CN104910406A - Method for improving water vapor barrier property of polymer film by virtue of surface crosslinking - Google Patents
Method for improving water vapor barrier property of polymer film by virtue of surface crosslinking Download PDFInfo
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Abstract
The invention discloses a method for improving water vapor barrier property of a polymer film by virtue of surface crosslinking. The polymer surface is bombarded by using hydrogen molecules with energy under vacuum conditions, a crosslinking reaction on the surface of the polymer is initiated, and the polymer of which the surface is provided with water vapor barrier property is obtained. The polymer surface is bombarded by virtue of the high-energy neutral hydrogen molecules, the crosslinking reaction on the polymer surface is initiated, and a surface crosslinking layer which is firmly bound and is dense is formed, so that the polymer has good water vapor barrier property. The most important is that the method disclosed by the invention is mild in reaction conditions, the condition that the polymer molecules are degraded and damaged in the process of crosslinking the polymer surface is avoided, the water vapor barrier property of the film can be effectively improved, and the original physical properties of the polymer film are remained.
Description
Technical field
The present invention relates to a kind of method by surface-crosslinked raising polymeric film water vapor rejection performance.
Background technology
Intercept steam in air to anti-corrosion of metal, electronic devices and components protection, food fresh keeping and historical relic's protection important in inhibiting.Polymer barrier protecting materials has that snappiness is good, cost is low, be easy to the features such as processing, is widely used in isolation moisture.But relative to inorganic barrier material, polymer barrier material causes water vapor rejection performance not enough because it has low chain tap density and degree of crystallinity.
Current, the methods such as vacuum vapor deposition inorganic coating, interpolation inorganic laminar filler, crosslinking reaction are used to the water vapor rejection performance improving polymkeric substance, and its cardinal principle builds dense structure, hinders the diffusion of steam in the molecular gap of polymeric film.Wherein, the inorganic coating (as titanium dioxide Silicified breccias) of deposition compact not only starting material is expensive and preparation process is complicated, relate to high temperature, multiple deposition steps, and obtained barrier coat easily breaks layering, cause barrier layer inefficacy (Journal of Applied Physics 2009,106,5331-5336).The matrix material that the sheet material (clay and Graphene) dosing low-permeability is in the polymer formed can improve water vapor rejection performance (Carbohydrate Polymers 2011,86,691-699), but, because nano-filled thing is easily reunited in the polymer, often cause actual preparation processing difficulties.Crosslinking reaction can reduce the free volume of polymkeric substance to intercept steam, usually needs in polymeric film preparation process, add overall being cross-linked of linking agent atarting material and realize intercepting, but overall being cross-linked can make material embrittlement, and application system is limited.Therefore, urgent need wants aftertreatment, surface-treated mode realizes being cross-linked, thus reserved materials original mechanical property expanded application scope.Although and utilize the post-treating method such as plasma, ultraviolet lighting can cause surface-crosslinked reaction (Journal of food science2012,77,15-23 at present; Journal of Materials Chemistry 2012,22,4881-4889), but destroy film simultaneously, introduce defect, the water vapor rejection performance of film cannot be improved.
Summary of the invention
The object of the invention is to overcome in prior art the method poor stability improving polymeric film barrier property or the problem bringing new destruction, a kind of surface cross-linking process of gentleness is provided, improves the barrier property of polymeric film.
In order to realize foregoing invention object, the invention provides following technical scheme:
By a method for surface-crosslinked raising polymeric film water vapor rejection performance, under vacuum, with the hydrogen molecule of band energy, polymer surfaces is bombarded, the surface-crosslinked reaction of initiated polymerization thing, obtain the polymkeric substance that surface has water vapor rejection performance.
The neutral hydrogen molecule of band energy is used to bombard polymer surfaces in the present invention, and then initiated polymerization.All contain a large amount of neutral key in polymer molecule, produce free radical by the bombardment destruction part of neutral hydrogen molecule, free radical forms new crosslinked bonding again, polymer surfaces is cross-linked and more closely realizes strengthening the object intercepting steam performance.Described vacuum condition is the actual vacuum tightness that can reach of existing science and technology, does not refer to perfect vacuum.Controlling vacuum condition mainly protects hydrogen molecule to carry out reducing interference in bombardment process, and improves the efficiency that bombardment generates radical crosslinking.Hydrogen molecule particularly with certain energy carries out bombardment reaction, causes crosslinked action.
