CN114623983A - Multi-element leakage-indicating gas leakage detection system and detection method thereof - Google Patents
Multi-element leakage-indicating gas leakage detection system and detection method thereof Download PDFInfo
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- CN114623983A CN114623983A CN202210121199.8A CN202210121199A CN114623983A CN 114623983 A CN114623983 A CN 114623983A CN 202210121199 A CN202210121199 A CN 202210121199A CN 114623983 A CN114623983 A CN 114623983A
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- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
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Abstract
The invention discloses a multi-leakage-indicating gas leakage detecting system, wherein an inlet pipe is connected with a first inlet of a dynamic leakage detecting chamber through a 3 rd valve, a first outlet pipe of the dynamic leakage detecting chamber is connected with an inlet of a first negative pressure standard leakage hole through a 4 th valve, a second outlet pipe of the dynamic leakage detecting chamber is connected with a first inlet of a mass spectrum chamber through a 6 th valve, a first outlet pipe of the mass spectrum chamber is connected with a quadrupole mass spectrometer through a 7 th valve, a second outlet pipe of the mass spectrum chamber is connected with a 9 th valve, a molecular pump and a backing pump, a branch is arranged on a connecting pipe between the molecular pump and the backing pump, the branch is connected with a third outlet of the dynamic leakage detecting chamber through a 5 th valve, and a third outlet pipe of the mass spectrum chamber is connected with a 8 th valve and an adsorption pump. The invention not only realizes the detection of the micro leakage of the helium leakage gas of the detected piece, but also realizes the micro leakage detection of various leakage gases such as He, Kr, Ar and the like of the detected piece, and the on-line monitoring of the residual gas components of the vacuum system, and has high leakage detection efficiency of the leakage gas and accurate and reliable leakage detection result.
Description
Technical Field
The invention belongs to detection equipment and a detection method for detecting trace gas leakage of a detected part, and particularly relates to a multi-element leakage-indicating gas leakage detection system and a detection method thereof.
Background
The helium mass spectrometer leak detector has high leak detection sensitivity, quick response, accurate positioning and quantification and high diffusion speed of helium in a high vacuum environment, so the helium mass spectrometer leak detector is widely applied to many fields, such as automobile manufacturing, aerospace, gas transmission pipelines, satellites and the like. The helium mass spectrometer leak detector can only detect helium, so that the application range and the research range of the leak detector are limited. The helium mass spectrometer leak detector can only detect helium, and after a leak detection background of a leak signal is found to be polluted in a leak detection process, a long time is needed for clearing the helium background by the instrument, and the original background level is difficult to reach, so that the leak detection efficiency and the reliability of a leak detection result are influenced. The helium mass spectrometer leak detector can meet the requirements of high sealing performance and high timeliness. Other types of leakage-indicating gas are considered to be replaced, once the background of the leakage detection system is polluted, other leakage-indicating gas is replaced for rechecking, the influence of the original polluted background is avoided, and the rechecking is rapidly carried out.
Disclosure of Invention
The invention aims to provide a multi-element leakage gas leakage detecting system and a detecting method thereof, which can realize the detection of the trace leakage of helium leakage gas of a detected piece, can realize the trace leakage detection of various leakage gases such as He, Kr, Ar and the like of the detected piece, can realize the online monitoring of residual gas components of a vacuum system, and has high leakage detecting efficiency and accurate and reliable leakage detecting result.
