CN105021033A - Firing furnace - Google Patents
Firing furnace Download PDFInfo
- Publication number
- CN105021033A CN105021033A CN201410390722.2A CN201410390722A CN105021033A CN 105021033 A CN105021033 A CN 105021033A CN 201410390722 A CN201410390722 A CN 201410390722A CN 105021033 A CN105021033 A CN 105021033A
- Authority
- CN
- China
- Prior art keywords
- separator
- region
- internal channel
- heavy section
- sintering furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B21/00—Open or uncovered sintering apparatus; Other heat-treatment apparatus of like construction
- F27B21/06—Endless-strand sintering machines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
- F27B9/028—Multi-chamber type furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/10—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated by hot air or gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
- F27B2009/3623—Heaters located under the track
Abstract
The present invention provides a sintering furnace, the sintering furnace may comprise: a sintering furnace main body having an inner channel in a predetermined length from the inlet to the outlet; a conveying roller, a central portion which is installed in the inner channel and is rotated in a direction through the outlet side of the driving unit; an upper heater and a lower heater, which are respectively mounted on the upper and lower internal passage; and a partition member, which is mounted so that the inner passage having a boundary for each area. At least one spacer is formed to a thickness thicker than the thickness of the spacer other thick portion.
Description
This application claims the rights and interests of the 10-2014-0050767 korean patent application submitted in Korean Intellectual Property Office on April 28th, 2014, the open of this application is contained in this by reference.
Technical field
The disclosure relates to a kind of sintering furnace.
Background technology
When manufacturing multilayer ceramic electronic component, interior electrode and dielectric layer have different sintering temperatures in sintering process.First in low-temperature region, sinter electrode, subsequently sintered dielectric in high-temperature area in being formed by metal.
Like this, because the sintering temperature of interior electrode and dielectric layer is different from each other, so there will be due to the excess agglomeration of interior electrode in high-temperature area and the coalescent defect of the such as electrode caused.In addition, when sintering, because the shrinkage factor between interior electrode (metal) from dielectric (pottery) is different, stress is concentrated on a single point, thus causes the defect of such as vertically crackle (vertical crack).
Particularly, when using ultra-fine powder to manufacture high power capacity product, the problems referred to above become key factor.
Simultaneously, according to prior art in the sintering furnace of multilayer ceramic electronic component, multilayer ceramic electronic component is arranged on roller, multilayer ceramic electronic component moves to be had in the region of predetermined temperature, while being passed in the region in each process with design temperature, the process that multilayer ceramic electronic component experience heats up, is incubated and cools, thus complete sintering.
In this case, because the heating rate in the intensification region in sintering furnace is lower, the sintering of electrode and dielectric sintering in therefore performing in temperature province different from each other, thus have very large possibility to there will be the defect of the coalescent grade of such as electrode.But because the sintering furnace according to prior art exists restriction, the attainable maximum heating rate of sintering furnace is about 30 DEG C/min, therefore there is the problem of the defect of the coalescent grade of such as electrode.
[prior art document]
2011-0003168 Korean laid-open is open
Summary of the invention
Exemplary embodiment in the disclosure can provide a kind of sintering furnace, and this sintering furnace can make by being rapidly heated to sinter between interior electrode and dielectric simultaneously, and can prevent the defect of the coalescent grade of such as electrode.
According to the exemplary embodiment in the disclosure, a kind of sintering furnace can comprise: sintering furnace main body, and having predetermined length is internal channel from the inlet to the outlet; Transfer roller, is arranged in the core of internal channel, to be rotated along outlet side direction by driver element; Upper heater and lower heater, be arranged in the upper and lower of internal channel respectively; Separator, is installed to be and allows internal channel to have border for each region, and wherein, at least one separator is set to the large heavy section of the thickness of other separator of Thickness Ratio.
Heavy section can be set to the thickness with 50mm to 180mm, the region being provided with heavy section in internal channel can provide the region that is rapidly heated, the region that is rapidly heated from the region before separator to separator after the heating rate in region be provided with the heating rate in the region of other separator than internal channel large.