Further, the polymkeric substance of described polymkeric substance mainly containing C-H bond.All contain a large amount of C-H bond in polymer molecule, destroy part C-H bond by the bombardment of neutral hydrogen molecule and produce free radical, free radical forms new crosslinked bonding again, polymer surfaces is cross-linked and more closely realizes strengthening the object intercepting steam performance.Cross-link bond mainly carbon-carbon bond, the C-H bond utilizing hydrogen molecule bombardment C-H bond to be formed, has good stability, the feature similar with main chain structure structure, little on the physico-chemical property impact of polymkeric substance itself.Preferably, described polymkeric substance is Parylene C.
Further, the hydrogen molecule of described band energy to be collided the hydrogen molecule of the kinetic energy obtained by band energy protons and hydrogen.Preferably, described hydrogen molecule energy is 10-30eV.Proton is the core after hydrogen atom loses electronics, is easily filled energy by electric field acceleration, utilizes high energy proton and hydrogen molecule to collide, and make hydrogen molecule obtain energy, and isolated proton can combine the neutral hydrogen molecule of generation between two after energy reduces.Can not be produced other when obtaining the hydrogen molecule of kinetic energy and have dysgenic deleterious molecular/atom to crosslinked.
Further, the time span using the bombardment of neutral hydrogen molecule is 30 seconds to 20 minutes.The process using neutral hydrogen molecule to bombard is the process of the fracture restructuring of polymer surfaces C-H bond, the fracture of the C-H bond on bombardment for some time post-consumer polymer surface and crosslinked reach balance, continue to increase bombardment time and can not strengthen crosslinked intensity, backbone in polymer molecule may be destroyed on the contrary, polymer surfaces fragility is increased.Binding tests is analyzed, and neutral hydrogen molecule bombardment time is less than 30 seconds and may be cross-linked deficiency or can not be effectively crosslinked, the time more than 20 minutes after bombard and no longer increase degree of crosslinking, do not promote the effect intercepting steam, the fragility that also may have influence on polymkeric substance in addition increases.
Further, the surface-crosslinked thickness of polymkeric substance is 5-60nm.For the crosslinking degree on surface of mainly polymkeric substance improving polymer water vapour locking separating performance, the high energy hydrogen molecule blast technique that the present invention adopts is exactly the crosslinked control carried out for the hydrocarbon chemical bond of polymer surfaces.The energy of adjustment hydrogen molecule can increase the degree of depth of bombardment, improve deeper crosslinked, but for the water vapor rejection performance of polymkeric substance, inner crosslinked enhancing is more increase the hard fragility in its surface and water vapor rejection performance for entirety might not have outstanding enhancement, consider the lifting of crosslinked cost and water vapor rejection performance, it is 5-60nm that control surface is cross-linked thickness.
Further, polymkeric substance is in advance through clean.The impurity that cleaning removing polymer surfaces adheres to, increases the efficiency that hydrogen molecule directly bombards polymer surfaces.Preferably, the organic solvent such as acetone, ethanol is adopted to rinse polymkeric substance.Use acetone or alcohol etc. to rinse the surface of polymkeric substance, acetone and ethanol have more weak solvability to polymkeric substance, rinse the impurity component effectively can removing molecular weight, and do not produce destruction for the agent structure of polymkeric substance.One or more solvents can be used in flushing process to rinse.
Further, described polymkeric substance is polymeric film.Described film refers to the polymkeric substance of the form making film, does not refer in particular to the polymeric film of a certain concrete thickness.Polymeric film being needed to intercept the situation of steam when being used for various preservation and antisepsis etc., using surface cross-linking process of the present invention when not changing the thickness of film, the water vapor rejection performance of polymeric film can be promoted greatly.
Further, the hydrogen molecule using superthermal hydrogen system to generate kinetic energy bombards polymkeric substance, realizes the crosslinking Treatment of polymer surfaces.
Compared with prior art, beneficial effect of the present invention:
1. the hydrogen molecule collision polymer surfaces of the present invention's kinetic energy, the C-H bond selectivity fracture of polymer surfaces molecule can be realized, form carbon radicals, carbon radicals is coupled crosslinked further simultaneously, formed in conjunction with firm, fine and close surface graft layer, and the surface graft layer opposing body formed has higher water vapor rejection ability.And usually can peel off inefficacy because of the problem of bonding force difference at the inorganic coating of polymer surfaces deposition.
2. adopt kinetic energy controlled neutral hydrogen collision polymer surfaces can selectivity fracture C-H bond, and other bond ruptures (as carbon-carbon bond) can not be caused, the method reaction conditions is gentle, polymer molecule can not be caused in the process on cross-linked polymer surface to degrade destroy, effectively can retain the original physical properties of polymeric film (as physical strength, transmittance).
Accompanying drawing illustrates:
Fig. 1 is a kind of device schematic diagram that the present invention generates the hydrogen molecule with kinetic energy.
