CN111816633A - 半导体装置及半导体装置的制造方法 - Google Patents
半导体装置及半导体装置的制造方法 Download PDFInfo
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- CN111816633A CN111816633A CN202010264074.1A CN202010264074A CN111816633A CN 111816633 A CN111816633 A CN 111816633A CN 202010264074 A CN202010264074 A CN 202010264074A CN 111816633 A CN111816633 A CN 111816633A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 250
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000004020 conductor Substances 0.000 claims abstract description 133
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Abstract
目的在于提供如下技术,即,针对半导体装置,能够在不损害可靠性的情况下实现小型化。半导体装置具有:绝缘基板(5),其具有电路图案(8);多个半导体芯片(10、11),它们搭载于电路图案(8)之上;导线(14),其将多个半导体芯片(10、11)之间、及半导体芯片(10、11)和电路图案(8)之间分别进行连接;以及作为导体的导电材料(15),其与导线(14)形成为一体。
Description
技术领域
本发明涉及在发电及送电至有效的能量利用及再生为止的所有情况下利用的半导体装置。
背景技术
在大量的功率半导体装置中,将由Al或Cu等构成的导线用于半导体芯片和电路图案的连接、及多个半导体芯片间的连接。但是,存在如下问题,即,在将半导体装置小型化时,导线的根数减少,由此每1根导线的电流密度增加,导线过度地产生发热。
例如专利文献1公开了对配线的电流密度进行抑制的方法。专利文献1所记载的配线方法是在对堆叠的多个半导体芯片进行配线的情况下应用的方法。在该方法中,在各半导体芯片的侧面形成金导线,使用导电性膏将多个半导体芯片之间连接。
专利文献1:日本特开2009-27041号公报
但是,如果想要将专利文献1所记载的方法用于流过大于或等于几十安培且小于或等于几百安培的电流的功率半导体装置,则由于仅通过导电性膏进行半导体芯片和电路图案之间的连接、及多个半导体芯片之间的连接,所以与半导体芯片和电路图案之间的连接、及多个半导体芯片之间的连接相关的阻抗变大。并且,存在如下问题,即,由于形成的导电性膏的形状不良或与导体的接触不良即润湿不良等,有可能产生断线,其结果,产品的特性降低,因此容易产生产品品质的缺陷。
发明内容
因此,本发明的目的在于提供如下技术,即,针对半导体装置,能够在不损害可靠性的情况下实现小型化。
本发明涉及的半导体装置具有:绝缘基板,其具有电路图案;
多个半导体芯片,它们搭载于所述电路图案之上;导线,其将多个所述半导体芯片之间、及所述半导体芯片和所述电路图案之间分别进行连接;以及导体,其与所述导线形成为一体。
发明的效果
根据本发明,由于在多个半导体芯片之间、及半导体芯片和电路图案之间,除了连接导线之外还连接导体,因此能够减少每1根导线的电流密度,所以能够减少导线的根数。
由于除了连接导线之外还连接导体,因此能够减少与多个半导体芯片之间、及半导体芯片和电路图案之间的连接相关的配线的阻抗,并且能够减少断线的可能性。由此,针对半导体装置,能够在不损害可靠性的情况下实现小型化。
附图说明
图1是实施方式1涉及的半导体装置的剖视图。
图2是半导体装置所具有的半导体芯片及其周边的剖视图。
图3是半导体芯片及其周边的俯视图。
图4是实施方式2涉及的半导体装置所具有的半导体芯片及其周边的剖视图。
图5是半导体芯片及其周边的俯视图。
图6是用于说明实施方式3涉及的半导体装置的制造方法的剖视图。
图7是实施方式3涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
图8是实施方式4涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
