CN107160242A - A kind of processing method for controlling non-spherical element full frequency band error - Google Patents
A kind of processing method for controlling non-spherical element full frequency band error Download PDFInfo
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- CN107160242A CN107160242A CN201710604702.4A CN201710604702A CN107160242A CN 107160242 A CN107160242 A CN 107160242A CN 201710604702 A CN201710604702 A CN 201710604702A CN 107160242 A CN107160242 A CN 107160242A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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Abstract
It is used to control the processing method of non-spherical element full frequency band error to be related to non-spherical element processing technique field the invention provides a kind of.A kind of processing method for controlling non-spherical element full frequency band error, it includes grinding-shaping, conformal polishing, amendment polishing, four steps of even sliding polishing.Grinding-shaping：The straight forming of non-spherical element is carried out using superfine grinding method, while by subsurface defect control in reduced levels；Conformal polishing：Using the rim of the mouth footpath polishing technology of high stability, high removal efficiency, realize that the fast conformal of non-spherical element throws bright, to remove subsurface defect；Amendment polishing：Non-spherical element low frequency aberration is quickly corrected using the rim of the mouth footpath polishing technology of high stability；Even sliding polishing：Using even sliding polishing technology, in the case where low frequency aberration is not deteriorated, non-spherical element medium-high frequency error is controlled.The characteristics of processing method of the present invention, is to realize non-spherical element full frequency band control errors by multiple technologies coupling.
Description
Technical field
It is a kind of for controlling non-spherical element full range the present invention relates to non-spherical element processing technique field, and more particularly to
The processing method of section error.
Background technology
Aperture aspherical element has the advantages that non-stop layer blocks, can improved as matter and simplied system structure, it has also become
The key element of the Large optical systems such as space camera, extreme ultra violet lithography, ultra high power laser aid.With the hair of science and technology
Exhibition, current Large optical system is proposed to the surface quality and manufacture efficiency of element much to be surmounted in classic optical system
It is required that.With U.S.'s Lao Lunsi livermore national laboratories (Lawrence Livermore National Laboratory,
LLNL) high power solid state laser-" the national igniter " (National Ignition Facility, NIF) set up is
Example, the optical system of whole device uses hundreds of heavy caliber (meter level) non-spherical elements.Due to device design requirement output light
Beam quality close to physics limit intense laser beam, and the beam quality of system and fan-out capability depend greatly on it is used
The precision and load capacity of non-spherical element.Therefore, the system to the precision index and quality requirement of non-spherical element substantially
Close to the limit of processing, the technical requirement of non-spherical element, such as low frequency aberration≤λ/3, intermediate frequency error PSD-1：A≤
1.01ν-1.55, RMS≤1.8nm, high frequency error≤1.0nm.Therefore, it is stable how on the premise of stringent technical index is met
Aperture aspherical element needed for controllably producing Large optical system turns into all Large optical systems and builds national institute
The basic challenge faced.
Traditional aperture aspherical element processing method is：Pass through milling shaping, shot grinding and polishing first
Go out best-fit sphere, recycle repair throwing by hand or Digit Control Machine Tool processed by sphere it is aspherical.It is this to be based on first polishing ball
Face, then aspherical mode is worked into by sphere there is obvious processing limitation, such as aspherical degree (sphere with it is aspherical partially
Difference) quantity of material that removes of big element polishing is big, extreme influence processing efficiency；The more difficult reality of depth of defect of milling or process of lapping
Existing stability contorting, the process time that influence subsequent defective is removed；Polishing stage certainty is not enough, and face shape convergency factor is low, processing week
Phase length etc..
The content of the invention
It is an object of the invention to provide a kind of processing method for controlling non-spherical element full range error, the method can
Aspherical mirror machining efficiency, and controllable full frequency band error are improved, processing aperture aspherical element is effectively improved finally complete
Frequency range precision.
The present invention is solved its technical problem and realized using following technical scheme.
