CN115008011B - Laser welding device integrated with self-adaptive OCT - Google Patents

Laser welding device integrated with self-adaptive OCT Download PDF

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CN115008011B
CN115008011B CN202210818410.1A CN202210818410A CN115008011B CN 115008011 B CN115008011 B CN 115008011B CN 202210818410 A CN202210818410 A CN 202210818410A CN 115008011 B CN115008011 B CN 115008011B
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laser welding
module
oct
adaptive
sample
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CN115008011A (en
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李鹏
俞晨阳
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a laser welding device integrated with self-adaptive OCT. Comprises an OCT structure imaging light path, the device is used for real-time guiding before laser welding and timely detecting and evaluating the welding quality of a welding surface and a welding line position after laser welding; comprises an electrically controllable self-adaptive optical module, wherein the OCT beam spot is shaped before entering a laser welding module; the device comprises a visual imaging module, a laser welding module and a control module, wherein the visual imaging module is used for amplifying and acquiring surface information of a laser welding sample in real time; the device comprises a laser welding module, wherein a two-dimensional vibrating mirror is utilized to enable high-power laser to finish controllable large-area two-dimensional welding on the surface of a sample. According to the invention, under different use scenes of laser welding, particularly the welding scenes of a long-focus field lens, the diameter of a light spot before the OCT sample arm enters the laser welding module is adjusted through the self-adaptive module, so that the numerical aperture of the light spot is effectively improved, the transverse resolution of an OCT system under different welding scenes is improved, the accuracy of guiding before laser welding is improved, and the welding quality evaluation effectiveness after laser welding is improved.

Description

Laser welding device integrated with self-adaptive OCT
Technical Field
The invention relates to a laser welding device in the technical field of laser welding and self-adaptive OCT imaging, in particular to a laser welding device integrating self-adaptive OCT.
Background
With the rapid development of high-power laser, the laser has been widely used in manufacturing industry, automobile industry, microelectronics industry, etc. by virtue of its higher intensity, smaller heat affected zone, higher precision, smaller deformation and compatibility with different metals, and of course, the market demand has also put higher demands on welding precision, and quality detection of laser welding has become particularly important.
OCT is used as a non-contact and nondestructive optical industrial detection mode, and the unique depth imaging capability of OCT can be used for monitoring the depth position of laser welding in real time, so that the OCT plays an important role in quality detection after laser welding. However, in the conventional OCT integrated laser welding apparatus, considering the influence of spatter and laser pattern generated during welding, the laser welding is conducted with a larger focal length and thicker field lens, resulting in poor lateral resolution in OCT imaging, and larger dispersion introduced by the field lens, which also results in a decrease in axial resolution in OCT imaging, which may have an error in OCT-guided laser welding and quality evaluation after welding.
Disclosure of Invention
In order to solve the defects in the prior art, the invention provides a laser welding device integrated with a self-adaptive OCT, which solves the problems of low OCT transverse resolution and large chromatic dispersion of axial resolution in different laser welding scenes and is particularly suitable for laser welding application of long-focal-length field lenses.
The above object of the present invention is achieved by the following technical solutions:
the invention comprises an OCT imaging module, a self-adaptive optical module, a visual imaging module, a laser welding module and an optical coupling module; the sample arm beam emitted from the OCT imaging module sequentially passes through the self-adaptive optical module, the optical coupling module and the laser welding module and then enters the surface of the sample to be welded, and the sample arm beam is reflected on the surface of the sample to be welded and then returns to the OCT imaging module along an original light path for OCT scanning imaging; the visual imaging light beam emitted by the visual imaging module is incident to the surface of the sample to be welded after passing through the optical coupling module and the laser welding module, and the visual imaging light beam is reflected on the surface of the sample to be welded and then returns to the visual imaging module along the original light path for visual imaging.
The adaptive optics module includes a beam expanding structure using a dual lens or multiple lenses.
