CN110455405A - Beam splitter, optical power monitoring device and chip of laser - Google Patents
Beam splitter, optical power monitoring device and chip of laser Download PDFInfo
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- CN110455405A CN110455405A CN201810432035.0A CN201810432035A CN110455405A CN 110455405 A CN110455405 A CN 110455405A CN 201810432035 A CN201810432035 A CN 201810432035A CN 110455405 A CN110455405 A CN 110455405A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 262
- 238000012806 monitoring device Methods 0.000 title claims abstract description 15
- 230000005284 excitation Effects 0.000 claims abstract description 73
- 230000008054 signal transmission Effects 0.000 claims description 36
- 238000012544 monitoring process Methods 0.000 claims description 29
- 230000005540 biological transmission Effects 0.000 claims description 27
- 238000003032 molecular docking Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 description 34
- 238000010586 diagram Methods 0.000 description 19
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 238000004806 packaging method and process Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
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- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
This application provides a kind of beam splitters, optical power monitoring device and chip of laser, the beam splitter includes: mode excitation device and 1 × 1MMI photo-coupler, the output end face of the waveguide of mode excitation device is docked with what the input end face edge of the first input waveguide section of 1 × 1MMI photo-coupler flushed, mode excitation device is for exciting a part of basic mode optical signal for high-order mode optical signal, high-order mode optical signal and the unawakened basic mode optical signal of another part are transferred to the first input waveguide section of 1 × 1MMI photo-coupler by the output end face of the waveguide of mode laser, the unawakened basic mode optical signal of another part is exported from the first output waveguide section of 1 × 1MMI photo-coupler, and high-order mode optical signal is exported from the second output waveguide section of 1 × 1MMI photo-coupler.Beam splitter provided by the present application, it is simple and compact for structure, it can be monolithically integrated on chip of laser or other types of optical chip.
Description
Technical field
This application involves semiconductor fields, and in particular, to a kind of beam splitter, optical power monitoring device and laser core
Piece.
Background technique
In the course of work of optical device or optical chip, it usually needs be monitored to the optical power in optical path, to come
Whether decision-making system is normal.
Traditional power monitoring is external polarization spectroscope, monitor photodetector (monitor photo outside optical chip
Detector, MPD) and MPD pedestal realize power monitoring.This scheme needs to occupy biggish space, and higher cost.
Summary of the invention
The application provides a kind of beam splitter, optical power monitoring device and chip of laser, can be realized beam splitter collection
At on chip of laser.
In a first aspect, providing a kind of beam splitter, comprising: mode excitation device and 1 × 1 multiple-mode interfence MMI photo-coupler,
The input end face of first input waveguide section of the output end face of the waveguide of the mode excitation device and 1 × 1MMI photo-coupler
The docking that edge flushes, the mode excitation device is for exciting a part of basic mode optical signal for high-order mode optical signal, the height
Rank mould optical signal and the unawakened basic mode optical signal of another part are passed by the output end face of the waveguide of the mode laser
It is defeated by the first input waveguide section of 1 × 1MMI photo-coupler, the unawakened basic mode optical signal of another part is from institute
The first output waveguide section output of 1 × 1MMI photo-coupler is stated, and the high-order mode optical signal is from 1 × 1MMI photo-coupler
The second output waveguide section output.Wherein, the first output waveguide section is arranged at the imaging point of the basic mode optical signal, institute
It states the second output waveguide section to be arranged at the imaging point of the high-order mode optical signal, the position of the imaging point of the basic mode optical signal
It is different from the position of imaging point of the high-order mode optical signal.
Beam splitter provided by the present application can be integrated on chip of laser, so as to reduce chip of laser
Package dimension.In addition, the beam splitter of the application is simple and compact for structure, it is only necessary to which 11 × 1MMI photo-coupler can be realized
Light splitting, cost is relatively low.
In one possible implementation, the basic mode optical signal is TE00 mould optical signal, the high-order mode optical signal
For TE01 mould optical signal.
In one possible implementation, the basic mode optical signal is TM00 mould optical signal, the high-order mode optical signal
For TM01 mould optical signal.
In one possible implementation, the 1 × 1MMI meets the following conditions,
Wherein, Lc is characterized length, and n is the effective refractive index in the multiple-mode interfence area of 1 × 1MMI photo-coupler, and k is
The wave number in the multiple-mode interfence area of 1 × 1MMI photo-coupler, W are the width in the multiple-mode interfence area of 1 × 1MMI photo-coupler
Degree, q, r are positive integer, and the multiple-mode interfence area of 1 × 1MMI photo-coupler is defeated for receiving the first input waveguide section
Optical signal out, and give the optical signal transmission to the first output waveguide section and/or the second output waveguide section.
In one possible implementation, the 1 × 1MMI meets the following conditions,
Wherein, n is the effective refractive index in the multiple-mode interfence area of 1 × 1MMI photo-coupler, and k is 1 × 1MMI light
The wave number in the multiple-mode interfence area of coupler, W be 1 × 1MMI photo-coupler multiple-mode interfence area width, L be described 1 ×
The length in the multiple-mode interfence area of 1MMI photo-coupler.
Meet 1 × 1MMI photo-coupler compact structure of the condition, length may be generally less than 100 μm.The application is real
The length for applying the mode excitation device of example can be with very little, usually less than 50 μm.Lesser beam splitter is integrated in power monitoring apparatus
On, when power monitoring apparatus is integrated in formation packaging on chip of laser, the size of packaging can be reduced.Especially
For the chip of laser of multichannel, as the port number of chip of laser increases, required power monitoring apparatus is also more next
It is more.If the size of power monitoring apparatus is larger, the size of the chip of laser of multichannel can be made increasing.Therefore,
Using the size that can reduce integrated chip for the 1 × 1MMI photo-coupler for meeting above-mentioned condition.
