CN111215970A - Ultrasonic cavitation assisted ultrasonic magnetic polishing method for microstructure mold - Google Patents
Ultrasonic cavitation assisted ultrasonic magnetic polishing method for microstructure mold Download PDFInfo
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- CN111215970A CN111215970A CN202010078242.8A CN202010078242A CN111215970A CN 111215970 A CN111215970 A CN 111215970A CN 202010078242 A CN202010078242 A CN 202010078242A CN 111215970 A CN111215970 A CN 111215970A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a device and a method for polishing a microstructure die by double-ultrasonic-assisted magnetic force, which can ensure that a polishing area generates sufficient ultrasonic cavitation phenomenon and increase polishing pressure by independently arranging an ultrasonic vibration device generating ultrasonic cavitation effect, and simultaneously, as the microstructure die is completely immersed in polishing liquid, nano SiO in the polishing liquid2The particles also have a certain polishing effect on the die material, so that the die material is favorably removed, and the quality of the polished surface is improved. In addition, different from the prior art that the ultrasonic main shaft of the machine tool is perpendicular to the surface of a workpiece to be polished, the ultrasonic main shaft of the machine tool is arranged parallel to the surface to be polished of the microstructure die, polishing is carried out through the circumferential surface of the annular permanent magnet, and the tangential linear velocity of the whole polishing area is consistent from the center to the edge, so that the polishing speed is increased, and the processing efficiency is improved.
Description
Technical Field
A device and a method for polishing a microstructure die by double-ultrasonic-assisted magnetic force belong to the field of precision manufacturing, and particularly relate to a precision polishing process method for a microstructure die and an implementation device.
Background
The microstructure optical element is widely applied to the fields of national defense and military, mechano-electronics, optics and photoelectronics, such as a microlens array backlight module in a liquid crystal display screen of electronic equipment such as a mobile phone, a computer and the like, and can ensure that the display screen obtains bright and uniform display effect; optical fiber connectors and microsensors in the field of mechatronics, shadowless lamps in the field of biomedicine, large-caliber zone plates in military satellite imaging systems, guidance systems in missiles and the like have applications of micro-structured optical elements. At present, the demand of people on the microstructure optical element is rapidly increased, and in order to realize the mass and low-cost production of the microstructure optical element, a more mature scheme is that a mold with a microstructure surface is produced by using a precision grinding processing technology, and then the mass production of the microstructure optical element is carried out by using a glass mold pressing technology.
When the micro-structure optical element is subjected to mould pressing, the processing quality of the micro-structure mould directly influences the final product performance and the production cost. The microstructure mold manufactured by the precision grinding technology is generally poor in surface quality, and is prone to generating defects such as micro pits and micro cracks, and the processing quality of the microstructure element is seriously affected, so that the microstructure mold manufactured by grinding needs to be polished.
In the prior art, an ultrasonic magnetorheological composite polishing method is commonly adopted to grind the surfaces of hard and brittle materials (such as glass, ceramics, crystals, gems and the like), for example, CN205342683U, CN1613605A and the like, a magnetic grinding head is arranged at the lower part of an ultrasonic generating device, magnetorheological fluid is conveyed to the surface of a workpiece through a circulating conveying device, and during processing, the ultrasonic grinding device generates high-frequency vibration, so that abrasive particles continuously impact the surface of the workpiece under ultrasonic vibration and pressure, and meanwhile, the polishing liquid enables the ultrasonic vibration to generate cavitation, thereby strengthening the polishing and grinding effects. However, most of the microstructure molds used for molding the optical element are made of hard alloy, and the material properties of the microstructure molds are completely different from those of the hard brittle materials, so that the microstructure molds are ground and polished by the traditional ultrasonic magnetorheological composite polishing method, an ideal polishing effect cannot be achieved, and the requirement of high-quality processing of the surfaces of the microstructure molds cannot be met.
