CN108508030A - 玻璃基板检查装置及使用其检查玻璃基板的方法 - Google Patents
玻璃基板检查装置及使用其检查玻璃基板的方法 Download PDFInfo
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- CN108508030A CN108508030A CN201810473265.1A CN201810473265A CN108508030A CN 108508030 A CN108508030 A CN 108508030A CN 201810473265 A CN201810473265 A CN 201810473265A CN 108508030 A CN108508030 A CN 108508030A
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- 239000011521 glass Substances 0.000 title claims abstract description 196
- 239000000758 substrate Substances 0.000 title claims abstract description 130
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- 238000007689 inspection Methods 0.000 claims abstract description 49
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- 238000005286 illumination Methods 0.000 claims abstract description 10
- 230000033001 locomotion Effects 0.000 claims description 18
- 239000003638 chemical reducing agent Substances 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 claims description 6
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
- 238000013459 approach Methods 0.000 claims description 3
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- 238000009434 installation Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
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- 230000002452 interceptive effect Effects 0.000 description 2
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- 239000003599 detergent Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
- G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201810473265.1A CN108508030A (zh) | 2018-05-17 | 2018-05-17 | 玻璃基板检查装置及使用其检查玻璃基板的方法 |
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CN201810473265.1A CN108508030A (zh) | 2018-05-17 | 2018-05-17 | 玻璃基板检查装置及使用其检查玻璃基板的方法 |
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CN108508030A true CN108508030A (zh) | 2018-09-07 |
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CN201810473265.1A Pending CN108508030A (zh) | 2018-05-17 | 2018-05-17 | 玻璃基板检查装置及使用其检查玻璃基板的方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110672629A (zh) * | 2019-11-07 | 2020-01-10 | 江苏上达电子有限公司 | 一种避免外观检查时cof产品产生背面划伤的方法 |
WO2020062571A1 (zh) * | 2018-09-29 | 2020-04-02 | 苏州精濑光电有限公司 | 基板检测设备 |
CN112764266A (zh) * | 2020-12-31 | 2021-05-07 | 惠州视维新技术有限公司 | 背光模组、显示装置以及显示装置的检测方法 |
CN113960824A (zh) * | 2021-10-18 | 2022-01-21 | 江苏宏芯亿泰智能装备有限公司 | 基板上翻机构及基板检测方法 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1940541A (zh) * | 2005-09-29 | 2007-04-04 | 奥林巴斯株式会社 | 基板检查装置 |
CN1991446A (zh) * | 2005-12-29 | 2007-07-04 | Lg.菲利浦Lcd株式会社 | 用于检查平板显示器件的装置及其检查方法 |
JP2008170254A (ja) * | 2007-01-11 | 2008-07-24 | Olympus Corp | 基板検査装置 |
CN203909468U (zh) * | 2014-01-09 | 2014-10-29 | 深圳市度信科技有限公司 | 一种摄像头模组及其半自动调焦测试装置 |
CN104280400A (zh) * | 2013-07-11 | 2015-01-14 | 北京兆维电子(集团)有限责任公司 | 一种打光装置及纸张质量检测设备 |
CN106680289A (zh) * | 2017-01-25 | 2017-05-17 | 江苏东旭亿泰智能装备有限公司 | 玻璃基板宏观检查*** |
CN106990567A (zh) * | 2017-05-12 | 2017-07-28 | 深圳市华星光电技术有限公司 | 一种宏观检查装置及宏观检查方法 |
CN107831172A (zh) * | 2017-08-02 | 2018-03-23 | 深圳市迪姆自动化有限公司 | 全自动玻璃表面瑕疵检测机 |
CN207163930U (zh) * | 2017-09-28 | 2018-03-30 | 芜湖东旭光电科技有限公司 | 液晶基板玻璃条纹辅助检查装置和检查*** |
CN107907549A (zh) * | 2017-11-13 | 2018-04-13 | 武汉华星光电半导体显示技术有限公司 | 基板检查设备及基板检查方法 |
CN208520779U (zh) * | 2018-05-17 | 2019-02-19 | 江苏东旭亿泰智能装备有限公司 | 玻璃基板检查装置 |
-
2018
- 2018-05-17 CN CN201810473265.1A patent/CN108508030A/zh active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1940541A (zh) * | 2005-09-29 | 2007-04-04 | 奥林巴斯株式会社 | 基板检查装置 |
CN1991446A (zh) * | 2005-12-29 | 2007-07-04 | Lg.菲利浦Lcd株式会社 | 用于检查平板显示器件的装置及其检查方法 |
JP2008170254A (ja) * | 2007-01-11 | 2008-07-24 | Olympus Corp | 基板検査装置 |
CN104280400A (zh) * | 2013-07-11 | 2015-01-14 | 北京兆维电子(集团)有限责任公司 | 一种打光装置及纸张质量检测设备 |
CN203909468U (zh) * | 2014-01-09 | 2014-10-29 | 深圳市度信科技有限公司 | 一种摄像头模组及其半自动调焦测试装置 |
CN106680289A (zh) * | 2017-01-25 | 2017-05-17 | 江苏东旭亿泰智能装备有限公司 | 玻璃基板宏观检查*** |
CN106990567A (zh) * | 2017-05-12 | 2017-07-28 | 深圳市华星光电技术有限公司 | 一种宏观检查装置及宏观检查方法 |
CN107831172A (zh) * | 2017-08-02 | 2018-03-23 | 深圳市迪姆自动化有限公司 | 全自动玻璃表面瑕疵检测机 |
CN207163930U (zh) * | 2017-09-28 | 2018-03-30 | 芜湖东旭光电科技有限公司 | 液晶基板玻璃条纹辅助检查装置和检查*** |
CN107907549A (zh) * | 2017-11-13 | 2018-04-13 | 武汉华星光电半导体显示技术有限公司 | 基板检查设备及基板检查方法 |
CN208520779U (zh) * | 2018-05-17 | 2019-02-19 | 江苏东旭亿泰智能装备有限公司 | 玻璃基板检查装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020062571A1 (zh) * | 2018-09-29 | 2020-04-02 | 苏州精濑光电有限公司 | 基板检测设备 |
CN110672629A (zh) * | 2019-11-07 | 2020-01-10 | 江苏上达电子有限公司 | 一种避免外观检查时cof产品产生背面划伤的方法 |
CN112764266A (zh) * | 2020-12-31 | 2021-05-07 | 惠州视维新技术有限公司 | 背光模组、显示装置以及显示装置的检测方法 |
CN113960824A (zh) * | 2021-10-18 | 2022-01-21 | 江苏宏芯亿泰智能装备有限公司 | 基板上翻机构及基板检测方法 |
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Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant after: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: JIANGSU DONGXU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20201221 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |
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Application publication date: 20180907 |
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