In one possible implementation, 1 × 1MMI photo-coupler further includes two spuious light-output waveguide segments,
Described two spuious light-output waveguide segments are located at the two sides of the first input waveguide section of 1 × 1MMI photo-coupler, and with
The multiple-mode interfence area of 1 × 1MMI photo-coupler is connected.
Spuious light-output waveguide segment can by the reflected spuious light-output of the output end of 1 × 1MMI photo-coupler, from
And guarantee the normal transmission of the optical signal in 1 × 1MMI photo-coupler.
In one possible implementation, the ratio of the high-order mode optical signal and the basic mode optical signal be greater than 0 and
Less than or equal to 0.5.
In one possible implementation, the direction transmitted in the mode excitation device along optical signal, the mould
Formula exciter includes first wave guide section, second waveguide section and third waveguide segment, the first wave guide section along optical signal transmission
The central axis along optical signal transmission direction of the central axis in direction and the third waveguide segment is parallel to each other, and described
One waveguide segment is connected with the third waveguide segment by the second waveguide section, the second waveguide section and the first wave guide
There is angle α, α is greater than pi/2 and is less than π between section.
In one possible implementation, the direction transmitted in the mode excitation device along optical signal, the mould
Formula exciter includes first wave guide section and second waveguide section, the central axis along optical signal transmission direction of the first wave guide section
Line and the central axis along optical signal transmission direction of the second waveguide section are parallel to each other, the output of the first wave guide section
Input end face of the end face close to the second waveguide section, and the partial region of the output end face of the first wave guide section and described
It docks the partial region of the input end face of two waveguide segments.
In one possible implementation, the mode excitation device includes first wave guide section and second waveguide section, described
First wave guide section along optical signal transmission direction central axis and the second waveguide section along optical signal transmission direction
Central axis be parallel to each other, the output end face of the first wave guide section close to the second waveguide section input end face, it is described
The area of the input end face of second waveguide section is greater than the area of the output end face of the first wave guide section, the first wave guide section
Output end face is docked with the partial region of the input end face of the second waveguide section.
In one possible implementation, the central axis along optical signal transmission direction of the first wave guide section and
The central axis along optical signal transmission direction of the second waveguide section coincides, and the output end face of the first wave guide section
It is docked with the central area of the input end face of the second waveguide section.
In one possible implementation, the mode excitation device is tapered transmission line, and the narrow end of the tapered transmission line is
Input terminal, wide end are output end.
Second aspect provides a kind of power monitoring apparatus, comprising: the first photoelectric detector PD and such as first aspect or the
On the one hand beam splitter described in any possible implementation, the first PD are arranged in the institute in the beam splitter
It states in the second output waveguide section of 1 × 1MMI photo-coupler, what the first PD was used to export the second output waveguide section
The high-order mode optical signal is monitored.
In one possible implementation, 1 × 1MMI photo-coupler further includes third output waveguide section, the light
Power monitoring apparatus further includes the 2nd PD, and the 2nd PD is arranged in the third output waveguide section, and the 2nd PD is used for
The high-order mode optical signal of third output waveguide section output is monitored.
In one possible implementation, the electrode of the first PD and the 2nd PD is connected.
The third aspect provides a kind of chip of laser, comprising: laser and as second aspect or second aspect it is any
Optical power monitoring device described in possible implementation, the output end of the laser be located at the optical power monitoring device
The input waveguide section of the interior mode excitation device is connected.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of beam splitter provided by the embodiments of the present application；
Fig. 2 is a kind of structural schematic diagram of 1 × 1MMI photo-coupler provided by the embodiments of the present application；
Fig. 3 is the schematic diagram of imaging of the TE00 mould provided by the embodiments of the present application in 1 × 1MMI photo-coupler；
Fig. 4 is the schematic diagram of imaging of the TE01 mould provided by the embodiments of the present application in 1 × 1MMI photo-coupler；
Fig. 5 is the structural schematic diagram of one mode exciter provided by the embodiments of the present application；
Fig. 6 is the schematic diagram of the Y value size of one mode exciter provided by the embodiments of the present application and the relationship of splitting ratio；
Fig. 7 is the signal of the relationship between the splitting ratio and Insertion Loss of one mode exciter provided by the embodiments of the present application
Figure；
Fig. 8 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application；
Fig. 9 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application；
Figure 10 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application；
Figure 11 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application；
Figure 12 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application；
Figure 13 is a kind of structural schematic diagram of power monitoring apparatus provided by the embodiments of the present application；
Figure 14 is a kind of structural schematic diagram of chip of laser provided by the embodiments of the present application.
Specific embodiment
Below in conjunction with attached drawing, the technical solution in the application is described.
Fig. 1 is a kind of structural schematic diagram of beam splitter provided by the embodiments of the present application.The beam splitter includes that mode swashs
Send out the multiple-mode interfence of device 110 and 1 × 1 (multi-mode interference, MMI) photo-coupler 120.The mode excitation device
The output end face of waveguide is docked with what the input end face edge of the first input waveguide section of 1 × 1MMI photo-coupler 120 flushed.
The mode excitation device 110 is used to excite a part of basic mode optical signal for high-order mode optical signal, the high-order mode optical signal and another
The unawakened basic mode optical signal in part is transferred to 1 × 1MMI optical coupling by the output end face of the waveguide of mode laser 110
First input waveguide section 150 of device 120, the unawakened basic mode optical signal of the another part is from 1 × 1MMI photo-coupler 120
The output of first output waveguide section 140, and the second output waveguide section 130 of high-order mode optical signal from 1 × 1MMI photo-coupler 120 is defeated
Out.