The self-adaptive optical module comprises a focusing lens and an electric control self-adaptive optical lens; the sample arm beam emitted from the OCT imaging module sequentially passes through the focusing lens and the electric control self-adaptive optical lens along the optical axis and then enters the optical coupling module.
The laser welding module comprises a laser light source, a dichroic mirror, a laser welding galvanometer and a laser welding field lens;
the beam emitted from the optical coupling module is incident to the dichroic mirror, transmitted by the dichroic mirror, then incident to the laser welding vibrating mirror, reflected by the laser welding vibrating mirror, incident to the laser welding field lens, transmitted by the laser welding field lens and converged on the surface of the sample to be welded; the laser of the laser source is incident to the dichroic mirror, reflected by the dichroic mirror, then incident to the laser welding vibrating mirror, reflected by the laser welding vibrating mirror, transmitted by the laser welding field mirror, incident to the surface of the sample to be welded and welded, and the welding position of the sample to be welded is changed by adjusting the laser welding vibrating mirror.
The OCT imaging module comprises a broadband light source, an optical fiber coupler, a polarization controller, a reference arm collimator, a reference arm focusing lens, a reference arm reflecting mirror, a sample arm collimator, an OCT scanning device, a spectrometer collimator, a spectrometer reflection type grating, a spectrometer focusing lens and a spectrometer camera;
the first branch end of one side of the optical fiber coupler is connected with a broadband light source, the second branch end of the other side of the optical fiber coupler is connected with a spectrometer camera after passing through a spectrometer collimator, a spectrometer reflection grating and a spectrometer focusing lens in sequence, the first branch end of the other side of the optical fiber coupler is connected with a reference arm reflecting mirror after passing through a polarization controller, a reference arm collimator and a reference arm focusing lens in sequence, the second branch end of the other side of the optical fiber coupler is connected with an OCT scanning device after passing through a sample arm collimator, and the OCT scanning device is connected with a self-adaptive optical module.
The OCT scanning device is a galvanometer.
The OCT imaging module adopts one of the following methods:
a time domain OCT imaging method for changing the optical path of a reference arm through mechanical scanning;
or a spectrometer OCT imaging method for recording a spectrum interference signal through a spectrometer;
or a sweep OCT imaging method for recording spectrum interference signals by utilizing sweep light source line scanning.
The visual imaging module is a visual imaging camera.
The beneficial effects and innovation points of the invention are as follows:
1. under different laser welding scenes, especially under the working mode of a long-focal-length field lens, the transverse resolution of an OCT image is limited, and the self-adaptive optical module in the invention can change the driving current value of a lens through an electric control self-adaptive optical lens before an OCT sample arm beam enters a laser welding device, so that the focal length of the electric control lens is changed, and meanwhile, the distance between the electric control lens and a focusing lens is adjusted, so that the beam enters the laser welding module as a collimated beam after beam expansion, and the optimal collimating light spot size is determined through the signal-to-noise ratio of an image ROI region and the image quality feedback, so that the transverse resolution of an OCT system is effectively improved;
2. by adding dispersion phase factors in a digital iteration mode, chromatic dispersion introduced by a field lens, an optical coupling module and the like in a laser welding module in a sample arm is compensated, the axial resolution of an OCT system is improved, the hardware configuration of a reference arm is simplified because of no dispersion compensation of hardware, and the reference arm can be replaced by an optical fiber with a fixed length, so that the system volume is compressed, and the system cost is saved;
3. the OCT imaging module, the vision module and the laser welding module are designed on the common optical axis, and before laser welding, the sample surface can be subjected to two-dimensional imaging only by the OCT scanning device under the condition that the laser welding galvanometer does not work, so that sample surface information and depth information of any position of metal to be welded can be obtained; in the laser welding process, the OCT scanning device is reset, the depth information of the welding point position can be obtained in real time under the two-dimensional rotation of the laser welding vibrating mirror, the inside of a key hole is measured, and the actual welding penetration is determined in real time; after the laser welding is finished, the welding quality of the welding surface, the welding line and other positions can be rapidly and effectively evaluated and analyzed through scanning by the OCT scanning device.
