CN115432657A - Filling device for electronic-grade sulfuric acid tank car and using method - Google Patents
Filling device for electronic-grade sulfuric acid tank car and using method Download PDFInfo
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- CN115432657A CN115432657A CN202211191543.7A CN202211191543A CN115432657A CN 115432657 A CN115432657 A CN 115432657A CN 202211191543 A CN202211191543 A CN 202211191543A CN 115432657 A CN115432657 A CN 115432657A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/76—Arrangements of devices for purifying liquids to be transferred, e.g. of filters, of air or water separators
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- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
Abstract
An electronic-grade sulfuric acid tank car filling device and a using method thereof are disclosed, the device comprises a tank car, a filling platform, a residual liquid collecting tank and a liquid phase particle counter, the top of the tank car is communicated with a gas pipe and a liquid conveying pipe, the gas pipe is communicated with a gas inlet pipe in the filling platform, the liquid conveying pipe is communicated with a liquid inlet pipe in the filling platform, the gas pipe and the gas inlet pipe are communicated with an exhaust pipe, the liquid phase particle counter is communicated with the liquid inlet pipe through a detection pipe, a second material return pipe is communicated with the detection pipe, the other end of the second material return pipe is communicated with the residual liquid collecting tank, and a first material return pipe is communicated between the residual liquid collecting tank and the liquid phase particle counter; the invention presses the material in the liquid end pipeline out to the residual liquid collecting tank by means of back pressure instead of blowing the material in the liquid end pipeline to the tank car by nitrogen, thereby effectively reducing the particle size content of the electronic-grade sulfuric acid in the tank car.
Description
Technical Field
The invention belongs to the field of electronic chemical production devices, and particularly relates to an electronic-grade sulfuric acid tank wagon filling device and a using method thereof.
Background
During semiconductor manufacturing, silicon wafers are often contaminated with various impurities that can lead to a reduction in the yield of the silicon wafers. To achieve high quality, high yield integrated circuit chips, the silicon wafer must be kept clean at all times. Insoluble fixed particles or metal ions on a silicon wafer may conduct electricity between fine circuits to short them, and several metal ions or dusts are enough to scrap an IC having a small line width. When heavy metal impurities such as Cu, fe, cr, ag and the like are adhered to the surface of the silicon wafer, the withstand voltage of a P-N junction is reduced, and the IC performance is influenced. Impurity ions such as boron, phosphorus, arsenic and the like can influence the diffusion effect of the diffusant; dust particles can cause photoetching defects, uneven oxide layers and influence the plate making quality and the plasma etching process.
In the production process of electronic-grade sulfuric acid, the filling process has great influence on the purity and cleanliness of finished products. Because a plurality of raw material liquids share one filling system, the last material has few parts remained in the filling system in the filling process, when electronic-grade sulfuric acid is filled, the upper-grade material is brought into a tank car, although the mixed material is relatively less, the final product quality of the electronic-grade sulfuric acid is greatly influenced, and a specific scheme for treating the problem is not provided at present.
Disclosure of Invention
In view of the technical problems in the prior art, the invention provides the filling device and the use method of the electronic-grade sulfuric acid tank wagon.
In order to solve the technical problems, the invention adopts the following technical scheme to realize:
the utility model provides an electronic level sulphuric acid tank wagon filling device, including tank wagon, filling platform, raffinate collection tank and liquid phase particle counter, the top intercommunication of tank wagon has gas-supply pipe and transfer line, the gas-supply pipe is linked together with the intake pipe in the filling platform, and the transfer line is linked together with the feed liquor pipe in the filling platform, and gas-supply pipe and intake pipe are linked together with the blast pipe, and liquid phase particle counter is linked together through detecting tube and feed liquor pipe, the intercommunication has second feed back pipe on the detecting tube, and the other end intercommunication raffinate collection tank of second feed back pipe, the intercommunication has first feed back pipe between raffinate collection tank and the liquid phase particle counter.
In the preferred scheme, an air inlet valve is arranged on an air inlet pipe, the air inlet pipe is connected with an air conveying pipe through a filling table air end quick connector, a liquid inlet valve is arranged on a liquid inlet pipe, and the liquid inlet pipe is connected with an infusion pipe through a filling table liquid end quick connector.
In the preferred scheme, a communicating pipe is communicated between the air inlet pipe and the liquid inlet pipe, and a communicating valve is arranged on the communicating pipe.
In the preferred scheme, a gas end ball valve and a tank car gas end quick connector are arranged on a gas pipe at the top of the tank car; a liquid end ball valve and a tank car liquid end quick connector are arranged on a liquid conveying pipe at the top of the tank car.
