CN110440836A - A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level - Google Patents
A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level Download PDFInfo
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- CN110440836A CN110440836A CN201910571285.7A CN201910571285A CN110440836A CN 110440836 A CN110440836 A CN 110440836A CN 201910571285 A CN201910571285 A CN 201910571285A CN 110440836 A CN110440836 A CN 110440836A
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- fixed plate
- glued
- hole
- electrode
- movable plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
The present invention relates to a kind of quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level, technical characterstic is: including upper fixed plate, movable plate electrode, lower fixed plate, multiple isolation pads, upper anti-glued ring, lower anti-glued ring and connecting component；The upper fixed plate, movable plate electrode and lower fixed plate are formed with central through hole, in upper fixed plate lower surface, lower fixed plate upper surface, the upper and lower surfaces of movable plate electrode and the equal plating golden film of lateral surface；The upper fixed plate and lower fixed plate are parallel to each other overlapping, and laid equidistantly has multiple detachable isolation pads between upper fixed plate and lower fixed plate, and the upper fixed plate and lower fixed plate intermediate active on the inside of isolation pad are equipped with movable plate electrode；It is fixed with anti-glued ring and lower anti-glued ring in the cylindrical shape that there is flange in tail portion respectively on the central through hole of upper fixed plate and lower fixed plate；Connecting component is coated in the cavity that upper and lower anti-glued cylinder shape through-hole is formed.The present invention, which can be improved displacement resolution capability and reduce non-linearity of capacitor, generates error.
Description
Technical field
The invention belongs to measure, metrical instrument technical field, be related to capacitive displacement transducer, especially one kind and have angstrom
Rice (10-10M) the quartzy capacitive displacement transducer of grade resolving power level.
Background technique
Currently, the miniaturization of instrument and equipment is the certainty of development in science and technology, the hair advanced by leaps and bounds with micron, nanotechnology
Exhibition, nanometer (10-9M), Ethylmercurichlorendimide (10-10M) micro-displacement measurement of magnitude becomes the technical problem of urgent need to resolve.Due to atom
Diameter is exactly Ethylmercurichlorendimide grade, and the measurement of single-contact formula can not accurately measure an angstrom meter-sized precision.Non-contact measurement master
If starting with from electricity, magnetic, light etc., nanometer, the transfer of Ethylmercurichlorendimide level are changed to the variation of other signals.Current mainstream in the world
Optical sensor be essentially nanoscale, the temperature of test environment when use, purification require very high and expensive.Electromagnetism class
The structure of sensor is complex and resolving power is difficult to reach Ethylmercurichlorendimide magnitude.
Capacitive displacement transducer has the characteristics that planar survey and non-contacting, compensates for lacking for single-contact formula measurement completely
It falls into, there is inherent advantage in terms of Ethylmercurichlorendimide grade displacement measurement.But due to the characteristic of capacitor itself, in insulated with material, any surface finish
Degree, nonlinearity erron and stray capacitance influences etc. produce new problem again.Therefore it is up to standard how to design a performance
Capacitor realizes Ethylmercurichlorendimide grade displacement measurement, is the core work of capacitive displacement transducer.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art, propose a kind of design rationally, structure and simple process and
The quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level of high sensitivity.
The present invention solves its realistic problem and adopts the following technical solutions to achieve:
A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level, comprising: upper fixed plate, movable plate electrode,
Lower fixed plate, multiple isolation pads, upper anti-glued ring, lower anti-glued ring and connecting component；The upper fixed plate, movable plate electrode and lower determine pole
Plate is formed with central through hole, equal in upper fixed plate lower surface, lower fixed plate upper surface, the upper and lower surfaces of movable plate electrode and lateral surface
Plating golden film；The upper fixed plate and lower fixed plate are parallel to each other overlapping, between upper fixed plate and lower fixed plate equally spacedly
Multiple dismountable isolation pads are laid with, the upper fixed plate and lower fixed plate intermediate active on the inside of isolation pad are equipped with dynamic
Pole plate；It is fixedly mounted in the cylindrical shape that there is flange in tail portion anti-glued ring and lower anti-respectively on the central through hole of upper fixed plate and lower fixed plate
Paste ring；Upper and lower anti-glued cylinder shape through-hole formed cavity in be coated with connecting component, the upper end of the connecting component with to location
Moving device is fixedly connected, and lower end is packed on movable plate electrode central through hole.