Drawings
FIG. 1 is a schematic block diagram of the apparatus of the present invention;
FIG. 2 is a schematic diagram of an example apparatus of the present invention;
FIG. 3 is a graph comparing imaging experimental results of an exemplary embodiment of the present invention;
in the figure, a 1-OCT imaging module; 2-adaptive optics module, 3-visual imaging module, 4-laser welding module, 5-optical coupling module, 6-sample to be welded, 101-broadband light source, 102-fiber coupler, 103-polarization controller, 104-reference arm collimator, 105-reference arm focusing lens, 106-reference arm mirror, 107-sample arm collimator, 108-OCT scanning device, 109-spectrometer collimator, 110-spectrometer reflective grating, 111-spectrometer focusing lens, 112-spectrometer camera, 201-focusing lens, 202-electronically controlled adaptive optics lens, 301-visual imaging camera, 401-laser light source, 402-dichroic mirror, 403-laser welding galvanometer, 404-laser welding field lens.
Detailed Description
The following detailed description of the invention is made in connection with the accompanying drawings, which form a part hereof. It is noted that these descriptions and examples are merely illustrative and are not to be construed as limiting the scope of the invention, which is defined by the appended claims, and any changes based on the claims are intended to be within the scope of the invention.
To facilitate an understanding of embodiments of the invention, the operations are described as multiple discrete operations, but the order of description does not represent the order in which the operations are performed.
As shown in fig. 1 and 2, the present invention includes an OCT imaging module 1, an adaptive optics module 2, a vision imaging module 3, a laser welding module 4, and an optical coupling module 5; the sample arm beam emitted from the OCT imaging module 1 sequentially passes through the self-adaptive optical module 2, the optical coupling module 5 and the laser welding module 4 and then enters the surface of a sample 6 to be welded, the self-adaptive optical module 2 and the optical coupling module 5 share the optical axis, and the sample arm beam is reflected on the surface of the sample 6 to be welded and then returns to the OCT imaging module 1 along the original optical path for OCT scanning imaging, so that a metal surface OCT signal is obtained; the visual imaging light beam emitted by the visual imaging module 3 is incident to the surface of the sample 6 to be welded after passing through the optical coupling module 5 and the laser welding module 4, and the visual imaging light beam is reflected on the surface of the sample 6 to be welded and returns to the visual imaging module 3 along the original light path for visual imaging, so that a metal surface image is obtained. In a specific implementation, the sample 6 to be welded is metal.
According to the metal OCT signal obtained in the OCT imaging module 1, the laser welding module 4 is guided to finish laser welding at a preset position in real time, the inside of a keyhole is measured in the welding process, the actual welding penetration is determined in real time, and the welding quality at the welding surface and the depth position of a welding line is detected and evaluated after the welding is finished;
the sample arm beam emitted by the OCT imaging module 1 is shaped through the beam expanding structure in the self-adaptive optical module 2, namely, the numerical aperture of a light spot is increased, and the transverse resolution of the OCT system is improved.
The visual imaging module 3 is used for amplifying and acquiring the surface information of the sample 6 to be welded in real time;
and the laser welding module 4 utilizes a two-dimensional vibrating mirror to enable high-power laser to finish adjustable large-area two-dimensional welding on the surface of the sample 6 to be welded.
The OCT imaging module 1 and the visual imaging module 3 are coupled together by the optical coupling module 5, and the OCT imaging module 1 and the visual imaging module 3 share the laser welding two-dimensional galvanometer and the laser welding focusing field lens at the moment, the imaging object planes coincide, and the imaging center positions also coincide.