According to the exemplary embodiment in the disclosure, a kind of sintering furnace can comprise: sintering furnace main body, and having predetermined length is internal channel from the inlet to the outlet; Transfer roller, is arranged in the core of internal channel, to be rotated along outlet side direction by driver element; Upper heater and lower heater, be arranged in the upper and lower of internal channel respectively; And separator, be installed to be and make internal channel have border for each region, wherein, there is the region of at least one separator in internal channel for the region that is rapidly heated, the region that is rapidly heated from the region before separator to separator after the heating rate in region have the heating rate in the region of other separator than internal channel large.
Accompanying drawing explanation
By the detailed description of carrying out below in conjunction with accompanying drawing, above-mentioned and other side, other advantage of characteristic sum of the present disclosure will be more clearly understood, in the accompanying drawings:
Fig. 1 is the sectional view of the structure of the sintering furnace illustrated according to exemplary embodiment of the present disclosure;
Fig. 2 is the sectional view of the schematic structure of the sintering furnace illustrated according to another exemplary embodiment of the present disclosure;
Fig. 3 is the curve map of heating rate to illustrate according to the thickness at heavy section of exemplary embodiment of the present disclosure be 50mm;
Fig. 4 is the curve map of heating rate to illustrate according to the thickness at heavy section of exemplary embodiment of the present disclosure be 180mm; And
Fig. 5 is the curve map of heating rate to illustrate according to the thickness at heavy section of exemplary embodiment of the present disclosure be 200mm.
Detailed description of the invention
Hereinafter, embodiment of the present disclosure is described with reference to the accompanying drawings in detail.But the disclosure can embody in many different forms, and should not be construed as limited to embodiment set forth herein.On the contrary, provide these embodiments to make the disclosure to be thoroughly with complete, and the scope of the present disclosure will be conveyed to those skilled in the art fully.In the accompanying drawings, for clarity, the shape and size of element can be exaggerated, and will identical Reference numeral be used all the time to represent same or analogous element.
sintering furnace
Fig. 1 is the sectional view of the structure of the sintering furnace illustrated according to exemplary embodiment of the present disclosure.
With reference to Fig. 1, the sintering furnace according to exemplary embodiment of the present disclosure can comprise: sintering furnace main body 110, and having predetermined length is internal channel 120 from the inlet to the outlet; Transfer roller 130, is arranged in the core of internal channel 120, to be rotated along outlet side direction by driver element; Upper heater 150 and lower heater 160, be arranged in the upper and lower of internal channel 120 respectively; Separator 210 and 220, is installed to be and makes internal channel 120 have border for each region.
In addition, the sintering furnace according to exemplary embodiment of the present disclosure can comprise: pallet 140, is placed on transfer roller 130 to perform at a predetermined velocity towards the motion of outlet side; Gas supply unit 170, environmental gas is supplied with the inside of inward channel 120 in the side be set to through the bottom of sintering furnace main body 110; Gas vent unit 180, is set to the opposite side on the top through sintering furnace main body 110, is discharged into outside to allow the environmental gas being fed to internal channel 120 by gas supply unit 170.
Under the state of the product mounting that will be sintered on pallet 140, when pallet 140 is transmitted to outlet side by transfer roller, the product that will be sintered can by being arranged on the heat of upper heater 150 in the upper and lower of transfer roller 130 and the supply of lower heater 160 and being sintered by the environmental gas that the gas supply unit 170 of the bottom being installed to penetrate sintering furnace main body 110 is supplied respectively.
The environmental gas being fed to the inside of internal channel 120 by gas supply unit 170 can be discharged into the outside of sintering furnace main body 110 by the gas vent unit 180 being fixedly mounted in the opposite side on the top of sintering furnace main body 110.
In this case, while pallet 140 is moved along outlet side direction by transfer roller 130, being placed in the product that will be sintered on pallet 140 can the region with different temperatures and environmental condition in sintering furnace, thus experience warming temperature, insulation operation and cooling down operation.