The purpose of the invention is realized as follows: a multi-element leakage-indicating gas leakage detecting system is characterized in that an inlet pipe provided with an inlet interface is connected with a first inlet of a dynamic leakage detecting chamber through a 3 rd valve, a first outlet pipe of the inlet interface is connected with an inlet of a first negative pressure standard leakage hole through a 4 th valve, a second outlet pipe of the dynamic leakage detecting chamber is connected with a first inlet of a mass spectrum chamber through a 6 th valve, a first outlet pipe of the mass spectrum chamber is connected with a quadrupole mass spectrometer through a 7 th valve, a second outlet pipe of the mass spectrum chamber is sequentially connected with a 9 th valve, a molecular pump and a backing pump, a branch is arranged on a connecting pipe between the molecular pump and the backing pump, the branch is connected with a third outlet of the dynamic leakage detecting chamber through a 5 th valve, a third outlet pipe of the mass spectrum chamber is sequentially connected with an 8 th valve and an adsorption pump, a 2 nd valve and a connecting port are sequentially arranged on an outlet pipe of a positive pressure standard leakage hole, the connecting port is matched with a suction nozzle of a suction gun, an outlet pipe of the suction gun is connected with the inlet pipe through a 1 st valve, the branch connected with the inlet pipe is connected with a first inlet of a vacuum accumulation chamber through an 11 th valve, a first outlet pipe of the chamber is connected with a second inlet of a mass spectrum chamber through a 10 th valve, and a second outlet pipe of the vacuum accumulation chamber is sequentially connected with a 12 th valve and a second negative pressure standard leak hole.
The first negative pressure standard leak hole is a nitrogen standard leak hole, and the second negative pressure standard leak hole is other leakage-indicating gas standard leak holes.
The mass spectrometry chamber is a magnetic deflection mass spectrometry chamber.
A detection method of a multi-element leakage-indicating gas leakage detection system comprises a mass spectrum normal pressure leakage detection method, a mass spectrum vacuum dynamic leakage detection method and a mass spectrum vacuum accumulation leakage detection method.
The mass spectrum normal pressure leak detection method comprises the following steps: firstly, adopting nitrogen as leakage-indicating gas, opening a 3 rd valve and a 5 th valve, opening a 9 th valve and a molecular pump when a pre-stage pump is started to pump to reach the vacuum degree of 1500Pa, opening a 1 st valve when the vacuum degree is pumped to reach 20Pa, opening a 2 nd valve after the background of the system is stable, and opening a 7 th valve if other gases are adopted as leakage-indicating gas and the opening state of the valves at the early stage is kept unchanged;
respectively sniffing the positive pressure standard leak hole by a suction gun, allowing atmospheric air containing leak-indicating gas around the detected piece or suspected leak part to enter a mass spectrum chamber through the suction gun and a dynamic leak detection chamber under the atmospheric environment or working environment, and comparing two different types of air around the outlet of the positive pressure standard leak hole and the detected piece under the dynamic conditionUnder the detection condition, the four-stage mass spectrometer respectively gives out the ion current intensity values of the leakage gas, wherein QSIs a standard value of a positive pressure standard leak hole with the unit of Pa.m3/s；ILIon current intensity value I displayed by the quadrupole mass spectrometer when the suction gun smells and sucks the periphery of the detected piece or the suspicious leakage partSThe ion current strength value, I, displayed by the quadrupole mass spectrometer when the positive pressure standard leak outlet is sniffed by the suction gunOWhen the ambient background is sniffed by the suction gun, the ion current intensity value displayed by the quadrupole mass spectrometer is Pa;
③ using formula
Calculating to obtain the leakage value of the tested object, wherein QLIs the subject leakage value.
The mass spectrum vacuum dynamic leak detection method comprises the following steps: firstly, adopting nitrogen as leakage-indicating gas, connecting the vacuum side of a detected piece with an interface of an inlet pipe, opening a 3 rd valve (2) and a 5 th valve, starting a pre-stage pump to pump until the vacuum degree is 1500Pa, opening a 9 th valve and a molecular pump, opening a 6 th valve when the vacuum degree is 20Pa, opening a 4 th valve of a first negative pressure standard leak hole after the background of a system is stable, calibrating the sensitivity of the system, and then closing the 4 th valve; or other gases are used as leakage-indicating gases, the operation steps are that a detected part is connected at the interface of an inlet pipe, a 3 rd valve and a 5 th valve are opened, a pre-stage pump is started until the vacuum degree is 1500Pa, a 9 th valve is opened, when the vacuum degree is reduced to 20Pa, a 7 th valve is opened, after the background of the system is stable, a 12 th valve of a second negative pressure standard leakage hole is opened, the sensitivity of the system is calibrated, and then the 12 th valve is closed; secondly, the leakage indicating gas at the high pressure side of the detected piece enters a dynamic leakage detecting chamber and then enters a mass spectrum chamber along the pumping speed direction of the vacuum pump or against the pumping speed direction of the vacuum pump, and the ion current intensity Q of the leakage indicating gas is respectively given by four-stage mass spectrums in two different detection states after a vacuum leak hole valve is opened and the leakage indicating gas is filled at the high pressure side of the detected piece under the dynamic conditionS、IL、IS、IO(ii) a ③ using formula QL=QS×
And calculating to obtain a leakage value of the detected piece.