The OCT imaging module 1 adopts one of the following methods:
a time domain OCT imaging method for changing the optical path of a reference arm through mechanical scanning;
or a spectrometer OCT imaging method for recording a spectrum interference signal through a spectrometer;
or a sweep OCT imaging method for recording spectrum interference signals by utilizing sweep light source line scanning;
the OCT imaging module 1 includes a broadband light source 101, a fiber coupler 102, a polarization controller 103, a reference arm collimator 104, a reference arm focusing lens 105, a reference arm mirror 106, a sample arm collimator 107, an OCT scanning device 108, a spectrometer collimator 109, a spectrometer reflection grating 110, a spectrometer focusing lens 111, and a spectrometer camera 112;
the first branch end of one side of the optical fiber coupler 102 is connected with the broadband light source 101, the second branch end of one side of the optical fiber coupler 102 is connected with the spectrometer camera 112 after passing through the spectrometer collimator 109, the spectrometer reflection grating 110 and the spectrometer focusing lens 111 in sequence, the first branch end of the other side of the optical fiber coupler 102 is connected with the reference arm reflecting mirror 106 after passing through the polarization controller 103, the reference arm collimator 104 and the reference arm focusing lens 105 in sequence, and the second branch end of the other side of the optical fiber coupler 102 is connected with the OCT scanning device 108 after passing through the sample arm collimator 107, and the OCT scanning device 108 is connected with the adaptive optics module 2. The OCT scanning device 108 is a galvanometer mirror.
In this embodiment, the OCT imaging module 1 is a spectral domain OCT, the center wavelength of a broadband light source thereof is 840nm, the bandwidth is 45nm, the OCT signal of the sample is obtained in real time by a spectrometer camera and transmitted to a computer, and the OCT scanning device is a galvanometer mirror for controlling the scanning position of the OCT structure imaging, so that raster scanning, ring scanning, sampling scanning and the like can be realized.
The adaptive optics module 2 includes a beam expanding structure using a double lens or a plurality of lenses.
The adaptive optics module 2 comprises a focusing lens 201 and an electronically controlled adaptive optics lens 202;
the sample arm beam emitted from the OCT imaging module 1 sequentially passes through the focusing lens 201 and the electronically controlled adaptive optical lens 202 along the optical axis, and then enters the optical coupling module 5.
In this embodiment, the adaptive optics module 2 adopts a combination of a focusing lens and an electrically-controlled adaptive optics lens, and under different focal lengths of field lenses, especially under a laser welding scene with a long focal length and a long focal depth, the driving current of the lens is changed, so that the focal length of the electrically-controlled lens is changed, and then the distance between the focusing lens and the variable focal lens is adjusted, so that the sample arm beam can enter the laser welding module with a larger spot size, and the most suitable enlarged size is determined through an image quality feedback mechanism, so that an optimal OCT image is obtained, and the method is applicable to the laser welding scene without a focal length field lens.
The visual imaging module 3 is a visual imaging camera 301.
The laser welding module 4 comprises a laser light source 401, a dichroic mirror 402, a laser welding galvanometer 403 and a laser welding field lens 404;
the light beam emitted from the optical coupling module 5 is incident to the dichroic mirror 402, transmitted by the dichroic mirror 402, then incident to the laser welding galvanometer 403, reflected by the laser welding galvanometer 403, incident to the laser welding field lens 404, transmitted by the laser welding field lens 404 and converged on the surface of the sample 6 to be welded; the high-power laser of the laser light source 401 is incident to the dichroic mirror 402, reflected by the dichroic mirror 402, then incident to the laser welding vibrating mirror 403, reflected by the laser welding vibrating mirror 403, transmitted by the laser welding field mirror 404, incident to the surface of the sample 6 to be welded, and welding the surface of the sample 6 to be welded, and adjusting the laser welding vibrating mirror 403 to change the welding position of the sample 6 to be welded. The dichroic mirror 402 couples the OCT imaging module 1, the vision imaging module 3, and the laser welding module 4 together, the welding position coincides with the imaging position, and the welding center and the imaging center position also coincide.