Wherein, the setting of the first output waveguide section 140 basic mode optical signal 1 × 1MMI photo-coupler 120 output end
At imaging point, the second output waveguide section 150 setting high-order mode optical signal 1 × 1MMI photo-coupler 120 output end at
At picture point, and basic mode optical signal is different with the imaging point position of high-order mode optical signal.
It should be noted that the second output waveguide section 150 is arranged at the imaging point of high-order mode optical signal, high-order mode light
Signal may take away least a portion of basic mode optical signal and also export in the second output waveguide section 150 during imaging.
The mode excitation device 110 can excite a part of basic mode optical signal in basic mode optical signal as high-order mode light letter
Number.Wherein, basic mode optical signal is different from high-order mode optical signal, and basic mode optical signal is the main optical signal in optical path.Also, the mould
The output end of 110 waveguide of formula exciter and the first input waveguide section 150 of 1 × 1MMI photo-coupler 120 can support transmission base
Mould optical signal and high-order mode optical signal.
As shown in Figure 1, P0 is basic mode optical signal, P1 is high-order mode optical signal, and P0 ' is unawakened in basic mode optical signal
Basic mode optical signal.Mode excitation device 110 can excite a part of P0 as P1, and by the P1 and unawakened P0 ' after excitation
It is transferred to the first input waveguide section 150 of 1 × 1MMI photo-coupler 120.
Unawakened another part basic mode optical signal is in 1 × 1MMI optical coupling in high-order mode optical signal and basic mode optical signal
The imaging point position of the output end of device 120 is different, to realize light splitting.In other words, 1 × 1MMI photo-coupler 120 can incite somebody to action
P0 ' optical signal and P1 optical signal are separated in the imaging point of the output of 1 × 1MMI photo-coupler 120.
It should be noted that 1 × 1 in 1 × 1MMI photo-coupler 120 in the embodiment of the present application is believed for basic mode light
For number, that is to say, that 1 × 1MMI photo-coupler 120 includes the input terminal and a basic mode light of a basic mode optical signal
The output end of signal.
Beam splitter provided by the embodiments of the present application can be integrated in chip of laser or other kinds of optical chip
On, so as to reduce the package dimension of chip of laser.In addition, the beam splitter of the application is simple and compact for structure, it is only necessary to 1
A 1 × 1MMI photo-coupler can realize light splitting, and cost is relatively low.
Preferably, transmission basic mode optical signal is only supported in the input terminal waveguide of the mode excitation device.
Optionally, the optical signal of the embodiment of the present application can be believed for transverse electric (transverse electric, TE) mould light
Number, or horizontal magnetic (transverse magnetic, TM) mould optical signal.
By taking TE mould as an example, TE mould can be divided into different moulds according to distribution of the optical signal electromagnetic field on cross section is different
Formula, such as TE00 mould, TE01 mould, TE02 mould.At this point, basic mode optical signal refers to that TE00 mould optical signal, high-order mode optical signal refer to
Other mode optical signals in TE mould in addition to TE00 mould.
Similarly, TM mould can also be divided into TM00 mould, TM01 mould, TM02 mould etc..At this point, basic mode optical signal refers to TM00 mould
Optical signal, high-order mode optical signal refer to other mode optical signals in TM mould in addition to TM00 mould.
Optionally, the basic mode optical signal in the embodiment of the present application can be TE00 mould, and high-order mode optical signal can be TE01
Mould.Alternatively, basic mode optical signal can be TM00 mould, which can be TM01 mould.
Below with reference to Fig. 2-Fig. 4, with basic mode optical signal for TE00 mould, for high-order mode optical signal is TE01 mould, to basic mode
The imaging characteristics of optical signal and high-order mode optical signal in 1 × 1MMI photo-coupler are described.
Fig. 2 is the concrete structure schematic diagram of 1 × 1MMI photo-coupler, which includes multiple-mode interfence area
210, the first input waveguide section 220, the first output waveguide section 250, the second output waveguide section 240 and third output waveguide section 260.
Multiple-mode interfence area 210 can support the transmission of the optical signal of the various modes such as basic mode optical signal and high-order mode optical signal, Suo You
The mode that multiple-mode interfence area 210 is excited is imaged in the output of 1 × 1MMI photo-coupler together.First output waveguide section
250 are arranged at the imaging point of TE00 mould, TE01 mould 1 × 1MMI photo-coupler output end include two imaging points, second
Output waveguide section 240 and third output waveguide section 260 are separately positioned at two imaging points of TE01 mould.
Define the characteristic length of 1 × 1MMI photo-coupler are as follows:
Wherein, Lc is characterized length, and n is the effective refractive index in the multiple-mode interfence area of 1 × 1MMI photo-coupler, and k is 1 ×
The wave number in the multiple-mode interfence area of 1MMI photo-coupler, W are the width in the multiple-mode interfence area of 1 × 1MMI photo-coupler, the 1 × 1MMI
The multiple-mode interfence area of photo-coupler is used to receive the optical signal of the first input waveguide section output, and gives first for the optical signal transmission
Output waveguide section and/or the second output waveguide section.
By taking TE00 mould as an example, TE00 mould enters among the input end face in the multiple-mode interfence area 210 of 1 × 1MMI photo-coupler
It penetrates, has excited more TE00 moulds, TE02 mould, the even-order modes such as TE04 mould in multiple-mode interfence area 210.According to phase relation, TE00
Mould can be when the output end face of multiple-mode interfence area waveguide 210 be imaged, and the length L in multiple-mode interfence area 210 is q3Lc/ 4, q are positive
Integer.
By taking TE01 mould as an example, TE01 mould enters among the input end face in the multiple-mode interfence area 210 of 1 × 1MMI photo-coupler
It penetrates, has excited TE01 mould, TE03 mould, the odd order modes such as TE05 mould in multiple-mode interfence area 210.According to phase relation, TE01 mould
Can be when the output end face in multiple-mode interfence area 210 be imaged, the length L in multiple-mode interfence area 210 is Lc/4+(r-1)Lc/ 2, r are positive whole
Number.
