CN114361925B - Laser pulse characteristic measuring device and method based on fluorescence modulation sampling - Google Patents

Laser pulse characteristic measuring device and method based on fluorescence modulation sampling Download PDF

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CN114361925B
CN114361925B CN202111580155.3A CN202111580155A CN114361925B CN 114361925 B CN114361925 B CN 114361925B CN 202111580155 A CN202111580155 A CN 202111580155A CN 114361925 B CN114361925 B CN 114361925B
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light
fluorescence
mirror
laser
beam splitting
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CN114361925A (en
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黄沛
曹华保
付玉喜
袁浩
王向林
王虎山
刘柯阳
林华
王屹山
赵卫
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014Monitoring arrangements not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08059Constructional details of the reflector, e.g. shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

The invention relates to a laser pulse testing technology, in particular to a laser pulse characteristic measuring device and method based on fluorescence modulation sampling. The technical problems that the wavelength bandwidth is limited in the conventional laser pulse characteristic measurement, and different nonlinear crystals are needed in the measurement of laser pulses with different wavelengths are solved. The device of the invention generates laser by a laser, divides the laser into transmission light and reference light through a first beam splitting piece, the reference light sequentially passes through the third beam splitting sheet and the second reflecting mirror and then enters the concave silver mirror, and is focused to the fluorescent crystal to generate fluorescence, and the fluorescence is imaged on the camera through the focusing mirror; the transmitted light beam is divided into fundamental frequency light and signal light through the second beam splitting piece, the fundamental frequency light passing through the first reflecting mirror and the signal light passing through the delay line are combined through the wedge pair and then are incident into the concave silver mirror, and then are focused to the fluorescent crystal to generate fluorescence, and finally the fluorescence is imaged on the camera through the focusing mirror. The invention also provides a laser pulse characteristic measurement method based on fluorescence modulation sampling.

Description

Laser pulse characteristic measuring device and method based on fluorescence modulation sampling
Technical Field
The invention relates to a laser pulse testing technology, in particular to a laser pulse characteristic measuring device and method based on fluorescence modulation sampling.
Background
With the development of laser technology, femtosecond laser is widely applied to the fields of biomedicine, ultra-precise machining, information science and the like at present, and is used as a more accurate, more accurate and faster tool, so that a brand new technical means is provided for the fields, a plurality of inherent difficulties are solved, and the method becomes an important direction of discipline cross fusion. At present, ultrafast femtosecond lasers are mature, the wavelength can range from ultraviolet to middle infrared, but how to perform omnibearing diagnosis on femtosecond laser pulses in different wave bands is still a very challenging and important research content.
The pulse characteristics of laser light generally include information such as wavelength, pulse width, and phase in the time domain, and information such as spot quality, divergence angle, and energy and repetition frequency in the space domain. Different pulse characteristics need to be measured by using different instruments, wherein the characteristic measurement of a time domain is particularly complex, for ultra-fast laser pulses, a frequency resolution optical switching method and a spectrum phase coherent direct electric field reconstruction method are generally used internationally, wavelength and electric field information need to be reconstructed by utilizing a phase matching nonlinear effect, the two methods are limited by a phase matching mechanism, the wavelength bandwidth of response of nonlinear crystals is limited, and for the measurement of laser pulses with different wavelengths, the nonlinear crystals with special designs need to be replaced, so that the operation difficulty is increased, and the universality is not realized.
Disclosure of Invention
The invention aims to solve the problem that the pulse characteristic measurement of the existing laser is limited by a phase matching mechanism, so that the wavelength bandwidth to which a nonlinear crystal can respond is limited; meanwhile, the technical problem that the operation difficulty is increased because the nonlinear crystals with special designs are required to be replaced for measuring the laser pulses with different wavelengths is solved, and the laser pulse characteristic measuring device and method based on fluorescence modulation sampling are provided.
The invention replaces the nonlinear effect of phase matching with the multiphoton effect of fluorescence, and the generation mechanism of fluorescence is irrelevant to the wavelength of the excitation light source and is only relevant to the energy level structure of the fluorescent substance, so the invention has no limitation of laser wavelength bandwidth. The method has the advantages of simple operation, high measurement precision, wide detection wavelength and comprehensive detection information.
