CN111020479B - 一种高遮挡件抗腐蚀多元涂层及其制备方法以及制备方法所用的装置 - Google Patents
一种高遮挡件抗腐蚀多元涂层及其制备方法以及制备方法所用的装置 Download PDFInfo
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- CN111020479B CN111020479B CN201911355671.9A CN201911355671A CN111020479B CN 111020479 B CN111020479 B CN 111020479B CN 201911355671 A CN201911355671 A CN 201911355671A CN 111020479 B CN111020479 B CN 111020479B
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
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CN201911355671.9A CN111020479B (zh) | 2019-12-25 | 2019-12-25 | 一种高遮挡件抗腐蚀多元涂层及其制备方法以及制备方法所用的装置 |
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CN201911355671.9A CN111020479B (zh) | 2019-12-25 | 2019-12-25 | 一种高遮挡件抗腐蚀多元涂层及其制备方法以及制备方法所用的装置 |
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US11661849B2 (en) | 2021-02-12 | 2023-05-30 | Garrett Transportation I Inc. | Turbocharger turbine wheels having an alpha-alumina coating and methods for manufacturing the same |
CN113249683B (zh) * | 2021-07-11 | 2021-09-24 | 中国科学院宁波材料技术与工程研究所 | 高导电耐蚀长寿命max相固溶复合涂层、其制法与应用 |
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CN1206386C (zh) * | 2003-06-26 | 2005-06-15 | 上海交通大学 | 离子注入复合镀膜设备 |
WO2006070509A1 (ja) * | 2004-12-28 | 2006-07-06 | Sumitomo Electric Hardmetal Corp. | 表面被覆切削工具および表面被覆切削工具の製造方法 |
US7923130B2 (en) * | 2007-05-30 | 2011-04-12 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool |
CN201132849Y (zh) * | 2007-07-05 | 2008-10-15 | 北京师范大学 | 视线外磁过滤金属蒸汽真空弧等离子体沉积多层膜镀膜机 |
CN102825855B (zh) * | 2012-07-20 | 2015-03-18 | 中国科学院宁波材料技术与工程研究所 | 一种基体表面的超厚CrSiBN复合涂层及其制备方法 |
CN102848638A (zh) * | 2012-09-14 | 2013-01-02 | 虞海香 | 一种金属耐磨损且抗腐蚀的复合涂层 |
CN110144562B (zh) * | 2019-06-24 | 2020-05-19 | 北京师范大学 | 一种超厚吸能涂层的制备方法 |
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Inventor after: Liao Bin Inventor after: OuYang Xiaoping Inventor after: Luo Jun Inventor after: Chen Lin Inventor after: Zhang Xu Inventor after: Wu Xianying Inventor after: Pang Pan Inventor after: Han Ran Inventor after: Yingminju Inventor before: Liao Bin Inventor before: Han Ran Inventor before: Yingminju Inventor before: OuYang Xiaoping Inventor before: He Guangyu Inventor before: He Weifeng Inventor before: Luo Jun Inventor before: Chen Lin Inventor before: Zhang Xu Inventor before: Wu Xianying Inventor before: Pang Pan |
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