The mass spectrum vacuum dynamic leak detection method comprises a helium cover method, a stamping vacuum method and a blowing method.
The mass spectrum vacuum accumulation leak detection method comprises the following steps: directly placing the small-sized fully-sealed detected piece into a vacuum accumulation chamber or connecting the vacuum side of the small-sized fully-sealed detected piece with an inlet pipe interface, opening an 11 th valve, enabling leakage-indicating gas of the detected piece to enter the vacuum accumulation chamber, opening a 10 th valve, an 8 th valve and an adsorption pump, closing a 5 th valve and a 9 th valve, opening a 7 th valve, and enabling the leakage-indicating gas to enter a mass spectrum chamber; ② leakage information is accumulated toΔt=
Q min After second (Q min In order to be sensitive to the leak detector,q min in order to be sensitive to the leak detection of the system,ΣV i is the sum of the volumes of the test piece and the leak detection system,Scorresponding pumping speed), opening the 5 th and 9 th valves, continuing to detect leakage, and during leakage detection, the adsorption pump will supply N2、O2、H2Pumping out active gas but not He, Ar and Kr inert gases, selecting inert gas for leak detection, and giving out ion current intensity value of vacuum leak hole opening and leak gas applied to the detected piece by a quadrupole mass spectrometer, wherein RLIon current rise rate of leakage gas in mass spectrum chamber when static accumulation of leakage gas is applied in detected piece, RSAfter the vacuum leak hole is opened, the ion current rising rate of the leakage gas in the mass spectrum chamber during static accumulation is shown as ROAccumulating the ion current rising rate of the leakage gas for the system background in the connection process of the detected piece, wherein the unit is A/s;
③ using formula
Calculating to obtain leakage quantity Q of the detected pieceLIs the subject leakage value.
The multi-element leakage-showing and leakage-detecting system mainly comprises a quadrupole mass spectrometer, a magnetic deflection mass spectrum chamber, an accumulation leakage-detecting chamber, a dynamic leakage-detecting chamber, a suction gun, a standard leakage hole, a vacuumizing unit, a corresponding valve and a corresponding pipeline. The vacuumizing unit consists of a backing pump, a molecular pump and an adsorption pump.
1) Working principle of mass spectrum normal pressure leak detection method
When the mass spectrum normal pressure leak detection method is adopted, a suction gun is used for sucking a positive pressure standard leak hole, and normal pressure air containing leak-indicating gas enters a mass spectrum chamber after passing through the suction gun and a dynamic leak detection chamber around a detected piece or at a suspicious leak part under the atmospheric environment (working environment). And (3) comparing the ion current intensity values of the leakage indicating gas given by the mass spectrometers in two different detection states at the outlet of the positive pressure leak hole and around the detected piece under the dynamic condition, and calculating by adopting the following formula to obtain the leakage amount of the detected piece.
QL=QS×
Wherein Q isLFor the leakage value of the test object, QSIs the nominal value of a standard leak hole and has the unit of Pa.m3/s；ILIon current strength value I displayed by the mass spectrometer when the suction gun smells and sucks the periphery of the detected piece or the suspicious leakage partSThe ion current strength value, I, displayed by the mass spectrometer when the suction gun smells and sucks the positive pressure leak hole outletOWhen the environment background is sniffed by a suction gun, the ion current strength value displayed by the mass spectrometer is Pa;
2) working principle of mass spectrum vacuum dynamic leak detection method
When the mass spectrum vacuum dynamic leak detection method is adopted, the vacuum side of a detected piece is required to be connected with a vacuum dynamic leak detection method interface, leak gas on the high-pressure side of the detected piece enters a dynamic leak detection chamber through a leak hole and then enters the mass spectrum chamber in a forward diffusion mode (along the pumping speed direction of a vacuum pump) or a reverse diffusion mode (against the pumping speed direction of the vacuum pump), and leak amount of the detected piece is calculated by adopting a calculation formula of the mass spectrum normal-pressure leak detection method according to leak gas ion current intensity of leak gas given by a quadrupole mass spectrometer in two different detection states after a vacuum leak hole valve is opened and leak gas is filled on the high-pressure side of the detected piece under the comparative dynamic condition.