The present invention proposes a kind of processing method for controlling non-spherical element full frequency band error, and it comprises the following steps：
Grinding-shaping：The straight forming of non-spherical element is carried out using superfine grinding method, while by subsurface defect
Control is in reduced levels；
Conformal polishing：Using the rim of the mouth footpath polishing technology of high stability, high removal efficiency, the quick of non-spherical element is realized
It is conformal to throw bright, to remove subsurface defect；
Amendment polishing：Non-spherical element low frequency aberration is quickly corrected using the rim of the mouth footpath polishing technology of high stability, made non-
Aspherical elements low frequency index reaches optical system use requirement；
Even sliding polishing：Using even sliding polishing technology, in the case where low frequency aberration is not deteriorated, in control non-spherical element
High frequency error, makes high target in non-spherical element reach optical system use requirement.
The a kind of of the embodiment of the present invention is used to controlling the beneficial effect of processing method of non-spherical element full frequency band error to be：
A kind of processing method for controlling non-spherical element full frequency band error provided, first, the tool that grinding is obtained
The non-spherical element for having initial aspherical shape precision carries out conformal polishing, to remove Grinding defects layer, and improves aspheric bin
Part surface roughness makes it directly to carry out interference detection.Accurate grinding is carried out using parallel grinding and cutting technology to non-spherical element to add
Work so that initial aspherical shape precision is reached after grinding.Conformal polishing can quickly remove Grinding defects layer, and improve element
Roughness it is directly carried out interference detection.Secondly, low-frequency range is removed to the non-spherical element Jing Guo conformal polishing
Error correction polishes and removed the even sliding polishing of medium-high frequency section error.Amendment polishing can effectively correct low frequency aberration.Even cunning
Polishing can quickly remove medium-high frequency error, until final technical requirements.The method can improve aspherical mirror machining efficiency, Er Qieke
Full frequency band error is controlled, the processing final full frequency band precision of aperture aspherical element is effectively improved.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be attached to what is used required in embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, therefore is not construed as pair
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is the preferable non-spherical element surface error convergence process designed in the present invention；
Fig. 2 is the technique processing method figure for the control non-spherical element full frequency band error that embodiments of the invention are provided；
Fig. 3 is the processing method figure that embodiments of the invention provide control non-spherical element full frequency band error；
Fig. 4 a are aspheric surface figures after grinding provided in an embodiment of the present invention；
Fig. 4 b are aspherical transmission wave front charts after the conformal polishing of air bag provided in an embodiment of the present invention；
Fig. 4 c are aspherical transmission wave front charts after first time provided in an embodiment of the present invention even sliding polishing；
Fig. 4 d are aspherical transmission wave front charts after air bag amendment polishing provided in an embodiment of the present invention；
Fig. 4 e are aspherical transmission wave front charts after second provided in an embodiment of the present invention even sliding polishing；
Fig. 4 f are aspherical intermediate frequency error maps after second provided in an embodiment of the present invention even sliding polishing；
Fig. 5 is aspherical frequency P SD curve maps after second of even sliding polishing that embodiments of the invention are provided；
Fig. 6 a are aspheric surface roughness figures after the grinding that embodiments of the invention are provided；
Fig. 6 b are aspheric surface roughness figures after the conformal polishing of air bag that embodiments of the invention are provided；
Fig. 6 c are aspheric surface roughness figures after second of even sliding polishing that embodiments of the invention are provided.
Embodiment
, below will be in the embodiment of the present invention to make the purpose, technical scheme and advantage of the embodiment of the present invention clearer
Technical scheme be clearly and completely described.Unreceipted actual conditions person, builds according to normal condition or manufacturer in embodiment
The condition of view is carried out.Agents useful for same or the unreceipted production firm person of instrument, are the conventional production that can be obtained by commercially available purchase
Product.
Below a kind of of the embodiment of the present invention is used to control the processing method of non-spherical element full frequency band error to have
Body explanation.
A kind of processing method for controlling non-spherical element full frequency band error, it comprises the following steps：
Grinding-shaping：The straight forming of non-spherical element is carried out using superfine grinding method, while by subsurface defect
Control is in reduced levels；
Conformal polishing：Using the rim of the mouth footpath polishing technology of high stability, high removal efficiency, the quick of non-spherical element is realized
It is conformal to throw bright, to remove subsurface defect；
Amendment polishing：Non-spherical element low frequency aberration is quickly corrected using the rim of the mouth footpath polishing technology of high stability, made non-
Aspherical elements low frequency index reaches optical system use requirement；
Even sliding polishing：Using even sliding polishing technology, in the case where low frequency aberration is not deteriorated, in control non-spherical element
High frequency error, makes high target in non-spherical element reach optical system use requirement.
