CN110109271A - Liquid cutter - Google Patents
Liquid cutter Download PDFInfo
- Publication number
- CN110109271A CN110109271A CN201910302232.5A CN201910302232A CN110109271A CN 110109271 A CN110109271 A CN 110109271A CN 201910302232 A CN201910302232 A CN 201910302232A CN 110109271 A CN110109271 A CN 110109271A
- Authority
- CN
- China
- Prior art keywords
- groove
- liquid
- ontology
- liquid cutter
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims abstract description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 6
- 239000004800 polyvinyl chloride Substances 0.000 claims description 6
- 239000004568 cement Substances 0.000 claims description 5
- 229920003023 plastic Polymers 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 210000001364 upper extremity Anatomy 0.000 claims description 3
- 239000003292 glue Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 5
- 238000007323 disproportionation reaction Methods 0.000 abstract description 5
- 238000003860 storage Methods 0.000 description 5
- 239000007921 spray Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001596 poly (chlorostyrenes) Polymers 0.000 description 1
- -1 steam Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nozzles (AREA)
Abstract
The present invention provides a kind of liquid cutter, for applying treatment liquid, including ontology and fixing piece in display panel processing procedure.The ontology includes the nozzle and the neighbouring at least groove for being opened in the nozzle of reservoir channel, the connection reservoir channel.The groove includes notch and closed slot bottom, wherein the size of the notch is less than the height of the groove.Fixing piece is fixed in the ontology, and the fixing piece is fixed between the reservoir channel and the groove.Whereby, enable uniformly to flow out when nozzle of the liquid by the liquid cutter, improve the defect that fluid pressure unevenness causes the display panel to be formed to have brightness disproportionation (mura), critical dimension (CD) uniformity is improved, to improve the uniformity of display panel brightness.
Description
Technical field
The present invention relates to a kind of processing procedure fields of display panel, and espespecially one kind is in display panel manufacturing process to apply
The liquid cutter for the treatment of liquid.
Background technique
In existing thin film transistor (TFT) (TFT) wet process technology, glass substrate is cleaned or must be used when developing narrow
Seam liquid cutter makes equably to flow out and be coated on the glass substrate such as developer.When slit liquid cutter is carried out by screw
After fixation, liquid is generated via slit liquid cutter sprinkling glass substrate to splash, in the liquid meeting splash to liquid cutter of part.Through it is long when
Between operation when steam can be condensed in liquid cutter, liquid cutter surface condensation droplet by gravity again can to liquid cutter mouth flowing and shadow
Ring liquid cutter spray cascade (liquid curtain), cause cascade uneven, cause post-develop photoresist (photoresist,
PR threadiness/corrugated brightness disproportionation (mura) defect) is easily presented at the opposite display panel of figure, leads to yield (yield)
Decline.Since liquid outflow unevenness leads to finally formed pattern spacing, the i.e. critical dimension (critical of front and back end pattern
Dimension, CD) it has differences, and then it is uneven to cause the brightness of liquid crystal display to show.
Summary of the invention
In view of this, it is necessary to provide a kind of liquid cutter, to solve the problems of prior art.
The purpose of the present invention is to provide a kind of liquid cutter, avoids steam or the liquid of splash from converging and fall in cascade and draw
Sprinkling unevenness is played, the defect that fluid pressure unevenness causes display panel to have brightness disproportionation (mura) is improved, improves critical dimension
(CD) uniformity, to improve the uniformity of display panel brightness.
To reach foregoing purpose of the present invention, the present invention provides a kind of liquid cutter, for the application processing in display panel processing procedure
Liquid, including ontology and fixing piece.The ontology include reservoir channel, the connection reservoir channel nozzle and neighbouring open up
In an at least groove for the nozzle.The groove includes notch and closed slot bottom, wherein the size of the notch is less than institute
State the height of groove.Fixing piece is fixed in the ontology, and the fixing piece is connected between the reservoir channel and the groove.
In one embodiment of this invention, the slot bottom is the parallel or inclined hydrojet direction in the nozzle.
In one embodiment of this invention, the tilt angle of the slot bottom is high between zero to arc tangent 2 times of grooves
Degree/the trench length (0 < θ < arctan (2H/L)).