3) Working principle of mass spectrum vacuum accumulation leak detection method
When leak detection is performed by adopting a mass spectrum vacuum accumulation leak detection method, a small-sized fully-sealed detected part can be directly placed into an accumulation leak detection chamber or the vacuum side of the small-sized detected part is connected with a vacuum accumulation leak detection method interface, leak detection gas on the high-pressure side of the detected part can enter the accumulation leak detection chamber through a leak hole, leak detection gas on the high-pressure side of the accumulation leak detection chamber can enter the accumulation leak detection chamber through the leak hole, a connecting valve of the accumulation leak detection chamber and the mass spectrum chamber is opened, a connecting valve of an adsorption pump and the mass spectrum chamber is closed, the connecting valve of the main pump and the mass spectrum chamber is closed, and during leak detection, the configured adsorption pump with a selective pumping function can be used for N2、O2、H2When the active gas is pumped away in time but the inert gas such as He and Ar can not be pumped away, the accumulation of leakage signals can be realized when the inert gas is selected for leakage detection, ion current intensity values given by a quadrupole mass spectrometer under different detection states (the vacuum leakage hole is opened and the leakage indicating gas is applied to the detected piece) are respectively recorded, and the leakage amount of the detected piece is calculated by adopting the following formula.
In the formula, RLIon current rise rate of leakage gas in mass spectrum chamber during static accumulation, R, for applying leakage gas in detected pieceSAfter the vacuum leak hole is opened, the ion current rising rate of the leakage gas in the mass spectrum chamber during static accumulation is shown as ROThe unit is A/s for the increase rate of the ion current of the background accumulated leakage gas in the connection process of the detected piece.
During operation, the quadrupole mass spectrometer can select whether to open 3 rd valve and 4 th valve according to the needs of work, and when 3 rd valve, 4 th valve were closed, newly-designed leak detector just can only detect the helium signal with original helium mass spectrometer leak detector. When the 3 rd valve and the 4 th valve are opened, other leakage-indicating gases can be detected, a proper standard leakage hole is selected according to the type of the selected leakage-indicating gas, and the gas of the standard leakage hole and the selected leakage-indicating gas are of the same type.
The quadrupole mass spectrometer is used for analyzing gas ion signals with molecular weights of 1-200 except helium; the mass spectrum chamber is used for analyzing helium ion signals; the backing pump is used for rough pumping of the picked part and provides backing vacuum for the main pump; the vacuum accumulation chamber is used for connecting a gas path between the mass spectrum chamber and the quadrupole mass spectrum chamber; the dynamic leak detection chamber is used for the gas path trend of gas under different vacuum degrees.
The invention mainly adopts a measuring sensor with quadrupole mass spectrum and magnetic deflection mass spectrum as the core, realizes the trace leakage detection of multiple leakage-indicating gases such as He, Kr, Ar and the like, monitors the residual gas components of a vacuum system on line, combines three leakage detection methods of a mass spectrum normal pressure leakage detection method, a mass spectrum vacuum dynamic leakage detection method and a mass spectrum vacuum accumulation leakage detection method, and can select a proper leakage detection method according to the conditions of the working condition, the allowable leakage rate and the like of a detected piece.
Has the advantages that:
1. the micro leakage detection of multiple leakage indicating gases such as He, Kr, Ar and the like can be realized;
2. the device can realize continuous monitoring of the background residual gas and is beneficial to accurate judgment of tiny leakage signals.
3. The leakage detection of various leakage-indicating gases by a vacuum method and a suction gun method can be realized.
The invention not only realizes the detection of the micro leakage of the helium leakage gas of the detected piece, but also realizes the micro leakage detection of various leakage gases such as He, Kr, Ar and the like of the detected piece, the online monitoring of the residual gas components of the vacuum system, the leakage detection efficiency of the leakage gas is high, and the leakage detection result is accurate and reliable.
Drawings
The invention will be further described with reference to the accompanying drawings, and fig. 1 is a schematic structural diagram of the invention.
Detailed Description
A multi-element leakage-indicating gas leakage detecting system is disclosed, as shown in figure 1, an inlet pipe of an inlet interface 1 is connected with a first inlet of a dynamic leakage detecting chamber 3 through a 3 rd valve 2, a first outlet pipe of the inlet interface is connected with an inlet of a first negative pressure standard leakage hole 5 through a 4 th valve 4, a second outlet pipe of the dynamic leakage detecting chamber 3 is connected with a first inlet of a mass spectrum chamber 7 through a 6 th valve 6, a first outlet pipe of the mass spectrum chamber 7 is connected with a quadrupole mass spectrometer 9 through a 7 th valve 8, a second outlet pipe of the mass spectrum chamber 7 is sequentially connected with a 9 th valve 10, a molecular pump 11 and a backing pump 12, a branch is arranged on a connecting pipe between the molecular pump 11 and the backing pump 12, the branch is connected with a third outlet of the dynamic leakage detecting chamber 3 through a 5 th valve 15, a third outlet pipe of the mass spectrum chamber 7 is sequentially connected with a 8 th valve 13 and an adsorption pump 14, a 2 nd valve 17 and a connecting port 18 are sequentially arranged on an outlet pipe of a positive pressure standard leakage hole 16, the connection port 18 is matched with a suction nozzle of a suction gun 19, an outlet pipe of the suction gun 19 is connected with an inlet pipe through a 1 st valve 20, a branch of the inlet pipe connection is connected with a first inlet of a vacuum accumulation chamber 22 through an 11 th valve 21, a first outlet pipe of the chamber is connected with a second inlet of a mass spectrum chamber 7 through a 10 th valve 23, and a second outlet pipe of the vacuum accumulation chamber 22 is sequentially connected with a 12 th valve 24 and a second negative pressure standard leak hole 25.
A detection method of a multi-element leakage-indicating gas leakage detection system comprises a mass spectrum normal pressure leakage detection method, a mass spectrum vacuum dynamic leakage detection method and a mass spectrum vacuum accumulation leakage detection method:
the mass spectrum normal pressure leak detection method includes that firstly, helium is used as leak detection gas, a 3 rd valve 2 and a 5 th valve 15 are respectively opened, a backing pump 12 is opened to pump a vacuum degree of 1500Pa, a 9 th valve 10 and a molecular pump 11 are opened, a 1 st valve 20 is opened when the vacuum degree is pumped to 20Pa, a 2 nd valve 17 is opened after the system background is stable, the system sensitivity is calibrated, the 2 nd valve 17 is closed after calibration is completed, at the moment, a suction gun is used for kissing at a sealing link of a detected part to detect the leak rate of the detected part, if other gas is used as tracer gas, the opening state of the valve at the early stage is kept unchanged, and a 7 th valve 8 is opened; respectively sniffing the positive pressure standard leak hole 16 by using a suction gun 19, and allowing atmospheric air containing leak-indicating gas at the periphery of the detected piece or suspected leak part to enter a mass spectrum chamber 7 through the suction gun 19 and the dynamic leak detection chamber 3 under the atmospheric environment or working environment condition, wherein the leakage-indicating gas is respectively given out by a four-stage mass spectrometer 9 under two different detection conditions of comparing the outlet of the positive pressure standard leak hole 16 and the periphery of the detected piece under the dynamic conditionSubstream strength values, where QSIs a standard value of a positive pressure standard leak hole with the unit of Pa.m3/s；ILIon current intensity value I displayed by the quadrupole mass spectrometer when the suction gun smells and sucks the periphery of the detected piece or the suspicious leakage partSThe ion current strength value, I, displayed by the quadrupole mass spectrometer when the positive pressure standard leak outlet is sniffed by the suction gunOWhen the ambient background is sniffed by the suction gun, the ion current intensity value displayed by the quadrupole mass spectrometer is Pa; ③ using formula QL=QS×
And calculating to obtain a leakage value of the detected piece.
The mass spectrum vacuum dynamic leak detection method comprises the steps of firstly, adopting helium as leak detection gas, connecting a detected part with an inlet pipe interface 1, opening a 3 rd valve 2 and a 5 th valve 15, opening a backing pump 12 to pump until the vacuum degree is 1500Pa, opening a 9 th valve 10 and a molecular pump 11, opening a 6 th valve 6 when the vacuum degree is up to 20Pa, opening a 4 th valve 4 after the background of a system is stable, calibrating the sensitivity of the system, and then closing the 4 th valve 4; if other gases are used as leakage-indicating gases, the part to be detected is connected to the inlet pipe interface 1, the 3 rd valve 2 and the 5 th valve 15 are opened, when the vacuum degree is 1500Pa, the 9 th valve 10 and the molecular pump 11 are opened, when the vacuum degree is reduced to 20Pa, the 7 th valve 8 is opened, after the background is stable, the 12 th valve 24 is opened, the system sensitivity is calibrated, and then the 12 th valve 24 is closed; secondly, the leakage gas at the high pressure side of the detected piece enters the dynamic leakage detecting chamber 3 and then enters the mass spectrum chamber 7 along the pumping speed direction of the vacuum pump or against the pumping speed direction of the vacuum pump, and the ion current intensity Q of the leakage gas is given by the four-stage mass spectrometer 9 under two different detection states after the vacuum leak hole valve is opened and the leakage gas is filled at the high pressure side of the detected piece under the dynamic conditionS、IL、IS、IO(ii) a Using formula QL=QS×
And calculating to obtain a leakage value of the detected piece.
Mass spectrum vacuum accumulation method, vacuum accumulationThe product method is based on a mass spectrometry chamber vacuum dynamic method, a detected piece is placed in a vacuum accumulation chamber or the vacuum side of a small fully-sealed detected piece is connected with an inlet pipe interface 1, an 11 th valve 21 is opened, leakage gas of the detected piece enters a vacuum accumulation chamber 22, a 10 th valve 23, an 8 th valve 13 and an adsorption pump 14 are opened, a 5 th valve 15 and a 9 th valve 10 are closed, a 7 th valve 8 is opened, and the leakage gas enters a mass spectrometry chamber 7; ② leakage information is accumulated toΔt=
Q min After second (Q min In order to be sensitive to the leak detector,q min in order to provide a leak detection sensitivity of the system,ΣV i is the sum of the volumes of the test piece and the leak detection system,Scorresponding pumping speed), then 5 th and 9 th valves 15 and 10 are opened, the leakage detection is continued, and in the leakage detection, the adsorption pump 14 pumps N2、O2、H2Active gas is pumped away but He, Ar and Kr inert gases cannot be pumped away, the inert gases are selected for leak detection, and the quadrupole mass spectrometer 9 gives the ion current intensity value R of the opening of the vacuum leak hole and the application of the leak-indicating gas to the detected pieceLIon current rise rate of leakage gas in mass spectrum chamber when static accumulation of leakage gas is applied in detected piece, RSAfter the vacuum leak hole is opened, the ion current rising rate of the leakage gas in the mass spectrum chamber during static accumulation is shown as ROAccumulating the ion current rising rate of the leakage gas for the system background in the connection process of the detected piece, wherein the unit is A/s;
③ using formula
And calculating to obtain the leakage amount of the detected piece.
Claims (8)
1. A multi-element leakage-indicating gas leakage detecting system is characterized in that: an inlet pipe of an inlet interface (1) is connected with a first inlet of a dynamic leakage detection chamber (3) through a 3 rd valve (2), a first outlet pipe of the inlet interface is connected with an inlet of a first negative pressure standard leakage hole (5) through a 4 th valve (4), a second outlet pipe of the dynamic leakage detection chamber (3) is connected with a first inlet of a mass spectrum chamber (7) through a 6 th valve (6), a first outlet pipe of the mass spectrum chamber (7) is connected with a quadrupole mass spectrometer (9) through a 7 th valve (8), a second outlet pipe of the mass spectrum chamber (7) is sequentially connected with a 9 th valve (10), a molecular pump (11) and a backing pump (12), a branch is arranged on a connecting pipe between the molecular pump (11) and the backing pump (12), the branch is connected with a third outlet of the dynamic leakage detection chamber (3) through a 5 th valve (15), and a third outlet pipe of the mass spectrum chamber (7) is sequentially connected with an 8 th valve (13) and an adsorption pump (14), the outlet pipe of the positive pressure standard leak hole (16) is sequentially provided with a 2 nd valve (17) and a connecting port (18), the connecting port (18) is matched with a suction nozzle of a suction gun (19), the outlet pipe of the suction gun (19) is connected with an inlet pipe through a 1 st valve (20), a branch connected with the inlet pipe is connected with a first inlet of a vacuum accumulation chamber (22) through an 11 th valve (21), a first outlet pipe of the chamber is connected with a second inlet of a mass spectrum chamber (7) through a 10 th valve (23), and a second outlet pipe of the vacuum accumulation chamber (22) is sequentially connected with a 12 th valve (24) and a second negative pressure standard leak hole (25).
2. A method of testing a multiple leak indicator gas leak detection system as defined in claim 1, further comprising: the leak detection method of the multi-element leak gas leak detection system comprises a mass spectrum normal pressure leak detection method, a mass spectrum vacuum dynamic leak detection method and a mass spectrum vacuum accumulation leak detection method.
3. The method of claim 2, wherein the step of detecting comprises: the mass spectrum normal pressure leak detection method comprises the following steps: firstly, adopting nitrogen as leakage indicating gas, opening 3 rd and 5 th valves (2 and 15), starting a backing pump (12) to pump till the vacuum degree is 1500Pa, opening a 9 th valve (10) and a molecular pump (11), opening a 1 st valve (20) when the vacuum degree is 20Pa, opening a 2 nd valve (17) after the background of the system is stable, and opening a 7 th valve (8) if other gases are adopted as leakage indicating gases and the opening state of the valves at the early stage is kept unchanged;
secondly, a suction gun (19) is used for respectively sniffing the positive pressure standard leak hole (16) and normal pressure air containing leak gas at the periphery of the detected piece or suspected leak part enters the mass spectrum leak detection chamber (3) through the suction gun (19) and the dynamic leak detection chamber (3) under the atmospheric environment or working environment conditionA chamber (7) for respectively giving ion current intensity values of leakage-indicating gas by a four-stage mass spectrometer (9) under two different detection conditions of the outlet of the positive pressure standard leak hole (16) and the periphery of the detected piece under a dynamic condition, wherein QSIs a standard value of a positive pressure standard leak hole with the unit of Pa.m3/s；ILIon current intensity value I displayed by the quadrupole mass spectrometer when the suction gun smells and sucks the periphery of the detected piece or the suspicious leakage partSThe ion current strength value, I, displayed by the quadrupole mass spectrometer when the positive pressure standard leak outlet is sniffed by the suction gunOWhen the suction gun smells and sucks the environment background, the ion current intensity value displayed by the quadrupole mass spectrometer is Pa;
using a formula
Calculating to obtain the leakage value of the tested object, wherein QLIs the subject leakage value.
4. The method of claim 2, wherein the step of detecting comprises: the mass spectrum vacuum dynamic leak detection method comprises the following steps: firstly, nitrogen is used as leakage indicating gas, the vacuum side of a detected piece is connected with a connector (1) of an inlet pipe, a 3 rd valve (2) and a 5 th valve (15) are opened, a backing pump (12) is started to pump until the vacuum degree is 1500Pa, a 9 th valve (10) and a molecular pump (11) are opened, a 6 th valve (6) is opened when the vacuum degree is 20Pa, a 4 th valve (4) of a first negative pressure standard leakage hole (5) is opened after the background of the system is stable, the sensitivity of the system is calibrated, and then the 4 th valve (4) is closed; or other gases are used as leakage-indicating gases, the operation steps are that a detected part is connected at an interface (1) of an inlet pipe, a 3 rd valve (2) and a 5 th valve (15) are opened, a backing pump (12) is started to pump until the vacuum degree is 1500Pa, a 9 th valve (10) is opened, when the vacuum degree is reduced to 20Pa, a 7 th valve (8) is opened, after the background of the system is stable, a 12 th valve (24) of a second negative pressure standard leakage hole (25) is opened, the sensitivity of the system is calibrated, and then the 12 th valve (24) is closed; leakage indicating gas on the high-pressure side of the detected part enters a dynamic leakage detecting chamber (3), then enters a mass spectrum chamber (7) along the pumping speed direction of the vacuum pump or against the pumping speed direction of the vacuum pump, and is comparedUnder the dynamic condition, after the vacuum leak hole valve is opened and the high-pressure side of the detected piece is filled with the leakage gas, the leakage gas ion current strength Q of the leakage gas is respectively given by the four-level mass spectrometer (9) under two different detection statesS、IL、IS、IO(ii) a ③ using formula QL=QS×
And calculating to obtain a leakage value of the detected piece.
5. The method of claim 2, wherein the step of detecting comprises: the mass spectrum vacuum dynamic leak detection method comprises a helium cover method, a stamping vacuum method and a blowing method.
6. The method of claim 2, wherein the step of detecting comprises: the mass spectrum vacuum accumulation leak detection method comprises the following steps: directly placing a small-sized fully-sealed detected piece into a vacuum accumulation chamber (22) or connecting the vacuum side of the small-sized fully-sealed detected piece with an inlet pipe interface (1), opening an 11 th valve (21), enabling leakage-indicating gas of the detected piece to enter the vacuum accumulation chamber (22), opening a 10 th valve (23), an 8 th valve (13) and an adsorption pump (14), closing a 5 th valve (15) and a 9 th valve (10), opening a 7 th valve (8), and enabling the leakage-indicating gas to enter a mass spectrum chamber (7); ② leakage information is accumulated toΔt=
Q min After second (Q min In order to be the sensitivity of the leak detector,q min in order to be sensitive to the leak detection of the system,ΣV i is the sum of the volumes of the test piece and the leak detection system,Scorresponding pumping speed), opening 5 th and 9 th valves (15 and 10) to continue leak detection, and during leak detection, an adsorption pump (14) pumps N2、O2、H2Active gas is pumped away but He, Ar and Kr inert gases cannot be pumped away, the inert gases are selected for leak detection, a quadrupole mass spectrometer (9) gives out vacuum leak hole opening and a detected pieceApplying an ion flux intensity value of a tracer gas, wherein RLIon current rise rate of leakage gas in mass spectrum chamber when static accumulation of leakage gas is applied in detected piece, RSAfter the vacuum leak hole is opened, the ion current rising rate of the leakage gas in the mass spectrum chamber during static accumulation is shown as ROAccumulating the ion current rising rate of the leakage gas for the system background in the connection process of the detected piece, wherein the unit is A/s;
③ using formula
And calculating to obtain the leakage amount of the detected piece.
7. A multiple leak-indicating gas leak detection system as defined in claim 1, wherein: the first negative pressure standard leak hole (5) is a nitrogen standard leak hole, and the second negative pressure standard leak hole (25) is other leakage gas standard leak holes.
8. A multiple leak indicator gas leak detection system as defined in claim 1, further comprising: the mass spectrum chamber (7) is a magnetic deflection mass spectrum chamber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210121199.8A CN114623983A (en) | 2022-02-09 | 2022-02-09 | Multi-element leakage-indicating gas leakage detection system and detection method thereof |
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| CN202210121199.8A CN114623983A (en) | 2022-02-09 | 2022-02-09 | Multi-element leakage-indicating gas leakage detection system and detection method thereof |
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