CN105784332A - Grating offset monitoring adjusting device and method in vacuum compression chamber - Google Patents
Grating offset monitoring adjusting device and method in vacuum compression chamber Download PDFInfo
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Abstract
Provided is a grating offset monitoring and adjusting device in a vacuum compression chamber of a high-power pw system. A light beam passes a light splitting prism and is then input to a far-field detection system for calibration, and the light splitting prism is rotated after calibration. The light beam passes a single-pass double parallel grating pair compressor structure in certain incident angle; a semi-reflection semi-transmission lens between the two grating pairs is used for beam splitting; a reflected light beam returns along an original path, and is input to an autocorrelation instrument and the far-field detection system which is composed of a Fabry-Perot interferometer, an achromatic lens, a microscopic object lens and a CCD; a transmitted light beam passes one grating pair, and is then input to the autocorrelation instrument and the far-field detection system; and each grating is controlled by a stepping motor to rotate along the 3D angular direction. The grating offset monitoring adjusting device and method are characterized in that 1) the structure is simple; 2) offset of the four gratings at any dimensional angle is allowed; 3) a monitoring optical path is separated from a main optical path; 4) adjustment steps are automatic and 5) the precision is high.
Description
Technical field
The present invention is a kind of monitoring adjustment device and control method clapping grating imbalance in vacuum compression room in tile system for high energy, belongs to high power ultra-short pulse laser field, mainly ensures that high energy claps the ultra-short pulsed laser beam quality of tile system outgoing with this device.
Background technology
In Practical Project, in order to eliminate undesirable nonlinear optical effect and ensure the quality of output beam, compressor is generally positioned at inside vacuum compression room, due to the unstability of grating support electric system, vibration and the air stream of vacuum pump process and use interval for a long time, grating will inevitably deviate the ideal position of original setting, namely imbalance occur, this can cause spectral component spatially to have dislocation, and brings residual angle dispersion.For bigbore high power ultra-short pulse laser system, this can the quality of appreciable impact outgoing beam, so for the monitoring of stop position of lacking of proper care and calibration, engineering having very exigence and strict required precision.
The conventional thought that grating regulates is all fix with first block of grating for benchmark, regulate the depth of parallelism of adjacent gratings and benchmark grating, but for being placed on the compressor of vacuum enclosure, benchmark grating there is also imbalance, and the method adopted for this problem in the world at present has the disadvantage in that
1, structure complicated (this regulates, for the remotely monitoring of vacuum chamber compressor, the interference source adding more instability)；
2, precision not high (prescription of fs-laser system outgoing beam can not be met)；
3, the misalignment rate can monitored is limited (can only monitor grating to whether being parallel to each other, it is impossible to suitable in vacuum chamber two pairs of gratings to 12 degree of freedom de-synchronization state)；
4, monitoring light path does not separate (in discharge chambe, main optical path is in use, can not have any unrelated component influences laser beam compression quality in light path) with main optical path.
Summary of the invention
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, there is provided a kind of high energy to clap the monitoring of vacuum compression room grating imbalance in tile system and regulate device and method, this apparatus structure is simple, precision is high, can quickly regulate the grating angular misalignment amount to 12 degree of freedom, and monitoring light path separates with main optical path.