Moreover, the upper and lower surfaces of the slightly above upper fixed plate in the upper surface and lower end surface of the upper anti-glued ring, under
The upper and lower surfaces of the slightly above lower fixed plate in the upper surface and lower end surface of anti-glued ring.
Moreover, the non-plating golden film at the upper fixed plate lower surface and lower fixed plate upper surface outer rim, the isolating pad
Piece be located at the outer rim of upper fixed plate lower surface and lower fixed plate upper surface without golden film at.
Moreover, the plating of movable plate electrode upper and lower surfaces is completely covered in the upper fixed plate and the surface area of lower fixed plate plating golden film
Cover the surface area of golden film.
Moreover, the connecting component includes the connecting rod being made into integration and connection rod base, the connecting rod and connecting rod base
Seat is installed in the cavity that anti-glued cylinder shape through-hole and lower anti-glued cylinder shape through-hole are formed；The connecting rod upper end with to location
Moving device is fixedly connected, and connection rod base is fixed in movable plate electrode through-hole.
The advantages of the present invention:
1, upper fixed plate of the invention, lower fixed plate and movable plate electrode are all made of is made in quartz glass on piece gold-plated film, makees
Higher compared with traditional metal electrodes surface smoothness for electrode, golden film is anti-oxidant, resistance to corrosion is stronger, at the same quartz glass plate with
It can guarantee insulation between mounting bracket.
2, for the fixed and moving pole plate golden film area of capacitor of the invention by the way of small one and large one, fixed plate golden film size can
Movable plate electrode golden film size is completely covered, the influence of capacitor edge effect is reduced with this.
3, the present invention overlaps to form differential capacitor using two independent capacitances, and displacement resolution capability can be improved and reduce electricity
The non-linear generation error of container.
4, the anti-glued ring that the present invention is fixed on fixed plate can effectively avoid two electrode contact short circuits of capacitor and generation
Adsorption capacity and be difficult to disengage.
5, the present invention, can be to differential electrical capacitance and to the constant multiplier progress of displacement by adjusting the thickness of isolation pad
The horizontal contradiction between resetting difficulty of resolving power is coordinated in control.
Detailed description of the invention
Fig. 1 is quartz glass plate plated film schematic diagram of the invention；
Fig. 2 is a kind of quartzy capacitive displacement transducer structural schematic diagram of the invention；
Description of symbols:
1-upper fixed plate, 2-movable plate electrodes, 3-lower fixed plates, 4,8,9-isolation pads, 5-upper anti-glued rings, 6-connections
Component, 6-1-connecting rod, 6-1-connection rod base, 7-lower anti-glued rings.
Specific embodiment
The embodiment of the present invention is described in further detail below in conjunction with attached drawing:
A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level, as depicted in figs. 1 and 2, comprising: on
Fixed plate, movable plate electrode, lower fixed plate, multiple isolation pads, upper anti-glued ring, lower anti-glued ring and connecting component；The upper fixed plate,
Movable plate electrode and lower fixed plate are formed with central through hole, upper fixed plate lower surface, lower fixed plate upper surface, movable plate electrode it is upper and lower
Surface and the equal plating golden film of lateral surface；The upper fixed plate and lower fixed plate are parallel to each other overlapping, in upper fixed plate and lower determine pole
Laid equidistantly has multiple dismountable isolation pads between plate, in the upper fixed plate and lower fixed plate on the inside of isolation pad
Between be movably installed with movable plate electrode；It is fixedly mounted with the cylindrical shape that there is flange in tail portion respectively on the central through hole of upper fixed plate and lower fixed plate
Upper anti-glued ring and lower anti-glued ring；It is coated with connecting component in the cavity that upper and lower anti-glued cylinder shape through-hole is formed, the connecting component
Upper end be fixedly connected with gearshift to be measured, lower end is packed on movable plate electrode central through hole.