In the present embodiment, non-spherical element low frequency aberration is quickly corrected using the rim of the mouth footpath polishing technology of high stability,
Non-spherical element low frequency index is set to reach optical system use requirement.Also, non-spherical element is entered using parallel grinding and cutting technology
Row accurate grinding is processed so that initial aspherical shape precision is reached after grinding.
In the present embodiment, conformal polishing realizes aspheric using high stability, the rim of the mouth footpath polishing technology of high removal efficiency
The fast conformal of bin part throws bright, to remove subsurface defect.And it is possible to quickly remove Grinding defects layer, and improve element
Roughness it is directly carried out interference detection.
Specifically, what embodiments of the invention were chosen is the non-spherical element that bore is Ф 400mm.This size it is aspherical
Element belongs to aperture aspherical element.Certainly, in other embodiments of the invention, the caliber size of non-spherical element can be with
Selected according to demand, the present invention is not limited.
Specifically, the non-spherical element with initial aspherical shape precision is to aspheric bin using parallel grinding and cutting technology
Part carries out grinding, it is preferable that the parameter of grinding is：Skive, 1500~2000r/min of grinding wheel speed, enters
Give speed 4500~6000mm/min, 5~25 μm of the depth of cut.Certainly, in other embodiments of the invention, the ginseng of grinding
Number can be adjusted according to real needs, and the present invention is not limited.
Wherein, parallel grinding and cutting technology is to be based on the straight line travelling wheelhead roll grinders of X/Y/Z tri-, and raster pattern track is run by arc diamond wheel,
The track of different contact points forms an aspherical enveloping surface on workpiece to be machined on the excircle configuration face of emery wheel, completes whole
Aspheric curve envelope is processed.
Wherein, face shape is detected in place using face shape during carrying out grinding to non-spherical element, it is preferred to use non-
Contact surface testing system is detected that roughness is detected using Taylor's contourgraph.In detail, after the completion of grinding, using non-
Contact surface testing system carries out aspheric surface in superfine grinding lathe and detected in place, detects non-using Taylor's contourgraph
Spherical face roughness.
Specifically, it is to use air bag polishing technology, ion beam polishing technology or Technique of Magnetorheological Finishing to carry out conformal polishing
Conformal polishing is carried out to non-spherical element.
Wherein, bright is thrown to the non-spherical element fast conformal after superfine grinding using air bag polishing technology, can removed
The defect of grinding skin.The conformal burnishing parameters of air bag are：Balloon radius 80mm, air bag volume under pressure 1mm, inside air bag pressure
0.1Mpa, bonnet rotational speed 1500rpm, air bag feed speed 1500mm/min, raster paths, path separation 2mm.Certainly, at this
In the other embodiment of invention, burnishing parameters can also be adjusted according to demand.Also, after the completion of the conformal polishing of air bag,
The aspherical autocollimatic formula interference detecting system built using sphere dynamic interferometer carries out aspherical transmission Wave-front measurement, in order to
Determine whether air bag polishing has reached the aspherical conformal technique purpose for removing Grinding defects layer；Detected using Zygo roughmeters
Non-spherical surface roughness, in order to determine whether the conformal polishing of air bag improves element after non-spherical surface finish, processing
Whether transmission wavefront detection directly can be carried out using sphericity interferometer.
In the present embodiment, amendment polishing is quickly to correct non-spherical element using the rim of the mouth footpath polishing technology of high stability
Low frequency aberration, makes non-spherical element low frequency index reach optical system use requirement.Amendment polishing can effectively correct low frequency
Error.Even sliding polishing is to use even sliding polishing technology, in the case where low frequency aberration is not deteriorated, high in control non-spherical element
Frequency error, makes high target in non-spherical element reach optical system use requirement.Even sliding polishing can quickly remove medium-high frequency mistake
Difference, until final technical requirements.The method can improve aspherical mirror machining efficiency, and controllable full frequency band error, effectively carry
The height processing final full frequency band precision of aperture aspherical element.