In the preferred scheme, the exhaust pipe is communicated with the air inlet pipe and the exhaust pipe through a filling platform gas end quick connector, and the exhaust pipe is provided with an exhaust valve.
In the preferred scheme, a flow meter and a detection valve are arranged on the detection pipe, and a return valve is arranged on the return pipe.
An application method of an electronic-grade sulfuric acid tank wagon filling device comprises the following steps when the device is used:
step1: opening a liquid inlet valve and a liquid end ball valve, and simultaneously opening a gas end ball valve and an exhaust valve, wherein liquid is filled into the tank car through a liquid inlet pipe and a liquid conveying pipe, and gas pressure in the tank car is discharged to an exhaust pipe through a gas conveying pipe;
step2: after filling, closing the liquid inlet valve and the exhaust valve, opening the air inlet valve, the reflux valve and the communicating valve, injecting high-purity nitrogen through the air inlet pipe, pressurizing the pipeline, and blowing residual liquid in the pipeline to a residual liquid collecting tank;
step3: after purging is finished, closing the reflux valve, opening the detection valve, and detecting the residual granularity in the pipe through a liquid phase particle counter;
step4: and after the detection is qualified, closing the air inlet valve and the communication valve, closing the air end ball valve and the liquid end ball valve at the top of the tank car, and detaching the tank car air end quick connector and the tank car liquid end quick connector to finish the filling work of the tank car.
In a preferable scheme, in Step1, the filling time of the tank wagon is controlled within 15-30 min, and the counter pressure existing in the tank wagon is controlled within 0.1-0.2 MPa.
In a preferable scheme, in Step3, the particles in the pipe pass through a flow meter before entering a liquid phase particle counter, and the flow value of the flow meter is controlled within 10 ml/min.
In the preferable scheme, in Step3, when a liquid phase particle counter detects that a numerical value Q is less than 600, the granularity of the residual liquid in the pipe is proved to meet the requirement; when the liquid phase particle counter detects that the numerical values are 600-Q-1000, the granularity of the residual liquid in the pipe is proved to basically meet the requirement; when the liquid phase particle counter detects that the value Q is greater than 1000, the granularity of the residual liquid in the pipe is proved to be not satisfactory.
This patent can reach following beneficial effect:
1. according to the invention, the pipeline is purged by adopting high-purity nitrogen, and the liquid remained in the pipeline is blown into the residual liquid collecting tank for collection, so that the residual material in the pipeline is replaced by the nitrogen and does not enter the tank car, and the purity of the electronic-grade sulfuric acid product is ensured;
2. the liquid particle counter is arranged, so that the particle size of the residual liquid in the inner pipe of the system can be accurately detected, and specific measures can be taken in time according to the values of different particle sizes of the residual liquid, so that the cleanness degree of the inner pipe is further ensured.
Drawings
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
FIG. 1 is a schematic diagram of the system of the present invention;
FIG. 2 is a schematic diagram of a filling station portion system of the present invention;
FIG. 3 is a schematic diagram of a system of the invention tank car.
In the figure: tank wagon 1, filling platform 2, liquid phase particle counter 3, raffinate holding vessel 4, intake pipe 5, feed liquor pipe 6, gas-supply pipe 7, transfer line 8, first feed back pipe 9, second feed back pipe 10, flowmeter 11, test tube 12, blast pipe 13, communicating pipe 14, communicating valve 15, feed liquor valve 16, discharge valve 17, filling platform gas end quick-operation joint 18, admission valve 19, filling platform liquid end quick-operation joint 20, test valve 21, return valve 22, gas end ball valve 22, tank wagon gas end quick-operation joint 24, liquid end ball valve 25, tank wagon liquid end quick-operation joint 26.
Detailed Description
As shown in fig. 1, an electronic-grade sulfuric acid tank wagon filling device comprises a tank wagon 1, a filling platform 2, a residual liquid collecting tank 4 and a liquid phase particle counter 3, wherein the top of the tank wagon 1 is communicated with a gas pipe 7 and a liquid pipe 8, the gas pipe 7 is communicated with a gas inlet pipe 5 in the filling platform 2, the liquid pipe 8 is communicated with a liquid inlet pipe 6 in the filling platform 2, the gas pipe 7 and the gas inlet pipe 5 are communicated with an exhaust pipe 13, a filling solution is filled through the liquid pipe 8 and the liquid inlet pipe 6 during operation, and when pipeline purging is needed, purging gas is injected through the gas inlet pipe 5 and the gas pipe 7;
the liquid phase particle counter 3 is communicated with the liquid inlet pipe 6 through a detection pipe 12, a second return pipe 10 is communicated with the detection pipe 12, the other end of the second return pipe 10 is communicated with the residual liquid collecting tank 4, and a first return pipe 9 is communicated between the residual liquid collecting tank 4 and the liquid phase particle counter 3; the residual liquid in the swept tank can be blown into the residual liquid collecting tank 4, and the liquid phase particle counter 3 is used for further detecting the granularity in the system pipe and making corresponding treatment measures in time according to the detection result.