In one embodiment of this invention, the groove shape is rectangle, circle or polygon, and the groove is located at institute
State the upper limb of nozzle opening.
In one embodiment of this invention, the ontology includes corresponding two even surface, the reservoir channel and described
The even surface for being opened in one at an at least groove interval.
In one embodiment of this invention, the quantity of the groove is 2 or 2 or more, and each groove is opened respectively
Set on any even surface.
In one embodiment of this invention, the reservoir channel include inject liquid flow in pipes be connected to the nozzle
Output channel, the output channel is located at the middle position of the ontology, and the size of the output channel is according to the liquid
The discharge of body and set.
In one embodiment of this invention, the fixing piece be screw, the fixing piece be fixed in the flow in pipes and
Between the groove.
In one embodiment of this invention, the material of the ontology is plastic cement, metal or alloy, and the plastic cement is polychlorostyrene second
Alkene (Polyvinyl Chloride, PVC), the alloy are stainless steel (Steel SpecialUse Stainless, SUS).
In one embodiment of this invention, the ontology is integrally formed or piecemeal assembles.
The present invention also have effects that it is following, the groove can for closed parallel slot bottom or tool slope/inclined slot bottom,
Other than it can store the liquid such as steam, water droplet, it can also increase steam storage capacity.Furthermore the quantity of groove further includes 2 or more,
Storage capacity can equally be increased.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the cross-sectional view of liquid cutter of the present invention；
Fig. 2 is the floor map of liquid cutter of the present invention；And
Fig. 3 is the schematic diagram of the groove of liquid cutter of the present invention.
Specific embodiment
Refer to that " embodiment " means that a particular feature, structure, or characteristic described in conjunction with the embodiments can in a specific embodiment
To be included at least one embodiment of the present invention.The identical term that different location in the description occurs not necessarily by
It is limited to identical embodiment, and should be understood as mutually being independent with other embodiments or alternative embodiment.At this
It invents under the enlightenment of technical solution disclosed in the embodiment provided, it should be appreciated by those skilled in the art that described in the invention
Embodiment can have other meet the technical solution of present inventive concept combine or variation.
The explanation of following embodiment is to can be used to the particular implementation of implementation to illustrate the present invention with reference to additional schema
Example.The direction term that the present invention is previously mentioned, for example, [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side],
[vertical], [level] etc. are only the directions with reference to annexed drawings.Therefore, the direction term used is to illustrate and understand this
Invention, rather than to limit the present invention.The similar unit of structure is with being given the same reference numerals in the figure.
It please refers to shown in Fig. 1 and Fig. 2, Fig. 1 is the cross-sectional view of liquid cutter of the present invention, and Fig. 2 is the flat of liquid cutter of the present invention
Face schematic diagram.As shown, the present invention provides a kind of liquid cutter 1, for the application treatment liquid 2 in display panel processing procedure, including
Ontology 11 and fixing piece 15.The liquid cutter 1 is by injection liquid 2, to achieve the effect that uniformly to spray.The liquid 2 is for example
Water, photoresist or developer (developer) etc..The liquid cutter 1 is worn by fixing piece 15 and connects ontology 11 and be fixed in display surface
On the equipment board (figure omits) of plate making technology.Display panel making technology includes but is not limited to cleaning process, PR technique etc..
The ontology 1 include reservoir channel 12, the connection reservoir channel 12 nozzle 13 and it is neighbouring be opened in it is described
An at least groove 14 for nozzle 13.The groove 14 includes notch 141 and closed slot bottom 142, wherein the ruler of the notch 141
The very little height H less than the groove 14.Fixing piece 15 is fixed in the ontology 11, and it is logical that the fixing piece 15 is fixed in the fluid injection
Between road 12 and the groove 14.
As shown in Figure 1, the groove 14 is preferably rectangular in shape；In the embodiment of secondary choosing, 14 shape of groove can
For round, polygon or combinations thereof, do not limit.The groove 14 is located at the upper limb of the nozzle 13 opening.The ontology 11
Including corresponding two even surface 16, each even surface 16 has bevel edge 17 close to the nozzle 13, makes the formation of nozzle 13
Sharp mouth shape, with benefit alignment sprinkling.The described of one that be opened at the reservoir channel 12 and an at least groove 14 interval is put down
Sliding surface 16.