图9是实施方式5涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
图10是实施方式6涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
图11是没有设置导体的情况下的半导体芯片及其周边的俯视图。
图12是实施方式7涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
图13是实施方式8涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
图14是用于说明实施方式9涉及的半导体装置的制造方法的俯视图。
图15是实施方式10涉及的半导体装置所具有的半导体芯片及其周边的俯视图。
标号的说明
5绝缘基板,8电路图案,10、11半导体芯片,14导线,15导电材料,16、17板状导电材料,20、21、22导体,24带状导线。
具体实施方式
<实施方式1>
下面,使用附图对本发明的实施方式1进行说明。图1是实施方式1涉及的半导体装置的剖视图。图2是半导体装置所具有的半导体芯片及其周边的剖视图,具体而言,是在图1中由虚线包围的部分的放大图。图3是半导体芯片及其周边的俯视图。
如图1所示,半导体装置为功率模块,其具有壳体1、基座板4、绝缘基板5、半导体芯片10、11、导线14、信号端子2、电极3、凝胶12、盖13及作为导体20的导电材料15。
壳体1具有在俯视观察时呈矩形框状的周壁部1a,该壳体1将基座板4、绝缘基板5、半导体芯片10、11、导线14、及导电材料15围绕起来。基座板4例如由Cu等金属形成,在俯视观察时形成为矩形状。基座板4以绝缘基板5的上表面的一部分露出的方式固定于壳体1的底面。
绝缘基板5通过焊料9固定于基座板4的上表面,绝缘基板5具有陶瓷板7、电路图案8、及金属图案6。电路图案8形成于陶瓷板7的上表面,金属图案6形成于陶瓷板7的下表面。
半导体芯片10、11由SiC等宽带隙半导体形成,经由焊料9搭载于电路图案8的上表面。半导体芯片10例如为IGBT(Insulated Gate Bipolar Transistor),半导体芯片11例如为二极管。
信号端子2及电极3安装于壳体1的周壁部1a。导线14将半导体芯片10和信号端子2之间、半导体芯片10、11之间、半导体芯片11和电路图案8之间、及半导体芯片11和电极3之间分别进行连接。
凝胶12填充于壳体1的内部,将基座板4的上表面的一部分、绝缘基板5、半导体芯片10、11、导线14、及导电材料15封装。盖13安装于壳体1的周壁部1a中的上端部的内周部。
下面,对导电材料15进行说明。如图2和图3所示,导电材料15沿多个导线14的长度方向的上侧与该导线14形成为一体,该多个导线14将半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接。这里,由于导电材料15的线膨胀系数比导线14的线膨胀系数小,因此能够对半导体芯片10、11工作时的导线14的伸缩量进行抑制。
下面,对导电材料15的形成方法进行说明。首先,在将多个导线14键合后通过滴涂器等沿导线14的长度方向的上侧对导电性膏进行涂敷。接着,例如通过进行加热处理而使导电性膏固化,从而形成导电材料15。由此,导电材料15将多个导线14电连接。
此外,在将铝导线用于导线14的情况下,不能够确保与导电性膏的润湿性。因此,优选采用具有由Al构成的基材和覆盖基材的由Ni或Cu构成的覆膜的铝导线。
另外,通过选择半导体芯片10、11的表面的金属与导电性膏润湿性良好的组合(例如芯片表面:Cu或Au,导电性膏:焊料的组合),针对半导体芯片10、11的与导线14的连接部位的周边部也能够对导电性膏进行涂敷。
如上所述,实施方式1涉及的半导体装置具有:绝缘基板5,其具有电路图案8;多个半导体芯片10、11,它们搭载于电路图案8之上;导线14,其将多个半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接;以及导体20,其与导线14形成为一体。
由于在多个半导体芯片10、11之间、及半导体芯片11和电路图案8之间,除了连接导线14之外还连接作为导体20的导电材料15,因此能够减少每1根导线的电流密度,所以能够减少导线14的根数。
由于除了连接导线14之外还连接导电材料15,因此能够减少与多个半导体芯片10、11之间、及半导体芯片11和电路图案8之间的连接相关的阻抗,并且能够减少断线的可能性。由此,针对半导体装置,能够在不损害可靠性的情况下实现小型化。
另外,即使是根数少的导线14也能够将电流密度抑制得低,能够实现半导体装置的设计自由度的提高。
由于导体20是通过将导电性膏涂敷于导线14并固化而形成的,因此能够容易地在导线14形成导体20。
当在半导体芯片10、11的与导线14的连接部位的周边部也形成有导电材料15的情况下,由于在半导体芯片10、11刚刚发热之后通过导电材料15将热量释放,因此得到刚刚发热之后的温度上升的降低效果。另外,在半导体装置的可靠性方面能够使P/C性提高。
虽然在半导体芯片10、11工作时(温度变化时)在它们的界面产生应力,但在导电材料15的线膨胀系数比导线14的线膨胀系数小的情况下,能够对半导体芯片10、11工作时的导线14的伸缩量进行抑制,因此能够对在半导体芯片10、11和导线14的界面产生的机械应力进行抑制,能够进一步使P/C性提高。
<实施方式2>
接着,对实施方式2涉及的半导体装置进行说明。图4是实施方式2涉及的半导体装置所具有的半导体芯片10、11及其周边的剖视图。图5是半导体芯片10、11及其周边的俯视图。此外,在实施方式2中,对与实施方式1中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图4和图5所示,在实施方式2中,替代导线14,半导体装置具有带状导线24。带状导线24由将Al和Cu等不同种类金属接合后的复合材料构成。
作为导体20的导电材料15沿带状导线24的长度方向的上侧与该带状导线24形成为一体,该带状导线24将半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接。由于相对于带状导线24的导电材料15的形成方法与实施方式1的情况相同,因此省略说明。
如上所述,就实施方式2涉及的半导体装置而言,由于导线为带状导线24,因此得到与实施方式1的情况相同的效果。
<实施方式3>
接着,对实施方式3涉及的半导体装置进行说明。图6是用于说明实施方式3涉及的半导体装置的制造方法的剖视图。具体而言,图6(a)是表示将导电性膏15a涂敷于与半导体芯片10、11及电路图案8连接的导线14的工序的剖视图。图6(b)是表示在与半导体芯片10、11及电路图案8连接的导线14形成导体21的工序的剖视图。图7是实施方式3涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。此外,在实施方式3中,对与实施方式1、2中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图6(a)、(b)和图7所示,在实施方式3中,导体21具有:导电材料15,其形成于导线14;以及板状导电材料16,其经由导电材料15固定于导线14。
导体21与将半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接的导线14形成为一体。具体而言,导电材料15形成于将半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接的导线14中的位于半导体芯片10、11及电路图案8处的部位。板状导电材料16载置于多个导电材料15,经由多个导电材料15固定于多个导线14。
下面,对导体21的形成方法进行说明。首先,如图6(a)所示,在将多个导线14键合后,在将半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接的导线14中的位于半导体芯片10、11及电路图案8处的部位,通过滴涂器50对导电性膏15a进行涂敷。接着,如图6(b)所示,经由导电性膏15a将板状导电材料16载置于导线14。接着,例如通过进行加热处理而使导电性膏15a固化,从而板状导电材料16经由导电材料15固定于多个导线14而形成导体21。由此,导体21将多个导线14电连接。此外,实施方式3涉及的半导体装置也可以具有在实施方式1、2中说明过的导体20。
如上所述,就实施方式3涉及的半导体装置而言,导体21具有:导电材料15,其形成于导线14;以及板状导电材料16,其经由导电材料15固定于导线14。因此,能够得到与实施方式1的情况相同的效果。此外,通过采用具有厚度的板状导电材料作为板状导电材料16,会预期半导体芯片10、11工作时的电流密度的减轻效果的增加。
由于导体21是通过在将导电性膏15a涂敷于导线14后,经由导电性膏15a将板状导电材料16载置于导线14,使导电性膏15a固化而形成的,因此能够容易地在导线14形成导体21。