In a preferred scheme, as shown in fig. 2, an air inlet valve 19 is arranged on an air inlet pipe 5, the air inlet pipe 5 is connected with an air conveying pipe 7 through a filling table air end quick connector 18, a liquid inlet valve 16 is arranged on a liquid inlet pipe 6, and the liquid inlet pipe 6 is connected with an infusion pipe 8 through a filling table liquid end quick connector 20; the ability to quickly remove the filling station 2 by the filling station gas end quick connector 18 and the filling station liquid end quick connector 20 improves the operability of the system.
The preferable scheme is as shown in fig. 2, a communicating pipe 14 is communicated between the air inlet pipe 5 and the liquid inlet pipe 6, a communicating valve 15 is arranged on the communicating pipe 14, when the filling system needs to be purged, the gas end and the liquid end of the system can be communicated with each other only by opening the communicating pipe 14, and then the purging work is carried out on the gas end pipeline and the liquid end pipeline simultaneously.
The preferable proposal is as shown in figure 3, a gas end ball valve 23 and a tank car gas end quick connector 24 are arranged on a gas pipe 7 at the top of the tank car 1; a liquid end ball valve 25 and a tank car liquid end quick connector 26 are arranged on the liquid conveying pipe 8 at the top of the tank car 1, and pipelines can be quickly assembled and disassembled at the tank car end through a tank car gas end quick connector 24 and a tank car liquid end quick connector 26, so that the operability of the device is improved.
The preferred scheme is as shown in figure 1, the exhaust pipe 13 is communicated with the air inlet pipe 5 and the exhaust pipe 13 through a filling platform gas end quick connector 18, the exhaust pipe 13 is provided with an exhaust valve 17, when the tank wagon 1 is filled, the air pressure in the tank wagon 1 can be discharged through the exhaust pipe 13, and the filling process is guaranteed to be totally closed, and meanwhile, the filling can be carried out smoothly.
In a preferred embodiment, as shown in FIG. 1, a flow meter 11 and a check valve 21 are provided in the check pipe 12, and a return valve 22 is provided in the return pipe.
Example 1
The first step is as follows: opening a liquid inlet valve 16 and a liquid end ball valve 25, simultaneously opening a gas end ball valve 23 and an exhaust valve 17, filling liquid into the tank wagon 1 through a liquid inlet pipe 6 and a liquid conveying pipe 8, discharging gas pressure in the tank wagon 1 to an exhaust pipe 13 through a gas conveying pipe 7, wherein the filling time is 20min, and the reverse pressure existing in the tank wagon 1 is 0.16MP.
The second step is that: after filling, the liquid inlet valve 16 and the exhaust valve 17 are closed, the air inlet valve 19, the reflux valve 22 and the communication valve 15 are opened, high-purity nitrogen is injected from the air inlet pipe 5, the pipeline is pressurized, and residual liquid in the pipeline is blown to the residual liquid collecting tank 4.
The third step: after purging is finished, closing the reflux valve 22, opening the detection valve 21, and detecting the residual granularity in the pipe through the liquid phase particle counter 3; the particles in the tube need to pass through a flow meter 11 before entering a liquid phase particle counter 3, and the numerical value of the flow meter 11 is 8ml/min;
when the liquid phase particle counter 3 detects that the value Q is less than 600, the granularity of the residual liquid in the pipe is proved to meet the requirement;
when a liquid phase particle counter (3) detects that the numerical values of 600-Q-Ap-1000, the granularity of the residual liquid in the pipe is basically met;
at the moment, the device is firstly kept still for one day, then acid is discharged to a residual liquid collecting tank through 14 to be replaced for 1 to 3min, if the result Q is less than 600, if the replacement is continuously carried out for 3 times or the effect cannot be achieved, the acid is judged to be not circularly filtered, the acid is continuously circulated for 12 hours, and the detection is carried out;
when the liquid phase particle counter (3) detects that the value Q is more than 1000, the granularity of the residual liquid in the pipe is proved not to meet the requirement;
at the moment, the device is firstly kept still for one day, then acid is discharged to a residual liquid collecting tank through 14 to perform replacement for 1 to 3min, and if the result Q is checked to be less than 600, if the effect cannot be achieved after 3 times of continuous replacement, the acid is judged to be not circularly filtered, and the acid is continuously circulated for 12 hours to be detected.
