CN108122537A - 有机发光显示装置 - Google Patents

有机发光显示装置 Download PDF

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CN108122537A
CN108122537A CN201711182849.5A CN201711182849A CN108122537A CN 108122537 A CN108122537 A CN 108122537A CN 201711182849 A CN201711182849 A CN 201711182849A CN 108122537 A CN108122537 A CN 108122537A
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contact hole
display device
organic light
emitting display
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CN108122537B (zh
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赵祐赞
郑浩永
金容玟
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LG Display Co Ltd
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LG Display Co Ltd
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    • G—PHYSICS
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    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
    • G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
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    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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    • G09G2320/00—Control of display operating conditions
    • G09G2320/02—Improving the quality of display appearance
    • G09G2320/029—Improving the quality of display appearance by monitoring one or more pixels in the display panel, e.g. by monitoring a fixed reference pixel
    • G09G2320/0295—Improving the quality of display appearance by monitoring one or more pixels in the display panel, e.g. by monitoring a fixed reference pixel by monitoring each display pixel
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    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
    • G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
    • G09G3/3233—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the current through the light-emitting element
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    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
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    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
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Abstract

公开了一种有机发光显示装置。根据本发明，通过在基板上形成设置在水平方向上的包括扫描线和感测控制线的第一信号线，使得第一信号线接触基板，并且在覆盖第一信号线的至少两个绝缘膜上形成设置在垂直方向上的包括数据线、高电压供给线和低电压供给线的第二信号线，有机发光显示装置可防止第一与第二信号线之间的短路缺陷。所述有机发光显示装置包括：设置在基板上的每个子像素区域中的发光元件；像素电路，设置在每个子像素区域的电路区域中以驱动发光元件；第一信号线，设置在基板上以接触基板，布置在第一方向上并连接至像素电路；第二信号线，布置在第二方向上并连接至像素电路；和设置在第一与第二信号线之间的至少两个绝缘膜。

Description

有机发光显示装置
本申请要求于2016年11月30日提交的韩国专利申请No.10-2016-0161362的权益，在此援引该专利申请作为参考，如同在这里完全阐述一样。
技术领域
本发明涉及一种有机发光显示装置。尤其是，本发明涉及一种防止信号线的短路缺陷的有机发光显示装置。
背景技术
用于在屏幕上显示各种信息的图像显示装置是信息技术时代的重要技术并且正朝着更纤薄、重量更轻、更便携和更高功能性形式发展。响应于这些需求，作为能够减小重量和体积(其为阴极射线管的缺点)的平板显示装置，通过控制由有机发光层发射的光量来显示图像的有机发光二极管引起了大量关注。自主发光的有机发光二极管(OLED)具有低功耗、快速响应速度、高发光功效、高亮度和宽视角。
有机发光二极管通过以矩阵形式设置的多个像素显示图像。每个像素包括发光元件、以及独立操作发光元件并且包括多个晶体管的像素电路。
有机发光显示装置包括给像素电路提供不同驱动信号的第一信号线L1和第二信号线L2。如图1中所示，第一信号线L1形成在设置于基板上的下部绝缘膜2上，第二信号线L2形成在覆盖第一信号线L1的上部绝缘膜4上。在这种情形中，在制造工艺过程中通常在第一信号线L1与第二信号线L2之间或在第一信号线L1下方产生杂质。在这种情形中，杂质减小了第一信号线L1与第二信号线L2之间的距离，因而不利地导致第一信号线L1与第二信号线L2之间的短路。
此外，第一信号线L1和第二信号线L2交替，使得单层的上部绝缘膜4夹在第一信号线L1与第二信号线L2之间，因而由于第一信号线L1与第二信号线L2之间相对较小的距离，具有高寄生电容以及导致短路缺陷的较高可能性的问题。
发明内容
因此，本发明旨在提供一种基本上克服了由于相关技术的限制和缺点而导致的一个或多个问题的有机发光显示装置。
本发明的一个目的在于提供一种防止信号线的短路缺陷的有机发光显示装置。
在下面的描述中将部分列出本发明的附加优点、目的、和特征，这些优点、目的和特征的一部分根据下面的解释对于所属领域普通技术人员将变得显而易见或者可通过本发明的实施领会到。通过说明书、权利要求书以及附图中具体指出的结构可实现和获得本发明的这些目的和其他优点。
为了实现这些目的和其他优点并根据本发明的意图，如在此具体化和概括描述的，通过在基板上形成设置在水平方向上的包括扫描线和感测控制线的第一信号线，使得第一信号线接触基板，并且在覆盖第一信号线的至少两个绝缘膜上形成设置在垂直方向上的包括数据线、高电压供给线和低电压供给线的第二信号线，有机发光显示装置可防止第一信号线与第二信号线之间的短路缺陷。
在一个方面，本发明提供一种有机发光显示装置，包括：设置在基板上的每个子像素区域中的发光元件；像素电路，所述像素电路设置在每个子像素区域的电路区域中，以驱动所述发光元件；第一信号线，所述第一信号线设置在所述基板上以接触所述基板，所述第一信号线布置在第一方向上并且连接至所述像素电路；第二信号线，所述第二信号线布置在第二方向上并且连接至所述像素电路；和设置在所述第一信号线与所述第二信号线之间的至少两个绝缘膜。
在另一个方面，本发明提供一种有机发光显示装置，包括：扫描线和感测控制线，所述扫描线和所述感测控制线在基板上设置在水平方向上，使得所述扫描线和所述感测控制线接触所述基板；设置在所述扫描线和所述感测控制线上的至少两个绝缘膜；在所述绝缘膜上设置在垂直方向上的数据线、高电压供给线和低电压供给线；像素电路，所述像素电路连接至所述扫描线、所述感测控制线、所述数据线、所述高电压供给线和所述低电压供给线；和连接至所述像素电路的发光元件。
应当理解，本发明前面的大体性描述和下面的详细描述都是例示性的和解释性的，旨在对要求保护的本发明提供进一步的解释。
附图说明
被包括用来给本发明提供进一步理解并且并入本申请构成本申请一部分的附图图解了本发明的实施方式，并与说明书一起用于解释本发明的原理。在附图中：
图1是图解根据相关技术的有机发光显示装置的信号线之间的位置关系的剖面图；
图2显示了根据本发明的有机发光显示装置；
图3是详细图解图2中所示的有机发光显示装置的开关晶体管和感测晶体管的平面图；
图4是沿图3中所示的有机发光显示装置的线“I-I”、“II-II”、“III-III”和“IV-IV”截取的剖面图；
图5A到5E是图解图4中所示的有机发光显示装置的剖面图；
图6是沿图3中所示的有机发光显示装置的另一个实施方式的线“I-I”、“II-II”、“III-III”和“IV-IV”截取的剖面图；以及
图7A到7E是图解图6中所示的有机发光显示装置的剖面图。
具体实施方式
现在将详细参考本发明的优选实施方式进行描述，附图中图解了这些实施方式的一些例子。
图2是图解根据本发明的有机发光显示装置的平面图。
图2中所示的根据本发明的有机发光显示装置包括有源区域AA和焊盘区域PA。
在焊盘区域PA中，形成有多个焊盘，多个焊盘各自给设置在有源区域AA中的扫描线SL、感测控制线SSL、数据线DL、基准线RL、高电压VDD供给线VDL和低电压VSS供给线VSL提供驱动信号。
有源区域AA通过包括发光元件130的单位像素显示图像。单位像素包括红色R子像素、绿色G子像素和蓝色B子像素，或者红色R子像素、绿色G子像素、蓝色B子像素和白色W子像素。每个子像素(或每个子像素区域)包括发光元件130和独立操作发光元件的像素驱动电路。
像素驱动电路设置在每个子像素区域的电路区域中，且包括开关薄膜晶体管(或开关晶体管)TSW、驱动薄膜晶体管(或驱动晶体管)TD、感测薄膜晶体管(或感测晶体管)TSS和存储电容器Cst。
当扫描脉冲提供至扫描线SL时，开关薄膜晶体管TSW导通并且将提供至数据线DL的数据信号提供至存储电容器Cst和驱动薄膜晶体管TD的栅极电极。为此，如图3和4中所示，开关薄膜晶体管TSW包括连接至扫描线SL的栅极电极106、连接至数据线DL的源极电极108、连接至驱动薄膜晶体管TD的栅极电极的漏极电极110、以及在开关薄膜晶体管TSW的源极电极108与漏极电极110之间形成沟道的有源层104。
驱动薄膜晶体管TD根据被充入在存储电容器Cst中的驱动电压控制从高电压供给线VDL提供的电流并且给发光元件130提供与驱动电压成比例的电流，由此引起发光元件130的光发射。为此，驱动薄膜晶体管TD包括连接至开关薄膜晶体管TSW的漏极电极的栅极电极、连接至高电压供给线VDL的源极电极、连接至发光元件130的漏极电极、以及在驱动薄膜晶体管TD的源极电极与漏极电极之间形成沟道的有源层。
当感测脉冲提供至感测控制线SSL时，感测薄膜晶体管TSS导通并且检测驱动薄膜晶体管TD的阈值电压。就是说，当感测薄膜晶体管TSS导通时，产生通往感测薄膜晶体管TSS和基准线RL的电流通路。数据驱动器(未示出)或时序控制器(未示出)检测流过电流通路的电流，由此检测驱动薄膜晶体管TD的阈值电压和发光元件130的阈值电压。基于检测的阈值电压补偿数据电压并将补偿后的数据电压提供至数据线DL。为此，感测薄膜晶体管TSS包括连接至感测控制线SSL的栅极电极106、连接至基准线RL的源极电极108、连接至驱动薄膜晶体管TD的漏极电极110、以及在感测薄膜晶体管TSS的源极电极108与漏极电极110之间形成沟道的有源层104。
开关薄膜晶体管TSW和感测薄膜晶体管TSS的各个栅极电极106经由栅极绝缘图案112与各个有源层104交叠，栅极绝缘图案112是与栅极电极106相同的图案。如图3中所示，开关薄膜晶体管TSW的栅极电极106通过连接电极140连接至经由栅极接触孔142暴露的感测线SL。此外，如图4中所示，感测薄膜晶体管TSS的栅极电极106通过连接电极140连接至经由栅极接触孔142暴露的感测控制线SSL。在此，栅极接触孔142穿透缓冲膜114和层间绝缘膜116，以暴露扫描线SL和感测控制线SSL的每一条的上表面、以及开关薄膜晶体管TSW和感测薄膜晶体管TSS的每一个的栅极电极106的侧表面。此外，连接电极140使用与数据线DL、源极电极108和漏极电极110相同的材料形成在层间绝缘膜116上。
开关薄膜晶体管TSW和感测薄膜晶体管TSS的每一个的有源层104与栅极绝缘图案112上的栅极电极106交叠，以在源极电极108与漏极电极110之间形成沟道。有源层104由包括选自Zn，Cd，Ga，In，Sn，Hf和Zr中的至少一种金属的氧化物半导体、或多晶硅或非晶硅形成。
开关薄膜晶体管TSW和感测薄膜晶体管TSS的每一个的源极电极108通过穿透层间绝缘膜116的源极接触孔124S连接至有源层104。开关薄膜晶体管TSW和感测薄膜晶体管TSS的每一个的漏极电极110通过穿透层间绝缘膜116的漏极接触孔124D连接至有源层104。
发光元件130包括阳极132、形成在阳极132上的发光叠层、以及形成在发光叠层上的阴极。
阳极132电连接至通过像素接触孔120暴露的驱动薄膜晶体管的漏极电极和感测薄膜晶体管的漏极电极。阳极132被堤部138暴露，以提供发光区域。
发光叠层是通过在阳极132上按顺序或倒序堆叠空穴相关层、有机发光层和电子相关层而形成的。此外，发光叠层可包括经由电荷生成层而彼此面对的第一和第二发光叠层。在这种情形中，第一和第二发光叠层中的至少一个的有机发光层产生蓝色光，并且第一和第二发光叠层中的另一个的有机发光层产生黄绿色光，由此通过第一和第二发光叠层产生白色光。
阴极形成在发光叠层和堤部138的上表面和侧表面上，使得阴极经由发光叠层面对阳极132。阴极电连接至低电压供给线VSL。
同时，根据本发明的扫描线SL和感测控制线SSL中的至少一条的第一信号线HL形成在第一方向(例如，水平方向)上，并且数据线DL、高电压供给线VDL和低电压供给线VSL中的至少一条的第二信号线VL形成在与第一方向交叉的第二方向(例如，垂直方向)上。第一信号线HL使用与遮光层102相同的材料形成在同一平面中(即，形成在基板101上)。第一信号线HL在接触基板101的同时设置在基板101上，使得在第一信号线HL下方不会产生通常在无机膜(例如，缓冲膜114)的沉积过程中产生的杂质。因此，可保护第一信号线HL使其不会由于杂质而突起，由此避免第一信号线HL与第二信号线VL之间的短路缺陷。另一方面，设置在缓冲膜上的相关技术的第一信号线在缓冲膜的沉积过程中涉及到杂质的产生，因此第一信号线由于杂质而突起，因而导致第一信号线与第二信号线之间的短路缺陷。
此外，第二信号线VL使用与源极电极108和漏极电极110相同的材料形成在同一平面上(即，形成在层间绝缘膜116上)。在第一信号线HL与第二信号线VL之间的交叉部分处设置有包括缓冲膜114和层间绝缘膜116的至少两个绝缘膜。相比之下，相关技术的一个层间绝缘膜夹在相关技术的第一信号线与第二信号线之间。结果，根据本发明的第一信号线HL与第二信号线VL之间的距离是相关技术的第一信号线与第二信号线之间的距离的至少两倍，由此防止第一信号线HL与第二信号线VL之间的短路。因为防止了第一信号线HL与第二信号线VL之间的短路缺陷，所以本发明消除了形成第一信号线HL的冗余线(redundantline)的必要性，因而防止在冗余线与第二信号线VL之间产生寄生电容。
此外，因为与相关技术相比，第一信号线HL与第二信号线VL之间的距离增加，所以本发明可减小第一信号线HL与第二信号线VL之间的寄生电容。
图5A到5E是图解图4中所示的有机发光显示装置的制造方法的剖面图。
参照图5A，在基板101上形成包括扫描线SL和感测控制线SSL的第一信号线HL、以及遮光层102。
具体地说，通过诸如溅射之类的沉积方法在基板101的整个表面上方沉积第一导电层。在此，第一导电层使用诸如Mo、Ti、Cu、AlNd、Al或Cr或其合金之类的金属材料形成为单层，或者使用上述材料形成为多层。然后，通过光刻和蚀刻工艺将第一导电层图案化，以形成包括扫描线SL和感测控制线SSL的第一信号线HL、以及遮光层102。
参照图5B，在设置有第一信号线HL和遮光层102的基板101上形成缓冲膜114，并且在缓冲膜114上形成有源层。
更具体地说，通过在设置有第一信号线HL和遮光层102的基板101的整个表面上方沉积诸如SiOx或SiNx之类的无机绝缘材料形成具有单层或多层结构的缓冲膜114。然后，通过诸如低压化学气相沉积(LPCVD)或等离子体增强化学气相沉积(PECVD)之类的方法在设置有缓冲膜114的基板101上沉积有源材料，然后通过光刻和蚀刻工艺将有源材料图案化，以形成有源层104。
参照图5C，在设置有有源层104的基板101上以相同的线宽度形成栅极电极106和栅极绝缘图案112。
更具体地说，在设置有有源层104的基板101上形成栅极绝缘膜并且通过诸如溅射之类的沉积方法在其上形成第二导电层。可使用诸如SiOx或SiNx之类的无机绝缘材料形成栅极绝缘膜。第二导电层使用诸如Mo、Ti、Cu、AlNd、Al或Cr或其合金之类的金属材料形成为单层，或者使用上述材料形成为多层。然后，通过光刻工艺和蚀刻工艺同时将第二导电层和栅极绝缘膜图案化，从而以相同的线宽度形成栅极电极106和栅极绝缘图案112。
参照图5D，在设置有栅极电极106和栅极绝缘图案112的基板101上形成具有源极接触孔124S、漏极接触孔124D和栅极接触孔142的层间绝缘膜116。
更具体地说，在设置有栅极电极106和栅极绝缘图案112的基板101上通过诸如PECVD之类的沉积方法形成层间绝缘膜116。然后，通过光刻工艺和蚀刻工艺将层间绝缘膜116图案化，以形成源极接触孔124S、漏极接触孔124D和栅极接触孔142。在此，源极接触孔124S和漏极接触孔124D穿透层间绝缘膜116，以暴露有源层104，并且栅极接触孔142穿透层间绝缘膜116和缓冲膜114，以暴露栅极电极106的侧表面和第一信号线HL的上表面。
参照图5E，在设置有源极接触孔124S、漏极接触孔124D和栅极接触孔142的层间绝缘膜116上形成包括数据线DL、低电压供给线VSL和高电压供给线VDL在内的第二信号线VL；源极电极108；漏极电极110和连接电极140。
更具体地说，通过诸如溅射之类的沉积方法在设置有源极接触孔124S、漏极接触孔124D和栅极接触孔142的层间绝缘膜116上形成第三导电层。第三导电层使用诸如Mo、Ti、Cu、AlNd、Al或Cr或其合金之类的金属材料形成为单层，或者使用上述材料形成为多层。然后，通过光刻工艺和蚀刻工艺将第三导电层图案化，以形成包括数据线DL、低电压供给线VSL和高电压供给线VDL在内的第二信号线VL；源极电极108；漏极电极110和连接电极140。
然后，在设置有第二信号线VL、源极电极108、漏极电极110和连接电极140的基板101上依次形成保护膜118、平坦化层128、阳极132、堤部138、发光叠层和阴极。
图6是根据本发明第二实施方式的有机发光显示装置的剖面图。
与图4中所示的有机发光显示装置相比，图6中所示的有机发光显示装置包括与图4中所示的有机发光显示装置基本相同的元件，不同之处在于使用与遮光层102相同的材料形成在基板101上的第一信号线HL直接连接至栅极电极106，而没有任何额外的连接电极。因此，省略对相同元件的详细描述。
栅极接触孔142穿透缓冲膜114，以暴露第一信号线HL中包括的扫描线SL和感测控制线SSL的每一条的上表面、以及栅极绝缘图案112的侧表面。因此，开关薄膜晶体管TSW的栅极电极106直接连接至通过栅极接触孔142暴露的扫描线SL。此外，感测薄膜晶体管TSS的栅极电极106直接连接至通过栅极接触孔142暴露的感测控制线SSL。
图7A到7E是图解图6中所示的有机发光显示装置的制造方法的剖面图。
首先，通过图5A和5B中所示的前述方法在基板上形成第一信号线HL、遮光层102、缓冲膜114和有源层104。然后，在设置有有源层104的基板101上使用诸如SiOx或SiNx之类的无机绝缘材料形成栅极绝缘膜，并且通过光刻工艺和蚀刻工艺将栅极绝缘膜图案化，由此形成栅极绝缘图案112，如图7A中所示。然后，通过光刻工艺和蚀刻工艺将缓冲膜114图案化，以形成栅极接触孔142，如图7B中所示。在此，栅极接触孔142穿透缓冲膜114，以暴露栅极绝缘图案112的侧表面、以及第一信号线HL的上表面。然后，通过诸如溅射之类的沉积方法在设置有栅极接触孔142的基板101上形成第二导电层。第二导电层使用诸如Mo、Ti、Cu、AlNd、Al或Cr或其合金之类的金属材料形成为单层，或者使用上述材料形成为多层。然后，通过光刻工艺和蚀刻工艺将第二导电层图案化，以形成栅极电极106，如图7C中所示。栅极电极106通过栅极接触孔142直接连接至第一信号线HL。然后，通过诸如PECVD之类的沉积方法在设置有栅极电极106的基板101上形成层间绝缘膜116。然后，通过光刻工艺和蚀刻工艺将层间绝缘膜116图案化，以形成源极接触孔124S和漏极接触孔124D，如图7D中所示。然后，在设置有源极接触孔124S和漏极接触孔124D的层间绝缘膜116上形成第三导电层。第三导电层使用诸如Mo、Ti、Cu、AlNd、Al或Cr或其合金之类的金属材料形成为单层，或者使用上述材料形成为多层。然后，通过光刻工艺和蚀刻工艺将第三导电层图案化，以形成包括数据线DL、低电压供给线VSL和高电压供给线VDL在内的第二信号线VL；源极电极108和漏极电极110，如图7E中所示。然后，在设置有第二信号线VL、源极电极108和漏极电极110的基板101上依次形成保护膜118、平坦化层128、阳极132、堤部138、发光叠层和阴极。
根据本发明，在基板上设置于水平方向上的包括扫描线和感测控制线的第一信号线接触基板，并且设置于垂直方向上的包括数据线、高电压供给线和低电压供给线的第二信号线设置在包括至少两层并覆盖第一信号线的绝缘膜上。因此，由于在接触基板的第一信号线下方不会产生杂质，所以本发明可防止第一信号线与第二信号线之间的短路缺陷。此外，在第一信号线与第二信号线之间的交叉部分处设置有包括至少两层的绝缘膜，因而增加了第一信号线与第二信号线之间的距离并防止了第一信号线与第二信号线之间的短路。
此外，在不背离本发明的精神或范围的情况下，能够在本发明中进行各种修改和变化，这对于所属领域技术人员来说将是显而易见的。因此，本发明中描述的实施方式不限制本发明。因而，本发明旨在覆盖落入所附权利要求书范围及其等同范围内的对本发明的修改和变化。

Claims (17)

1.一种有机发光显示装置，包括：
设置在基板上的每个子像素区域中的发光元件；
像素电路，所述像素电路设置在每个子像素区域的电路区域中，以驱动所述发光元件；
第一信号线，所述第一信号线设置在所述基板上以接触所述基板，所述第一信号线布置在第一方向上并且连接至所述像素电路；
第二信号线，所述第二信号线布置在第二方向上并且连接至所述像素电路；和
设置在所述第一信号线与所述第二信号线之间的至少两个绝缘膜。
2.根据权利要求1所述的有机发光显示装置，其中所述像素电路包括：
驱动晶体管，所述驱动晶体管连接在所述发光元件与高电压供给线之间；
开关晶体管，所述开关晶体管连接在所述驱动晶体管的栅极电极与数据线之间；和
感测晶体管，所述感测晶体管连接在所述驱动晶体管与基准线之间，
其中所述第一信号线包括扫描线和感测控制线中的至少一条，所述扫描线连接至所述开关晶体管的栅极电极，所述感测控制线连接至所述感测晶体管的栅极电极，并且
所述第二信号线包括所述高电压供给线、所述数据线、以及连接至所述发光元件的阴极的低电压供给线中的至少一条。