The technical scheme of the invention is as follows:
the utility model provides a laser pulse characteristic measuring device based on fluorescence modulation sampling which characterized in that: the device comprises a laser, a first beam splitting piece, a second beam splitting piece, a third beam splitting piece, a first reflecting mirror, a second reflecting mirror, a delay line, a wedge pair, a concave silver mirror, a fluorescent crystal, a focusing mirror and a CCD;
the first beam splitting sheet is arranged on a laser output light path of the laser and is used for splitting laser into transmitted light and reflected light; wherein the reflected light is used as reference light;
the third beam splitting piece and the second reflecting mirror are sequentially arranged on the reference light path and are used for making the reference light incident on the concave silver mirror;
the second beam splitting sheet is arranged on the transmission light path and is used for splitting transmission light into fundamental frequency light and signal light, the signal light is formed by transmission, and the fundamental frequency light is formed by reflection;
the first reflector is arranged on the fundamental frequency light path and is used for making fundamental frequency light incident on the wedge pair;
the delay line is arranged on the signal light path and is used for making the signal light incident on the wedge pair;
the fundamental frequency light and the signal light reach a wedge pair at the same time, and the wedge pair is used for combining the fundamental frequency light and the signal light and making the combined light incident on the concave silver mirror;
the reference light and the combined light after being focused by the concave silver mirror pass through the fluorescent crystal, the focusing mirror and the CCD in sequence;
the fluorescent crystal is used for generating fluorescence for the reflected light and the combined light;
the focusing mirror is used for focusing fluorescence onto the CCD for imaging.
Further, the laser is a femtosecond laser with a center wavelength of 1.3 μm.
Further, the delay line is composed of a third reflecting mirror and a fourth reflecting mirror which are placed on the piezoelectric ceramics.
Further, the fluorescent crystal is one of zinc oxide, diamond, fused quartz, magnesium oxide and monocrystalline silicon.
Further, the fluorescent crystal is zinc oxide.
Further, the zinc oxide thickness was 200 μm.
Further, the first beam splitting piece, the second beam splitting piece and the third beam splitting piece are all 50% beam splitting pieces;
the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror are all high reflecting mirrors, and the reflectivity is more than 99%;
the focal length of the concave silver mirror is 100mm;
the focal length of the focusing lens is 40mm;
the CCD is a silicon-based visible light camera.
Meanwhile, the invention also provides a laser pulse characteristic measuring method based on fluorescence modulation sampling, which is based on the device and is characterized by comprising the following steps:
step 1), a laser emits laser to be detected, and the laser is divided into reflected light and transmitted light after passing through a first beam splitting piece; wherein the reflected light is used as reference light;
step 2), the reference light is incident on a concave silver mirror through a third beam splitting sheet and a second reflecting mirror; focusing reference light to a fluorescent crystal through a concave silver mirror to generate fluorescence, marking the fluorescence as first fluorescence, and finally imaging the first fluorescence on a CCD through a focusing mirror to form a light spot, marking the light spot as a first fluorescence light spot;
the transmitted light is divided into fundamental frequency light and signal light through the second beam splitting sheet, the signal light is formed by transmission, and the fundamental frequency light is formed by reflection; the fundamental frequency light passes through the first reflecting mirror, the signal light passes through the delay line and then simultaneously enters the wedge pair, the wedge pair combines the fundamental frequency light and the signal light and then enters the concave silver mirror, the combined light is refocused to the fluorescent crystal through the concave silver mirror to generate fluorescence, the fluorescence is marked as second fluorescence, the second fluorescence finally forms a light spot on the CCD through the focusing mirror, and the light spot is marked as second fluorescence light spot;
step 3) sampling second fluorescent light spots with different coincidence degrees of the fundamental frequency light and the signal light under different delays by moving the delay line;
step 4) differentiating the second fluorescent light spot intensity and the first fluorescent light spot intensity with different coincidence degrees obtained in the step 3) to obtain fluorescent intensity under different time delays, and outputting fluorescent intensity curves obtained under different time delays;
and 5) carrying out inversion calculation on the fluorescence intensity curve by utilizing the perturbation theory of multiphoton to obtain the wavelength, the phase and the pulse width of the laser to be detected.
Further, in the step 2), the fluorescent crystal is zinc oxide;
the delay line is formed by placing a third reflecting mirror and a fourth reflecting mirror on piezoelectric ceramics.
Further, in step 1), the first beam splitting sheet is a 50% beam splitting sheet;
in the step 2), the second beam splitting sheet and the third beam splitting sheet are both 50% beam splitting sheets, the first reflecting mirror and the second reflecting mirror are both high reflecting mirrors with reflectivity larger than 99%, the focal length of the concave silver mirror is 100mm, the focal length of the focusing mirror is 40mm, and the CCD is a silicon-based visible light camera;
the thickness of the zinc oxide is 200 mu m;
the third reflector and the fourth reflector are both high-reflectivity reflectors and have a reflectivity of greater than 99%.