Specifically, the reservoir channel 12 include injection liquid 2 flow in pipes 121 be connected to the defeated of the nozzle 13
Pipeline 122 out.The flow in pipes 121 is Bi Cichuizhied with the output channel 122, and the output channel 122 is positioned at described
The middle position of ontology 11.In the embodiment of other secondary choosings, the flow in pipes 121 also can be with the output channel 122
It is arranged obliquely, and the output channel 122 can be biased to a wherein even surface 16 setting, optionally change.The efferent duct
The size (caliber) in road 122 can be sized according to the discharge of the liquid 2.In addition, fixing piece 15 as shown in Figure 1
Preferably screw or bolt, and the fixing piece 15 is connected between the flow in pipes 121 and the groove 14.
The slot bottom 142 as shown in Figure 1 is the hydrojet direction for being parallel to the nozzle 13.However as shown in Figure 3
In embodiment, the slot bottom 142 can also be the hydrojet direction for favouring the nozzle 13, to increase storage 21 amount of steam.Institute
State trench length L described in 2 times of groove height H/ of the tilt angle theta of slot bottom 142 between zero to arc tangent, i.e. 0 < θ <
Between arctan (2H/L), avoids steam 21 or the liquid of splash 2 from converging and fall in cascade 22 and cause sprinkling uneven.Change sentence
It talks about, groove 14 can store the liquid 2 of steam/water droplet 21 or splash, avoid it from directly converging and fall on nozzle 13, cause to spray
The cascade 22 that mouth 13 sprays is uneven and generates the defect of brightness disproportionation (mura) in display panel.Therefore, the present invention passes through
2 pressure of liquid is improved using groove 14 and unevenly causes threadiness/corrugated brightness disproportionation (mura) defect, improves critical dimension
(CD) uniformity, to improve the uniformity of display panel brightness.
In one embodiment of this invention, the quantity of the groove 14 is 2 or 2 or more, and each groove 14 divides
It is not opened in any even surface 16.In addition, the material of the ontology 11 can be plastic cement, metal or alloy, to be suitable for respectively
Kind sprinkling liquid 2 of different nature.The plastic cement is preferably polyvinyl chloride (Polyvinyl Chloride, PVC)；The alloy
Preferably stainless steel (Steel SpecialUse Stainless, SUS).Furthermore the ontology 11 can be integrally formed or divide
Block assembles, and optionally changes.
Therefore, the groove 14 of the invention can be parallel slot bottom 142 or the tool slope/inclined slot bottom 142 of closed,
Other than it can store the liquid 2 such as steam, water droplet 21, it can also increase steam storage capacity.Furthermore the quantity of the groove 14 further includes
2 or more, it can equally increase storage capacity.
In conclusion although the present invention is described in conjunction with its specific embodiment, it should be understood that many substitutions are repaired
Changing and changing will be apparent those skilled in the art.Therefore, it is intended to want comprising falling into appended right
Ask all substitutions, modification and the variation in the range of book.
Claims (10)
1. a kind of liquid cutter, for applying treatment liquid in display panel processing procedure, which is characterized in that the liquid cutter includes:
Ontology, nozzle and the neighbouring at least ditch for being opened in the nozzle including reservoir channel, the connection reservoir channel
Slot, the groove includes notch and closed slot bottom, wherein the size of the notch is less than the height of the groove；And
Fixing piece, is fixed in the ontology, and the fixing piece is fixed between the reservoir channel and the groove.
2. liquid cutter as described in claim 1, which is characterized in that the slot bottom is the parallel or inclined hydrojet side in the nozzle
To.
3. liquid cutter as claimed in claim 2, which is characterized in that the tilt angle of the slot bottom is between 2 times of zero to arc tangent
The groove height/the trench length (0 < θ < arctan (2H/L)).
4. liquid cutter as described in claim 1, which is characterized in that the groove shape is rectangle, circle or polygon, and described
Groove is located at the upper limb of the nozzle opening.
5. liquid cutter as described in claim 1, which is characterized in that the ontology includes corresponding two even surface, the fluid injection
The even surface for being opened in one in channel and an at least groove interval.
