CN105181755B - Ammonia gas sensor and its preparation process - Google Patents
Ammonia gas sensor and its preparation process Download PDFInfo
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- CN105181755B CN105181755B CN201510524167.2A CN201510524167A CN105181755B CN 105181755 B CN105181755 B CN 105181755B CN 201510524167 A CN201510524167 A CN 201510524167A CN 105181755 B CN105181755 B CN 105181755B
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Abstract
The invention discloses ammonia gas sensor, including gas sensitive and substrate, the gas sensitive is coated in the substrate surface, and the gas sensitive ingredient includes the titanium dioxide composite nanometer particle of the graphene modified with bridging structure；The composite nanometer particle includes graphene and titanium dioxide, and the graphene bridge joint is between the titanium dioxide；The mass fraction that the graphene accounts for composite nano materials is 0.2%~20%；The gas sensitive coating thickness is 0.4~0.5 μm；The substrate is Si substrates or Al with Au electrodes2O3Substrate.The gas sensitive of the ammonia gas sensor of the present invention is the titanium dioxide composite nanometer particle of the graphene modified with bridging structure, which shows to NH3The performances such as response performance better choice, restorative, stability and the lower operating temperature of gas.
Description
Technical field
The invention belongs to technical field of nano material, and in particular to ammonia gas sensor and its preparation process.
Background technology
Gas sensor is mainly used for the detection of CO gas, the detection of methane gas, coal gas in the prior art
The detection of ethyl alcohol, the detection etc. of human oral cavity halitosis in detection, the detection of freon (R11, R12), expiration.It is by gas kind
Class and its it is converted into electric signal with concentration dependent information, is obtained with according to the power of these electric signals and is existed under test gas
In environment there are the related information of situation, so as to be detected, monitor, alarm；Interface circuit and meter can also be passed through
The automatic detection of calculation machine composition, control and alarm system.Wherein, though ammonia is present in low concentration in air, low concentration
Ammonia still have a harmful effect to the health of people and environmental pollution, therefore how rapid and accurate determination goes out the content of ammonia,
Foundation is provided for the improvement of air environment, becomes the big hot issue of those skilled in the art.
Since 2004, single layer two-dimensional graphene is due to its special charge transport ability and in heat, light and machine
The excellent performance of tool etc. causes people and greatly pays close attention to, and the Schedin etc. of Univ Manchester UK is recently reported
Graphene is used for the potential application of advanced chemical sensor.However the Graphene derivative such as graphite oxide with surface functional group
Alkene (GO) or reproducibility graphene (rGO), compared with the metal oxide of tradition research, it may have characteristic of semiconductor, Ke Nenggeng
It is suitable for the application of chemical sensor.Started using the chemical sensor of reproducibility graphene (rGO) and its compound a large amount of
Research, such as it is found that reproducibility graphene (rGO) and the compound gas that can effectively improve sensor of metal oxide
Quick characteristic is primarily due to compound and combines different available characteristic in its composition, come improve the machinery of compound, chemistry and
Electrology characteristic.The metal oxide compound with reproducibility graphene (rGO) mainly has SnO now2, ZnO, WO3Deng domestic Jilin
The ZnO-rGO compounds of the synthesis such as university Liu Sen are to NO2Response more higher than single composition is shown, and is obviously shortened
Response and recovery time.The Russo etc. of Aveiro universities of Portugal is prepared for Pt-SnO2/ rGO nanostructures are relative to compound
Middle single substance is shown under low temperature to H2Preferable response characteristic.For ammonia gas sensor, Univ Wisconsin-Madison USA
Lu etc. sensor is made by the partial reductive graphene annealed under Ar environment, can be to NO2And NH3Response, and
For NH3Response it is unstable.
Therefore, it is simple to prepare a kind of processing step, it is at low cost and to NH3High selectivity, operating temperature easily reaches, surely
Qualitative and strong restorability ammonia gas sensor becomes those skilled in the art's technical problem urgently to be resolved hurrily.