<实施方式4>
接着,对实施方式4涉及的半导体装置进行说明。图8是实施方式4涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。此外,在实施方式4中,对与实施方式1~3中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图8所示,在实施方式4中,1个导体21连接于被并联连接的多个半导体芯片10、11。具体而言,3组半导体芯片10、11并联连接,1个导体21连接于3组半导体芯片10、11和电路图案8。此外,由于相对于导线14的导体21的形成方法与实施方式3的情况相同,因此省略说明。
如上所述,就实施方式4涉及的半导体装置而言,由于多个半导体芯片10、11以多组并联连接,通过1个导体21将多组的多个半导体芯片之间10、11连接,因此能够得到与实施方式3的情况相同的效果。
<实施方式5>
接着,对实施方式5涉及的半导体装置进行说明。图9是实施方式5涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。此外,在实施方式5中,对与实施方式1~4中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图9所示,在实施方式5中,导体单独地连接于被并联连接的多组的多个半导体芯片10、11。具体而言,3组半导体芯片10、11并联连接,3个导体21分别连接于3组半导体芯片10、11和电路图案8。此外,由于相对于导线14的导体21的形成方法与实施方式3的情况相同,因此省略说明。
如上所述,就实施方式5涉及的半导体装置而言,由于导体21单独地连接于被并联连接的多组的多个半导体芯片10、11,因此能够得到与实施方式3的情况相同的效果。
<实施方式6>
接着,对实施方式6涉及的半导体装置进行说明。图10是实施方式6涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。图11是没有设置导体22的情况下的半导体芯片10、11及其周边的俯视图。此外,在实施方式6中,对与实施方式1~5中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图10所示,在实施方式6中,对于被并联连接的多组的多个半导体芯片10、11,通过导体22使相邻的半导体芯片10之间及相邻的半导体芯片11之间的导线14导通。具体而言,导体22在相邻的半导体芯片10及相邻的半导体芯片11处,与一个半导体芯片10、11处的位于另一个半导体芯片10、11侧的导线14、另一个半导体芯片10、11处的位于一个半导体芯片10、11侧的导线14形成为一体。导体22具有导电材料15(参照图6)和板状导电材料17。
在没有设置导体22的情况下,为了对阻尼振荡进行抑制,如图11所示,实施将阻尼振荡抑制用的导线14a连接于被并联连接的3组半导体芯片10之间这一对策。但是,需要确保用于对阻尼振荡抑制用的导线14a进行连接的空间,成为半导体装置的小型化的妨碍。
相对于此,就实施方式6涉及的半导体装置而言,导体22在相邻的半导体芯片10、11处,与一个半导体芯片10、11处的位于另一个半导体芯片10、11侧的导线14、另一个半导体芯片10、11处的位于一个半导体芯片10、11侧的导线14形成为一体。
因此,不需要确保用于对阻尼振荡抑制用的导线14a进行连接的空间。由此,在采取阻尼振荡对策的情况下,也能够实现半导体装置的小型化。
<实施方式7>
接着,对实施方式7涉及的半导体装置进行说明。图12是实施方式7涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。此外,在实施方式7中,对与实施方式1~6中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图12所示,实施方式7是将实施方式5和实施方式6组合后的结构。即,在实施方式7中,导体21单独地连接于被并联连接的多组的多个半导体芯片10、11,并且对于被并联连接的多组的多个半导体芯片10、11,通过导体22使相邻的半导体芯片10之间及相邻的半导体芯片11之间的导线14导通。
如上所述,由于实施方式7涉及的半导体装置具有上述结构,因此能够得到实施方式5的情况下和实施方式6的情况下的效果。
<实施方式8>