Specifically, it is to use air bag polishing technology, ion beam polishing technology or Technique of Magnetorheological Finishing to be modified polishing
Polishing is modified to non-spherical element.
Wherein, non-spherical element surface low frequency aberration, air bag amendment polishing can quickly be corrected using air bag polishing technology
Parameter is：Balloon radius 40mm, 80mm, air bag 0.5~1mm of volume under pressure, pressure 0.1Mpa, 1000~1500rpm of bonnet rotational speed,
Raster paths, 1~2mm of path separation.Certainly, in other embodiments of the invention, the parameter of amendment polishing can be according to need
Ask and selected, the present invention is not limited.Also, after the completion of air bag amendment polishing, built using sphere dynamic interferometer
Aspherical autocollimatic formula interference detecting system carries out aspherical transmission Wave-front measurement.
Specifically, carry out even sliding polishing be using flexibility pitch small tool polishing technology or annular air-pocket polishing technology come pair
Non-spherical element carries out even sliding polishing.Element low frequency index reaches requirement after the aspherical polishing through air bag amendment, but surface is rich
Containing more medium-high frequency error.Therefore, medium-high frequency error is removed using the even sliding polishing technology of flexible pitch, until reaching optical system
The requirement of centering high frequency error.
Wherein, even sliding polishing is included in before polishing is modified to non-spherical element to non-spherical element progress for the first time
Even cunning polishing, and second of even cunning of non-spherical element progress is polished after polishing is modified to non-spherical element, first
Secondary even cunning polishing and the parameter that even cunning is polished for the second time are：45~55mm of pitch flexible polishing disk diameter, 4~6mm of bias, from
Turn 18~22r/min, 180~220r/min of revolution, 0.05~0.12Mpa of pressure, raster paths, 4~6mm of path separation；It is excellent
Selection of land, pitch flexible polishing disk diameter 50mm, bias 5mm, rotation 20r/min, revolution 200r/min, pressure 0.1Mpa, grating
Path, path separation 5mm.Certainly, in other embodiments of the invention, sliding polishing even for the first time and second of even sliding polishing
Parameter can be selected according to demand, and the present invention is not limited.Also, it is dynamically dry using sphere after the completion of even sliding polishing
The aspherical autocollimatic formula interference detecting system that interferometer is built carries out aspherical transmission Wave-front measurement, is detected using Zygo roughmeters
Non-spherical surface roughness.
In an embodiment of the present invention, to non-spherical element amendment polishing and even sliding polishing can alternately, to cause
The full frequency band error of non-spherical element touches the mark requirement.
Refering to Fig. 1 to Fig. 6, feature and performance of the invention are described in further detail with reference to embodiments.
A kind of processing method for controlling non-spherical element full frequency band error is present embodiments provided, it includes following step
Suddenly：
First, grinding-shaping is the straight forming that non-spherical element is carried out using superfine grinding method.
Wherein, grinding is carried out to non-spherical element using parallel grinding and cutting technology.The parameter of grinding is：Diamond
Emery wheel, grinding wheel speed 1500r/min, feed speed 4500mm/min, 5 μm of the depth of cut.After the completion of grinding, using contactless face
Shape detecting system carries out aspheric surface in superfine grinding lathe and detects that as shown in fig. 4 a, testing result is 2303nm in place；
Non-spherical surface roughness is detected using Taylor's contourgraph, as shown in Figure 6 a, testing result is 55nm.
Secondly, conformal polishing is that the fast conformal for realizing non-spherical element throws bright, to remove subsurface defect.Conformal polishing
It is to use air bag polishing technology, the conformal burnishing parameters of air bag are：Balloon radius 80mm, air bag volume under pressure 1mm, inside air bag pressure
0.1Mpa, bonnet rotational speed 1500rpm, air bag feed speed 1500mm/min, raster paths, path separation 2mm.It is conformal in air bag
After the completion of polishing, the aspherical autocollimatic formula interference detecting system built using sphere dynamic interferometer carries out aspherical transmission wavefront
Detection, as shown in Figure 4 b, it through wavefront PV is 1022nm (being scaled to aspheric surface PV about 2044nm) that testing result, which is,；Using
Zygo roughmeters detect non-spherical surface roughness, and as shown in Figure 6 b, testing result is 3.74nm.
Then, amendment polishing is quickly to correct non-spherical element low frequency mistake using the rim of the mouth footpath polishing technology of high stability
Difference, makes non-spherical element low frequency index reach optical system use requirement.
Wherein, air bag amendment burnishing parameters are：Balloon radius 40mm, air bag volume under pressure 0.5, pressure 0.1Mpa, air bag turns
Fast 1000rpm, raster paths, path separation 1mm.After the completion of air bag amendment polishing, built using sphere dynamic interferometer
Aspherical autocollimatic formula interference detecting system carries out aspherical transmission Wave-front measurement, and as shown in figure 4d, testing result passes through wavefront PV
For 149nm.
Subsequently, even sliding polishing is, in the case where low frequency aberration is not deteriorated, to control non-spherical element medium-high frequency error.
Even sliding polishing is included in polishing is modified to non-spherical element before non-spherical element is carried out it is even for the first time it is sliding polish, and
Second is carried out to non-spherical element after non-spherical element is modified polishing even sliding to polish, it is preferable that even cunning for the first time
Polishing and the parameter that even cunning is polished for the second time are：Pitch flexible polishing disk diameter 50mm, bias 5mm, rotation 20r/min, public affairs
Turn 200r/min, pressure 1Mpa, raster paths, path separation 5mm.
Also, after the completion of sliding polishing even for the first time, the aspherical autocollimatic formula built using sphere dynamic interferometer, which is interfered, to be examined
Examining system carries out aspherical transmission Wave-front measurement, as illustrated in fig. 4 c, and it through wavefront PV is 856nm that testing result, which is,.And such as Fig. 4 e
Shown, it is 56.7nm to pass through wavefront PV after second of even sliding polishing, is computed, as shown in fig. 4f, final aspherical PSD1 frequency ranges
Interior RMS value is 1.7nm.As shown in figure 5, aspherical frequency P SD curves are under appraisal curve, examined using Zygo roughmeters
Non-spherical surface roughness is surveyed, as fig. 6 c, testing result is 0.69nm.
In summary, refering to Fig. 1 to Fig. 6, one kind of the embodiment of the present invention is used to control non-spherical element full frequency band error
Processing method so that realize aperture aspherical element full frequency band control errors, low-frequency range, Mid Frequency, high band error
PV≤60nm, PSD1 are respectively reached：A≤1.01ν-1.55, RMS≤1.8nm, Rq≤1nm.It is thus possible to improve aspherical
Processing efficiency, and controllable full frequency band error, effectively improve the processing final full frequency band precision of aperture aspherical element.
Embodiments described above is a part of embodiment of the invention, rather than whole embodiments.The reality of the present invention
The detailed description for applying example is not intended to limit the scope of claimed invention, but is merely representative of the selected implementation of the present invention
Example.Based on the embodiment in the present invention, what those of ordinary skill in the art were obtained under the premise of creative work is not made
Every other embodiment, belongs to the scope of protection of the invention.
Claims (10)
1. a kind of processing method for controlling non-spherical element full frequency band error, it is characterised in that it comprises the following steps：
Grinding-shaping：The straight forming of non-spherical element is carried out using superfine grinding method, while by subsurface defect control
In reduced levels；
Conformal polishing：Using the rim of the mouth footpath polishing technology of high stability, high removal efficiency, the quick of the non-spherical element is realized
It is conformal to throw bright, to remove subsurface defect；
Amendment polishing：The low frequency aberration of the non-spherical element is quickly corrected using the rim of the mouth footpath polishing technology of high stability, made
The low frequency index of the non-spherical element reaches optical system use requirement；
Even sliding polishing：Using even sliding polishing technology, in the case where the low frequency aberration is not deteriorated, the aspheric bin is controlled
The medium-high frequency error of part, makes the middle high target of the non-spherical element reach optical system use requirement.