In the present embodiment, the upper surface of the slightly above upper fixed plate in the upper surface and lower end surface of the upper anti-glued ring is under
Surface, the upper and lower surfaces of the slightly above lower fixed plate in the upper surface and lower end surface of lower anti-glued ring.
In the present embodiment, non-plating golden film, institute at the upper fixed plate lower surface and lower fixed plate upper surface outer rim
State isolation pad be located at the outer rim of upper fixed plate lower surface and lower fixed plate upper surface without golden film at.
In the present embodiment, the upper fixed plate and the surface area of lower fixed plate plating golden film be completely covered on movable plate electrode,
The surface area of lower surface plating golden film.
In the present embodiment, the connecting component includes the connecting rod that is made into integration and connection rod base, the connecting rod and
Connection rod base is installed in the cavity that anti-glued cylinder shape through-hole and lower anti-glued cylinder shape through-hole are formed；The connecting rod upper end
It is fixedly connected with gearshift to be measured, connection rod base is fixed in movable plate electrode through-hole.
Structure, function and the effect of each component part of the invention are described further below:
In the present embodiment, of the invention to have Ethylmercurichlorendimide (10-10M) the quartzy capacitive displacement sensing of grade resolving power level
Device includes at least two panels quartz capacitor fixed plate, a bauerite movable plate electrode, two anti-glued rings, three pieces isolation pad and a company
Extension bar.The fixed plate of surface gold-plating film is parallel with movable plate electrode to be overlapped, and two panels fixed plate is separated out gap with isolation pad, and movable plate electrode exists
Among two panels fixed plate, two independent capacitors are formed, anti-glued ring, which can avoid dynamic, fixed plate golden film contact, causes capacitor short
Road.When capacitor movable plate electrode is mobile, by measuring the variation of two independent electrical capacitances, the mobile position of movable plate electrode can be accurately tested out
Shifting amount.
When capacitor is processed, only in 3 upper surface corresponding position plating golden film of upper 1 lower surface of fixed plate and lower fixed plate, In
Upper fixed plate lower surface and lower fixed plate upper surface outer rim are without golden film, for laying multiple isolation pads, the table on upper fixed plate
Face and lower fixed plate lower surface and inside and outside side are without golden film, it is ensured that are installed to electrode for capacitors and installation on outside support
The insulating properties of bracket；In upper and lower surfaces all plating golden films of movable plate electrode 2, upper and lower surfaces golden film size is compared with fixed plate 1,3 golden films
Size is small (such as Fig. 1), and to reduce the influence of capacitor edge effect, while in outer side plated film, the conducting of two surface electrodes is total to
Ground processing；
Isolation pad 4 using quartz glass or material that is close with glass linear expansion coefficient and insulating, using more small pieces or
The structure of one annulus is removably pacified between upper fixed plate and lower fixed plate at interval of 120 degree in the present embodiment
Fill isolation pad 4,8,9, each isolation pad be located at upper fixed plate lower surface and lower fixed plate upper surface outer rim without golden film at, thus
Guarantee that upper and lower fixed plate 1,3 position gap sizes are consistent, and does not interfere 2 normal movement of movable plate electrode.
Upper anti-glued ring 5 and lower anti-glued ring are the cylindric annulus that there is flange in tail portion, are packed in upper and lower fixed plate respectively
1, on 3 centre bores, position slightly protrudes from golden film plane, i.e., the slightly above upper fixed plate in the upper surface and lower end surface of upper anti-glued ring
Upper and lower surfaces, the upper and lower surfaces of the slightly above lower fixed plate in the upper surface and lower end surface of lower anti-glued ring, function
It can be that 2 upper and lower surfaces golden film of movable plate electrode is avoided to contact and make with upper and lower fixed plate 1,3 golden films during vertical motion
Capacitance electrode conducting.