Mark in figure: 1-hydrogen plasma, 2-first electric field, 3-collision cell, 4-second electric field, 5-sample.
Embodiment
Implement the inventive method concrete scheme:
By a method for surface-crosslinked raising polymeric film water vapor rejection performance, its feature comprises the following steps: (1) uses acetone, alcohol flushing polymeric film surface; (2) polymeric film after flushing is put into plasma chamber, vacuumize; (3) in cavity, hydrogen is passed into, hydrogen plasma is inspired by microwave device, hydrogen under the effect of electric field in plasma body and cavity collides, the neutral hydrogen molecule bombardment polymer surfaces of the certain kinetic energy of generating strap, the surface-crosslinked reaction of initiated polymerization thing, obtains the polymeric film with certain water vapor rejection performance.
In hydrogen plasma, proton passes through electric field acceleration, the hydrogen had in the plasma body of kinetic energy and cavity collides, produce high energy neutral hydrogen molecule and bombard polymer surfaces, the surface-crosslinked reaction of initiated polymerization thing, formed in conjunction with firm, fine and close surface graft layer, the new surface graft layer opposing body formed has higher water vapor rejection ability.The method reaction conditions is gentle, polymer molecule can not be caused in the process on cross-linked polymer surface to degrade destroy, effectively can improve the water vapor rejection ability of film, retain the original physical properties of polymeric film (as physical strength, transmittance) simultaneously.
Further, with rare gas element, polymkeric substance is dried up after step (1) is rinsed.As used nitrogen, polymer surfaces is dried up.
Further, it is 0 ~ 10Pa that step (2) vacuumizes post plasma cavity internal gas pressure, and vacuumizing can exhausted air fast, follow-up neutral hydrogen molecule is bombarded and provides good envrionment conditions.Because perfect vacuum cannot reach, it will be appreciated by those skilled in the art that the above air pressure vacuumized in rear chamber can not be zero, but can infinite approach perfect vacuum 0Pa when technology allows.Be preferably 1 × 10
-4~ 2 × 10
-1pa, according to the restriction vacuum tightness that preferably above air pressure is corresponding of prior art, realizes good balance between tooling cost and processing quality.
Further, negative potential is placed at distance 5 ~ 10cm place, plasma discharge region, the effect of electrode is that accelerate plasma makes it have certain kinetic energy, polymer surfaces can be bombarded and produce new free radical, electrode also can be called as accelerating electrode, corresponding pressurization is called acceleration voltage, and the voltage range of electrode is 80 ~ 250V.Preferred voltage is 100-250V.
Further, processed polymer thin membrane sample is from plasma discharge offset from being 40-70cm, and above film sample, 10 ~ 20cm place is placed with positive and negative two battery lead plates respectively.
As shown in Figure 1, the plasma body 1 that microwave device excites obtains a large amount of kinetic energy to the principle schematic of superthermal hydrogen processing sample under the booster action of the first electric field 2, then enters collision cell 3 and neutral hydrogen molecular impact wherein, makes hydrogen molecule have a large amount of kinetic energy.Then gone to pole from collision cell 3 plasma out by the second electric field 4, only retain neutral hydrogen molecule and pass through from gap.The hydrogen molecule with kinetic energy, by after the second electric field 4, bombards on sample 5, makes the carbon-carbon bond of sample surfaces, C-H bond etc. break to form free radical, and then realizes the crosslinking reaction of polymer surfaces.
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1
Poly monochloro-para-xylylene (thickness 100 μm) is fixed in the sample table of superthermal hydrogen system (CN 102414359 A), processed polymer thin membrane sample is from plasma discharge offset from being 50cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump evacuation, then 14SCCM (standard milliliters/minute) hydrogen is passed into, and open microwave plasma, open accelerating power source and repel power supply, acceleration voltage is 100V, bombarding the film sample time with hydrogen is 1min, obtains the polymeric film that modification improves surface water vapour locking separating performance.
Embodiment 2
Practicality is fixed in the sample table of superthermal hydrogen system with identical poly monochloro-para-xylylene in embodiment 1, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 1min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 3
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 45cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, and acceleration voltage is 100V, is 1min, obtains the film that surface water vapour locking separating performance strengthens with the hydrogen bombardment film sample time.
Embodiment 4
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 1min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 5
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump evacuation, then pass into 14SCCM hydrogen, and open microwave plasma, open accelerating power source and repel power supply, acceleration voltage is 100V, is 1min with the hydrogen bombardment film sample time, obtains the polymeric film that modification improves surface water vapour locking separating performance.