The broadband light source 101 emits an OCT light beam, the OCT light beam passes through the optical fiber coupler 102, then emits a reference arm light beam from a first branch end at the other side of the optical fiber coupler 102, emits a sample arm light beam from a second branch end at the other side of the optical fiber coupler 102, and sequentially passes through the polarization controller 103 and the reference arm collimator 104, then is converged on the reference arm reflector 106 through the reference arm focusing lens 105, and is reflected by the reference arm reflector 106 to return to the optical fiber coupler 102 along the original path of the optical path of the reference arm; the sample arm beam passes through the sample arm collimator 107 and then enters the adaptive optics module 2 together with the OCT scanning device 108. The sample arm beam emitted from the OCT scanning device 108 is incident to the optical coupling module 5 after being expanded in the beam spot size of the adaptive optical module 2, is incident to the laser welding galvanometer 403 after being transmitted by the optical coupling module 5 and the dichroic mirror 402 in sequence, is incident to the laser welding galvanometer 404 after being reflected by the laser welding galvanometer 403, the sample arm beam is focused on the metal 6 to be welded by the laser welding galvanometer 404, the original path of the beam carrying the information of the metal 6 to be welded returns to the optical fiber coupler 102, weak coherent interference occurs at the optical fiber coupler 102 between the reference arm beam returned by the reference arm reflecting mirror and the sample arm beam returned by the metal to be welded, the interference signal enters the spectrometer collimator 109 and then enters the spectrometer reflecting grating 110, the spectrometer reflecting grating 110 splits the interference signal according to wavelength, the split interference signal is converged on the spectrometer camera 112 by the spectrometer focusing lens 111, and the OCT image is obtained through the analysis processing of the computer on the spectrum signal.
The application steps of the invention are as follows:
1. before laser welding, under the condition that a laser welding vibrating mirror does not work, two-dimensional imaging can be carried out on the surface of a sample only through a galvanometer vibrating mirror, and depth information and surface information of any position of metal to be welded are obtained;
2. in the laser welding process, the galvanometer vibrating mirror is reset, the depth information of the welding point position can be obtained in real time under the two-dimensional rotation of the laser welding vibrating mirror, the inside of a key hole is measured, and the actual welding penetration is determined in real time;
3. after laser welding, the welding quality of the welding surface, the welding seam and other positions can be rapidly and effectively evaluated and analyzed through galvanometer scanning.
The remarkable stabilizing effect of the present invention in practical application can be represented in fig. 3. From fig. 3 a, which is a weld joint imaging picture after laser welding without adding the self-adaptive optical module, fig. 3 b, which is a weld joint imaging picture after laser welding with adding the self-adaptive optical module, wherein the picture marked with the number 1 is a scanned physical picture, the black frame is a scanning area, the picture marked with the number 2 is a projection picture of the weld joint after OCT scanning, the fault picture corresponding to the dotted line position in the projection picture of the weld joint after OCT scanning is a picture marked with the number 3, and the left image and the right image of fig. 3 are compared, it can be found that the fault picture is clearer and the welded metal surface is sharper after adding the self-adaptive optical module; the weld projection graph is clearer, and the weld profile is more obvious, so that the adaptive optical module effectively improves the transverse resolution and the axial resolution of the OCT image under the application scene of different focusing field lenses of laser welding, especially under the long-focal-length field lens, and has obvious effect.