Disclosure of Invention
Aiming at the technical problems, the invention provides a double-ultrasonic auxiliary magnetic polishing method and a realization device which are particularly suitable for polishing the surface of a microstructure die, and can realize high-efficiency and high-quality polishing of the microstructure die.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a device of two supersound supplementary magnetic force polishing micro-structure moulds which characterized in that mainly includes following structure:
the polishing device comprises a water tank, polishing liquid is filled in the water tank, the microstructure mold is fixed on a bottom platform of the water tank and is completely immersed in the polishing liquid, and the polishing liquid is nano SiO2Dispersing agent, water and the like, wherein SiO is2Particle size of 50-100 nm and SiO2The content of the abrasive particles is 2 to 10 percent;
the ultrasonic main shaft of the machine tool is arranged in parallel to the surface to be polished of the microstructure mould;
the annular permanent magnet is arranged on the ultrasonic main shaft of the machine tool through an aluminum disc, magnetic abrasive particles are adsorbed around the annular permanent magnet to form a flexible magnetic brush structure similar to a grinding wheel, and the magnetic abrasive particles mainly comprise iron powder and aluminum oxide particles;
the annular permanent magnet is driven by the machine tool ultrasonic spindle to rotate and feed along a preset direction, and meanwhile, the machine tool ultrasonic spindle generates ultrasonic vibration along the axial direction to drive the magnetic abrasive particles to continuously impact the surface of the microstructure die to play a polishing role;
the ultrasonic vibration device consists of a power supply, an ultrasonic generator and an ultrasonic vibrator;
the ultrasonic vibrator is arranged on the side face of the annular permanent magnet and is at a certain inclination angle, the inclination angle can be adjusted, the end part of the tool head of the ultrasonic vibrator and the surface of the microstructure die keep a certain distance, the influence on the movement of the annular permanent magnet is avoided, and the polishing area is guaranteed to generate a sufficient ultrasonic cavitation phenomenon.
Meanwhile, the invention provides a polishing method according to the device for double-ultrasonic-assisted magnetic polishing of the microstructure mold, which is characterized by mainly comprising the following steps of:
(1) connecting the annular permanent magnet with the end part of the ultrasonic main shaft of the machine tool through the aluminum disc, wherein magnetic abrasive particles are adsorbed around the annular permanent magnet;
(2) placing the microstructure mould to be polished on a bottom platform of the water tank filled with the polishing solution, and completely immersing the microstructure mould and the tool head of the ultrasonic vibrator in the polishing solution;
(3) adjusting the position and the posture of the ultrasonic vibrator to ensure that the end part of the ultrasonic vibrator is positioned on the side surface of the annular permanent magnet in the advancing direction and keeps a certain distance from the surface of the microstructure mould so as to enable the surface polishing processing area of the microstructure mould to generate a sufficient ultrasonic cavitation phenomenon;
(4) starting the ultrasonic generator to enable the ultrasonic vibrator to generate ultrasonic vibration, wherein the vibration direction is along the axial direction of the ultrasonic vibrator;
(5) adjusting the position of the ultrasonic main shaft of the machine tool to enable the annular permanent magnet to be located at the polishing starting point, and ensuring that the magnetic abrasive particles at the bottom of the annular permanent magnet are tightly attached to the surface of the microstructure mold; selecting a certain machine tool ultrasonic spindle rotating speed, a certain feeding speed, a certain ultrasonic vibration frequency and a certain amplitude to finish polishing of a certain area of the microstructure die;
(6) and (5) repeating the steps (3) to (5) to finish the polishing processing of the surface of the microstructure die.
Compared with the prior art, the ultrasonic vibration device for generating the ultrasonic cavitation effect is independently arranged, so that the sufficient ultrasonic cavitation phenomenon generated in the polishing area can be ensured, the polishing pressure is increased, and meanwhile, the micro-structure mold is completely immersed in the polishing solution, so that the nano SiO in the polishing solution2The particles also have a certain polishing effect on the die material, so that the die material is favorably removed, and the quality of the polished surface is improved. In addition, different from the prior art that the ultrasonic main shaft of the machine tool is perpendicular to the surface of a workpiece to be polished, the ultrasonic main shaft of the machine tool is arranged parallel to the surface to be polished of the microstructure die, polishing is carried out through the circumferential surface of the annular permanent magnet, and the tangential linear velocity of the whole polishing area is consistent from the center to the edge, so that the polishing speed is increased, and the processing efficiency is improved.