In order to the flowing of environmental gas in the regional by controlling internal channel 120 or heat exchange differently control internal temperature and environmental condition for each region, multiple separator 210 and 220 vertically and in rows can be installed.
When the product that will be sintered is sent to the operation with different internal temperature or environmental condition, separator 210 and 220 can be used as separator, and the product preventing from the air in the internal channel formerly operated to be sent to will being sintered is by the internal channel of the operation after transmitting.
Separator 210 and 220 is not particularly limited, as long as they can control flowing or the heat exchange of the environmental gas of regional.Such as, separator 210 and 220 can be made up of Zirconia-alumina composite.
The lower separator 220 that separator can comprise the upper separator 210 in the top being arranged on internal channel 120 and be arranged in the bottom of internal channel 120.
Upper separator 210 and lower separator 220 can be installed to be the preset distance that is spaced apart from each other.
Pallet 140 by transfer roller 130 along on space between separator 210 and lower separator 220 move time, the product that will be sintered be placed on pallet 140 can be transmitted.
Fig. 2 is the sectional view of the schematic structure of the sintering furnace illustrated according to another exemplary embodiment of the present disclosure.
With reference to Fig. 2, when the interval between upper separator 210 and lower separator 220 is defined as Dw, according to exemplary embodiment of the present disclosure, upper separator 210 and lower separator 220 can be provided so that Dw is 30mm or less.
Because the interval D w between upper separator 210 and lower separator 220 is formed 30mm or less, temperature and the environmental gas in each region therefore more effectively can be controlled.
Due to while the temperature controlling each region and environmental gas, need to guarantee the space being made pallet 140 movement by transfer roller 130, the scope therefore going up the interval D w between separator 210 and lower separator 220 can be 20mm to 30mm.
When the product that will be sintered is sintered by sintering furnace, the region corresponding with warming temperature can apply the temperature higher than the temperature in the region formerly operated, to improve internal temperature.
In this case, raised temperature is carried out before and after included in warming temperature region separator.Here, when heating rate is lower, in can performing in temperature province different from each other, may there is the defect of the coalescent grade of such as electrode in the sintering of electrode and dielectric sintering like this.
Therefore, according to exemplary embodiment of the present disclosure, the separator be included in warming temperature region in separator is set to the large heavy section 250 of the thickness of other separator 210 and 220 of Thickness Ratio.
Realize being rapidly heated region Y in the region that can be provided with heavy section 250 wherein, and the region of other separator 210 with 220 is wherein installed compares, the region Y that is rapidly heated from the region before separator to separator after region there is large heating rate.
Such as, according to exemplary embodiment of the present disclosure, the heavy section 250 that thickness setting is larger than the thickness of other separator 210 and 220, makes it possible to achieve and is rapidly heated and can sinters interior electrode and dielectric simultaneously.Therefore, the defects such as such as electrode is coalescent can be prevented.
Similar with 220 to other separator 210, heavy section 250 can be made up of Zirconia-alumina composite.
Heavy section 250 can comprise at least one pair of upper heavy section 251 respect to one another and lower heavy section 252.
Be included in respect to one another upper separator in warming temperature region and lower separator is all set to thicker than other separator 210 and 220, thus form heavy section 251 and lower heavy section 252 on a pair respect to one another.
By arranging heavy section 251 and lower heavy section 252 on a pair respect to one another, can more effectively realize being rapidly heated.
The thickness of heavy section 250 can be 50mm or larger.
Thickness setting is the heavy section 250 of 50mm or larger, thus improves heating rate, can realize the region that is rapidly heated thus.Therefore, interior electrode and dielectric can be sintered simultaneously and coalescent etc. the defect of such as electrode can be prevented.
Fig. 3 is the curve map of heating rate to illustrate according to the thickness at heavy section of exemplary embodiment of the present disclosure be 50mm.
With reference to Fig. 3, thickness is the design temperature that the region before the heavy section I of 50mm can have 700 DEG C, and the region after heavy section I can have the design temperature of 1200 DEG C.
Before and after heavy section I, temperature can raise.In the context of fig. 3, from the point between an A and some B, temperature can raise.