接着,对实施方式8涉及的半导体装置进行说明。图13是实施方式8涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。此外,在实施方式8中,对与实施方式1~7中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图13所示,在实施方式8中,多个导线14连续地且彼此成角度地进行配线,导体21沿连续地配线的多个导线14的长度方向与导线14形成为一体。
在将导线14连接于半导体芯片10、11和电路图案8时,有时需要如θ所示地形成角度。在连接导线14时形成角度的情况下,为了避免导线14和导线键合工具的接触,与没有形成角度的情况相比导线14的根数趋于减少,因此有时导线14的电流密度增加。
相对于此,就实施方式8涉及的半导体装置而言,导线14为多个,多个导线14连续地且彼此成角度地进行配线,导体21沿连续地配线的多个导线14的长度方向与导线14形成为一体。因此,得到与实施方式1的情况相同的效果,所以即使是根数少的导线14也能够将电流密度抑制得低。
<实施方式9>
接着,对实施方式9涉及的半导体装置进行说明。图14是用于说明实施方式9涉及的半导体装置的制造方法的俯视图。具体而言,图14(a)是表示将板状导电材料16连接于半导体芯片11和电路图案8之间之前的状态的俯视图。图14(b)是表示将板状导电材料16连接于半导体芯片11和电路图案8之间之后的状态的俯视图。此外,在实施方式9中,对与实施方式1~8中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图14(b)所示,在实施方式9中,不通过导线14将半导体芯片11和电路图案8之间连接,而通过板状导电材料16连接。
半导体装置具有:绝缘基板5,其具有电路图案8;多个半导体芯片10、11,它们搭载于电路图案8之上;以及板状导电材料16,其将半导体芯片11和电路图案8之间连接。
接着,对板状导电材料16的连接方法进行说明。如图14(a)所示,首先,在将多个导线14键合后,以与实施方式3的情况相同的方法在半导体芯片10、11之间形成导体21。接着,如图14(b)所示,在将导电性膏涂敷于半导体芯片11和电路图案8之间的连接部位后,经由导电性膏将板状导电材料16载置于连接部位。接着,例如通过进行加热处理而使导电性膏固化,从而将板状导电材料16连接于半导体芯片11和电路图案8之间。
此外,也可以替代与导线14一体化后的导体21,通过与导线14一体化后的导体20将半导体芯片10、11之间连接。另外,也可以不通过与导线14一体化后的导体21将半导体芯片10、11之间连接,而通过板状导电材料16连接。另外,也可以通过与导线14一体化后的导体20或导体21将半导体芯片11和电路图案8之间连接,通过板状导电材料16将半导体芯片10、11之间连接。
如上所述,实施方式9涉及的半导体装置具有:绝缘基板5,其具有电路图案8;多个半导体芯片10、11,它们搭载于电路图案8之上;以及板状导电材料16,其将多个半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接。
因此,能够得到与实施方式1的情况相同的效果。特别地,由于相对于难以进行使用了导线14的配线的布局也能够形成配线,因此能够进一步实现半导体装置的设计自由度的提高及小型化。
板状导电材料16是通过在将导电性膏涂敷于多个半导体芯片10、11之间的连接部位、及半导体芯片11和电路图案8之间的连接部位后,经由导电性膏将板状导电材料16载置于连接部位,使导电性膏固化而进行连接的。因此,能够将板状导电材料16容易地连接于多个半导体芯片10、11之间的连接部位、及半导体芯片11和电路图案8之间的连接部位。
还具有将多个半导体芯片10、11之间、及半导体芯片11和电路图案8之间分别进行连接的导线14、与导线14形成为一体的导体20或导体21。因此,通过使板状导电材料16和导体20或导体21并存,进一步提高了半导体装置的设计自由度。
<实施方式10>
接着,对实施方式10涉及的半导体装置进行说明。图15是实施方式10涉及的半导体装置所具有的半导体芯片10、11及其周边的俯视图。此外,在实施方式10中,对与实施方式1~9中说明过的结构要素相同的结构要素标注相同标号并省略说明。
如图15所示,在实施方式10中,1个板状导电材料16连接于被并联连接的多个半导体芯片10、11。具体而言,3组半导体芯片10、11并联连接,1个板状导电材料16连接于3组半导体芯片10、11和电路图案8。此外,由于板状导电材料16的连接方法与实施方式9的情况相同,因此省略说明。