Invention content
The purpose of the present invention is to provide a kind of to NH3Response is high, stability is strong, can effectively, accurately and rapidly examine
The ammonia gas sensor of ammonia level is surveyed, technical solution is：Including gas sensitive and substrate, the gas sensitive is coated in the base
Plate surface, which is characterized in that the gas sensitive ingredient includes having the titanium dioxide of the graphene modified of bridging structure compound
Nano particle；The composite nanometer particle includes graphene and titanium dioxide, the graphene bridge joint the titanium dioxide it
Between.
The mass fraction that the graphene accounts for composite nano materials as a preferred technical solution, is 0.2%~20%.
The gas sensitive coating thickness is 0.4~0.5 μm as a preferred technical solution,.
The substrate is Si substrates or Al with Au electrodes as a preferred technical solution,2O3Substrate.
The titanium dioxide is in spherical as a preferred technical solution, and the grain size of the titanium dioxide is 1 μm~5 μm.
It is further preferred that the titanium dioxide is mono-dispersion microballoon.
The present invention also provides the preparation processes of the ammonia gas sensor, include the following steps：
Step 1 prepares positively charged titanium dioxide microballoon sphere：The surface of titanium dioxide microballoon sphere is modified so that micro-
Ball surface is positively charged；
Step 2 prepares graphene dispersing solution：The graphene oxide of one mass parts is distributed in the water of 6-8 mass parts,
It is ultrasonically treated, adjusts pH value to 3.5~4.5；
Step 3 takes the positively charged titanium dioxide microballoon sphere 0.04g-0.40g obtained by step 1 to be added to 5ml-80ml
In absolute ethyl alcohol, pH to 6.5~7.5 is adjusted, under stirring, the graphene dispersing solution 49mg- obtained by step 2 is added
65mg adjusts pH to 5.5~6.5；It is centrifuged after stirring, obtains the ethanol water that sediment is dissolved in the 60-75% of 10ml-30ml
In, carry out hydro-thermal reaction, 175~185 DEG C of reaction temperature, 15~17h of reaction time；
Step 3 acquired solution is placed in Ar environment and calcines by step 4,395-405 DEG C of calcination temperature, calcination time 1
~3h obtains the titanium dioxide composite nanometer particle of the graphene modified with bridging structure；
Step 5 takes the titanium dioxide composite nanometer particle 4mg of the graphene modified obtained by step 4 with bridging structure
~5mg is dispersed in deionized water, forms the dispersion liquid of 8mg/ml~10mg/ml, then the 40 μ L dispersions of μ L~50 is taken to arrive
The substrate surface, 40~60 DEG C of dry 5-15min.
The preparation of titanium dioxide microballoon sphere of the present invention is not limited to specific method, can be used the prior art template,
Sol-gel method, hydro-thermal method, vapor phase method, Hydrolyze method etc..
As a preferred technical solution, in the step 1, prepares positively charged titanium dioxide microballoon sphere and use following place
Reason mode：0.3g-0.5g titanium dioxide microballoon sphere particles are dissolved in 180ml-240ml absolute ethyl alcohols, are ultrasonically treated；2ml- is added
3ml aminopropyl trimethoxysilanes, 3~5h of condensing reflux.
The step 2 as a preferred technical solution, ultrasonic power be 240~260W, ultrasonic time be 25~
35min；The clipped pretreatment of graphene oxide；The rotating speed of the step 3, centrifugation is 2500r-3000r, centrifugation time
For 5min-10min.It is fragmentated with scissor cut to the graphene oxide of bulk and (is more preferably less than 1x1mm2Fragment), can
Keep graphene sufficiently small in the solution.It is further preferred that the graphene oxide is preferably sheet single layer.
The coating method in the step 5 includes spraying, roller coating or dipping as a preferred technical solution,.
The implementation of the present invention includes following technique effect：
1, the present invention obtains titania nanoparticles using sol-gel method, the precipitation method, can prepare morphology controllable
Nanoparticle, while it also has the advantages that equipment investment is small, technological process is simple.