Movable plate electrode 2 and the possible contact position of anti-glued ring do not answer plating golden film.
When carrying out displacement measurement using sensor, first sensor is fixed on corresponding construction by Fig. 2 form, it is ensured that except dynamic
Remaining parts position and state are constant other than pole plate 2.Movable plate electrode 2 is connected by connecting component 6 with external moving parts.The company
Relay part includes the connecting rod 6-1 being made into integration and connection rod base 6-2, which is installed on anti-glued ring through-hole under
In the cavity that anti-glued ring through-hole is formed；The connecting rod upper end is fixedly connected with gearshift to be measured, and connection rod base is packed in
In movable plate electrode through-hole, when gearshift to be measured is when vertical direction generates displacement, connecting component and about 2 movable plate electrode are successively driven
It is mobile, when movable plate electrode 2 generates micro-displacement δ with external gearshift to be measured along the vertical direction, with upper and lower fixed plate 1,3
Between two capacitance electrode distances being formed increase separately δ and reduce δ, and capacitance is inversely proportional with electrode distance, two capacitances
It respectively reduces and increases, the two difference meets formulaThat is differential capacitance variable quantity is directly proportional to micro-displacement.Such as
Fruit chooses suitable electrode parameter, such as S=5000mm2、d0=0.2mm, when displacement δ=1 × 10-10When m, Δ C=2.2 ×
10-4PF, the capacitance variations of the magnitude are not difficult to detect, therefore sensor has Ethylmercurichlorendimide (10-10M) grade resolving power.
Meanwhile to avoid capacitor gap and change in dielectric constant, this sensor should be worked as far as possible in high-precision constant temperature
In constant pressure environment, influence of the air temperature and current disturbance to capacity measurement is reduced.
The working principle of the invention is:
Using the surface smoothness of quartz glass superelevation, metal electrode directly is formed in its coating surface golden film；Without golden film
Place ensures that insulation.After the lower surface gold-plated film of the upper surface of lower fixed plate, the upper and lower surfaces of movable plate electrode and upper fixed plate
It is successively horizontally overlapping, wherein being separated between upper and lower fixed plate with the isolation pad of non-uniform thickness, form the gap of fixed thickness.
Movable plate electrode is hit exactly in gap, is communicated with the outside by connecting rod through the through-hole in the middle part of fixed plate, and anti-glued ring can avoid dynamic, fixed plate
Contact generates short circuit and adsorption capacity.Between lower fixed plate upper surface and movable plate electrode lower surface electrode, upper fixed plate lower surface and dynamic
An independent capacitor is respectively formed between pole plate upper surface electrode.When movable plate electrode moves along the vertical direction, due to plate gap
Change the two capacitances one and increase a reduction, the two difference is directly proportional to movable plate electrode moving displacement.As long as measuring electricity
The variable quantity of tolerance can calculate the displacement of movable plate electrode (connecting rod with the exterior part that is connected).
Of the invention has Ethylmercurichlorendimide (10-10M) the quartzy capacitive displacement transducer structure of grade resolving power level is simple, spirit
Sensitivity is high, at low cost, there is higher cost performance and vast market prospect.
It is emphasized that embodiment of the present invention be it is illustrative, without being restrictive, therefore the present invention includes
It is not limited to embodiment described in specific embodiment, it is all to be obtained according to the technique and scheme of the present invention by those skilled in the art
Other embodiments, also belong to the scope of protection of the invention.