Embodiment 6
Practicality is fixed in the sample table of superthermal hydrogen system with identical poly monochloro-para-xylylene in embodiment 1, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 3min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 7
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 5min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 8
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 10min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 9
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 15min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 10
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 20min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 11
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 100V, with hydrogen bombardment the film sample time be 25min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 12
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 150V, with hydrogen bombardment the film sample time be 1min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 13
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 150V, with hydrogen bombardment the film sample time be 20min, obtain surface water vapour locking separating performance strengthen film.
Embodiment 14
Poly monochloro-para-xylylene (thickness 100 μm) is put into the container ultrasonic cleaning 15min containing acetone, ethanol successively, dries up with nitrogen.Be fixed on by film in the sample table of superthermal hydrogen system, processed polymer thin membrane sample is from plasma discharge offset from being 60cm, and above film sample, 10-20cm place is placed with positive and negative two repulsion battery lead plates respectively.Open vacuum pump, make vacuum tightness in cavity reach 6 × 10
-4during Pa, pass into 14SCCM hydrogen successively, and open microwave plasma, open accelerating power source and repel power supply, wherein microwave power is 300W, acceleration voltage be 150V, with hydrogen bombardment the film sample time be 25min, obtain surface water vapour locking separating performance strengthen film.
Comparative example 1
Are acceleration voltages with the difference of embodiment 14 be 200V, bombard the film sample time with hydrogen be 1min, all the other experiment conditions are all consistent.
Comparative example 2
Are acceleration voltages with the difference of embodiment 14 be 200V, bombard the film sample time with hydrogen be 20min, all the other experiment conditions are all consistent.
Comparative example 3
Are acceleration voltages with the difference of embodiment 14 be 200V, bombard the film sample time with hydrogen be 25min, all the other experiment conditions are all consistent.
Comparative example 4
Are acceleration voltages with the difference of embodiment 14 be 250V, bombard the film sample time with hydrogen be 1min, all the other experiment conditions are all consistent.
Comparative example 5
Are acceleration voltages with the difference of embodiment 14 be 250V, bombard the film sample time with hydrogen be 20min, all the other experiment conditions are all consistent.
Comparative example 6
Are acceleration voltages with the difference of embodiment 14 be 250V, bombard the film sample time with hydrogen be 25min, all the other experiment conditions are all consistent.
Performance evaluation
In order to test the water vapor rejection performance of sample, all original poly monochloro-para-xylylenes (thickness 100 μm) sample and through embodiment 1-14 crosslinking Treatment rear film water vapour permeability, transmittance and tensile strength test, the concrete test result of properties of sample is as shown in the table.
Test result after table 1 film crosslinking Treatment
From upper table embodiment 1-5, for surface modification, not there is absolute impact when whether polymeric film surface cleans.Though the time length of high energy hydrogen molecule bombardment has a great impact for the characteristic tool of polymer surfaces, being that bombardment time is too short or long all can produce larger impact to the surface property of polymeric film.When high energy hydrogen molecule bombardment time is too short, the molecule of polymer surfaces is not effectively cross-linked to form dense structure, cannot effectively strengthen water vapor rejection performance; When bombardment time is long, crosslinked enhancement is lower than bombardment destruction, and a large amount of destruction is suffered on result aggregator thing surface on the contrary, and surface water vapour locking separating performance is declined.Impact in addition about acceleration voltage is also similar to bombardment time, if brownout, bombardment is difficult to effectively destroy C-H bond, cannot form free radical, also just cannot produce new crosslinked bonding action.
Claims (9)
1. by a method for surface-crosslinked raising polymeric film water vapor rejection performance, under vacuum, with the hydrogen molecule of band energy, polymer surfaces is bombarded, the surface-crosslinked reaction of initiated polymerization thing, obtain the polymkeric substance that surface has water vapor rejection performance.
2. method according to claim 1, it is characterized in that, described polymkeric substance is the polymkeric substance containing C-H bond.
3. method according to claim 2, it is characterized in that, described polymkeric substance is Parylene C.
4. method according to claim 1, is characterized in that, the hydrogen molecule of described band energy is the hydrogen molecule of the kinetic energy obtained of being collided by band energy protons and hydrogen.
5. method according to claim 4, it is characterized in that, described hydrogen molecule energy is 10-30eV.
6. method according to claim 1, is characterized in that, the time using the bombardment of neutral hydrogen molecule is 30 seconds to 20 minutes.
7. method according to claim 1, it is characterized in that, the surface-crosslinked thickness of described polymkeric substance is 5-60 nm.
8. method according to claim 1, it is characterized in that, described polymkeric substance is in advance through clean.
9. method according to claim 1, it is characterized in that, described polymkeric substance is polymeric film.
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