When the length in the multiple-mode interfence area 210 of 1 × 1MMI photo-coupler meets following relationship, so that it may realize to TE00
The output end face of mould and TE01 mould simultaneously in multiple-mode interfence area 210 is imaged.
Work as q=1, when r=2, i.e. when the length of 1 × 1MMI photo-coupler is 3Lc/4, TE00 mould and TE01 mould 1 ×
Imaging characteristics in 1MMI photo-coupler are as shown in Figure 3 and Figure 4.Fig. 3 be TE00 mould incidence enter length L be 3Lc/4 1 ×
Image after 1MMI photo-coupler.From figure 3, it can be seen that TE00 mould is in the output end of 1 × 1MMI photo-coupler
It is imaged at the heart.Fig. 4 is that TE01 mould incidence enters the image after 1 × 1MMI photo-coupler that length is 3Lc/4.It can from Fig. 4
To find out, TE01 mould is imaged at the two sides of the output end of 1 × 1MMI photo-coupler.Therefore, when TE00 mould and TE01 mould simultaneously
When being incident on 1 × 1MMI photo-coupler, using TE00 mould and TE01 mould in the imaging position of the output end of 1 × 1MMI photo-coupler
Difference can separate the optical signal of both of which.
The length of the mode excitation device of the embodiment of the present application can be with very little, usually less than 50 μm.Length be 3Lc/4 1 ×
The size of 1MMI photo-coupler is also smaller, and length may be generally less than 100 μm.Therefore, by above-mentioned mode excitation device and 1 ×
1MMI photo-coupler connects the beam splitter to be formed, compact-sized small and exquisite.The beam splitter of smaller size is conducive to save chip
Space also facilitates layout.
Lesser beam splitter is integrated on power monitoring apparatus, and power monitoring apparatus is integrated on chip of laser and is formed
When packaging, the size of packaging can be reduced.Especially for the chip of laser of multichannel, with chip of laser
Port number increase, required power monitoring apparatus is also more and more.If the size of power monitoring apparatus is larger, can make
The size of the chip of laser of multichannel is increasing.Therefore, use length that can subtract for 1 × 1MMI photo-coupler of 3Lc/4
The size of small integrated chip.
The length of certain 1 × 1MMI photo-coupler is also not limited to 3Lc/4, as long as the size relationship in its multiple-mode interfence area can
The imaging point of basic mode optical signal and high-order mode optical signal to be separated.
Optionally, 1 × 1MMI photo-coupler in the embodiment of the present application can also be only in two imaging points of TE01 mould
An imaging point at be arranged output waveguide section.That is, 1 × 1MMI photo-coupler can also only include the first output wave
Section 250 and the second output waveguide section 240 are led, or only includes the first output waveguide section 250 and third output waveguide section 260.
It optionally, can also include spuious light-output waveguide segment in 1 × 1MMI photo-coupler.As shown in Fig. 2, this 1 ×
1MMI photo-coupler can also include spuious light-output waveguide segment 230 and spuious light-output waveguide segment 270, spuious light-output waveguide
Section 230 and spuious light-output waveguide segment 270 be located at 1 × 1MMI photo-coupler the first input waveguide section 220 two sides, and with
The multiple-mode interfence area 210 of 1 × 1MMI photo-coupler is connected.The two spuious light-output waveguide segments are used for 1 × 1MMI optocoupler
The reflected spuious light-output of clutch output end avoids the transmission for influencing TE00 mould and TE01 mould optical signal.
In general, it is desirable to the optical signals for power monitoring to only take up when element of the beam splitter as power monitoring
Small part optical signal in optical path.That is, while P1 optical signal can satisfy power monitoring, it is desirable to P1 light letter
It is number the smaller the better.
Optionally, as one embodiment, the ratio of the high-order mode optical signal and basic mode optical signal is greater than 0 and is less than or waits
In 0.5.
Specifically, which enables to basic mode optical signal to be inspired the high-order mode optical signal of very small part
To be used for power monitoring.
Below with reference to Fig. 5-Figure 12, the structure of mode excitation device is described in detail, by adjusting mode excitation device
Parameter can make mode excitation device inspire the high-order mode optical signal of arbitrary proportion.For convenience of description, the height that will hereafter be excited
The ratio of rank mould optical signal and basic mode optical signal is known as splitting ratio.
Optionally, as one embodiment, along the direction that optical signal transmits in mode excitation device, the mode excitation device
Including first wave guide section, second waveguide section and third waveguide segment, the central axis along optical signal transmission direction of first wave guide section
The central axis along optical signal transmission direction of line and third waveguide segment is parallel to each other, and first wave guide section and third waveguide segment
It is connected by second waveguide section, there is angle α between second waveguide section and first wave guide section, α is greater than pi/2 and is less than π.
As shown in figure 5, Fig. 5 is a kind of waveguide of bending.The waveguide of the bending includes first wave guide section 510, second waveguide
Section 520 and third waveguide segment 530, the central axis of the transmission direction along optical signal of first wave guide section 510 and third waveguide
The central axis along optical signal transmission direction of section 530 is parallel to each other.Or it may also be said that first wave guide section 510 and third
Waveguide segment 530 is parallel to each other.First wave guide section 510 is connected with third waveguide segment 530 by second waveguide section 520, and first
There is angle α between waveguide segment 510 and second waveguide section 520.Similarly, between third waveguide segment 530 and second waveguide section 520
Also there is angle α.Wherein, α is greater than pi/2 and is less than π.
It should be noted that the first wave guide section 510 and second waveguide section 520 are the both sides of the angle α respectively, and the folder
The extended line of the both sides of angle α not instead of the first wave guide section 510 and/or second waveguide section 520,510 He of first wave guide section
Second waveguide section 520 itself.