Claims (7)

1. The laser welding device integrating the self-adaptive OCT is characterized by comprising an OCT imaging module (1), a self-adaptive optical module (2), a visual imaging module (3), a laser welding module (4) and an optical coupling module (5); the sample arm beam emitted from the OCT imaging module (1) sequentially passes through the self-adaptive optical module (2), the optical coupling module (5) and the laser welding module (4) and then enters the surface of a sample (6) to be welded, and the sample arm beam is reflected on the surface of the sample (6) to be welded and then returns to the OCT imaging module (1) along an original light path for OCT scanning imaging; the visual imaging light beam emitted by the visual imaging module (3) is incident to the surface of the sample (6) to be welded after passing through the optical coupling module (5) and the laser welding module (4), and the visual imaging light beam is reflected on the surface of the sample (6) to be welded and then returns to the visual imaging module (3) along the original light path for visual imaging;
the adaptive optics module (2) includes a beam expanding structure using a double lens or a plurality of lenses.
2. The adaptive OCT integrated laser welding device of claim 1, wherein: the adaptive optics module (2) comprises a focusing lens (201) and an electronically controlled adaptive optics lens (202); the sample arm beam emitted from the OCT imaging module (1) sequentially passes through the focusing lens (201) and the electric control self-adaptive optical lens (202) along the optical axis and then enters the optical coupling module (5).
3. The adaptive OCT integrated laser welding device of claim 1, wherein: the laser welding module (4) comprises a laser light source (401), a dichroic mirror (402), a laser welding galvanometer (403) and a laser welding field lens (404);
the light beam emitted from the optical coupling module (5) is incident to the dichroic mirror (402), transmitted by the dichroic mirror (402), then incident to the laser welding vibrating mirror (403), reflected by the laser welding vibrating mirror (403), incident to the laser welding field lens (404), transmitted by the laser welding field lens (404), and converged on the surface of the sample (6) to be welded; laser of the laser light source (401) is incident to the dichroic mirror (402), reflected by the dichroic mirror (402), then incident to the laser welding vibrating mirror (403), reflected by the laser welding vibrating mirror (403), transmitted by the laser welding field mirror (404), incident to the surface of the sample (6) to be welded and welded on the surface of the sample (6) to be welded, and the laser welding vibrating mirror (403) is adjusted to change the welding position of the sample (6) to be welded.
4. The adaptive OCT integrated laser welding device of claim 1, wherein: the OCT imaging module (1) comprises a broadband light source (101), an optical fiber coupler (102), a polarization controller (103), a reference arm collimator (104), a reference arm focusing lens (105), a reference arm reflecting mirror (106), a sample arm collimator (107), an OCT scanning device (108), a spectrometer collimator (109), a spectrometer reflection grating (110), a spectrometer focusing lens (111) and a spectrometer camera (112);
the first branch end on one side of the optical fiber coupler (102) is connected with the broadband light source (101), the second branch end on one side of the optical fiber coupler (102) is connected with the spectrometer camera (112) after passing through the spectrometer collimator (109), the spectrometer reflection grating (110) and the spectrometer focusing lens (111) in sequence, the first branch end on the other side of the optical fiber coupler (102) is connected with the reference arm reflecting mirror (106) after passing through the polarization controller (103), the reference arm collimator (104) and the reference arm focusing lens (105) in sequence, and the second branch end on the other side of the optical fiber coupler (102) is connected with the OCT scanning device (108) after passing through the sample arm collimator (107), and the OCT scanning device (108) is connected with the adaptive optical module (2).
5. The adaptive OCT integrated laser welding device of claim 4, wherein: the OCT scanning device (108) is a galvanometer mirror.
6. The adaptive OCT integrated laser welding device of claim 1, wherein: the OCT imaging module (1) adopts one of the following methods:
a time domain OCT imaging method for changing the optical path of a reference arm through mechanical scanning;
or a spectrometer OCT imaging method for recording a spectrum interference signal through a spectrometer;
or a sweep OCT imaging method for recording spectrum interference signals by utilizing sweep light source line scanning.
7. The adaptive OCT integrated laser welding device of claim 1, wherein: the visual imaging module (3) is a visual imaging camera (301).
CN202210818410.1A 2022-07-12 2022-07-12 Laser welding device integrated with self-adaptive OCT Active CN115008011B (en)

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