2, sol-gel method of the present invention, the precipitation method obtain titanium dioxide granule precursor, realize there is bridge by hydro-thermal method
The TiO of the graphene modified of binding structure2Nano particle, the graphene with bridging structure of acquisition with titanium dioxide is compound receives
Rice grain chemical property is stable, to NH3Gas-sensitive property is good, compound conductivity is high.
3, the reduction of graphene oxide of the present invention is completed at the same time with realizing that the titanium dioxide of graphene modified is compound, prepares
Step is few and technique is simpler.
4, the titanium dioxide composite nanometer particle for the graphene modified with bridging structure that the present invention obtains, titanium dioxide
Even particle distribution.
5, the gas sensitive of ammonia gas sensor of the invention is that the titanium dioxide of the graphene modified with bridging structure is multiple
Nano particle is closed, which shows to NH3The response performance better choice of gas, restorative, stability and
The performances such as lower operating temperature.
Description of the drawings
5 width of attached drawing of the present invention；
The titanium dioxide composite nanometer particle X-ray diffractogram of Fig. 1 graphene modifieds of the present invention；
The titanium dioxide composite nanometer particle Raman collection of illustrative plates of Fig. 2 graphene modifieds of the present invention；
The titanium dioxide composite nanometer particle electronic transmission microscopic appearance figure of Fig. 3 graphene modifieds of the present invention；
Fig. 4 ammonia gas sensors of the present invention are in room temperature to about 5~50ppm NH3Resistance variations response diagram；
Fig. 5 ammonia gas sensors of the present invention are in room temperature to several escaping gas and NH3Response comparison diagram.
Specific implementation mode
Following non-limiting embodiments can make those skilled in the art be more fully understood the present invention, but not with
Any mode limits the present invention.
Embodiment graphene oxide is purchased from Nanjing Xian Feng Nono-material Science & Technology Ltd., XF002-1, piece diameter 0.5--5um
Thickness 0.5--1.2nm.
Embodiment 1
Ammonia gas sensor, including gas sensitive and substrate, gas sensitive are coated uniformly on the substrate surface, gas sensitive
Ingredient includes the titanium dioxide composite nanometer particle of the graphene modified with bridging structure, and gas sensitive coating thickness is 0.4
~0.5 μm.The titanium dioxide composite nanometer particle of graphene modified with bridging structure, including graphene and titanium dioxide,
The bridging structure refers to that graphene bridges between the titanium dioxide, and the graphene accounts for the quality point of composite nanometer particle
Number is 4.7%, and preparation method includes the following steps：
Step 1 prepares titanium dioxide microballoon sphere particle：The hexadecylamine (hexadecylamine) of 5.3g is dissolved into
In 800ml absolute ethyl alcohols (ethanol), 3.2mlKCl (0.1mol/L) solution is then added, room temperature stirs in stirring in water bath device
It mixes, 17.6ml isopropyl titanates (titanium (IV) isopropoxide), stirring at normal temperature 5min is added.Obtained white dioxy
Change titanium suspension and stand 18h at normal temperatures, then collects titanium dioxide microballoon sphere particle with filter, washes of absolute alcohol two is used in combination
Titania microsphere particle is three times；In order to control the formation of microsphere particle, the range of strict temperature control is needed, temperature range is 15
DEG C -20 DEG C best, and high temperature is unfavorable for the formation of spherical structure；
Step 2, the processing of titanium dioxide microballoon sphere particle surface positive charge：Titanium dioxide microballoon sphere prepared by 0.4g step 1
Particle is dissolved in 200ml absolute ethyl alcohols, ultrasonic 30min.2ml aminopropyl trimethoxysilanes (APTMS), condensing reflux is added