The technical solution of the present invention is as follows:
A kind of high energy is clapped the monitoring of vacuum compression room grating imbalance in tile system and is regulated device, is characterized in that its composition includes:
Amici prism, first half-reflecting half mirror, first far field detection system, first autocorrelation function analyzer, 3rd half-reflecting half mirror, 4th half-reflecting half mirror, second far field detection system, second autocorrelation function analyzer, by the first grating, second grating, 3rd grating, the bilateral list parallel grating of the 4th optical grating constitution is to compressor, and it is placed on the first plane mirror between this second grating and the 3rd grating, second half-reflecting half mirror and the second plane mirror, compressor is positioned over vacuum compression indoor by described bilateral list parallel grating, described Amici prism, first grating, second grating the 3rd grating and the 4th grating are respectively placed on three-dimensional trim holder；
Monitoring light beam is divided into reflection light beam A through described Amici prism1With transmitted light beam A2, reflect light beam A1Enter the first described far field detection system, transmitted light beam A2Entering vacuum compression room after the first half-reflecting half mirror, successively through the first described grating, the second grating and the first plane mirror, be injected into the second described half-reflecting half mirror, this second half-reflecting half mirror is by transmitted light beam A2It is divided into reflection light beam A21With transmitted light beam A22, transmitted light beam A22Successively through the second described plane mirror, the 3rd grating and the 4th grating, incide the 3rd half-reflecting half mirror, reflect light beam A respectively through the 3rd half-reflecting half mirror3With transmitted light beam A4, reflect light beam A3Enter the second described autocorrelation function analyzer, transmitted light beam A4The second described far field detection system is entered through the 4th described half-reflecting half mirror；Reflection light beam A21Return along original optical path, successively through the first semi-transparent semi-reflecting lens beam splitting after the second described grating and the first grating outgoing, wherein reflect light beam A211Enter in the first autocorrelation function analyzer, transmitted light beam A212It is reflected in the first far field detection system by the Amici prism after half-twist.
The first described far field detection system and the second far field detection system are constituted by fabry perot interferometer (16), De-dispersion mirror, microcobjective, CCD, wherein fabry perot interferometer is for carrying out spectral modulation to light beam, select several spectral components at fixed frequency interval, then pass through De-dispersion mirror to be focused, amplify imaging magnification via microcobjective, finally demonstrate the relative position change of each spectral content and the change in displacement with ideal position via CCD.
The temporal resolution of the first autocorrelation function analyzer, the second autocorrelation function analyzer temporal resolution, the prescription of outgoing beam is determined by the spectral component wave band interval of fabry perot interferometer, the focal length of De-dispersion mirror, the enlargement ratio of microcobjective and the resolution of CCD all in accordance with real system.
Described Amici prism, the first grating, the second grating, the 3rd grating, the 4th grating adjustment frame all can rotate around three-dimensional perspective direction, be rotate around the x-axis of laboratory coordinate, y-axis, z-axis respectively, and by step motor control.
Described Amici prism has dual-purpose, and incident beam is introduced the first far field detection system and is used for calibrating by the first, its two be 90 ° rotate after reciprocal reflection light beam introduced the first far field detection system be used for the monitoring of grating imbalance.
The first plane mirror according to grating formula and spectrum shearing principle gained and the angles of the second plane mirror, make the monitoring light path of certain angle of incidence completely can complete compression by four blocks of gratings, and separate with main optical path；
Two, for detecting the autocorrelation function analyzer of outgoing laser pulse width, are combined monitoring and improve system accuracy with far field detection method；
Utilize described monitoring the obtained monitoring variable of device in conjunction with the thought inverting misalignment rate of variables separation, fully deduce misalignment rate information according to the combination of monitoring variable, thus the monitoring number of devices of effective simplified system.Its concrete inverting regulating step is as follows:
Step 1. defines the grating angular misalignment amount to 12 degree of freedom: ζ1, η1, θ1Respectively the first grating is around x-axis, the imbalance angle that y-axis and z-axis rotate, and is the angle of pitch, horizontal angle and around shaft angle；ζ2, η2, θ2It is then that the second grating is around x-axis, the imbalance angle of y-axis and z-axis rotation；ζ3, η3, θ3The imbalance angle that respectively the 3rd grating rotates around x-axis, y-axis and z-axis；ζ4, η4, θ4The imbalance angle that respectively the 4th grating rotates around x-axis, y-axis and z-axis, imbalance angle is regulated by step motor control；
Step 2. defines the monitoring variable of monitoring equipment, and for the image that far field detection system presents, with desirable focal spot position for coordinate origin, transverse axis is x-axis direction, longitudinal axis y-axis direction, δ x1, δ y1The respectively difference of the horizontally and vertically displacement of two focal spot points that distance is farthest on image, is namely presented on the maximum wavelength of the first far field detection system and the minimum wavelength focal spot difference along x-axis and the displacement of y-axis when the first grating and the imbalance of the second grating；xλ01, yλ01Respectively the first far field detection system presents a middle focal spot point of image relative to the coordinate origin displacement along x-axis y-axis direction, namely when the first grating and the imbalance of the second grating centre wavelength correspondence focal spot relative to the desirable focal spot position at coordinate origin place along x-axis and displacement along the y-axis direction；τ1For being presented on the first autocorrelation function analyzer emergent light relative to the difference of incident light pulse width, it is the delay that grating dispersion causes, when imbalance causes residual angle dispersion, can cause that pulsewidth is widened further；It is presented on the second far field detection system and the second autocorrelation function analyzer corresponding monitoring variable respectively δ x2, δ y2, xλ02, yλ02, τ2, for monitoring the imbalance of the 3rd grating and the 4th grating；
The step 3. beam splitting effect according to the second half-reflecting half mirror, is divided into two stages to the adjustment of error angle:
First stage, the reflection light beam A being reflected back according to the second half-reflecting half mirror21, by the monitoring variable δ x of the first autocorrelation function analyzer and the first far field detection system1, δ y1, xλ01, yλ01, τ1Regulate the angular misalignment amount ζ of the first grating, the second grating six-freedom degree1, η1, θ1, ζ2, η2, θ2So that misalignment rate becomes 0, i.e. desired light palisade state, enters second stage after adjustment；
Second stage, according to the transmitted light beam A after the second half-reflecting half mirror transmission22, by the monitoring variable δ x of the second autocorrelation function analyzer and the second far field detection system2, δ y2, xλ02, yλ02, τ2Regulate the angular misalignment amount ζ of the 3rd grating, the 4th grating six-freedom degree3, η3, θ3, ζ4, η4, θ4So that misalignment rate becomes 0.
Presenting the regulating step of each step below in table form intuitively, remarks: when controlled plant is two, namely two regulate simultaneously, and keep adjustment to act in agreement.
Table 1 is lacked of proper care grating regulating step
The technique effect of the present invention is as follows:
Press in table step by programme-control motor to regulate, can the progressively each variable of separation adjusting, finally 12 misalignment rates are all adjusted to 0, namely compressor grating is recalled to completely to perfect condition.Comparing traditional scheme, this scenario-frame is simple, and precision is high, on-line automaticization being realized regulate, thus being mixed up disposable rapidly by imbalance grating, improve the service efficiency in engineering, monitoring light path separates with main optical path simultaneously, it is to avoid the coupled problem of each amount.This regulation scheme is also applied in the fine adjustment problem of the closed system such as stretcher and various configuration compressor imbalance dispersion element.
Accompanying drawing explanation
The monitoring that Fig. 1 is vacuum compression room of the present invention grating imbalance regulates device schematic diagram
In figure:
1-Amici prism；2-the first half-reflecting half mirror；3-the first far field detection system；4-the first autocorrelation function analyzer；5-the first grating；6-the second grating；7-the 3rd grating；8-the 4th grating；9-the first plane mirror；10-the second half-reflecting half mirror；11-the second plane mirror；12-the 3rd half-reflecting half mirror；13-the 4th half-reflecting half mirror；14-the second autocorrelation function analyzer；15-the second far field detection system；16-main optical path watch window；Double-head arrow represent through semi-transparent partly return mirror 10 after reflection beam path
Fig. 2 is far field detection system detail installation drawing of the present invention
17-fabry perot interferometer；18-De-dispersion mirror；19-microcobjective；20-CCD
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention will be further described, but should not limit the scope of the invention with this.
First referring to Fig. 1, Fig. 1 is the overall structure schematic diagram that vacuum compression room of the present invention grating imbalance monitoring regulates device.The composition of this device is:
Amici prism, first half-reflecting half mirror, first far field detection system, first autocorrelation function analyzer, 3rd half-reflecting half mirror, 4th half-reflecting half mirror, second far field detection system, second autocorrelation function analyzer, by the first grating, second grating, 3rd grating, the bilateral list parallel grating of the 4th optical grating constitution is to compressor, and it is placed on the first plane mirror between this second grating and the 3rd grating, second half-reflecting half mirror and the second plane mirror, compressor is positioned over vacuum compression indoor by described bilateral list parallel grating, described Amici prism, first grating, second grating the 3rd grating and the 4th grating are respectively placed on three-dimensional trim holder；
Monitoring light beam is divided into reflection light beam A through described Amici prism1With transmitted light beam A2, reflect light beam A1Enter the first described far field detection system, transmitted light beam A2Entering vacuum compression room after the first half-reflecting half mirror, successively through the first described grating, the second grating and the first plane mirror, be injected into the second described half-reflecting half mirror, this second half-reflecting half mirror is by transmitted light beam A2It is divided into reflection light beam A21With transmitted light beam A22, transmitted light beam A22Successively through the second described plane mirror, the 3rd grating and the 4th grating, incide the 3rd half-reflecting half mirror, reflect light beam A respectively through the 3rd half-reflecting half mirror3With transmitted light beam A4, reflect light beam A3Enter the second described autocorrelation function analyzer, transmitted light beam A4The second described far field detection system is entered through the 4th described half-reflecting half mirror；Reflection light beam A21Return along original optical path, successively through the first semi-transparent semi-reflecting lens beam splitting after the second described grating and the first grating outgoing, wherein reflect light beam A211Enter in the first autocorrelation function analyzer, transmitted light beam A212It is reflected in the first far field detection system by the Amici prism after half-twist.
There is following relation in monitoring variable and the angular misalignment amount of four blocks of gratings that during grating imbalance, far field detection system and autocorrelation function analyzer obtain:
1, the angular misalignment (i.e. η) of grating horizontal direction can cause lateral displacement (the i.e. x of focal spot centre wavelength positionλ0) and the elongation of different wave length lateral attitude (i.e. δ x), and only with grating, horizontal angle is relevant relative to nonparallelism, when the first grating 5 and the second grating 6, when the 3rd grating 7 and the 4th grating 8 horizontal angle are parallel to each other, δ x=0 and xλ0=0.
2, grating the angle of pitch (i.e. ζ) and around shaft angle (i.e. θ) imbalance be length travel (the i.e. y causing focal spot centre wavelength positionλ0) and longitudinal direction (the i.e. δ y) elongation of different focal spot point.
3, the imbalance of grating horizontal angle and the angle of pitch can produce Shu Yanchi and (be designated as τs, restraint the delay that optical path difference is corresponding, the retardation that namely a certain wavelength components causes due to wave tilt), Shu Yanchi is only relevant with the relative nonparallelism of grating pair, first grating 5 and the second grating 6, when the 3rd grating 7 and the 4th grating 8 are parallel to each other, Shu Yanchi is 0.
4, the second grating 6 and the 3rd grating 7 horizontal angle imbalance can produce dispersion and postpone (being designated as τ ', for the longest delay corresponding with the optical path difference of the wavelength average light path of the shortest light beam of wavelength, be the compressor dispersion to incident chirped pulse and postpone).
5, no matter τsOr τ ', unifies to be rendered as pulsewidth on autocorrelation function analyzer and widens, so monitoring variable unification τ represents.
6, when low-angle is lacked of proper care, above-mentioned monitoring variable and misalignment rate present linear relationship.
In conjunction with features described above, adopt the thought of variables separation to be separated one by one by misalignment rate, progressively regulate to perfect condition by step in table 1.
In sum, apparatus of the present invention have simple in construction with method, precision is high, automatization quickly regulates, monitor light path separates with main optical path, comprehensive monitoring respectively ties up the feature of angular misalignment amount.
Claims (6)
- null1. a high energy is clapped the monitoring of vacuum compression room grating imbalance in tile system and is regulated device，It is characterised by that its composition includes Amici prism (1)、First half-reflecting half mirror (2)、First far field detection system (3)、First autocorrelation function analyzer (4)、3rd half-reflecting half mirror (12)、4th half-reflecting half mirror (13)、Second far field detection system (15)、Second autocorrelation function analyzer (14)、By the first grating (5)、Second grating (6) the 3rd grating (7)、The bilateral list parallel grating that 4th grating (8) is constituted is to compressor，And it is placed on the first plane mirror (9) between this second grating (6) and the 3rd grating (7)、Second half-reflecting half mirror (10) and the second plane mirror (11)，Compressor is positioned over vacuum compression indoor by described bilateral list parallel grating，Described Amici prism (1)、First grating (5)、Second grating (6) the 3rd grating (7) and the 4th grating (8) are respectively placed on three-dimensional trim holder；Monitoring light beam is divided into reflection light beam A through described Amici prism (1)1With transmitted light beam A2, reflect light beam A1Enter the first described far field detection system (3), transmitted light beam A2Vacuum compression room is entered after the first half-reflecting half mirror (2), successively through described the first grating (5), the second grating (6) and the first plane mirror (9), being injected into described the second half-reflecting half mirror (10), this second half-reflecting half mirror (10) is by transmitted light beam A2It is divided into reflection light beam A21With transmitted light beam A22, transmitted light beam A22Successively through described the second plane mirror (11), the 3rd grating (7) and the 4th grating (8), incide the 3rd half-reflecting half mirror (12), reflect light beam A respectively through the 3rd half-reflecting half mirror (12)3With transmitted light beam A4, reflect light beam A3Enter described the second autocorrelation function analyzer (14), transmitted light beam A4The second described far field detection system (15) is entered through the 4th described half-reflecting half mirror (13)；Reflection light beam A21Return along original optical path, successively through the first semi-transparent semi-reflecting lens (2) beam splitting after described the second grating (6) and the first grating (5) outgoing, wherein reflect light beam A211Enter in the first autocorrelation function analyzer (4), transmitted light beam A212It is reflected in the first far field detection system (3) by the Amici prism (1) after half-twist.
- 2. high energy according to claim 1 is clapped the monitoring of vacuum compression room grating imbalance in tile system and is regulated device, it is characterized in that, the first described far field detection system (3) and the second far field detection system (15) are by fabry perot interferometer (16), De-dispersion mirror (17), microcobjective (18), CCD (19) is constituted, wherein fabry perot interferometer (16) is for carrying out spectral modulation to light beam, select several spectral components at fixed frequency interval, then pass through De-dispersion mirror (17) to be focused, imaging magnification is amplified via microcobjective (18), the relative position change of each spectral content and the change in displacement with ideal position is finally demonstrated via CCD (19).
- 3. high energy according to claim 2 is clapped the monitoring of vacuum compression room grating imbalance in tile system and is regulated device, it is characterized in that the temporal resolution of the temporal resolution of the first autocorrelation function analyzer (12), the second autocorrelation function analyzer (14), the prescription of outgoing beam is determined by the spectral component wave band interval of fabry perot interferometer (16), the focal length of De-dispersion mirror (17), the enlargement ratio of microcobjective (18) and the resolution of CCD (19) all in accordance with real system.
- 4. high energy according to claim 1 is clapped the monitoring of vacuum compression room grating imbalance in tile system and is regulated device, it is characterized in that described Amici prism (1), the first grating (5), the second grating (6), the 3rd grating (7), the 4th grating (8) adjustment frame all can rotate around three-dimensional perspective direction, it is rotate around the x-axis of laboratory coordinate, y-axis, z-axis respectively, and by step motor control.