Drawings
Fig. 1 is a diagram of a double ultrasonic assisted magnetic polishing experimental apparatus of the present invention, and fig. 2 is an enlarged view of a dotted line in fig. 1. In the figure, 1 is a water tank, 2 is a microstructure mold, 3 is polishing solution, 4 is a support frame, 5 is an independently arranged ultrasonic vibrator generating ultrasonic cavitation effect, 6 is a revolute pair, 7 is an annular permanent magnet, 8 is a machine tool ultrasonic main shaft, 9 is magnetic abrasive particles, 10 is an aluminum disc connecting the annular permanent magnet and the machine tool ultrasonic main shaft, and 11 is cavitation bubbles.
Detailed Description
The invention will now be described in more detail by way of example with reference to the accompanying figures 1-2.
(1) The annular permanent magnet 7 is connected with the end part of the ultrasonic main shaft 8 of the machine tool through an aluminum disc 10, the diameter of the annular permanent magnet 7 is 50-100mm, and magnetic abrasive grains 9 are adsorbed around the annular permanent magnet.
(2) And fixing the microstructure mould 2 to be polished on a platform at the bottom of the water tank 1 filled with the polishing solution 3, and ensuring that the water level of the polishing solution 3 exceeds the surface of the microstructure mould 2 by 10-20 mm. The material of the mould is tungsten carbide hard alloy. The polishing solution 3 is prepared from nano SiO2Dispersing agent, water, SiO2Particle size of 50-100 nm and SiO2The content of the abrasive particles is 2 to 10 percent.
(3) And adjusting the position and the posture of the ultrasonic vibrator 5 to ensure that the end part of the ultrasonic vibrator is positioned on the side surface of the annular permanent magnet 7 in the advancing direction, wherein the included angle between the axis of the ultrasonic vibrator and the axis of the annular permanent magnet is 30-60 degrees, and the included angle keeps a distance of 10-20 mm from the surface of the microstructure mold, so that the surface polishing processing area of the microstructure mold 2 generates a sufficient ultrasonic cavitation phenomenon.
(4) And starting the ultrasonic generator to enable the ultrasonic vibrator 5 to generate ultrasonic vibration, wherein the vibration frequency is 20-50 kHz, the amplitude is 8-10 mu m, and the vibration direction is along the axial direction of the ultrasonic vibrator.
(5) Adjusting the position of an ultrasonic main shaft 8 of the machine tool to enable the annular permanent magnet 7 to be positioned at the polishing starting point, and ensuring that the magnetic abrasive particles 9 at the bottom of the annular permanent magnet 7 are tightly attached to the surface of the microstructure mold 2; the method comprises the steps of selecting the rotating speed of an ultrasonic main shaft of a machine tool to be 800-2000 r/min, the feeding speed to be 5-10 mm/min, the ultrasonic vibration frequency of the ultrasonic main shaft of the machine tool to be 18-20 kHz, and the amplitude to be 2-5 mu m, and finishing polishing processing of a certain area of a micro-structure die.
(6) And (5) repeating the steps (3) to (5) to finish the polishing processing of the surface of the microstructure die.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a device of two supersound supplementary magnetic force polishing micro-structure moulds which characterized in that mainly includes following structure:
the polishing device comprises a water tank, polishing liquid is filled in the water tank, the microstructure mold is fixed on a bottom platform of the water tank and is completely immersed in the polishing liquid, and the polishing liquid is nano SiO2Dispersing agent, water and the like, wherein SiO is2Particle size of 50-100 nm and SiO2The content of the abrasive particles is 2 to 10 percent;
the ultrasonic main shaft of the machine tool is arranged in parallel to the surface to be polished of the microstructure mould;
the annular permanent magnet is arranged on the ultrasonic main shaft of the machine tool through an aluminum disc, magnetic abrasive particles are adsorbed around the annular permanent magnet to form a flexible magnetic brush structure similar to a grinding wheel, and the magnetic abrasive particles mainly comprise iron powder and aluminum oxide particles;
the annular permanent magnet is driven by the machine tool ultrasonic spindle to rotate and feed along a preset direction, and meanwhile, the machine tool ultrasonic spindle generates ultrasonic vibration along the axial direction to drive the magnetic abrasive particles to continuously impact the surface of the microstructure die to play a polishing role;
the ultrasonic vibration device consists of a power supply, an ultrasonic generator and an ultrasonic vibrator;
the ultrasonic vibrator is arranged on the side face of the annular permanent magnet and is at a certain inclination angle, the inclination angle can be adjusted, the end part of the tool head of the ultrasonic vibrator and the surface of the microstructure die keep a certain distance, the influence on the movement of the annular permanent magnet is avoided, and the polishing area is guaranteed to generate a sufficient ultrasonic cavitation phenomenon.