4h.Then the titanium dioxide obtained by washes of absolute alcohol is used, to remove remaining APTMS completely, is collected with filter device made
Standby titanium dioxide microballoon sphere particle；
Step 3 prepares graphene dispersing solution：The graphene oxide of 8mg is distributed in 50ml deionized waters, by super
After sound machine ultrasound 1h, graphene dispersing solution is obtained；
Step 4, titanium dioxide prepared by 0.16g step 2 (APTMS-Treated TiO2) it is dissolved into the nothing of 40ml
Solution a is obtained in water-ethanol, it is 5 to measure its pH value, weakly acidic, and ammonia spirit is added, adjusts its pH to 7, obtains solution b, is surveyed
(55mg) graphene dispersing solution pH value prepared by step 3 is 5, weakly acidic, and HCl solution is added, adjusts its pH value to 4, obtains molten
Solution c down to its pH value in solution b, is adjusted is slowly 6, is slowly stirred 1h, obtains by liquid c, solution b in magnetic stirring apparatus environment
To solution d；
Step 5, solution d centrifuges prepared by step 4, centrifuge speed are obtained in 2500r-3000r
Gray precipitate things are dissolved in the absolute ethyl alcohol of 10ml and the mixed liquor of the deionized water of 5ml, obtain solution e, and solution e is put in instead
It answers and carries out hydro-thermal process in kettle, hydrothermal conditions are to keep 16h at 180 DEG C；Then 400 DEG C of calcinings in Ar environment by material
2h is prepared into the titania nanoparticles of the graphene modified with bridging structure；
Step 6, take the titania nanoparticles 4mg of the graphene modified with bridging structure that step 5 obtains~
5mg is dispersed in deionized water, is formed the dispersion liquid of 8mg/ml~10mg/ml, is taken the 40 μ L dispersions of μ L~50 to substrate
Surface obtains ammonia gas sensor after 50 DEG C of dry 10min.
Attached drawing 1 gives the titanium dioxide composite Nano of the graphene modified with bridging structure of the preparation of embodiment 1
The X-ray diffractogram of grain, prepared nano particle contain TiO2；
Attached drawing 2 is the titanium dioxide composite nanometer particle of the graphene modified with bridging structure prepared by embodiment 1
Raman collection of illustrative plates, the titanium dioxide composite nanometer particle of prepared graphene modified have the peaks D of typical reproducibility graphene
With the peaks G.
Attached drawing 3 gives the titanium dioxide composite Nano of the graphene modified with bridging structure prepared by embodiment 1
The titanium dioxide composite nanometer particle of the electronic transmission microscopic appearance figure of particle, prepared graphene modified has apparent bridge
Connect microstructure.
Embodiment 2
Ammonia gas sensor, including gas sensitive and substrate, the gas sensitive is coated uniformly on the substrate surface, described
Gas sensitive ingredient includes the titanium dioxide composite nanometer particle of the graphene modified with bridging structure, and the gas sensitive applies
It is 0.4~0.5 μm to cover thickness.The titanium dioxide composite nanometer particle of graphene modified with bridging structure, including graphene
And titanium dioxide, the bridging structure refer to that graphene bridges between the titanium dioxide, the graphene accounts for composite Nano
The mass fraction of particle is 1.9%, and preparation method includes the following steps：
Step 1 prepares titanium dioxide microballoon sphere particle：The hexadecylamine (hexadecylamine) of 5.3g is dissolved into
In 800ml absolute ethyl alcohols (ethanol), 3.2ml KCl (0.1mol/L) solution is then added, room temperature stirs in stirring in water bath device
It mixes, 17.6ml isopropyl titanates (titanium (IV) isopropoxide), stirring at normal temperature 5min is added.Obtained white dioxy
Change titanium suspension and stand 18h at normal temperatures, then collects titanium dioxide microballoon sphere particle with filter, washes of absolute alcohol two is used in combination