2. the processing method according to claim 1 for controlling non-spherical element full frequency band error, it is characterised in that mill
The type of being whittled into uses parallel grinding and cutting technology, it is preferable that the parameter of grinding is：Skive, grinding wheel speed 1500~
2000r/min, 4500~6000mm/min of feed speed, 5~25 μm of the depth of cut.
3. the processing method according to claim 2 for controlling non-spherical element full frequency band error, it is characterised in that right
The face shape of the non-spherical element during grinding-shaping is detected in place using face shape, it is preferred to use contactless surface testing
System is detected that roughness is detected using Taylor's contourgraph.
4. the processing method according to claim 1 for controlling non-spherical element full frequency band error, it is characterised in that right
The amendment polishing of the non-spherical element and even sliding polishing can alternately, to cause the full frequency band error of the non-spherical element
Touch the mark requirement.
5. the processing method according to claim 1 for controlling non-spherical element full frequency band error, it is characterised in that enter
The conformal polishing of row is that the non-spherical element is entered using air bag polishing technology, ion beam polishing technology or Technique of Magnetorheological Finishing
The conformal polishing of row.
6. the processing method according to claim 1 for controlling non-spherical element full frequency band error, it is characterised in that enter
Row amendment polishing is that the non-spherical element is entered using air bag polishing technology, ion beam polishing technology or Technique of Magnetorheological Finishing
Row amendment polishing.
7. the processing method according to claim 1 for controlling non-spherical element full frequency band error, it is characterised in that enter
The even sliding polishing of row is that the non-spherical element is entered using flexible pitch small tool polishing technology or annular air-pocket polishing technology
The even sliding polishing of row.
8. the processing method according to claim 6 for controlling non-spherical element full frequency band error, it is characterised in that
During conformal polishing, amendment polishing and even sliding polishing are carried out to the non-spherical element, the face shape of the non-spherical element
Interference detection is carried out using the auto-collimation detecting system built based on sphericity interferometer, roughness is detected using roughmeter.
9. the processing method according to claim 6 for controlling non-spherical element full frequency band error, it is characterised in that institute
State even sliding polishing be included in polishing is modified to the non-spherical element before the non-spherical element is carried out it is even for the first time
It is sliding to polish, and to second of even sliding throwing of non-spherical element progress after polishing is modified to the non-spherical element
Light.
10. the processing method according to claim 9 for controlling non-spherical element full frequency band error, it is characterised in that
The parameter of the even sliding polishing is：45~55mm of pitch flexible polishing disk diameter, 4~6mm of bias, 18~22r/min of rotation, public affairs
Turn 180~220r/min, 0.05~0.12Mpa of pressure, raster paths, 4~6mm of path separation；Preferably, pitch flexible polishing
Disk diameter 50mm, bias 5mm, rotation 20r/min, revolution 200r/min, pressure 0.1Mpa, raster paths, path separation 5mm.
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| CN111070080A (en) * | 2019-12-31 | 2020-04-28 | 天津大学 | Sub-aperture center liquid supply optical surface series processing technology and tool |
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| CN108581715A (en) * | 2018-04-25 | 2018-09-28 | 成都精密光学工程研究中心 | A kind of numerical-control processing method of optical glass device, apparatus and system |
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| CN110682165B (en) * | 2019-11-06 | 2020-10-23 | 成都精密光学工程研究中心 | Planar optical element and processing method thereof |
| CN111070080A (en) * | 2019-12-31 | 2020-04-28 | 天津大学 | Sub-aperture center liquid supply optical surface series processing technology and tool |
| CN114102340A (en) * | 2021-12-03 | 2022-03-01 | 湖北久之洋红外***股份有限公司 | Polishing preparation method for quadric surface reflector |
| CN114102340B (en) * | 2021-12-03 | 2023-03-14 | 湖北久之洋红外***股份有限公司 | Polishing preparation method for quadric surface reflector |
| CN118288121A (en) * | 2024-06-06 | 2024-07-05 | 中国科学院光电技术研究所 | Processing method of aspheric optical element |
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