite-difference time-domain (FDTD) method or an eigenmode expansion (Eigenmode Expansion, EME) method, and the curve gives a length corresponding to the power transmission efficiency, and the length can be used for practical application.
FDTD is one of the most widely applied time domain numerical methods in the field of computational electromagnetics, EME calculates Maxwell's equations in the frequency domain, calculation accuracy is high and fast, devices are segmented along the propagation direction, the eigenmodes of each segment are calculated, when the lengths of the devices are changed, recalculation is not needed, and time is less when the devices are scanned.
Example 2
Based on example 1, step 1: determining waveguide input end width W I And output end width W F 。
The cross section of the adiabatic taper waveguide is shown in the figure1, the structure comprises a silicon core 1 and a cladding 2, wherein the refractive index n of the silicon core 1 Si 3.455 it has a thickness h and a width W from the left end W L To the right end W R As shown in fig. 2. The material of the cladding 2 is silicon dioxide, and the refractive index n SiO2 =1.445, thickness h 0 Width W 0 . The incident beam wavelength was set to 1.55 μm.
Width W of silicon dioxide 0 =10μm, thickness h 0 =1.5 μm, thickness of silicon h=300 nm, width of silicon from W I Increase of =2μm to W F =8μm。
Step 2: the present example employs uniform segmentation to divide the width from W I =2μm to W F The interval Δw=0.1 μm of=8 μm is divided into n=60 segments. The width of the input end and the output end of the ith segment is W respectively i =[2+(i-1)×0.1]μm and W i+1 = (2+i×0.1) μm, where i increases from 1 to n=60.
Step 3: for each segment, according to the equationObtaining the length L of each segment i As shown in table 1.
TABLE 1 Length L of individual fragments i
Step 4: according to the width W of the input end of each segment i And output end width W i+1 And step S3, constructing each segment according to the length of each segment obtained in the step, and then splicing and recombining all the segments to form a complete waveguide shape.
Step 5: the power transmission efficiency curve of the whole structure is obtained through simulation by a Finite-difference time-domain (FDTD) method or an eigenmode expansion (Eigenmode Expansion, EME) method, as shown in fig. 4. The figure shows the length of the power transfer efficiency versus which can be used for practical applications.
Step 6: the length of the device to be used is selected according to the actual application requirements.
As shown in fig. 4, when it is desired to achieve 95% power transmission efficiency, the length required for the device of the present invention is 36 μm, and the length required for the linear connection is 54 μm; when it is desired to achieve 99% power transfer efficiency, the device of the present invention requires a length of 78 μm, while the linear connection requires a length of 109 μm. The size of the structural device designed by the design method is far smaller than that of the linear connection. It is well known that the smaller the device size, the more device structures can be integrated into the chip, and the more functional the product is produced. Therefore, the reverse design method plays an important role in miniaturization design of devices in the photon integrated chip.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (1)
1. A method of reverse engineering an adiabatic tapered waveguide in optical communications, the method comprising the steps of:
s1: determining waveguide input end width W I And output end width W F ;
S2: uniformly segmenting the whole conical waveguide;
s3: determining the length L of each segment i ;
S4: forming a complete waveguide;
s5: simulating a power transmission efficiency curve;
s6: selecting a waveguide length according to the device;
in the step S2, the width is set from W I To W F The interval DeltaW is divided into N segments, and the width of the input end of the ith segment is as follows: w (W) i =W I The width of the output end is: w (W) i+1 =W I +i×Δw, where i increases from 1 to N, where N is a positive integer;
in the step S3, for each segment, a quadratic function is used for designing, and the horizontal direction is taken as the x axis, the vertical direction is taken as the y axis, and the quadratic function expression is:
y=Ax 1/2 (1)
wherein: a is a constant, and is determined by the structural parameters to be designed;
width of input end W I =2y I The corresponding abscissa is x I Width W of output end F =2y F The corresponding abscissa is x F Wherein x is F >x I Absolute length L > 0 TOT =x F -x I Coordinates (x) i y i ) And (x) i+1 ,y i+1 ) Substituting equation (1) can result in:
wherein x is F >x i+1 >x i >x I ;
Due to width W i =2y i And width W i+1 =2y i+1 Substituting equations (2) and (3) can result in:
equations (4) and (5) square on both sides, with:
equation (7) minus equation (6) can be obtained:
let W i =W I ,W i+1 =W F An expression for the coefficient a can be obtained:
substituting the expression (9) of the coefficient a into equation (8) can result in the length of each segment:
equation (10) is used for calculation of the respective segment lengths in the present invention;
in the step S4, according to the input end width W of each segment i And output end width W i+1 Each segment L obtained in step S3 i Constructing each segment, and then splicing and recombining all the segments to form a complete waveguide shape;
and step S5, obtaining a power transmission efficiency curve of the whole structure through a time domain finite difference method or an eigenmode expansion method in a simulation mode, wherein the curve gives the length corresponding to the power transmission efficiency.
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Publication number | Priority date | Publication date | Assignee | Title |
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US20040037506A1 (en) * | 2002-05-25 | 2004-02-26 | Bookham Technology, Plc | Semiconductor optical waveguide device |
CN114077773A (en) * | 2020-08-19 | 2022-02-22 | 中兴光电子技术有限公司 | Adiabatic coupling waveguide section design method of adiabatic coupler, and apparatus and equipment thereof |
CN114721176A (en) * | 2022-03-10 | 2022-07-08 | 浙江大学 | Polarization controller based on-chip mode conversion |
CN115826139A (en) * | 2022-11-24 | 2023-03-21 | 哈尔滨工业大学 | Ultra-compact ultra-wideband waveguide mode converter based on longitudinal refractive index modulation |
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US20040037506A1 (en) * | 2002-05-25 | 2004-02-26 | Bookham Technology, Plc | Semiconductor optical waveguide device |
CN114077773A (en) * | 2020-08-19 | 2022-02-22 | 中兴光电子技术有限公司 | Adiabatic coupling waveguide section design method of adiabatic coupler, and apparatus and equipment thereof |
CN114721176A (en) * | 2022-03-10 | 2022-07-08 | 浙江大学 | Polarization controller based on-chip mode conversion |
CN115826139A (en) * | 2022-11-24 | 2023-03-21 | 哈尔滨工业大学 | Ultra-compact ultra-wideband waveguide mode converter based on longitudinal refractive index modulation |
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