While passing through heavy section I, temperature can raise constantly, and is in the region after heavy section I at the point by some D, and temperature can reach the design temperature of 1200 DEG C, can terminate thus to heat up.
In this case, the heating rate recorded can be about 350 DEG C/min.
Fig. 4 is the curve map of heating rate to illustrate according to the thickness at heavy section of exemplary embodiment of the present disclosure be 180mm.
Thickness with reference to Fig. 4, heavy section II is 180mm.Similar to Fig. 3, the region before heavy section II can have the design temperature of 700 DEG C, and the region after heavy section II can have the design temperature of 1200 DEG C.
Before and after heavy section II, temperature can raise.In the case of figure 4, from the some B passed through after some A, temperature can raise.
Similar to Fig. 3, can raise constantly at the simultaneous temperature by heavy section II, and be in the region after heavy section II at the point by some D, temperature can reach the design temperature of 1200 DEG C, can terminate thus to heat up.
Compared with the heavy section I being 50mm with thickness, when thickness is the heavy section II of 180mm, owing to heating up from the point close to heavy section and terminating to heat up at the point identical with heavy section I, therefore, when thickness is the thicker heavy section II of 180mm, heating rate can be improved further.
When thickness is the heavy section II of 180mm, the heating rate recorded can be about 500 DEG C/min.
Fig. 5 is the curve map of heating rate to illustrate according to the thickness at heavy section of exemplary embodiment of the present disclosure be 200mm.
Thickness with reference to Fig. 5, heavy section III is 200mm.Similar to Fig. 3, the region before heavy section III can have the design temperature of 700 DEG C, and the region after heavy section III can have the design temperature of 1200 DEG C.
In the case of fig. 5, similar to Fig. 3 with Fig. 4, temperature can reach the design temperature of 1200 DEG C in the some region be in after heavy section III by some D, can terminate thus to heat up.
But temperature can reduce from the some B before heavy section III, even can reduce in the region by heavy section III.
In this case, when measuring the heating rate before and after heavy section III, heating rate seems to improve, but is not suitable for sintering, because at the some B before heavy section III by during heavy section III, temperature declines.
Such as, can be 50mm to 180mm according to the thickness of the heavy section 250 of exemplary embodiment of the present disclosure.
When the thickness of heavy section 250 is less than 50mm, heating rate is lower, thus in performing in temperature province different from each other when the sintering of electrode and dielectric sintering, the defect of the coalescent grade of such as electrode may be there is, when the thickness of heavy section 250 is greater than 180mm, cause there will be temperature lowering zone because heavy section is blocked up.
A pair upper heavy section 251 respect to one another and lower heavy section 252 can have the thickness of 50mm or larger respectively, and upper heavy section 251 and lower heavy section 252 can have the thickness of 50mm to 180mm respectively.
The region Y that is rapidly heated wherein being provided with heavy section 250 can have the heating rate of 350 DEG C/min or larger.
When heating rate is raised to 350 DEG C/min or higher, interior electrode and dielectric can be sintered simultaneously, and can prevent the appearance of the defect of the coalescent grade of such as electrode.
Table 1 below comprises the result obtained by observing interior electrode connective according to the raising of heating rate.
According to the heating rate of the product that will be sintered for each size, in observing, electrode is connective, and the improvement level of interior electrode connectedness when to show based on heating rate be 30 DEG C/min.
[table 1]
As the result of observing according to electrode connectedness in heating rate, when heating rate is lower, the connective deterioration of electrode, when heating rate is raised to 350 DEG C/min or higher, electrode connectedness improves about 2.0% to about 5.0%.
According to exemplary embodiment of the present disclosure, by being rapidly heated and easily controlling the atmospheric condition for each region, sinter while facilitating between interior electrode and dielectric, thus the generation of the defect such as such as electrode can be prevented coalescent.
Although illustrate and describe exemplary embodiment above, it will be apparent to one skilled in the art that when not departing from the spirit and scope of the present disclosure limited by claim, can modifications and variations be made.