The fourth step: and after the detection is qualified, closing the air inlet valve 19 and the communication valve 15, closing the air end ball valve 23 and the liquid end ball valve 25 at the top of the tank car 1, and detaching the tank car air end quick connector 24 and the tank car liquid end quick connector 26 to finish the filling work of the tank car 1.
The above-described embodiments are merely preferred embodiments of the present invention, and should not be construed as limiting the present invention, and the technical features described in the present invention can be combined with each other without conflicting with each other. The protection scope of the present invention is defined by the claims, and includes equivalents of technical features of the claims. I.e., equivalent alterations and modifications within the scope hereof, are also intended to be within the scope of this invention.
Claims (10)
1. The utility model provides an electronic grade sulphuric acid tank wagon filling device, includes tank wagon (1), filling platform (2), raffinate holding vessel (4) and liquid phase particle counter (3), its characterized in that: the top intercommunication of tank wagon (1) has gas-supply pipe (7) and transfer line (8), gas-supply pipe (7) are linked together with intake pipe (5) in filling platform (2), and transfer line (8) are linked together with feed liquor pipe (6) in filling platform (2), and gas-supply pipe (7) and intake pipe (5) are linked together with blast pipe (13), and liquid phase particle counter (3) are linked together through detecting tube (12) and feed liquor pipe (6), the intercommunication has second feed back pipe (10) on detecting tube (12), and the other end intercommunication raffinate collecting vessel (4) of second feed back pipe (10), and the intercommunication has first feed back pipe (9) between raffinate collecting vessel (4) and liquid phase particle counter (3).
2. The electronic-grade sulfuric acid tank wagon filling device according to claim 1, characterized in that: an air inlet valve (19) is arranged on the air inlet pipe (5), the air inlet pipe (5) is connected with an air conveying pipe (7) through a filling table air end quick joint (18), an air inlet valve (16) is arranged on the air inlet pipe (6), and the air inlet pipe (6) is connected with an infusion pipe (8) through a filling table liquid end quick joint (20).
3. The electronic-grade sulfuric acid tank wagon filling device according to claim 2, characterized in that: a communicating pipe (14) is communicated between the air inlet pipe (5) and the liquid inlet pipe (6), and a communicating valve (15) is arranged on the communicating pipe (14).
4. The electronic grade sulfuric acid tank car filling device according to claim 1, characterized in that: a gas end ball valve (23) and a tank car gas end quick connector (24) are arranged on a gas pipe (7) at the top of the tank car (1); a liquid end ball valve (25) and a tank car liquid end quick connector (26) are arranged on a liquid conveying pipe (8) at the top of the tank car (1).
5. The electronic-grade sulfuric acid tank wagon filling device according to claim 1, characterized in that: the exhaust pipe (13) is communicated with the air inlet pipe (5) and the exhaust pipe (13) through a filling platform gas end quick connector (18), and an exhaust valve (17) is arranged on the exhaust pipe (13).
6. The electronic-grade sulfuric acid tank wagon filling device according to claim 1, characterized in that: the detection pipe (12) is provided with a flow meter (11) and a detection valve (21), and the return pipe is provided with a return valve (22).
7. The use method of the electronic-grade sulfuric acid tank wagon filling device is characterized by comprising the following steps of:
step1: opening a liquid inlet valve (16) and a liquid end ball valve (25), simultaneously opening a gas end ball valve (23) and an exhaust valve (17), pouring liquid into the tank wagon (1) through a liquid inlet pipe (6) and a liquid conveying pipe (8), and discharging gas pressure in the tank wagon (1) to an exhaust pipe (13) through a gas conveying pipe (7);
step2: after filling, closing the liquid inlet valve (16) and the exhaust valve (17), opening the air inlet valve (19), the reflux valve (22) and the communication valve (15), injecting high-purity nitrogen from the air inlet pipe (5), pressurizing the pipeline, and blowing residual liquid in the pipeline to the residual liquid collecting tank (4);
step3: after purging is finished, closing the reflux valve (22), opening the detection valve (21), and detecting the residual granularity in the pipe through a liquid phase particle counter (3);
step4: and after the detection is qualified, closing the air inlet valve (19) and the communication valve (15), closing the air end ball valve (23) and the liquid end ball valve (25) at the top of the tank car (1), and detaching the tank car air end quick coupling (24) and the tank car liquid end quick coupling (26) to complete the filling work of the tank car (1).