另外,与实施方式9的情况相同地,例如,也可以通过1个板状导电材料16将配置于电路图案8侧的2组的多个半导体芯片10、11之间、及半导体芯片10、11和电路图案8之间连接,通过与导线14一体化后的导体20或导体21将剩余的1组的多个半导体芯片10、11之间连接。即,1个板状导电材料16和导体20或导体21也可以并存。
如上所述,就实施方式10涉及的半导体装置而言,由于多个半导体芯片10、11以多组并联连接,通过1个板状导电材料16将多组的多个半导体芯片10、11之间、及半导体芯片10、11和电路图案8之间连接。
并且,还具有将多个半导体芯片10、11之间、及半导体芯片10、11和电路图案8之间分别进行连接的导线14、与导线14形成为一体的导体20或导体21。由此,能够得到与实施方式9的情况相同的效果。
此外,本发明可以在其发明的范围内将各实施方式自由地组合,对各实施方式适当进行变形、省略。
Claims (17)
1.一种半导体装置,其具有:
绝缘基板,其具有电路图案;
多个半导体芯片,它们搭载于所述电路图案之上;
导线,其将多个所述半导体芯片之间、及所述半导体芯片和所述电路图案之间分别进行连接;以及
导体,其与所述导线形成为一体。
2.根据权利要求1所述的半导体装置,其中,
所述导体也形成于所述半导体芯片的与所述导线的连接部位的周边部。
3.根据权利要求1所述的半导体装置,其中,
所述导体的线膨胀系数比所述导线的线膨胀系数小。
4.根据权利要求1所述的半导体装置,其中,
所述导线具有由Al构成的基材和覆盖所述基材的由Ni或Cu构成的覆膜。
5.根据权利要求1所述的半导体装置,其中,
所述导体为导电材料。
6.根据权利要求1所述的半导体装置,其中,
所述导线为带状导线。
7.根据权利要求1所述的半导体装置,其中,
所述导体具有:导电材料,其形成于所述导线;以及板状导电材料,其经由所述导电材料固定于所述导线。
8.根据权利要求7所述的半导体装置,其中,
多个所述半导体芯片以多组并联连接,
通过1个所述导体将多组的多个所述半导体芯片之间连接。
9.根据权利要求1所述的半导体装置,其中,
所述导体在相邻的所述半导体芯片处,与一个所述半导体芯片处的位于另一个所述半导体芯片侧的所述导线、另一个所述半导体芯片处的位于一个所述半导体芯片侧的所述导线形成为一体,
所述导体具有:导电材料,其形成于所述导线;以及板状导电材料,其经由所述导电材料固定于所述导线。
10.根据权利要求1所述的半导体装置,其中,
所述导线为多个,
多个所述导线连续地且彼此成角度地进行配线,
所述导体沿连续地配线的多个所述导线的长度方向与所述导线形成为一体。
11.一种半导体装置,其具有:
绝缘基板,其具有电路图案;
多个半导体芯片,它们搭载于所述电路图案之上;以及
板状导电材料,其将多个所述半导体芯片之间、及所述半导体芯片和所述电路图案之间分别进行连接。
12.根据权利要求11所述的半导体装置,其中,
多个所述半导体芯片以多组并联连接,
通过1个所述板状导电材料将多组的多个所述半导体芯片之间、及所述半导体芯片和所述电路图案之间连接。
13.根据权利要求11或12所述的半导体装置,其中,
还具有:导线,其将多个所述半导体芯片之间、及所述半导体芯片和所述电路图案之间分别进行连接;以及
导体,其与所述导线形成为一体。
14.根据权利要求1至13中任一项所述的半导体装置,其中,
多个所述半导体芯片由宽带隙半导体形成。
15.一种半导体装置的制造方法,其为权利要求5所记载的半导体装置的制造方法,其中,
所述导体是通过将导电性膏涂敷于所述导线并固化而形成的。
16.一种半导体装置的制造方法,其为权利要求7所记载的半导体装置的制造方法,其中,
所述导体是通过在将导电性膏涂敷于所述导线后,经由所述导电性膏将所述板状导电材料载置于所述导线,使所述导电性膏固化而形成的。
17.一种半导体装置的制造方法,其为权利要求11所记载的半导体装置的制造方法,其中,
所述板状导电材料是通过在将导电性膏涂敷于多个所述半导体芯片之间的连接部位、及所述半导体芯片和所述电路图案之间的连接部位后,经由所述导电性膏将所述板状导电材料载置于所述连接部位,使所述导电性膏固化而进行连接的。
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US20200328178A1 (en) | 2020-10-15 |
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