Similarly, between the second waveguide section 520 and third waveguide segment 530 have angle α, and the both sides of the α be this second
Waveguide segment 520 and third waveguide segment 530 itself are not any one in the second waveguide section 520 and third waveguide segment 530 prolong
Long line.It is appreciated that the various angle α between first wave guide section 510 and second waveguide section 520 and second waveguide section 520 and the
Angle α between three waveguide segments 530 is alternate interior angle.
The angle α makes have transversion malposition distance X and longitudinal mistake between first wave guide section 510 and third waveguide segment 530
Position distance Y.The first wave guide section 510 is input waveguide section, which is mode excitation area, the third waveguide segment
530 be output waveguide section.When the P0 optical signal that first wave guide section 510 is transmitted passes through second waveguide section 520, P1 light can be inspired
Signal.Third waveguide segment 530 can support transmission P1 optical signal and unawakened P0 ' optical signal.By adjusting the size of X, Y
It can control the ratio that P1 optical signal is excited.
Optionally, the width of the first wave guide section 510 and third waveguide segment 530 may be the same or different.
Fig. 6 is the schematic diagram of the size of Y value provided by the embodiments of the present application and the relationship of splitting ratio.Wherein, abscissa table
Show the size of Y value, ordinate indicates the size of splitting ratio.From fig. 6 it can be seen that in the case where X value is certain, with Y value
Increase, splitting ratio also increases with it, and can have more optical signals to be separated out to be used for power monitoring in this way.When Y value is
At 0.25 μm, which is about 10%.
It should be noted that come the light splitting for realizing arbitrary proportion being only the embodiment of the present application by adjusting the size of Y value
One example, but the embodiment of the present application is not limited to this.The embodiment of the present application can also appoint by adjusting the size of X value to realize
The light splitting of meaning ratio, or size by adjusting X, Y value simultaneously realize the light splitting of arbitrary proportion.
Fig. 7 is showing for the relationship between the splitting ratio of waveguide and the Insertion Loss of beam splitter of the embodiment of the present application offer bending
It is intended to.Wherein, abscissa indicates the size of Y value, and ordinate indicates the size of Insertion Loss value.As seen from Figure 7, when Y value is
When 0.25, the overall Insertion Loss of beam splitter is less than 0.1dB.That is, separating 0~10% high-order mode light in basic mode optical signal
When signal, the overall Insertion Loss of beam splitter is less than 0.1dB.
Therefore, beam splitter provided by the embodiments of the present application, overall Insertion Loss is smaller, has excellent performance.
Optionally, as one embodiment, along the direction that optical signal transmits in mode excitation device, the mode excitation device
Including first wave guide section and second waveguide section, the central axis and second waveguide along optical signal transmission direction of first wave guide section
The central axis along optical signal transmission direction of section is parallel to each other, and the output end face of first wave guide section is close to second waveguide section
Input end face, and the partial region pair of the input end face of the partial region of the output end face of first wave guide section and second waveguide section
It connects.
As shown in figure 8, the mode excitation device includes first wave guide section 810 and second waveguide section 820.First wave guide section 810
It is mutually flat along the central axis in optical signal transmission direction along the central axis and second waveguide section 820 in optical signal transmission direction
Row.The output end face of first wave guide section 810 close to second waveguide section 820 input end face, and two adjacent end faces with
The central axis upright of two waveguide segments.The partial region of the output end face of first wave guide section 810 and second waveguide section 820 it is defeated
Enter the partial region docking of end face.That is, first wave guide section 810 and second waveguide section 820 have longitudinally displaced distance Y.
This dislocation can make a part of basic mode optical signal excitation in incident basic mode optical signal be high-order mode optical signal.By adjusting Y
The size of value can control splitting ratio.
First wave guide section 810 can be input waveguide section, second waveguide section 820 can be output waveguide section, and this second
Waveguide segment 820 can support transmission basic mode optical signal and high-order mode optical signal.Incident P0 optical signal passes through the mode excitation device
P1 optical signal can be inspired, and by adjusting the size of Y value, can control the ratio that P1 optical signal is excited.
Optionally, the width of the first wave guide section 810 and second waveguide section 820 may be the same or different.
Fig. 9 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application.The mode excitation device includes
First wave guide section 910 and second waveguide section 920, first wave guide section 910 is along the central axis in optical signal transmission direction and second
Waveguide segment 920 is parallel to each other along the central axis in optical signal transmission direction.The output end face of first wave guide section 910 is close to second
The input end face of waveguide segment 920, and the central axis out of plumb of two adjacent end faces and two waveguide segments.First wave guide
The partial region docking of the input end face of the partial region and second waveguide section 920 of the output end face of section 910.That is, the
One waveguide segment 910 and second waveguide section 920 have transversion malposition distance X and longitudinally displaced distance Y.This dislocation can make incidence
A part of basic mode optical signal excitation in basic mode optical signal is high-order mode optical signal.Size by adjusting X value and/or Y value can
To control splitting ratio.
First wave guide section 910 can be input waveguide section, second waveguide section 920 can be output waveguide section, and this second
Waveguide segment 920 can support transmission basic mode optical signal and high-order mode optical signal.Incident P0 optical signal passes through the mode excitation device
P1 optical signal can be inspired, and by adjusting X value and/or the size of Y value, can control the ratio that P1 optical signal is excited.
Optionally, the width of the first wave guide section 910 and second waveguide section 920 may be the same or different.
Optionally, as one embodiment, which includes first wave guide section and second waveguide section, first wave guide
Section along the central axis in optical signal transmission direction and the central axis phase along optical signal transmission direction of second waveguide section
It is mutually parallel, and the output end face of first wave guide section is close to the input end face of second waveguide section, the input end face of second waveguide section
Area is greater than the area of the output end face of first wave guide section, the output end face of first wave guide section and the input end face of second waveguide section
Partial region docking.