Titania microsphere particle is three times；
Step 2, the processing of titanium dioxide microballoon sphere particle surface positive charge：Titanium dioxide microballoon sphere prepared by 0.4g step 1
Particle is dissolved in 200ml absolute ethyl alcohols, ultrasonic 30min.2ml aminopropyl trimethoxysilanes (APTMS), condensing reflux is added
4h.Then the titanium dioxide obtained by washes of absolute alcohol is used, to remove remaining APTMS completely, is collected with filter device made
Standby titanium dioxide microballoon sphere particle；
Step 3 prepares graphene dispersing solution：The graphene oxide of 8mg is distributed in 50ml deionized waters, by super
After sound machine ultrasound 1h, graphene dispersing solution is obtained；
Titanium dioxide (APTMS-Treated TiO2) prepared by 0.4g step 2 is dissolved into the anhydrous of 60ml by step 4
Solution a is obtained in ethyl alcohol, it is 5 to measure its pH value, weakly acidic, and ammonia spirit is added, adjusts its pH to 7, obtains solution b, surveys step
Rapid three (55mg) graphene dispersing solution pH value prepared are 5, weakly acidic, and HCl solution is added, adjusts its pH value to 4, obtains solution
Solution c down to its pH value in solution b, is adjusted is slowly 6, is slowly stirred 1h, obtains by c, solution b in magnetic stirring apparatus environment
Solution d；
Step 5, solution d centrifuges prepared by step 4, centrifuge speed are obtained in 2500r-3000r
Gray precipitate things are dissolved in the absolute ethyl alcohol of 10ml and the mixed liquor of the deionized water of 5ml, obtain solution e, and solution e is put in instead
It answers and carries out hydro-thermal process in kettle, hydrothermal conditions are to keep 16h at 180 DEG C；Then 400 DEG C of calcinings in Ar environment by material
2h is prepared into the titania nanoparticles of the graphene modified with bridging structure；
Step 6, take the titania nanoparticles 4mg of the graphene modified with bridging structure that step 5 obtains~
5mg is dispersed in deionized water, is formed the dispersion liquid of 8mg/ml~10mg/ml, is taken the 40 μ L dispersions of μ L~50 to substrate
Surface obtains ammonia gas sensor after 50 DEG C of dry 10min.
Embodiment 3
A kind of novel ammonia gas sensor, including gas sensitive and substrate, the gas sensitive are coated uniformly on the substrate
Surface, the gas sensitive ingredient includes the titanium dioxide composite nanometer particle of the graphene modified with bridging structure, described
Gas sensitive coating thickness is 0.4~0.5 μm.The titanium dioxide composite nanometer particle of graphene modified with bridging structure,
Including graphene and titanium dioxide, the bridging structure refers to that graphene bridges between the titanium dioxide, the graphene
The mass fraction for accounting for composite nanometer particle is 9.0%, and preparation method includes the following steps：
Step 1 prepares titanium dioxide microballoon sphere particle：The hexadecylamine (hexadecylamine) of 5.3g is dissolved into
In 800ml absolute ethyl alcohols (ethanol), 3.2ml KCl (0.1mol/L) solution is then added, room temperature stirs in stirring in water bath device
It mixes, 17.6ml isopropyl titanates (titanium (IV) isopropoxide), stirring at normal temperature 5min is added.Obtained white dioxy
Change titanium suspension and stand 18h at normal temperatures, then collects titanium dioxide microballoon sphere particle with filter, washes of absolute alcohol two is used in combination
Titania microsphere particle is three times；
Step 2, the processing of titanium dioxide microballoon sphere particle surface positive charge：Titanium dioxide microballoon sphere prepared by 0.4g step 1
Particle is dissolved in 200ml absolute ethyl alcohols, ultrasonic 30min.2ml aminopropyl trimethoxysilanes (APTMS), condensing reflux is added
4h.Then the titanium dioxide obtained by washes of absolute alcohol is used, to remove remaining APTMS completely, is collected with filter device made
Standby titanium dioxide microballoon sphere particle；