The invention has the beneficial effects that:
1. the invention replaces the nonlinear effect of phase matching with the multiphoton effect of fluorescence, and the generation mechanism of fluorescence is irrelevant to the wavelength of the excitation light source and is only relevant to the energy level structure of the fluorescent substance, so the invention has no limitation of laser wavelength bandwidth.
2. The invention replaces the nonlinear effect of phase matching by utilizing the multiphoton effect of fluorescence, and the nonlinear crystal is not required to be replaced for measuring the laser pulses with different wavelengths, so that the operation flow is simplified, and the measurement is accurate and efficient.
3. The method has the advantages of simple operation, high measurement precision, wide detection wavelength and comprehensive detection information.
Drawings
FIG. 1 is a schematic view of an optical path of a laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to the present invention;
FIG. 2 is a plot of the resulting fluorescence spot of an embodiment of the present invention;
FIG. 3 shows fluorescence intensities obtained at different delays according to an embodiment of the present invention;
FIG. 4 shows the wavelength and spectral phase of a laser to be measured obtained according to an embodiment of the present invention;
fig. 5 shows a pulse width of a laser to be measured obtained according to an embodiment of the present invention.
Reference numerals illustrate:
1-laser, 2-first beam splitter, 3-third beam splitter, 4-second reflector, 5-second beam splitter, 6-first reflector, 7-third reflector, 8-fourth reflector, 9-delay line, 10-wedge pair, 11-concave silver mirror, 12-fluorescent crystal, 13-focusing mirror and 14-CCD.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and examples.
As shown in fig. 1, the laser pulse characteristic measuring device based on fluorescence modulation sampling of the present invention includes a laser 1, a first beam splitter 2, a second beam splitter 5, a third beam splitter 3, a first mirror 6, a second mirror 4, a delay line 9, a wedge pair 10, a concave silver mirror 11, a fluorescent crystal 12, a focusing mirror 13, and a CCD14. The fluorescent crystal 12 is one of zinc oxide, diamond, fused quartz, magnesium oxide and monocrystalline silicon, other crystals capable of generating fluorescence can be used, and the fluorescence wavelengths of different materials are different. In this example, zinc oxide with a thickness of 200 μm was used as the fluorescent crystal, and the fluorescence generated was 390nm. In the embodiment, the first beam splitting piece 2, the second beam splitting piece 5 and the third beam splitting piece 3 are all 50% beam splitting pieces; the first reflecting mirror 6, the second reflecting mirror 4, the third reflecting mirror 7 and the fourth reflecting mirror 8 are all high reflecting mirrors, and the reflectivity is more than 99%; the focal length of the concave silver mirror 11 is 100mm; the focal length of the focusing mirror 13 is 40mm; the camera CCD14 is a silicon-based visible light camera.
The first beam splitting sheet 2 is arranged on a laser output light path of the laser 1 and is used for splitting laser light into transmitted light and reflected light; wherein the reflected light is reference light. In this embodiment, the laser 1 is a femtosecond laser with a center wavelength of 1.3 μm. The third beam splitting sheet 3 and the second reflecting mirror 4 are sequentially arranged on the reference light path and are used for making the reference light incident on the concave silver mirror 11; the reference light is focused to a fluorescent crystal 12 through a concave silver mirror 11 to generate fluorescence, and the generated fluorescence is imaged through a focusing mirror 13 to form a fluorescent light spot on a visible light camera.
The second beam splitting sheet 5 is disposed on the transmission light path and is used for splitting the transmission light into fundamental frequency light and signal light, wherein the signal light is formed by transmission and the fundamental frequency light is formed by reflection; the first reflecting mirror 6 is arranged on the fundamental frequency optical path and is used for making the fundamental frequency light incident on the wedge pair 10; the delay line 9 is arranged on the signal light path and is used for making the signal light incident on the wedge pair 10; the delay line 9 is composed of a third mirror 7 and a fourth mirror 8 placed on the piezoelectric ceramic. The fundamental frequency light passing through the first reflecting mirror 6 and the signal light passing through the delay line 9 reach the wedge pair 10 at the same time, the wedge pair 10 combines the fundamental frequency light and the signal light, the combined light is incident on the concave silver mirror 11, the combined light is focused to the zinc oxide fluorescent crystal through the concave silver mirror 11 to generate fluorescence, and the generated fluorescence is imaged through the focusing mirror 13 to form a fluorescent light spot on the visible light camera.