Preferably, first wave guide section along the central axis in optical signal transmission direction and believing along light for second waveguide section
The central axis of number transmission direction coincides, and the center of the output end face of first wave guide section and the input end face of second waveguide section
Region docking.
As shown in Figure 10, which includes first wave guide section 1010 and second waveguide section 1020, first wave guide section
1010 along the central axis in optical signal transmission direction and the center along optical signal transmission direction of second waveguide section 1020
Axis coincides, and the central area pair of the output end face of first wave guide section 1010 and the input end face of second waveguide section 1020
It connects.The output end face of first wave guide section 1010 is close to the input end face of second waveguide section 1020, and second waveguide section 1020 is defeated
Enter end face area be greater than first wave guide section output end face area so that first wave guide section 1010 and second waveguide section
1020 in the direction of the width with the difference of 2 × Y size.Incident P0 optical signal can go out P1 in the inconsistent interface excitation of width
Optical signal can control splitting ratio by adjusting the size of Y value.The second waveguide section 1020 can support transmission P0 ' optical signal
With the optical signal of P1 optical signal both of which.
Optionally, the central axis of the first wave guide section 1010 and second waveguide section 1020 can not also be located at same axis
On.
Mode excitation device shown in Figure 11 is a kind of deformation of mode excitation device shown in Fig. 10.1110 He of first wave guide section
Of different size, width of the width greater than first wave guide section 1110 of second waveguide section 1120 of second waveguide section 1120, first wave
It leads section 1110 and is connected with second waveguide section 1120 by third waveguide segment 1130.The face of the input end face of third waveguide segment 1130
Product is identical as the area of the output end face of first wave guide section 1110, and the docking that two end face edges flush.Third waveguide segment
The area of 1130 output end face is identical as the area of the input end face of second waveguide section 1120, and two end face edges flush
Docking.First wave guide section 1110 and second waveguide section 1120 have the difference of 2 × Y size in the direction of the width, in the horizontal direction
On have the dislocation of X value size.Size by adjusting X value and/or Y value can control splitting ratio.1120 energy of second waveguide section
Enough optical signals for supporting transmission P0 ' optical signal and P1 optical signal both of which.
Optionally, the central axis of the first wave guide section 1110 and second waveguide section 1120 can not also be located at same axis
On.
Optionally, as one embodiment, which is tapered transmission line, and the narrow end of the tapered transmission line is input
End, wide end is output end.
Figure 12 is the structural schematic diagram of another mode excitation device provided by the embodiments of the present application.The mode excitation device can be with
For tapered transmission line.The narrow end of the tapered transmission line is input terminal, and the wide end of the tapered transmission line is output end.In other words, from input
Output end is held, the width of the tapered transmission line gradually broadens.Since the width of waveguide changes, lead to incident P0 optical signal
P1 optical signal can be inspired.By adjusting the taper of tapered transmission line, the ratio that the excitation of P0 optical signal is P1 optical signal can control
Example.Mode excitation device is by the input terminal of P1 optical signal and unawakened P0 ' optical signal transmission to 1 × 1MMI photo-coupler.Cone
The output end of shape waveguide can support the optical signal of transmission P0 ' optical signal and P1 optical signal both of which.
Alternatively it is also possible to using the narrow end of tapered transmission line as output end, using the wide end of tapered transmission line as input terminal, only
Will the tapered transmission line narrow end can support transmission P0 ' optical signal and P1 optical signal both of which optical signal.
Mode excitation device shown in Fig. 5-Figure 12 is only illustrating for the application, but the embodiment of the present application is not limited to
This.
It should be noted that the type to the high-order mode optical signal after the excitation of mode excitation device of the embodiment of the present application is not
It is specifically limited.For example, TE00 mode excitation can be a variety of high-order mode optical signals by the mode excitation device by taking TE mould as an example, it should
A variety of high-order mode optical signals include TE01 mould optical signal.For example, the excitation of TE00 mould optical signal can also be by the mode excitation device
TE01 mould optical signal and TE02 mould optical signal.
It usually is not intended to introduce additional stray light in the optical path, if the excitation of TE00 mould optical signal is by mode excitation device
A variety of high-order mode optical signals can be by adjusting 1 in order to guarantee to only exist TE00 mould optical signal and TE01 mould optical signal in optical path
The parameter of × 1MMI photo-coupler input waveguide section, so that other mode lights except TE00 mould optical signal and TE01 mould optical signal
Signal is filtered.
Similarly, which can also excite TM00 mould optical signal as a variety of high-order mode optical signals.For example, should
Mode excitation device can also excite TE00 mould optical signal as TE01 mould optical signal and TE02 mould optical signal.When TM00 mould and a variety of
It, can be by adjusting 1 × 1MMI input waveguide section after high-order mode optical signal is incident on the input terminal of 1 × 1MMI photo-coupler simultaneously
Parameter so that other mode optical signals except TM00 mould optical signal and TM01 mould optical signal are filtered.
Optionally, beam splitter provided by the embodiments of the present application can be above-described any 1 × 1MMI optical coupling
The combination of device and any mode excitation device.By adjusting the parameter of mode excitation device, a kind of small scale may be implemented or appoint
The beam splitter of meaning ratio.
The embodiment of the present application also provides a kind of power monitoring apparatus.The power monitoring apparatus includes the first photodetector
(photo detector, PD) and above-described any beam splitter.First PD is arranged in beam splitter
In second output waveguide section of 1 × 1MMI photo-coupler, the first PD is used for the high-order mode light exported to the second output waveguide section
Signal is monitored.
