CN108774732B - Magnetic guiding translation mechanism in vacuum chamber of vacuum coating machine - Google Patents
Magnetic guiding translation mechanism in vacuum chamber of vacuum coating machine Download PDFInfo
- Publication number
- CN108774732B CN108774732B CN201810859252.8A CN201810859252A CN108774732B CN 108774732 B CN108774732 B CN 108774732B CN 201810859252 A CN201810859252 A CN 201810859252A CN 108774732 B CN108774732 B CN 108774732B
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- Prior art keywords
- vacuum chamber
- mounting plate
- translation
- vacuum
- fixed
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- 230000007246 mechanism Effects 0.000 title claims abstract description 16
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 21
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 5
- 230000000149 penetrating effect Effects 0.000 abstract description 4
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a magnetic guiding translation mechanism in a vacuum chamber of a vacuum coating machine, which comprises a vacuum chamber, magnetic guiding devices, a plurality of connecting rods transversely penetrating through side plates on two sides of the vacuum chamber, wherein the magnetic guiding devices are longitudinally fixed on the connecting rods, one ends of the connecting rods are fixed on a mounting plate, corrugated pipes are sleeved outside the connecting rods between the mounting plate and the vacuum chamber, the other ends of the connecting rods are sleeved in sealing sleeves, two ends of the vacuum chamber are respectively provided with a transmission rod transversely penetrating through the side plates on two sides of the vacuum chamber, a clamp is fixed on each transmission rod, one end of each transmission rod is connected with a rotary motor fixed on the mounting plate, the other ends of the transmission rods are sleeved in the sealing sleeves, the mounting plates are connected with a translation driving device, and the translation driving device can drive the mounting plates to reciprocate. The utility model can realize the left-right translation of a plurality of substrate frames in a single box vacuum environment, so that the substrate frames can be kept stable in the translation process, and the vacuum degree can not be changed in the whole working process.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to a magnetic guiding translation mechanism in a vacuum chamber of a vacuum coating machine.
Background
The vacuum coating production line is characterized in that a plurality of vacuum boxes are distributed on the same horizontal plane, and the coated glass is processed through each vacuum box under the conveying of a conveying device, so that surface coating is realized. When the substrate frame of the vertical vacuum coating production line is conveyed, the substrate frame is vertical to the bottom plate of the vacuum chamber, the bottom of the substrate frame is driven by a mechanical conveying mechanism, the upper part of the substrate frame is guided by a magnetic guiding device, the magnetic guiding device is used for arranging magnetic steel on the upper part of the substrate frame for bearing glass, then, the upper part of the substrate frame is clamped in U-shaped grooves with a plurality of groups of magnetic guiding units on the two side walls, and the purpose of non-contact positioning and guiding of the substrate frame is realized by utilizing the homopolar repulsion effect of the magnetic steel. At present, a fixed magnetic guiding device in a vacuum environment is adopted.
Disclosure of Invention
Aiming at the technical problems in the prior art, the utility model provides a magnetic guiding translation mechanism in a vacuum chamber of a vacuum coating machine, which can realize the left-right translation of a plurality of substrate frames in a single-box vacuum environment.
The technical scheme adopted by the utility model is as follows: the utility model provides a vacuum coating machine vacuum chamber is indoor magnetic guide translation mechanism, including the vacuum chamber, magnetic guide device, still include many transverse cross vacuum chamber both sides curb plate's connecting rod, many magnetic guide device vertical fixation is on the connecting rod, the one end of connecting rod is fixed on the mounting panel, the connecting rod overcoat between mounting panel and vacuum chamber has the bellows, bellows both ends are connected with mounting panel and vacuum chamber curb plate are airtight respectively, the other end cover of connecting rod is in sealed sleeve, sealed sleeve fixes on the vacuum chamber curb plate, still be equipped with a transfer line of transverse cross vacuum chamber both sides curb plate at the both ends of vacuum chamber respectively, be fixed with the anchor clamps with magnetic guide device one-to-one on the transfer line, transfer line one end is connected with the rotary motor who fixes on the mounting panel, the transfer line overcoat between mounting panel and vacuum chamber has the bellows, bellows both ends are in mounting panel and vacuum chamber curb plate airtight connection respectively, the other end cover of transfer line is in sealed sleeve, sealed sleeve is fixed on the vacuum chamber curb plate, the mounting panel is connected with translation drive arrangement, translation drive arrangement can drive the mounting panel and reciprocate.
Further, the translation driving device comprises a translation motor, a screw rod connected with the translation motor and a screw rod nut matched with the screw rod, and the screw rod nut is connected with the mounting plate.