Step 3 prepares graphene dispersing solution：The graphene oxide of 8mg is distributed in 50ml deionized waters, by super
After sound machine ultrasound 1h, graphene dispersing solution is obtained；
Titanium dioxide (APTMS-Treated TiO2) prepared by 0.08g step 2 is dissolved into the nothing of 10ml by step 4
Solution a is obtained in water-ethanol, it is 5 to measure its pH value, weakly acidic, and ammonia spirit is added, adjusts its PH to 7, obtains solution b, is surveyed
(55mg) graphene dispersing solution pH value prepared by step 3 is 5, weakly acidic, and HCl solution is added, adjusts its pH value to 4, obtains molten
Solution c down to its pH value in solution b, is adjusted is slowly 6, is slowly stirred 1h, obtains by liquid c, solution b in magnetic stirring apparatus environment
To solution d；
Step 5, solution d centrifuges prepared by step 4, centrifuge speed are obtained in 2500r-3000r
Gray precipitate things are dissolved in the absolute ethyl alcohol of 8ml and the mixed liquor of the deionized water of 4ml, obtain solution e, and solution e is put in instead
It answers and carries out hydro-thermal process in kettle, hydrothermal conditions are to keep 16h at 180 DEG C；Then 400 DEG C of calcinings in Ar environment by material
2h is prepared into the titania nanoparticles of the graphene modified with bridging structure；
Step 6, take the titania nanoparticles 4mg of the graphene modified with bridging structure that step 5 obtains~
5mg is dispersed in deionized water, is formed the dispersion liquid of 8mg/ml~10mg/ml, is taken the 40 μ L dispersions of μ L~50 to substrate
Surface obtains ammonia gas sensor after 50 DEG C of dry 10min.
4 ammonia gas sensor performance test of embodiment
Sensor prepared by embodiment 1-3 is placed under air atmosphere, operating temperature is room temperature, then introduces NH3Gas
Molecule.By multimeter measurement sensor in air and using air as the various concentration NH of background3Resistance variations under atmosphere,
Signal as sensor.It compares attached drawing by taking the ammonia gas sensor that embodiment 1 is prepared as an example to be illustrated, Fig. 4 gives institute
The sensor of preparation is in the about NH of 10~50ppm3Under atmosphere, the situation of change of sensor resistance.Sensor passes through a few minutes
(about 8min) afterwards, sensor resistance variation (i.e. inductive signal) reach the 90% of peak value.Fig. 5 gives prepared sensor
For several escaping gas such as ethyl alcohol, methanol and NH3Response comparison at room temperature, it can be found that the sensor is to NH3Sound
Should be the several times of other gases.
The present invention obtains titania nanoparticles using sol-gel method, the precipitation method, is restored by being realized in hydro-thermal method
Graphene connects TiO2Nano particle, there are two the effects of hydro-thermal process：First, it generates graphene and connects TiO as bridge2
The microstructure of nano particle；Second, graphene oxide is reduced to reproducibility graphene oxide, the hydro-thermal time is very long, can be with
Obtain higher reduction degree.It is finally calcined in Ar environment, other organic matters can be removed, and ensure C atoms not by oxygen
Oxidation.The TiO of the graphene modified with bridging structure obtained2Composite nanometer particle, as ammonia gas sensor of the present invention
Gas sensitive main component.The ammonia gas sensor coated with the gas sensitive that the present invention prepares is to NH3The response of gas
With performances such as better choice, restorative, stability and lower operating temperatures.
Finally it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than the present invention is protected
The limitation of range is protected, although being explained in detail to the present invention with reference to preferred embodiment, those skilled in the art answer
Work as understanding, technical scheme of the present invention can be modified or replaced equivalently, without departing from the reality of technical solution of the present invention
Matter and range.