6. liquid cutter as claimed in claim 5, which is characterized in that the quantity of the groove is 2 or 2 or more, each described
Groove is opened in any even surface respectively.
7. liquid cutter as described in claim 1, which is characterized in that the reservoir channel includes flow in pipes and the company for injecting liquid
Lead to the output channel of the nozzle, the output channel is located at the middle position of the ontology, and the size of the output channel
It is set according to the discharge of the liquid.
8. liquid cutter as claimed in claim 7, which is characterized in that the fixing piece is screw, and the fixing piece is connected to described
Between flow in pipes and the groove.
9. liquid cutter as described in claim 1, which is characterized in that the material of the ontology is plastic cement, metal or alloy, the modeling
Glue is polyvinyl chloride, and the alloy is stainless steel.
10. liquid cutter as described in claim 1, which is characterized in that the ontology is integrally formed or piecemeal assembles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910302232.5A CN110109271B (en) | 2019-04-16 | 2019-04-16 | Liquid knife |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910302232.5A CN110109271B (en) | 2019-04-16 | 2019-04-16 | Liquid knife |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110109271A true CN110109271A (en) | 2019-08-09 |
| CN110109271B CN110109271B (en) | 2022-02-22 |
Family
ID=67485370
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910302232.5A Active CN110109271B (en) | 2019-04-16 | 2019-04-16 | Liquid knife |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110109271B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112899757A (en) * | 2020-12-31 | 2021-06-04 | 珠海松柏科技有限公司 | Electroplating water knife for electroplating PCB (printed circuit board) micropores |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021872A (en) * | 1999-07-06 | 2001-01-26 | Matsushita Electric Ind Co Ltd | Apparatus for production of substrate for liquid crystal display |
| CN1803321A (en) * | 2006-01-17 | 2006-07-19 | 友达光电股份有限公司 | Knife mechanism with liquid passage |
| KR20070057474A (en) * | 2005-12-02 | 2007-06-07 | 엘지.필립스 엘시디 주식회사 | Air knife for liquid crystal display and method for controlling thereof |
| CN101303968A (en) * | 2007-05-07 | 2008-11-12 | 大日本网目版制造株式会社 | Substrate processing apparatus |
| CN201520802U (en) * | 2009-08-21 | 2010-07-07 | 深圳华映显示科技有限公司 | Wet etching equipment |
| CN207856553U (en) * | 2017-12-11 | 2018-09-14 | 广东澳森环保科技有限责任公司 | It is a kind of to apply exhaust gas cleaner without water pumping churning |
-
2019
- 2019-04-16 CN CN201910302232.5A patent/CN110109271B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021872A (en) * | 1999-07-06 | 2001-01-26 | Matsushita Electric Ind Co Ltd | Apparatus for production of substrate for liquid crystal display |
| KR20070057474A (en) * | 2005-12-02 | 2007-06-07 | 엘지.필립스 엘시디 주식회사 | Air knife for liquid crystal display and method for controlling thereof |
| CN1803321A (en) * | 2006-01-17 | 2006-07-19 | 友达光电股份有限公司 | Knife mechanism with liquid passage |
| CN101303968A (en) * | 2007-05-07 | 2008-11-12 | 大日本网目版制造株式会社 | Substrate processing apparatus |
| CN201520802U (en) * | 2009-08-21 | 2010-07-07 | 深圳华映显示科技有限公司 | Wet etching equipment |
| CN207856553U (en) * | 2017-12-11 | 2018-09-14 | 广东澳森环保科技有限责任公司 | It is a kind of to apply exhaust gas cleaner without water pumping churning |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112899757A (en) * | 2020-12-31 | 2021-06-04 | 珠海松柏科技有限公司 | Electroplating water knife for electroplating PCB (printed circuit board) micropores |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110109271B (en) | 2022-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
|
| CB02 | Change of applicant information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Liquid knife Effective date of registration: 20231113 Granted publication date: 20220222 Pledgee: Industrial and Commercial Bank of China Limited Shenzhen Guangming Sub branch Pledgor: TCL China Star Optoelectronics Technology Co.,Ltd. Registration number: Y2023980065368 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |