CN107162000A - A kind of renovation process of silicon carbide blade material - Google Patents
A kind of renovation process of silicon carbide blade material Download PDFInfo
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- CN107162000A CN107162000A CN201710539110.9A CN201710539110A CN107162000A CN 107162000 A CN107162000 A CN 107162000A CN 201710539110 A CN201710539110 A CN 201710539110A CN 107162000 A CN107162000 A CN 107162000A
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- silicon carbide
- carbide powder
- useless
- powder
- blade material
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
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Abstract
The present invention discloses a kind of renovation process of silicon carbide blade material, and silicon carbide waste mortar is obtained into useless silicon carbide powder by separation of solid and liquid first, also included successively：Decontamination, purification, integer, reconstruction grain sword step, compared with prior art, discarded carborundum is reclaimed processing and recycled by the present invention, and utilization rate is up to more than 90%, to greatest extent using carborundum, increases the use value of carborundum.
Description
Technical field
The present invention relates to crystal silicon chip processing technique field, and in particular to a kind of sword material renovation process of silicon carbide blade material.
Background technology
Sword material refers to that granularity is micro- generally between solids such as 5 μm~15 μm of relatively fine carborundum, boron carbide or aluminum oxide
Powder particles, quality is hard and with sharp corner angle, wire cutting available for solar energy crystal silicon chip and semiconductor crystal wafer, grinds
Mill, polishing, are one of main consumptive materials of current crystal silicon chip processing.
The sword material after wire cutting, grinding, polishing use is due to the certain journey of corner angle generation of part powder granule at present
The abrasion of degree, granularity there occurs a certain degree of change, introduce the impurity such as a certain degree of iron filings, at present to the sword after use
Material can only use refractory material or be buried, and cause significant wastage.
Li Sen, Wang Jie of Kaifeng Wan Sheng new materials Co., Ltd etc. were the 6th phase in 2013《Regenerated resources and recycling economy》
" the regeneration and treatment technique research of cutting blade material carborundum " text has been delivered in periodical, has disclosed a kind of using chemical reaction removal of impurities
The method of processing and waterpower sedimentation grading carries out sword material regeneration method, mainly includes, waste mortar separation of solid and liquid is obtained
To sand cake first carry out HCl dropwise processing, remove the iron and its oxi in carborundum, including other metal impurities, then
Carry out thereto again plus alkali chemical treatment, remove the silicon and its oxide impurity in carborundum.It is chemically treated more than, carbonization
Impurity in silicon is substantially achieved removal.It is subjected to waterpower sedimentation in siphon cylinder again, according to the sedimentation of varigrained carborundum
The difference of speed so that varigrained carborundum is classified by settling layering.The carborundum purity and granularity being classified are equal
Effectively handled, then needed according to cutting, carry out the regulation of pH values to carborundum in neutrality.Then carborundum is taken off
Water and drying, slough the moisture in carborundum, so as to obtain silicon carbide powder.
Scheme disclosed in this article is the method rather than regeneration method of a kind of recovery actually, for the hair of powder granule
The raw corner angle worn and torn to a certain degree do not carry out any processing procedure, it is impossible to be re-used for crystal silicon chip and semiconductor crystal wafer
Wire cutting, grinding, polishing.
The content of the invention
The purpose of the present invention is to overcome the deficiencies in the prior art, and open one kind really turns waste into wealth, by disabled carbon
SiClx is reprocessed into the renovation process for the silicon carbide blade material that can reach the brand-new cutting power of silicon carbide micro-powder more than 90% again.Institute
Adopt the technical scheme that：
A kind of renovation process of silicon carbide blade material, obtains useless silicon carbide powder by silicon carbide waste mortar by separation of solid and liquid first,
Characterized in that, also including successively：
A）Decontamination：Removed respectively through 80 mesh, 200 mesh, the classification of 500 mesh water sieves fiber in the useless silicon carbide powder, gravel,
The impurity such as wood chip；
B）Purification：
（1）The useless silicon carbide powder after decontamination is placed in container, the water for not having its upper surface is added, in stirring condition
It is lower to add the dispersant for accounting for aqueous weight 0.2% -0.3%, the chelating agent of aqueous weight 0.2% -0.3% is accounted for, is made using dispersant
The adsorbate adsorbed in useless silicon carbide powder particle surface is separated and is suspended in water, is arrived metal ion inclusion using chelating agent
Inside chelating agent, become the bigger compound of molecular weight stably and be dispersed in water；
（2）The collecting agent for accounting for aqueous weight 0.2% -0.3% is added under agitation, accounts for rising for aqueous weight 0.2% -0.3%
To Aeration in the water after infusion, the collecting agent makes the hydrophily of useless silicon carbide powder particle be changed into hydrophobicity；The foaming agent drop
The surface tension of the low aqueous solution, makes to be filled with the air in water and is easy to disperse into bubble and stablizes bubble；Foaming agent and collecting agent connection
It is combined and is adsorbed in useless silicon carbide powder particle surface, makes useless silicon carbide powder particle emersion；
（3）Most of iron powder that useless silicon carbide powder is mixed into cutting, grinding, polishing process is removed with wet magnetic separator；
（4）Useless silicon carbide powder is placed in stirring and pickling in mixed acid solution, remaining iron in useless silicon carbide powder is removed completely
Powder and its oxide；
（5）Useless silicon carbide powder is rinsed more than three times with pure water again, carried out by modes such as centrifugation, press filtration or tube settlers dense
Contracting, the useless silicon carbide powder after concentration, by steam-heated mode, is sufficiently dried in tray drier, final
To the useless silicon carbide powder of purifying；
C）Integer：There to be crackle Particle Breakage using reshaper；
D）Reproduce grain sword：The silicon-carbide particle of approximate cobblestone is worn into the sharp carborundum of corner angle using tower ball mill
Grain；Form regeneration silicon carbide blade material.
Further, the dispersant be sodium pyrophosphate, tertiary sodium phosphate, tetrasodium phosphate, calgon, sodium metasilicate or
Sodium disilicate；The chelating agent is ethylenediamine, 2,2'- bipyridyls, 1,10- ferrosins, oxalate or ethylenediamine tetra-acetic acid.It is scattered
Agent isInorganic electrolyteMatter dispersant, can particle surface absorption, the absolute value of particle surface current potential can not only be significantly increased,
So as to produce powerful electric double layer electrostatic repulsion, and inorganic electrolyte can also strengthen wetting journey of the water to particle surface
Degree.Inorganic electrolyte also strengthens wettability of the surface, increase solvation film strength and thickness in the absorption of particle surface, so that
Further enhance the mutually exclusive effect of particle.
Further, the collecting agent is aviation kerosine；The foaming agent is No. two oil.
Further, the mixed acid is that concentration is 1 according to volume ratio for the hydrochloric acid and sulfuric acid less than 9%:3 mixing.
Further, in the step C）Before with the process for adding classification, by the useless silicon carbide powder according to particle diameter
Size is divided into different grades, then carries out shaping and reconstruction grain sword respectively again.
Compared with prior art, it is of the inventionDiscarded carborundum is reclaimed into processing to recycle, utilization rate up to more than 90%,
Carborundum is utilized to greatest extent, increases the use value of carborundum.
Embodiment
A kind of renovation process of silicon carbide blade material, obtains useless carborundum powder by silicon carbide waste mortar by separation of solid and liquid first
Body, is then carried out successively：
A）Decontamination：Removed respectively through 80 mesh, 200 mesh, the classification of 500 mesh water sieves fiber in the useless silicon carbide powder, gravel,
The impurity such as wood chip；
B）Purification：
（1）The useless silicon carbide powder after decontamination is placed in container, the water for not having its upper surface is added, in stirring condition
It is lower to add the tertiary sodium phosphate for accounting for aqueous weight 0.25%, 1, the 10- ferrosins of aqueous weight 0.28 are accounted for, make suction using tertiary sodium phosphate
The adsorbate for being attached to useless silicon carbide powder particle surface is separated and is suspended in water, using 1,10- ferrosins by metal ion bag
Close inside chelating agent, the bigger compound of the molecular weight for becoming stable is dispersed in water；
（2）It is backward that the aviation kerosine for accounting for aqueous weight 0.22%, No. two oil for accounting for aqueous weight 0.26% are added under agitation
Aeration in the water, the collecting agent makes the hydrophily of useless silicon carbide powder particle be changed into hydrophobicity；The foaming agent reduces the aqueous solution
Surface tension, make to be filled with the air in water and be easy to disperse into bubble and stablizing bubble；Foaming agent and collecting agent are united
Useless silicon carbide powder particle surface is adsorbed in, makes useless silicon carbide powder particle emersion；
（3）Most of iron powder that useless silicon carbide powder is mixed into cutting, grinding, polishing process is removed with wet magnetic separator；
（4）Useless silicon carbide powder is placed in stirring and pickling in mixed acid solution, remaining iron in useless silicon carbide powder is removed completely
Powder and its oxide；The increasing mixed acid concentration is 1 according to volume ratio for the hydrochloric acid and sulfuric acid less than 9%:3 mixing.
（5）Useless silicon carbide powder is rinsed more than three times with pure water again, concentrated by press filtration, the useless carbonization after concentration
Silicon powder, by steam-heated mode, is sufficiently dried in tray drier, finally gives the useless carborundum of purifying
Powder；
（6）The useless silicon carbide powder is divided into different grades according to particle size；
C）Integer：There to be crackle Particle Breakage in different grades of useless silicon carbide powder using reshaper；
D）Reproduce grain sword：Now with corner angle particle and approximate cobblestone silicon-carbide particle it is mixed in together, due to
The particles of corner angle seldom, therefore is not required to when reproducing grain sword to separate, and all participates in reconstruction, using tower ball mill by approximate goose ovum
The silicon-carbide particle of stone wears into the sharp silicon-carbide particle of corner angle；Form regeneration silicon carbide blade material.
Claims (5)
1. a kind of renovation process of silicon carbide blade material, obtains useless carborundum powder by silicon carbide waste mortar by separation of solid and liquid first
Body, it is characterised in that also include successively：
A）Decontamination：Removed respectively through 80 mesh, 200 mesh, the classification of 500 mesh water sieves fiber in the useless silicon carbide powder, gravel,
The impurity such as wood chip；
B）Purification：
（1）The useless silicon carbide powder after decontamination is placed in container, the water for not having its upper surface is added, in stirring condition
It is lower to add the dispersant for accounting for aqueous weight 0.2% -0.3%, the chelating agent of aqueous weight 0.2% -0.3% is accounted for, is made using dispersant
The adsorbate adsorbed in useless silicon carbide powder particle surface is separated and is suspended in water, is arrived metal ion inclusion using chelating agent
Inside chelating agent, become the bigger compound of molecular weight stably and be dispersed in water；
（2）The collecting agent for accounting for aqueous weight 0.2% -0.3% is added under agitation, accounts for rising for aqueous weight 0.2% -0.3%
To Aeration in the water after infusion, the collecting agent makes the hydrophily of useless silicon carbide powder particle be changed into hydrophobicity；The foaming agent drop
The surface tension of the low aqueous solution, makes to be filled with the air in water and is easy to disperse into bubble and stablizes bubble；Foaming agent and collecting agent connection
It is combined and is adsorbed in useless silicon carbide powder particle surface, makes useless silicon carbide powder particle emersion；
（3）Most of iron powder that useless silicon carbide powder is mixed into cutting, grinding, polishing process is removed with wet magnetic separator；
（4）Useless silicon carbide powder is placed in stirring and pickling in mixed acid solution, remaining iron in useless silicon carbide powder is removed completely
Powder and its oxide；
（5）Useless silicon carbide powder is rinsed more than three times with pure water again, carried out by modes such as centrifugation, press filtration or tube settlers dense
Contracting, the useless silicon carbide powder after concentration, by steam-heated mode, is sufficiently dried in tray drier, final
To the useless silicon carbide powder of purifying；
C）Integer：There to be crackle Particle Breakage using reshaper；
D）Reproduce grain sword：The silicon-carbide particle of approximate cobblestone is worn into the sharp carborundum of corner angle using tower ball mill
Grain；Form regeneration silicon carbide blade material.
2. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：The dispersant is burnt phosphorus
Sour sodium, tertiary sodium phosphate, tetrasodium phosphate, calgon, sodium metasilicate or sodium disilicate；The chelating agent is ethylenediamine, 2,2'-
Bipyridyl, 1,10- ferrosins, oxalate or ethylenediamine tetra-acetic acid.
3. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：The collecting agent is aviation
Kerosene；The foaming agent is No. two oil.
4. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：The mixed acid is concentration
According to volume ratio it is 1 for the hydrochloric acid and sulfuric acid less than 9%:3 mixing.
5. a kind of renovation process of silicon carbide blade material according to claim 1, it is characterised in that：In the step C）Before
Process with classification is added, is divided into different grades according to particle size by the useless silicon carbide powder, then carries out respectively again
Shaping and reconstruction grain sword.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710539110.9A CN107162000A (en) | 2017-07-04 | 2017-07-04 | A kind of renovation process of silicon carbide blade material |
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| CN201710539110.9A CN107162000A (en) | 2017-07-04 | 2017-07-04 | A kind of renovation process of silicon carbide blade material |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108394903A (en) * | 2018-04-23 | 2018-08-14 | 刘焕新 | A kind of preparation method of nanometer silicon carbide micro mist |
| CN108752003A (en) * | 2018-08-17 | 2018-11-06 | 宁夏和兴碳基材料有限公司 | The preparation method of silicon carbide fine ceramics silicon carbide micro-powder |
| CN111298950A (en) * | 2019-08-07 | 2020-06-19 | 西安隆基锂电新材料有限公司 | Aqueous silicon powder grinding method and silicon powder |
| CN111377448A (en) * | 2018-12-27 | 2020-07-07 | Kc工业有限公司 | Preparation method of high-purity SiC powder |
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| CN101691216A (en) * | 2009-10-05 | 2010-04-07 | 山东科技大学 | Method for recycling silicon carbide and co-producing white carbon black from waste mortar for wire cutting |
| CN102765722A (en) * | 2012-08-08 | 2012-11-07 | 铁生年 | Method for recovering and separating silicone and silicon carbide powder through foam flotation in silicon wafer cutting effluent |
| CN102951641A (en) * | 2012-11-01 | 2013-03-06 | 临沭山田研磨材有限公司 | Water-saving and environmental protection-type preparation method of silicon carbide micro-powder for silicon wafer wire cutting |
| CN105883813A (en) * | 2014-12-09 | 2016-08-24 | 任海涛 | Regeneration treatment technology of cutting edge material silicon carbide |
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2017
- 2017-07-04 CN CN201710539110.9A patent/CN107162000A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101691216A (en) * | 2009-10-05 | 2010-04-07 | 山东科技大学 | Method for recycling silicon carbide and co-producing white carbon black from waste mortar for wire cutting |
| CN102765722A (en) * | 2012-08-08 | 2012-11-07 | 铁生年 | Method for recovering and separating silicone and silicon carbide powder through foam flotation in silicon wafer cutting effluent |
| CN102951641A (en) * | 2012-11-01 | 2013-03-06 | 临沭山田研磨材有限公司 | Water-saving and environmental protection-type preparation method of silicon carbide micro-powder for silicon wafer wire cutting |
| CN105883813A (en) * | 2014-12-09 | 2016-08-24 | 任海涛 | Regeneration treatment technology of cutting edge material silicon carbide |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108394903A (en) * | 2018-04-23 | 2018-08-14 | 刘焕新 | A kind of preparation method of nanometer silicon carbide micro mist |
| CN108752003A (en) * | 2018-08-17 | 2018-11-06 | 宁夏和兴碳基材料有限公司 | The preparation method of silicon carbide fine ceramics silicon carbide micro-powder |
| CN111377448A (en) * | 2018-12-27 | 2020-07-07 | Kc工业有限公司 | Preparation method of high-purity SiC powder |
| US11718532B2 (en) | 2018-12-27 | 2023-08-08 | Kcindustrial Co., Ltd. | Preparation method of high purity SiC powder |
| CN111298950A (en) * | 2019-08-07 | 2020-06-19 | 西安隆基锂电新材料有限公司 | Aqueous silicon powder grinding method and silicon powder |
| CN111298950B (en) * | 2019-08-07 | 2022-04-05 | 西安隆基锂电新材料有限公司 | Aqueous silicon powder grinding method and silicon powder |
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Application publication date: 20170915 |
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