3.根据权利要求2所述的有机发光显示装置，其中所述至少两个绝缘膜包括：
覆盖所述扫描线和所述感测控制线的缓冲膜；和
设置在所述缓冲膜上的层间绝缘膜。
4.根据权利要求3所述的有机发光显示装置，还包括：
栅极接触孔，所述栅极接触孔穿透所述缓冲膜和所述层间绝缘膜，以暴露所述第一信号线的上表面和所述栅极电极；和
连接电极，所述连接电极将通过所述栅极接触孔暴露的第一信号线连接至所述栅极电极。
5.根据权利要求4所述的有机发光显示装置，其中所述栅极接触孔穿透所述缓冲膜和所述层间绝缘膜，以暴露所述扫描线的上表面和所述开关晶体管的栅极电极，并且
所述连接电极将通过所述栅极接触孔暴露的扫描线连接至所述开关晶体管的栅极电极。
6.根据权利要求4或5所述的有机发光显示装置，其中所述栅极接触孔穿透所述缓冲膜和所述层间绝缘膜，以暴露所述感测控制线的上表面和所述感测晶体管的栅极电极，并且
所述连接电极将通过所述栅极接触孔暴露的感测控制线连接至所述感测晶体管的栅极电极。
7.根据权利要求6所述的有机发光显示装置，其中所述连接电极使用与所述数据线相同的材料设置在所述层间绝缘膜上。
8.根据权利要求3所述的有机发光显示装置，还包括：
栅极接触孔，所述栅极接触孔穿透所述缓冲膜，以暴露所述第一信号线的上表面和栅极绝缘图案的侧表面，
其中所述栅极电极直接连接至通过所述栅极接触孔暴露的第一信号线。
9.根据权利要求8所述的有机发光显示装置，其中所述栅极接触孔穿透所述缓冲膜，以暴露所述扫描线的上表面，并且
所述开关晶体管的栅极电极直接连接至通过所述栅极接触孔暴露的扫描线。
10.根据权利要求8或9所述的有机发光显示装置，其中所述栅极接触孔穿透所述缓冲膜，以暴露所述感测控制线的上表面，并且
所述感测晶体管的栅极电极直接连接至通过所述栅极接触孔暴露的感测控制线。
11.根据权利要求8所述的有机发光显示装置，其中所述栅极绝缘图案设置在所述栅极电极和所述缓冲膜之间。
12.根据权利要求8所述的有机发光显示装置，其中所述栅极绝缘图案以与所述栅极电极相同的线宽度而形成。
13.根据权利要求1所述的有机发光显示装置，其中所述第一方向与所述第二方向交叉。
14.一种有机发光显示装置，包括：
扫描线和感测控制线，所述扫描线和所述感测控制线在基板上设置在水平方向上，使得所述扫描线和所述感测控制线接触所述基板；
设置在所述扫描线和所述感测控制线上的至少两个绝缘膜；
在所述绝缘膜上设置在垂直方向上的数据线、高电压供给线和低电压供给线；
像素电路，所述像素电路连接至所述扫描线、所述感测控制线、所述数据线、所述高电压供给线和所述低电压供给线；和
连接至所述像素电路的发光元件。
15.根据权利要求14所述的有机发光显示装置，其中所述像素电路包括：
驱动晶体管，所述驱动晶体管连接在所述发光元件与所述高电压供给线之间；
开关晶体管，所述开关晶体管连接在所述驱动晶体管的栅极电极与所述数据线之间；和
感测晶体管，所述感测晶体管连接在所述驱动晶体管与基准线之间，
其中所述至少两个绝缘膜包括至少两层，且所述至少两层包括：
覆盖所述扫描线和所述感测控制线的缓冲膜；和
设置在所述缓冲膜上的层间绝缘膜。
16.根据权利要求15所述的有机发光显示装置，还包括：
栅极接触孔，所述栅极接触孔穿透所述缓冲膜和所述层间绝缘膜，以暴露所述扫描线和所述感测控制线的每一条的上表面、以及所述开关晶体管和所述感测晶体管的每一个的栅极电极；和
连接电极，所述连接电极将通过所述栅极接触孔暴露的扫描线连接至所述开关晶体管的栅极电极，并且将通过所述栅极接触孔暴露的感测控制线连接至所述感测晶体管的栅极电极，
其中所述连接电极使用与所述数据线相同的材料设置在所述层间绝缘膜上。
17.根据权利要求15所述的有机发光显示装置，还包括：
栅极接触孔，所述栅极接触孔穿透所述缓冲膜，以暴露所述扫描线和所述感测控制线的每一条的上表面，
其中所述开关晶体管的栅极电极直接连接至通过所述栅极接触孔暴露的扫描线，并且
所述感测晶体管的栅极电极直接连接至通过所述栅极接触孔暴露的感测控制线。
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