Claims (8)
1. ammonia gas sensor, including gas sensitive and substrate, the gas sensitive is coated in the substrate surface, and feature exists
In the gas sensitive ingredient includes the titanium dioxide composite nanometer particle of the graphene modified with bridging structure；It is described multiple
It includes graphene and titanium dioxide to close nano particle, and the graphene bridge joint is between the titanium dioxide；The titanium dioxide
In spherical, the grain size of the titanium dioxide is 1 μm ~ 5 μm；
The preparation process of ammonia gas sensor, includes the following steps：Step 1 prepares positively charged titanium dioxide microballoon sphere：To two
The surface of titania microsphere is modified so that microsphere surface is positively charged；
Step 2 prepares graphene dispersing solution：The graphene oxide of one mass parts is distributed in the water of 6-8 mass parts, ultrasound
Processing adjusts pH value to 3.5 ~ 4.5；
Step 3 takes the positively charged titanium dioxide microballoon sphere 0.04g-0.40g obtained by step 1 to be added to 5ml-80ml anhydrous
In ethyl alcohol, pH to 6.5 ~ 7.5 is adjusted, under stirring, the graphene dispersing solution 49mg-65mg obtained by step 2 is added, adjusts
Save pH to 5.5 ~ 6.5；It is centrifuged after stirring, obtained sediment is dissolved in the ethanol water of the 60-75% of 10ml-30ml, is carried out
Hydro-thermal reaction, 175 ~ 185 DEG C of reaction temperature, 15 ~ 17h of reaction time；
Step 3 acquired solution is placed in Ar environment and calcines by step 4,395-405 DEG C of calcination temperature, and calcination time is 1 ~ 3h,
Obtain the titanium dioxide composite nanometer particle of the graphene modified with bridging structure；
Step 5 takes titanium dioxide composite nanometer particle 4mg~5mg of the graphene modified obtained by step 4 with bridging structure
It is dispersed in deionized water, forms the dispersion liquid of 8mg/ml~10mg/ml, then take the 40 μ L dispersions of μ L~50 to the base
Plate surface, 40 ~ 60 DEG C of dry 5-15min.
2. ammonia gas sensor according to claim 1, which is characterized in that the graphene accounts for the quality of composite nano materials
Score is 0.2% ~ 20%.
3. ammonia gas sensor according to claim 1, which is characterized in that the gas sensitive coating thickness be 0.4 ~
0.5mm。
4. ammonia gas sensor according to claim 1, which is characterized in that the substrate be Si substrates with Au electrodes or
Person Al2O3Substrate.
5. ammonia gas sensor according to claim 1, which is characterized in that the titanium dioxide is mono-dispersion microballoon.
6. ammonia gas sensor according to claim 1, which is characterized in that in the step 1, prepare positively charged two
Titania microsphere uses following processing mode：0.3g-0.5g titanium dioxide microballoon sphere particles are dissolved in 180ml-240ml absolute ethyl alcohols
In, it is ultrasonically treated；3 ~ 5h of 2ml-3ml aminopropyl trimethoxysilane condensing refluxes of addition.
7. ammonia gas sensor according to claim 1, which is characterized in that the step 2, ultrasonic power are 240 ~ 260W,
Ultrasonic time is 25 ~ 35min；The clipped pretreatment of graphene oxide；The rotating speed of the step 3, centrifugation is 2500r-
3000r, centrifugation time 5min-10min.
8. ammonia gas sensor according to claim 1, which is characterized in that the coating method in the step 5 includes spray
Painting, roller coating or dipping.
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| RU2732802C1 (en) * | 2019-09-26 | 2020-09-22 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" (РХТУ им. Д.И. Менделеева) | Method of producing sensitive elements based on silicon-carbon composites and making gas sensors based thereon |
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| CN109613070B (en) * | 2019-01-02 | 2021-04-20 | 大连理工大学 | Ammonia gas sensor based on two-dimensional MXene/SnO2 heterojunction, preparation process and application |
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| RU2732802C1 (en) * | 2019-09-26 | 2020-09-22 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" (РХТУ им. Д.И. Менделеева) | Method of producing sensitive elements based on silicon-carbon composites and making gas sensors based thereon |
| RU2732802C9 (en) * | 2019-09-26 | 2020-11-03 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Российский химико-технологический университет имени Д.И. Менделеева" (РХТУ им. Д.И. Менделеева) | Method of producing sensitive elements based on silicon-carbon composites and making gas sensors based thereon |
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