The invention also provides a method for measuring the laser pulse characteristics based on the device, which comprises the following steps:
step 1), a laser 1 emits laser to be detected, and the laser is divided into reflected light and transmitted light after passing through a first beam splitting piece 2; wherein the reflected light is used as reference light; the laser in this embodiment employs a femtosecond laser with a center wavelength of 1.3 μm.
Step 2), the reference light is incident on a concave silver mirror 11 through a third beam splitting sheet 3 and a second reflecting mirror 4; the reference light is focused to a fluorescent crystal 12 through a concave silver mirror 11 to generate fluorescence, which is marked as first fluorescence, and the first fluorescence is finally imaged on a visible light camera through a focusing mirror 13 to form a light spot, which is marked as first fluorescence light spot.
The transmitted light is split into fundamental frequency light and signal light by the second beam splitter 5, the signal light is formed by transmission, and the fundamental frequency light is formed by reflection. The fundamental frequency light passes through the first reflector 6, and the signal light passes through the delay line 9 and then simultaneously enters the wedge pair 10; the wedge pair 10 combines the fundamental frequency light and the signal light and then makes the fundamental frequency light and the signal light incident on the concave silver mirror 11; the combined light is refocused to the fluorescent crystal 12 through the concave silver mirror 11 to generate fluorescence, which is marked as second fluorescence, and the second fluorescence is finally imaged on the visible light camera through the focusing mirror 13 to form a light spot, which is marked as second fluorescence light spot. The wedge pair does not absorb the transmitted fundamental frequency light basically, and the energy of the signal light reflected by the wedge pair is in the range of one thousandth to one hundredth. When the zinc oxide fluorescent crystal is arranged, the energy ratio of the reference light to the fundamental frequency light is 1:1, and the energy of the signal light is one thousandth to one hundredth of the other two beams of light. The first fluorescent light spot and the second fluorescent light spot acquired by the visible light camera are shown in fig. 2.
And 3) sampling the second fluorescent light spots with different coincidence degrees of the fundamental frequency light and the signal light under different delays by moving the delay line 9.
And 4) differentiating the second fluorescent light spot intensity and the first fluorescent light spot intensity with different coincidence degrees obtained in the step 3), finally obtaining the fluorescent light intensity under different time delays, and outputting a fluorescent light intensity curve obtained under different time delays, as shown in figure 3.
Step 5) carrying out inversion calculation on the fluorescence intensity curve by utilizing a multiphoton perturbation theory to obtain the wavelength and the phase of the laser to be detected, wherein the wavelength range is 1.2-1.5 mu m, and the phase is less than 10rad, as shown in figure 4; the pulse width 37fs of the laser to be measured is shown in fig. 5. By utilizing the theory, the wavelength of laser to be detected is required to be 2.5 times greater than the fluorescence wavelength, in the experiment, the fluorescence wavelength of the zinc oxide band gap is 390nm, so that the pulse characteristics of laser pulses with the wavelength of greater than 975nm can be measured.

Claims (10)

1. A laser pulse characteristic measuring device based on fluorescence modulation sampling is characterized in that: the device comprises a laser (1), a first beam splitting sheet (2), a second beam splitting sheet (5), a third beam splitting sheet (3), a first reflecting mirror (6), a second reflecting mirror (4), a delay line (9), a wedge pair (10), a concave silver mirror (11), a fluorescent crystal (12), a focusing mirror (13) and a CCD (14);
the first beam splitting sheet (2) is arranged on a laser output light path of the laser (1) and is used for splitting laser into transmitted light and reflected light; wherein the reflected light is used as reference light;
the third beam splitting sheet (3) and the second reflecting mirror (4) are sequentially arranged on the reference light path and are used for making the reference light incident on the concave silver mirror (11);
the second beam splitting sheet (5) is arranged on the transmission light path and is used for splitting transmission light into fundamental frequency light and signal light, the signal light is formed by transmission, and the fundamental frequency light is formed by reflection;
the first reflecting mirror (6) is arranged on the fundamental frequency light path and is used for making fundamental frequency light incident on the wedge pair (10);
the delay line (9) is arranged on the signal light path and is used for making the signal light incident on the wedge pair (10);
the fundamental frequency light and the signal light reach the wedge pair (10) at the same time, and the wedge pair (10) is used for combining the fundamental frequency light and the signal light and making the combined light incident on the concave silver mirror (11);
the reference light and the combined light focused by the concave silver mirror (11) sequentially pass through the fluorescent crystal (12), the focusing mirror (13) and the CCD (14);
the fluorescent crystal (12) is used for generating fluorescence for the reflected light and the combined light;
the focusing mirror (13) is used for focusing fluorescence onto the CCD (14) for imaging.