- 5. high energy according to claim 1 is clapped the monitoring of vacuum compression room grating imbalance in tile system and is regulated device, it is characterized in that described Amici prism (1) has dual-purpose, incident beam is introduced the first far field detection system (3) and is used for calibrating by the first, its two be 90 ° rotate after reciprocal reflection light beam introduced the monitoring that the first far field detection system (3) is lacked of proper care for grating.
- 6. utilize the arbitrary described high energy of claim 1-5 to clap the monitoring of vacuum compression room grating imbalance in tile system and regulate the method that device is monitored regulating, it is characterised in that the method comprises the steps:Step 1. defines the grating angular misalignment amount to 12 degree of freedom: ζ1, η1, θ1Respectively the first grating (5) is around x-axis, the imbalance angle that y-axis and z-axis rotate, and is the angle of pitch, horizontal angle and around shaft angle；ζ2, η2, θ2It is then that the second grating (6) is around x-axis, the imbalance angle of y-axis and z-axis rotation；ζ3, η3, θ3The imbalance angle that respectively the 3rd grating (7) rotates around x-axis, y-axis and z-axis；ζ4, η4, θ4The imbalance angle that respectively the 4th grating (8) rotates around x-axis, y-axis and z-axis, imbalance angle is regulated by step motor control；Step 2. defines the monitoring variable of monitoring equipment, and for the image that far field detection system presents, with desirable focal spot position for coordinate origin, transverse axis is x-axis direction, longitudinal axis y-axis direction, δ x1, δ y1The respectively difference of the horizontally and vertically displacement of two focal spot points that distance is farthest on image, is namely presented on the maximum wavelength of the first far field detection system (3) and the minimum wavelength focal spot difference along x-axis and the displacement of y-axis when the first grating (5) and the second grating (6) imbalance；xλ01, yλ01Respectively the first far field detection system (3) presents a middle focal spot point of image relative to the coordinate origin displacement along x-axis y-axis direction, when namely the first grating (5) is lacked of proper care with the second grating (6) the corresponding focal spot of centre wavelength relative to the desirable focal spot position at coordinate origin place along x-axis and displacement along the y-axis direction；τ1For being presented on the upper emergent light of the first autocorrelation function analyzer (4) relative to the difference of incident light pulse width, it is the delay that grating dispersion causes, when imbalance causes residual angle dispersion, can cause that pulsewidth is widened further；It is presented on the second far field detection system (15) and the upper corresponding monitoring variable respectively δ x of the second autocorrelation function analyzer (14)2, δ y2, xλ02, yλ02, τ2, it is used for monitoring the imbalance of the 3rd grating (7) and the 4th grating (8)；The step 3. beam splitting effect according to the second half-reflecting half mirror (10), is divided into two stages to the adjustment of error angle:First stage, the reflection light beam A being reflected back according to the second half-reflecting half mirror (10)21, by the monitoring variable δ x of the first autocorrelation function analyzer (4) and the first far field detection system (3)1, δ y1, xλ01, yλ01, τ1Regulate the angular misalignment amount ζ of the first grating (5), the second grating (6) six-freedom degree1, η1, θ1, ζ2, η2, θ2So that misalignment rate becomes 0, i.e. desired light palisade state, enters second stage after adjustment；Second stage, according to the transmitted light beam A after the second half-reflecting half mirror (10) transmission22, by the monitoring variable δ x of the second autocorrelation function analyzer (14) and the second far field detection system (15)2, δ y2, xλ02, yλ02, τ2Regulate the angular misalignment amount ζ of the 3rd grating (7), the 4th grating (8) six-freedom degree3, η3, θ3, ζ4, η4, θ4So that misalignment rate becomes 0.
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