Further, the device also comprises a translation guiding device, wherein the translation guiding device comprises a linear sliding rail and a sliding block fixed on the mounting plate and matched with the linear sliding rail.
Further, the connecting rod, the transmission rod and the side plate of the vacuum chamber are connected through linear bearings.
The beneficial effects of the utility model are as follows: the utility model can realize the left-right translation of a plurality of substrate frames in a single box vacuum environment, solves the problems of the swing of the upper end of the substrate frames in the horizontal movement process and the swing of the whole frame, ensures that the substrate frames are kept stable in the translation process, and ensures that the whole translation mechanism is carried out in the vacuum environment without causing the change of vacuum degree in the whole working process.
Drawings
Fig. 1 is a schematic perspective view of the present utility model.
Fig. 2 is a longitudinal cross-sectional view of the present utility model in a use state.
Fig. 3 is a transverse cross-sectional view of the utility model in use.
Detailed Description
The present utility model will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments are shown, for the purpose of illustrating the utility model, but the scope of the utility model is not limited to the specific embodiments shown.
As shown in fig. 1-3, the magnetic guiding translation mechanism in the vacuum chamber of the vacuum coating machine of this embodiment comprises a vacuum chamber, a magnetic guiding device 1, a plurality of connecting rods 2 transversely penetrating through side plates 15 on two sides of the vacuum chamber, a plurality of magnetic guiding devices 1 longitudinally fixed on the connecting rods 2, one ends of the connecting rods 2 are fixed on a mounting plate 8, bellows 6 are sleeved outside the connecting rods between the mounting plate 8 and the vacuum chamber, two ends of the bellows 6 are respectively in airtight connection with the mounting plate 8 and the side plates 15 of the vacuum chamber, the other ends of the connecting rods 2 are sleeved in a sealing sleeve 3, the sealing sleeve 3 is fixed on the side plates of the vacuum chamber, two ends of the vacuum chamber are also respectively provided with a transmission rod 4 transversely penetrating through the side plates on two sides of the vacuum chamber, clamps 5 corresponding to the magnetic guiding devices 1 are fixed on the transmission rods 4, one end of each transmission rod 4 is connected with a rotary motor 7 fixed on the mounting plate 8, two ends of each transmission rod are respectively sleeved with a bellows between the mounting plate and the vacuum chamber, the other ends of each bellows are respectively in airtight connection with the mounting plate and the side plates, the other ends of the transmission rods 4 are sleeved in the sealing sleeve, the sealing sleeve is fixed on the side plates of the vacuum chamber, the mounting plate 8 is connected with a driving screw rod 10, a driving device is connected with a screw rod 11 in a reciprocating way, a driving screw rod 11 and a driving device is in a reciprocating way, and a translation nut is in translation device is connected with a driving screw, and a driving screw rod 11.
Further, the device also comprises a translation guiding device, wherein the translation guiding device comprises a linear slide rail 12 and a sliding block 13 fixed on the mounting plate 8 and matched with the linear slide rail 12.
Further, the connecting rod 2, the transmission rod 4 and the vacuum chamber side plate 15 are connected through a linear bearing 16.
When the magnetic guide translation mechanism in the vacuum chamber of the vacuum coating machine works, the translation motor 9 drives the screw rod 10 to drive the mounting plate 8 to move left and right, so that the magnetic guide device 1 and the substrate frame 14 can be driven to translate, and when the magnetic guide translation mechanism moves, the rotation motor 7 drives the transmission rod 4 to rotate, so that the clamp 5 fixed on the transmission rod 4 is put down to clamp two ends of the substrate frame 14, and after the magnetic guide translation mechanism moves in place, the rotation motor drives the transmission rod to rotate reversely, so that the clamp breaks away from clamping the two ends of the substrate frame.
Many modifications and other embodiments of the utility model will come to mind to one skilled in the art to which this utility model pertains having the benefit of the teachings presented in the foregoing descriptions and the associated drawings. Therefore, it is to be understood that the utility models are not to be limited to the specific embodiments disclosed and that modifications and other embodiments are intended to be included within the scope of the appended claims. Although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.