Claims (5)
1. a kind of quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level, it is characterised in that: include: upper to determine pole
Plate, movable plate electrode, lower fixed plate, multiple isolation pads, upper anti-glued ring, lower anti-glued ring and connecting component；The upper fixed plate, dynamic pole
Plate and lower fixed plate are formed with central through hole, upper fixed plate lower surface, lower fixed plate upper surface, movable plate electrode upper and lower surfaces
With the equal plating golden film of lateral surface；The upper fixed plate and lower fixed plate are parallel to each other overlapping, upper fixed plate and lower fixed plate it
Between laid equidistantly have multiple dismountable isolation pads, it is living among the upper fixed plate and lower fixed plate on the inside of isolation pad
It is dynamic that movable plate electrode is installed；It is fixedly mounted in the cylindrical shape that there is flange in tail portion and prevents respectively on the central through hole of upper fixed plate and lower fixed plate
Paste ring and lower anti-glued ring；Upper and lower anti-glued cylinder shape through-hole formed cavity in be coated with connecting component, the connecting component it is upper
End is fixedly connected with gearshift to be measured, and lower end is packed on movable plate electrode central through hole.
2. a kind of quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level according to claim 1, special
Sign is: the upper and lower surfaces of the slightly above upper fixed plate in the upper surface and lower end surface of the upper anti-glued ring, lower anti-glued ring
The slightly above lower fixed plate in upper surface and lower end surface upper and lower surfaces.
3. a kind of quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level according to claim 1, special
Sign is: the non-plating golden film at the upper fixed plate lower surface and lower fixed plate upper surface outer rim, the isolation pad are located at
The outer rim of upper fixed plate lower surface and lower fixed plate upper surface without golden film at.
4. a kind of quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level according to claim 1, special
Sign is: movable plate electrode upper and lower surfaces plating golden film is completely covered in the upper fixed plate and the surface area of lower fixed plate plating golden film
Surface area.
5. a kind of quartzy capacitive displacement transducer for having Ethylmercurichlorendimide grade resolving power level according to claim 1, special
Sign is: the connecting component includes the connecting rod being made into integration and connection rod base, and the connecting rod and connection rod base install
In the cavity that upper anti-glued cylinder shape through-hole and lower anti-glued cylinder shape through-hole are formed；The connecting rod upper end and gearshift to be measured
It is fixedly connected, connection rod base is fixed in movable plate electrode through-hole.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910571285.7A CN110440836A (en) | 2019-06-28 | 2019-06-28 | A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910571285.7A CN110440836A (en) | 2019-06-28 | 2019-06-28 | A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level |
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| CN110440836A true CN110440836A (en) | 2019-11-12 |
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| CN201910571285.7A Pending CN110440836A (en) | 2019-06-28 | 2019-06-28 | A kind of quartzy capacitive displacement transducer having Ethylmercurichlorendimide grade resolving power level |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09311009A (en) * | 1996-05-23 | 1997-12-02 | Jeco Co Ltd | Position sensor |
| CN1696643A (en) * | 2005-05-31 | 2005-11-16 | 清华大学 | Suspension type static and dynamic material testing machine of tiny tensile |
| CN105402298A (en) * | 2015-12-29 | 2016-03-16 | 中国科学院测量与地球物理研究所 | Balanced feedback system of electromagnetic damper |
| CN109459168A (en) * | 2018-09-30 | 2019-03-12 | 江苏大学 | A kind of electromagnetic balance formula pull pressure sensor |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
-
2019
- 2019-06-28 CN CN201910571285.7A patent/CN110440836A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09311009A (en) * | 1996-05-23 | 1997-12-02 | Jeco Co Ltd | Position sensor |
| CN1696643A (en) * | 2005-05-31 | 2005-11-16 | 清华大学 | Suspension type static and dynamic material testing machine of tiny tensile |
| CN105402298A (en) * | 2015-12-29 | 2016-03-16 | 中国科学院测量与地球物理研究所 | Balanced feedback system of electromagnetic damper |
| CN109459168A (en) * | 2018-09-30 | 2019-03-12 | 江苏大学 | A kind of electromagnetic balance formula pull pressure sensor |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
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Application publication date: 20191112 |