Claims (18)
1. a sintering furnace, described sintering furnace comprises:
Sintering furnace main body, having predetermined length is internal channel from the inlet to the outlet;
Transfer roller, is arranged in the core of internal channel, to be rotated along outlet side direction by driver element;
Upper heater and lower heater, be arranged in the upper and lower of internal channel respectively; And
Separator, is installed to be and makes internal channel have border for each region,
Wherein, at least one separator is set to the thick heavy section of the thickness of other separator of Thickness Ratio.
2. sintering furnace according to claim 1, wherein, the thickness of heavy section is 50mm or larger.
3. sintering furnace according to claim 1, wherein, the thickness of heavy section is 50mm to 180mm.
4. sintering furnace according to claim 1, wherein, separator comprises the upper separator be arranged in the top of internal channel and the lower separator be arranged in the bottom of internal channel.
5. sintering furnace according to claim 4, wherein, upper separator and lower separator are installed to be the distance of the 30mm or less that is spaced apart from each other.
6. sintering furnace according to claim 1, wherein, heavy section comprises at least one pair of upper heavy section respect to one another and lower heavy section.
7. sintering furnace according to claim 6, wherein, upper heavy section and lower heavy section have the thickness of 50mm or larger all respectively.
8. sintering furnace according to claim 1, wherein, the region in internal channel with heavy section provides the region that is rapidly heated, the region that is rapidly heated from the region before separator to separator after the heating rate in region larger than the heating rate in the region internal channel with other separator.
9. sintering furnace according to claim 8, wherein, the heating rate in the region that is rapidly heated is 350 DEG C/min or higher.
10. sintering furnace according to claim 1, wherein, separator makes the temperature of the regional of internal channel and environmental condition differently be controlled.
11. sintering furnaces according to claim 1, wherein, separator is made up of Zirconia-alumina composite.
12. 1 kinds of sintering furnaces, described sintering furnace comprises:
Sintering furnace main body, having predetermined length is internal channel from the inlet to the outlet;
Transfer roller, is arranged in the core of internal channel, to be rotated along outlet side direction by driver element;
Upper heater and lower heater, be arranged in the upper and lower of internal channel respectively; And
Separator, is installed to be and makes internal channel have border for each region,
Wherein, there is the region of at least one separator in internal channel for the region that is rapidly heated, the region that is rapidly heated from the region before separator to separator after the heating rate in region have the heating rate in the region of other separator than internal channel large.
13. sintering furnaces according to claim 12, wherein, the heating rate in the region that is rapidly heated is 350 DEG C/min or higher.
14. sintering furnaces according to claim 12, wherein, the thickness being arranged on the separator be rapidly heated in region is 50mm to 180mm.
15. sintering furnaces according to claim 12, wherein, separator comprises the upper separator be arranged in the top of internal channel and the lower separator be arranged in the bottom of internal channel.
16. sintering furnaces according to claim 15, wherein, upper separator and lower separator are installed to be the distance of the 30mm or less that is spaced apart from each other.
17. sintering furnaces according to claim 12, wherein, the region that is rapidly heated comprises at least one pair of upper heavy section respect to one another and lower heavy section, and upper heavy section and lower heavy section have the thickness of 50mm or larger all respectively.