8. The use method of the electronic grade sulfuric acid tank wagon filling device according to claim 7, characterized in that: in Step1, the filling time of the tank wagon (1) is controlled within 15-30 min, and the counter pressure existing in the tank wagon (1) is controlled within 0.1-0.2 MPa.
9. The use method of the electronic grade sulfuric acid tank wagon filling device according to claim 7, characterized in that: in Step3, the particles in the pipe need to pass through a flow meter (11) before entering a liquid phase particle counter (3), and the flow value of the flow meter (11) is controlled within 10 ml/min.
10. The use method of the electronic-grade sulfuric acid tank wagon filling device according to claim 7, characterized in that: in Step3, when a liquid phase particle counter (3) detects that a value Q is less than 600, the granularity of the residual liquid in the pipe is proved to meet the requirement;
when a liquid phase particle counter (3) detects that the numerical values of 600-Q-sum 1000 are detected, the granularity of residual liquid in the pipe is proved to basically meet the requirement;
when the liquid phase particle counter (3) detects that the value Q is greater than 1000, the granularity of the residual liquid in the pipe is proved to be not satisfactory.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211191543.7A CN115432657B (en) | 2022-09-28 | 2022-09-28 | Filling device for electronic-grade sulfuric acid tank car and using method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211191543.7A CN115432657B (en) | 2022-09-28 | 2022-09-28 | Filling device for electronic-grade sulfuric acid tank car and using method |
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| CN115432657A true CN115432657A (en) | 2022-12-06 |
| CN115432657B CN115432657B (en) | 2023-03-31 |
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| CN202211191543.7A Active CN115432657B (en) | 2022-09-28 | 2022-09-28 | Filling device for electronic-grade sulfuric acid tank car and using method |
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Citations (8)
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| JPH0940092A (en) * | 1995-07-20 | 1997-02-10 | Fuji Photo Film Co Ltd | Recovery of residual liquid in piping |
| CN1256241A (en) * | 1998-09-22 | 2000-06-14 | 液体空气乔治洛德方法利用和研究有限公司 | Method and system for distributing liquid chemicals |
| JP2009137590A (en) * | 2007-12-03 | 2009-06-25 | Kanto Chem Co Inc | Method for counting opening and closing of valve in automatic liquid feeding apparatus |
| CN203998927U (en) * | 2014-06-26 | 2014-12-10 | 江阴江化微电子材料股份有限公司 | The tank car device of unloading |
| CN206384822U (en) * | 2017-01-09 | 2017-08-08 | 苏州瑞环化工有限公司 | A kind of tank car automatic filling equipment |
| CN109071204A (en) * | 2016-04-19 | 2018-12-21 | 默克专利有限公司 | With the method and filling device of fluid filling shipping container |
| CN217230217U (en) * | 2022-01-26 | 2022-08-19 | 江阴江化微电子材料股份有限公司 | Automatic unloading and filling device of outdoor tank car |
| CN217377299U (en) * | 2021-12-30 | 2022-09-06 | 江苏达诺尔科技股份有限公司 | Ultrapure alcohol tank car filling post-treatment system |
-
2022
- 2022-09-28 CN CN202211191543.7A patent/CN115432657B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0940092A (en) * | 1995-07-20 | 1997-02-10 | Fuji Photo Film Co Ltd | Recovery of residual liquid in piping |
| CN1256241A (en) * | 1998-09-22 | 2000-06-14 | 液体空气乔治洛德方法利用和研究有限公司 | Method and system for distributing liquid chemicals |
| JP2009137590A (en) * | 2007-12-03 | 2009-06-25 | Kanto Chem Co Inc | Method for counting opening and closing of valve in automatic liquid feeding apparatus |
| CN203998927U (en) * | 2014-06-26 | 2014-12-10 | 江阴江化微电子材料股份有限公司 | The tank car device of unloading |
| CN109071204A (en) * | 2016-04-19 | 2018-12-21 | 默克专利有限公司 | With the method and filling device of fluid filling shipping container |
| US20190127211A1 (en) * | 2016-04-19 | 2019-05-02 | Merck Patent Gmbh | Method and filling device for filling a transport container with a fluid |
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| CN217377299U (en) * | 2021-12-30 | 2022-09-06 | 江苏达诺尔科技股份有限公司 | Ultrapure alcohol tank car filling post-treatment system |
| CN217230217U (en) * | 2022-01-26 | 2022-08-19 | 江阴江化微电子材料股份有限公司 | Automatic unloading and filling device of outdoor tank car |
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