2. A polishing method of a microstructure mould is characterized in that the device of claim 1 is adopted to carry out double-ultrasonic-assisted magnetic composite polishing on the microstructure mould, and mainly comprises the following steps:
(1) connecting the annular permanent magnet with the end part of the ultrasonic main shaft of the machine tool through the aluminum disc, wherein magnetic abrasive particles are adsorbed around the annular permanent magnet;
(2) placing the microstructure mould to be polished on a bottom platform of the water tank filled with the polishing solution, and completely immersing the microstructure mould and the tool head of the ultrasonic vibrator in the polishing solution;
(3) adjusting the position and the posture of the ultrasonic vibrator to ensure that the end part of the ultrasonic vibrator is positioned on the side surface of the annular permanent magnet in the advancing direction and keeps a certain distance from the surface of the microstructure mould so as to enable the surface polishing processing area of the microstructure mould to generate a sufficient ultrasonic cavitation phenomenon;
(4) starting the ultrasonic generator to enable the ultrasonic vibrator to generate ultrasonic vibration, wherein the vibration direction is along the axial direction of the ultrasonic vibrator;
(5) adjusting the position of the ultrasonic main shaft of the machine tool to enable the annular permanent magnet to be located at the polishing starting point, and ensuring that the magnetic abrasive particles at the bottom of the annular permanent magnet are tightly attached to the surface of the microstructure mold; selecting a certain machine tool ultrasonic spindle rotating speed, a certain feeding speed, a certain ultrasonic vibration frequency and a certain amplitude to finish polishing of a certain area of the microstructure die;
(6) and (5) repeating the steps (3) to (5) to finish the polishing processing of the surface of the microstructure die.
3. A polishing method according to claim 2, characterized in that the microstructure mold is made of cemented carbide, preferably tungsten carbide.
4. A polishing method according to claim 2 or 3, characterized in that the included angle between the axis of the ultrasonic vibrator and the axis of the annular permanent magnet is 30-60 degrees, and the included angle is 10-20 mm away from the surface of the microstructure mold.
5. A polishing method according to claim 2 or 3, characterized in that the ultrasonic vibrator has a vibration frequency of 20 to 50kHz and an amplitude of 8 to 10 μm.
6. A polishing method according to claim 2 or 3, characterized in that the rotational speed of the ultrasonic spindle of the machine tool is 800 to 2000r/min, the feed speed is 5 to 10mm/min, the ultrasonic vibration frequency of the ultrasonic spindle of the machine tool is 18 to 20kHz, and the amplitude is 2 to 5 μm.
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Cited By (4)
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| CN112171434A (en) * | 2020-09-28 | 2021-01-05 | 中国人民解放军国防科技大学 | Shape modification device and method based on shear thickening and polishing |
| CN114800286A (en) * | 2022-05-31 | 2022-07-29 | 西安焦视医疗器械有限责任公司 | Post-processing device and method for 3D printing titanium alloy mirror frame |
| CN115365995A (en) * | 2022-07-29 | 2022-11-22 | 大连理工大学 | Large-size quartz crucible non-circular curved surface chemical mechanical grinding and polishing integrated equipment |
| CN115609770A (en) * | 2022-10-11 | 2023-01-17 | 上海理工大学 | Ultrasonic cavitation auxiliary fretsaw cutting device and method |
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| CN114800286B (en) * | 2022-05-31 | 2024-03-08 | 西安华交兆睛医疗器械有限责任公司 | Post-processing device and post-processing method for 3D printing titanium alloy mirror frame |
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| CN115609770A (en) * | 2022-10-11 | 2023-01-17 | 上海理工大学 | Ultrasonic cavitation auxiliary fretsaw cutting device and method |
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