18. sintering furnaces according to claim 12, wherein, separator is made up of Zirconia-alumina composite.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020140050767A KR20150124207A (en) | 2014-04-28 | 2014-04-28 | Firing furnace |
| KR10-2014-0050767 | 2014-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105021033A true CN105021033A (en) | 2015-11-04 |
Family
ID=54411190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410390722.2A Pending CN105021033A (en) | 2014-04-28 | 2014-08-08 | Firing furnace |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2015210072A (en) |
| KR (1) | KR20150124207A (en) |
| CN (1) | CN105021033A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105371658A (en) * | 2015-12-16 | 2016-03-02 | 广东昭信照明科技有限公司 | Ceramic sintering furnace |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7110127B2 (en) * | 2019-01-16 | 2022-08-01 | 日本碍子株式会社 | heat treatment furnace |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1886629A (en) * | 2003-11-26 | 2006-12-27 | 松下电器产业株式会社 | Multi-stage baking apparatus for plasma display panel |
| CN101256051A (en) * | 2007-03-01 | 2008-09-03 | 松下电器产业株式会社 | Heat treatment device |
| KR20110068077A (en) * | 2009-12-15 | 2011-06-22 | 주식회사 원준 | Burning apparatus |
| CN102393139A (en) * | 2011-11-16 | 2012-03-28 | 杨桂玲 | Roller way type solar battery silicon wafer sintering furnace |
| CN102689008A (en) * | 2011-03-23 | 2012-09-26 | 杰富意钢铁株式会社 | Method of finish heat treatment of iron powder and apparatus for finish heat treatment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003322471A (en) * | 2002-04-26 | 2003-11-14 | Murata Mfg Co Ltd | Continuous type heat treatment furnace |
-
2014
- 2014-04-28 KR KR1020140050767A patent/KR20150124207A/en not_active Application Discontinuation
- 2014-07-23 JP JP2014149593A patent/JP2015210072A/en active Pending
- 2014-08-08 CN CN201410390722.2A patent/CN105021033A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1886629A (en) * | 2003-11-26 | 2006-12-27 | 松下电器产业株式会社 | Multi-stage baking apparatus for plasma display panel |
| CN101256051A (en) * | 2007-03-01 | 2008-09-03 | 松下电器产业株式会社 | Heat treatment device |
| KR20110068077A (en) * | 2009-12-15 | 2011-06-22 | 주식회사 원준 | Burning apparatus |
| CN102689008A (en) * | 2011-03-23 | 2012-09-26 | 杰富意钢铁株式会社 | Method of finish heat treatment of iron powder and apparatus for finish heat treatment |
| CN102393139A (en) * | 2011-11-16 | 2012-03-28 | 杨桂玲 | Roller way type solar battery silicon wafer sintering furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105371658A (en) * | 2015-12-16 | 2016-03-02 | 广东昭信照明科技有限公司 | Ceramic sintering furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015210072A (en) | 2015-11-24 |
| KR20150124207A (en) | 2015-11-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6055443B2 (en) | Graphitization furnace and method for producing graphite | |
| US9139438B2 (en) | Graphitization furnace and method for producing graphite | |
| US20150230293A1 (en) | System for insulating an induction vacuum furnace and method of making same | |
| JP6186039B2 (en) | Heat treatment furnace and heat treatment method | |
| CN102896391B (en) | A kind of chain type vacuum furnace | |
| CN106066627A (en) | A kind of safety glass production control system | |
| CN202099324U (en) | Three-section continuous vacuum annealing furnace | |
| CN105021033A (en) | Firing furnace | |
| CN105466209A (en) | Heat-insulated efficient energy-saving bottom discharge vertical vacuum calcination annealing furnace for zirconia fiber boards | |
| KR101993209B1 (en) | Heat treatment kiln for fabricating cathode active material | |
| JP2010159463A (en) | In-line type plasma cvd method, and apparatus thereof | |
| CN204356218U (en) | Muffle furnace field control device | |
| CN104529180A (en) | Electrothermal film board production method and device | |
| CN204678904U (en) | resistance furnace | |
| JP4587022B2 (en) | Continuous firing furnace and continuous firing method | |
| CN203999731U (en) | A kind of energy-saving metal silk heating gas stove | |
| CN202804411U (en) | Chain type vacuum furnace | |
| KR101358358B1 (en) | Degreasing sintering furnace | |
| KR102558921B1 (en) | Heat treatment apparatus and control method thereof | |
| CN108981381A (en) | A kind of solid particle sintering furnace | |
| CN204388552U (en) | A kind of horizontal hot roasting kiln | |
| KR101368356B1 (en) | REHEATING APPARATUS OF Slab | |
| CN105783528A (en) | Heating element structure for glue discharging and sintering combined furnace for sintering electronic elements | |
| CN203928694U (en) | Horizontal rotary furnace | |
| US20210254894A1 (en) | Heating furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151104 |
|
| WD01 | Invention patent application deemed withdrawn after publication |