Claims (4)
1. The utility model provides a vacuum coating machine vacuum chamber is indoor magnetic guide translation mechanism, includes vacuum chamber, magnetic guide device, its characterized in that: the device comprises a mounting plate, a plurality of magnetic guiding devices, a connecting rod, a sealing sleeve, a transmission rod, a clamp, a bellows, a translation driving device and a rotary motor, wherein the connecting rod transversely penetrates through the side plates on two sides of the vacuum chamber, one end of the magnetic guiding devices is longitudinally fixed on the connecting rod, the bellows is sleeved on the connecting rod between the mounting plate and the vacuum chamber, two ends of the bellows are respectively connected with the mounting plate and the side plates of the vacuum chamber in a sealing mode, the other end of the bellows is sleeved in the sealing sleeve, the sealing sleeve is fixed on the side plates of the vacuum chamber, the transmission rod transversely penetrates through the side plates on two sides of the vacuum chamber, the clamp in one-to-one correspondence with the magnetic guiding devices is fixed on the transmission rod, one end of the transmission rod is connected with the rotary motor fixed on the mounting plate, the bellows is sleeved outside the transmission rod between the mounting plate and the vacuum chamber, two ends of the bellows are respectively connected with the mounting plate and the side plates in a sealing mode, the other end of the transmission rod is sleeved in the sealing sleeve, the sealing sleeve is fixed on the side plates of the vacuum chamber, the mounting plate is connected with the translation driving device, and the translation driving device can drive the mounting plate to reciprocate.
2. The magnetic guide translation mechanism in a vacuum chamber of a vacuum coating machine as recited in claim 1, wherein: the translation driving device comprises a translation motor, a screw rod connected with the translation motor and a screw rod nut matched with the screw rod, and the screw rod nut is connected with the mounting plate.
3. The magnetic guide translation mechanism in a vacuum chamber of a vacuum coating machine as recited in claim 1, wherein: the device also comprises a translation guiding device, wherein the translation guiding device comprises a linear slide rail and a slide block fixed on the mounting plate and matched with the linear slide rail.
4. The magnetic guide translation mechanism in a vacuum chamber of a vacuum coating machine as recited in claim 1, wherein: the connecting rod, the transmission rod and the vacuum chamber side plate are connected through a linear bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810859252.8A CN108774732B (en) | 2018-07-31 | 2018-07-31 | Magnetic guiding translation mechanism in vacuum chamber of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810859252.8A CN108774732B (en) | 2018-07-31 | 2018-07-31 | Magnetic guiding translation mechanism in vacuum chamber of vacuum coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108774732A CN108774732A (en) | 2018-11-09 |
| CN108774732B true CN108774732B (en) | 2024-01-30 |
Family
ID=64028761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810859252.8A Active CN108774732B (en) | 2018-07-31 | 2018-07-31 | Magnetic guiding translation mechanism in vacuum chamber of vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108774732B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4952299A (en) * | 1988-10-31 | 1990-08-28 | Eaton Corporation | Wafer handling apparatus |
| KR19990078567A (en) * | 1999-05-19 | 1999-11-05 | 류득룡 | Installation for welding panels for the vessel and armatures |
| DE102009007156A1 (en) * | 2008-01-31 | 2009-08-06 | Von Ardenne Anlagentechnik Gmbh | Magnetron sputtering assembly has a ceramic cruciform electrical separator between magnetic system and drive |
| CN202730224U (en) * | 2012-07-23 | 2013-02-13 | 陈晓东 | Deposition equipment for conducting film of flexible thin-film solar cell |
| CN205588148U (en) * | 2016-04-05 | 2016-09-21 | 朱国军 | Saw bit is synchronous grabbing device of manipulator for sand blasting machine |
| CN208917299U (en) * | 2018-07-31 | 2019-05-31 | 湖南玉丰真空科学技术有限公司 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102181839B (en) * | 2011-06-03 | 2013-01-23 | 浙江大学 | Same end entrance-exit type continuous sputtering film plating device |
-
2018
- 2018-07-31 CN CN201810859252.8A patent/CN108774732B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4952299A (en) * | 1988-10-31 | 1990-08-28 | Eaton Corporation | Wafer handling apparatus |
| KR19990078567A (en) * | 1999-05-19 | 1999-11-05 | 류득룡 | Installation for welding panels for the vessel and armatures |
| DE102009007156A1 (en) * | 2008-01-31 | 2009-08-06 | Von Ardenne Anlagentechnik Gmbh | Magnetron sputtering assembly has a ceramic cruciform electrical separator between magnetic system and drive |
| CN202730224U (en) * | 2012-07-23 | 2013-02-13 | 陈晓东 | Deposition equipment for conducting film of flexible thin-film solar cell |
| CN205588148U (en) * | 2016-04-05 | 2016-09-21 | 朱国军 | Saw bit is synchronous grabbing device of manipulator for sand blasting machine |
| CN208917299U (en) * | 2018-07-31 | 2019-05-31 | 湖南玉丰真空科学技术有限公司 | Magnetic steering translation mechanism in a kind of vacuum coating equipment vacuum chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108774732A (en) | 2018-11-09 |
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