2. The laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to claim 1, wherein: the laser (1) is a femtosecond laser with a center wavelength of 1.3 μm.
3. The laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to claim 2, wherein: the delay line (9) is formed by placing a third reflecting mirror (7) and a fourth reflecting mirror (8) on piezoelectric ceramics.
4. A laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to claim 3, wherein:
the fluorescent crystal (12) is one of zinc oxide, diamond, fused quartz, magnesium oxide and monocrystalline silicon.
5. The laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to claim 4, wherein: the fluorescent crystal (12) is zinc oxide.
6. The laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to claim 5, wherein: the zinc oxide thickness was 200 μm.
7. The laser pulse characteristic measuring apparatus based on fluorescence modulation sampling according to claim 6, wherein: the first beam splitting piece (2), the second beam splitting piece (5) and the third beam splitting piece (3) are all 50% beam splitting pieces;
the first reflecting mirror (6), the second reflecting mirror (4), the third reflecting mirror (7) and the fourth reflecting mirror (8) are all high reflecting mirrors, and the reflectivity is more than 99%;
the focal length of the concave silver mirror (11) is 100mm;
the focal length of the focusing mirror (13) is 40mm;
the CCD (14) is a silicon-based visible light camera.
8. A method for measuring laser pulse characteristics based on fluorescence modulation sampling, based on the device of any one of claims 1-7, characterized by comprising the steps of:
step 1), a laser (1) emits laser to be detected, and the laser is divided into reflected light and transmitted light after passing through a first beam splitting sheet (2); wherein the reflected light is used as reference light;
step 2), the reference light is incident on a concave silver mirror (11) through a third beam splitting sheet (3) and a second reflecting mirror (4); the reference light is focused to a fluorescent crystal (12) through a concave silver mirror (11) to generate fluorescence, the fluorescence is marked as first fluorescence, and the first fluorescence is finally imaged on a CCD (14) through a focusing mirror (13) to form a light spot, and the light spot is marked as first fluorescence light spot;
the transmitted light is divided into fundamental frequency light and signal light through a second beam splitting sheet (5), the signal light is formed by transmission, and the fundamental frequency light is formed by reflection; the fundamental frequency light passes through a first reflecting mirror (6), the signal light passes through a delay line (9) and then simultaneously enters a wedge pair (10), the wedge pair (10) combines the fundamental frequency light and the signal light and then enters a concave silver mirror (11), the combined light is refocused to a fluorescent crystal (12) through the concave silver mirror (11) to generate fluorescence, the fluorescence is marked as second fluorescence, the second fluorescence is finally imaged on a CDD (14) through a focusing mirror (13) to form a light spot, and the light spot is marked as second fluorescence light spot;
step 3) sampling second fluorescent light spots with different coincidence degrees of the fundamental frequency light and the signal light under different delays by moving the delay line (9);
step 4) differentiating the second fluorescent light spot intensity and the first fluorescent light spot intensity with different coincidence degrees obtained in the step 3) to obtain fluorescent intensity under different time delays, and outputting fluorescent intensity curves obtained under different time delays;
and 5) carrying out inversion calculation on the fluorescence intensity curve by utilizing the perturbation theory of multiphoton to obtain the wavelength, the phase and the pulse width of the laser to be detected.
9. The method for measuring the laser pulse characteristics based on fluorescence modulation sampling according to claim 8, wherein the method comprises the following steps: in the step 2), the fluorescent crystal (12) is zinc oxide;
the delay line (9) is formed by placing a third reflecting mirror (7) and a fourth reflecting mirror (8) on piezoelectric ceramics.
10. The method for measuring the laser pulse characteristics based on fluorescence modulation sampling according to claim 9, wherein the method comprises the following steps: in the step 1), the first beam splitting sheet (2) is a 50% beam splitting sheet;
in the step 2), the second beam splitting sheet (5) and the third beam splitting sheet (3) are both 50% beam splitting sheets, the first reflecting mirror (6) and the second reflecting mirror (4) are both high-reflecting mirrors with reflectivity larger than 99%, the focal length of the concave silver mirror (11) is 100mm, the focal length of the focusing mirror (13) is 40mm, and the CCD (14) is a silicon-based visible light camera;
the thickness of the zinc oxide is 200 mu m;
the third reflecting mirror (7) and the fourth reflecting mirror (8) are high reflecting mirrors, and the reflectivity is more than 99%.
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