Optionally, which includes 2 imaging points, the 1 × 1MMI in the output end of 1 × 1MMI photo-coupler
Photo-coupler further includes third output waveguide section, another imaging point of high-order mode optical signal is arranged in third output waveguide section
Place.The optical power monitoring device further includes the 2nd PD, and the 2nd PD is arranged in third output waveguide section, and the 2nd PD is used for the
The high-order mode optical signal of three output waveguide sections output is monitored.That is, the first PD and the 2nd PD are respectively to high-order mode light
Optical signal of the signal at 2 imaging points of the output end of 1 × 1MMI photo-coupler is monitored.
Optionally, the material of which can be used laser material or modulator serves as absorbed layer, and makes electrode
Draw photoelectric current.
It is alternatively possible to which the electrode of the first PD and the 2nd PD is connected with each other on piece, packaging and routing can be reduced in this way
Number.
Below with reference to Figure 13, the specific structure of power monitoring apparatus is described in detail.
Figure 13 is that there are two the structural schematic diagrams of the power monitoring apparatus of PD for tool provided by the embodiments of the present application.Power prison
Surveying device includes mode excitation device 1310 and 1 × 1MMI photo-coupler 1320, which includes first defeated
Waveguide segment 1350, the second output waveguide section 1330, third output waveguide section 1370 out.It is TE00 mould light letter with basic mode optical signal
Number, high-order mode optical signal is TE01 mould optical signal, for the length of 1 × 1MMI photo-coupler is 3Lc/4, TE00 mould 1 ×
The output end of 1MMI photo-coupler has an imaging point, referred to as the first imaging point.TE01 mould is defeated 1 × 1MMI photo-coupler
Outlet has 2 imaging points, referred to as the second imaging point and third imaging point.Second imaging point and third imaging point are located at first
The two sides of imaging point.Second output waveguide section 1330 is arranged at the second imaging point, and the setting of third output waveguide section 1370 is the
At three imaging points.It is provided with the first PD 1340 in the second output waveguide section 1330, is arranged in third output waveguide section 1370
There is the 2nd PD 1360.First PD 1340 can be connected with the electrode of the 2nd PD 1360 by lead 1380.Routing is only needed in this way
Once, so that it may draw the electric signal on the first PD 1340 and the 2nd PD 1360, so as to reduce process complexity.
The embodiment of the present application is not specifically limited the structure of waveguide.For example, the waveguide can be circular waveguide, rectangular wave
It leads, planar waveguide etc..
The embodiment of the present application is not specifically limited the material of waveguide.Such as the waveguide can be indium phosphide (InP) base
Waveguide is also possible to the waveguide of silicon (Si) base, the waveguide of GaAs (GaAs) base, silica (SiO2) base waveguide, nitridation
The waveguide of silicon (SiNx) base or the waveguide of nitrogen oxidation silicon substrate.
Optionally, power monitoring apparatus provided by the embodiments of the present application can integrate in chip of laser or other optics
On chip.
The embodiment of the present application also provides a kind of chip of laser, which includes laser and above description
Any power monitoring apparatus.The power monitoring apparatus includes mode excitation device and 1 × 1MMI photo-coupler, the laser core
The output end of piece is connected with the input waveguide section for the mode excitation device being located in optical power monitoring device.The light meeting that laser issues
Ingoing power monitoring device, power detection device are in turn monitored the optical signal in optical path.
As shown in figure 14, which includes laser 1410, mode excitation device 1420 and 1 × 1MMI optical coupling
Device 1430.The P0 optical signal transmission that the laser 1410 generates enters mode excitation device 1420.Mode excitation device 1420 will
The excitation of P0 optical signal generates P0 ', P1 optical signal, and P0 ', P1 optical signal transmission enter 1 × 1MMI photo-coupler 1430 and realize light splitting.
PD (not shown) can collect the optical signal after light splitting, realize the power monitoring to optical signal.
The power monitoring apparatus is integrated on chip of laser, device size can be reduced, saves space.
The above, the only specific embodiment of the application, but the protection scope of the application is not limited thereto, it is any
Those familiar with the art within the technical scope of the present application, can easily think of the change or the replacement, and should all contain
Lid is within the scope of protection of this application.Therefore, the protection scope of the application should be based on the protection scope of the described claims.
Claims (15)
1. a kind of beam splitter characterized by comprising mode excitation device and 1 × 1 multiple-mode interfence MMI photo-coupler, the mould
The output end face of the waveguide of formula exciter and the input end face edge of the first input waveguide section of 1 × 1MMI photo-coupler are neat
Flat docking,
The mode excitation device is used to excite a part of basic mode optical signal for high-order mode optical signal, the high-order mode optical signal with
The unawakened basic mode optical signal of another part is transferred to described 1 by the output end face of the waveguide of the mode laser ×
First input waveguide section of 1MMI photo-coupler, the unawakened basic mode optical signal of another part is from 1 × 1MMI light
First output waveguide section of coupler exports, and the high-order mode optical signal is exported from the second of 1 × 1MMI photo-coupler
Waveguide segment output.
2. beam splitter according to claim 1, which is characterized in that the basic mode optical signal is zeroth order transverse electric TE00 mould light
Signal, the high-order mode optical signal are TE01 mould optical signal.
3. beam splitter according to claim 1, which is characterized in that the basic mode optical signal is the horizontal magnetic TM00 mould light of zeroth order
Signal, the high-order mode optical signal are TM01 mould optical signal.
4. beam splitter according to any one of claim 1-3, which is characterized in that 1 × 1MMI photo-coupler is full
Sufficient the following conditions:
Wherein, n is the effective refractive index in the multiple-mode interfence area of 1 × 1MMI photo-coupler, and k is 1 × 1MMI optical coupling
The wave number in the multiple-mode interfence area of device, W are the width in the multiple-mode interfence area of 1 × 1MMI photo-coupler, and L is the 1 × 1MMI
The multiple-mode interfence area of the length in the multiple-mode interfence area of photo-coupler, 1 × 1MMI photo-coupler is defeated for receiving described first
Enter the optical signal of waveguide segment output, and by the optical signal transmission to the first output waveguide section and/or second output
Waveguide segment.
5. beam splitter described in any one of -4 according to claim 1, which is characterized in that 1 × 1MMI photo-coupler is also
Including two spuious light-output waveguide segments, described two spuious light-output waveguide segments are located at the of 1 × 1MMI photo-coupler
The two sides of one input waveguide section, and be connected with the multiple-mode interfence area of 1 × 1MMI photo-coupler.
6. beam splitter according to any one of claims 1-5, which is characterized in that the high-order mode optical signal with it is described
The ratio of basic mode optical signal is greater than 0 and is less than or equal to 0.5.
7. beam splitter according to claim 1 to 6, which is characterized in that swash along optical signal in the mode
The direction transmitted in device is sent out, the mode excitation device includes first wave guide section, second waveguide section and third waveguide segment, and described first
Waveguide segment along optical signal transmission direction central axis and the third waveguide segment along in optical signal transmission direction
Mandrel line is parallel to each other, and the first wave guide section is connected with the third waveguide segment by the second waveguide section, described
There is angle α, α is greater than pi/2 and is less than π between second waveguide section and the first wave guide section.
8. beam splitter according to claim 1 to 6, which is characterized in that swash along optical signal in the mode
The direction transmitted in device is sent out, the mode excitation device includes first wave guide section and second waveguide section, the edge of the first wave guide section
The central axis in optical signal transmission direction and the second waveguide section the central axis along optical signal transmission direction it is mutual
In parallel, input end face of the output end face of the first wave guide section close to the second waveguide section, and the first wave guide section
It docks the partial region of the input end face of the partial region of output end face and the second waveguide section.
9. beam splitter according to claim 1 to 6, which is characterized in that the mode excitation device includes first
Waveguide segment and second waveguide section, the central axis along optical signal transmission direction of the first wave guide section and the second waveguide
The central axis along optical signal transmission direction of section is parallel to each other, and the output end face of the first wave guide section is close to described second
The input end face of waveguide segment, the area of the input end face of the second waveguide section are greater than the output end face of the first wave guide section
Area, the output end face of the first wave guide section are docked with the partial region of the input end face of the second waveguide section.
10. beam splitter according to claim 9, which is characterized in that the first wave guide section along optical signal transmission
The central axis in direction and the central axis along optical signal transmission direction of the second waveguide section coincide, and described first
The docking of the central area of the output end face of waveguide segment and the input end face of the second waveguide section.
11. beam splitter according to claim 1 to 6, which is characterized in that the mode excitation device is taper
The narrow end of waveguide, the tapered transmission line is input terminal, and wide end is output end.
12. a kind of optical power monitoring device characterized by comprising in the first photoelectric detector PD and such as claim 1-11
Described in any item beam splitters, the first PD are arranged in 1 × 1MMI photo-coupler in the beam splitter
The second output waveguide section on, the high-order mode optical signal that the first PD is used to export the second output waveguide section into
Row monitoring.
13. optical power monitoring device according to claim 12, which is characterized in that 1 × 1MMI photo-coupler also wraps
Third output waveguide section is included, the optical power monitoring device further includes the 2nd PD, and the 2nd PD setting is exported in the third
On waveguide segment, the high-order mode optical signal that the 2nd PD is used to export the third output waveguide section is monitored.
14. optical power monitoring device according to claim 13, which is characterized in that the electrode of the first PD and the 2nd PD
It is connected.
15. a kind of chip of laser characterized by comprising laser and the light as described in any one of claim 12-14
Power monitoring apparatus, the output end of the laser are defeated with the mode excitation device in the optical power monitoring device
Enter waveguide segment to be connected.
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| CN201810432035.0A CN110455405A (en) | 2018-05-08 | 2018-05-08 | Beam splitter, optical power monitoring device and chip of laser |
| PCT/CN2018/122596 WO2019214244A1 (en) | 2018-05-08 | 2018-12-21 | Optical beam splitter, optical power monitoring device, and laser chip |
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| CN201810432035.0A CN110455405A (en) | 2018-05-08 | 2018-05-08 | Beam splitter, optical power monitoring device and chip of laser |
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| CN112289884A (en) * | 2020-11-11 | 2021-01-29 | 中国科学院上海微***与信息技术研究所 | Laser redundancy photoelectric integrated circuit |
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| US11064592B1 (en) | 2018-09-28 | 2021-07-13 | Apple Inc. | Systems and methods for wavelength locking in optical sensing systems |
| US11835836B1 (en) | 2019-09-09 | 2023-12-05 | Apple Inc. | Mach-Zehnder interferometer device for wavelength locking |
| US20230100317A1 (en) * | 2021-09-24 | 2023-03-30 | Apple Inc. | Interference Devices for Wavelength Locking |
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| US5524156A (en) * | 1994-06-17 | 1996-06-04 | Koninklijke Ptt Nederland N.V. | Polarization and wavelength independent optical power splitting circuit |
| CN104914506A (en) * | 2015-06-23 | 2015-09-16 | 中国科学院半导体研究所 | InP-based mode division multiplexer/demultiplexer structure based on multimode interference coupler |
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| JPH11502634A (en) * | 1995-02-01 | 1999-03-02 | ロイトルド，ユルグ | Compact optical-optical switch and wavelength converter using multimode interference mode converter |
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| US5524156A (en) * | 1994-06-17 | 1996-06-04 | Koninklijke Ptt Nederland N.V. | Polarization and wavelength independent optical power splitting circuit |
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